CN216145590U

CN216145590U - Full-automatic silicon wafer cleaning machine with cooling device

Info

Publication number: CN216145590U
Application number: CN202121655059.6U
Authority: CN
Inventors: 陈忠海
Original assignee: Suzhou Deruimu Ultrasonic Technology Co ltd
Current assignee: Suzhou Deruimu Ultrasonic Technology Co ltd
Priority date: 2021-07-20
Filing date: 2021-07-20
Publication date: 2022-03-29
Anticipated expiration: 2031-07-20

Abstract

The utility model belongs to the field of silicon wafer cleaning machines, and particularly relates to a full-automatic silicon wafer cleaning machine with a cooling device, which comprises a cleaning machine main body and cooling liquid; the inside of the cleaning machine body is provided with cooling liquid; the cleaning machine is characterized in that a medicament feeding mechanism is arranged inside the cleaning machine body and comprises a motor, a stirring rod, a medicament box, a first sealing block, a second sealing block, a pull rod and a spring, wherein the motor is fixedly connected to the outer wall of the cleaning machine body; through starter motor for the motor drives the puddler and stirs the cleaning machine main part is inside, get the pull rod through drawing, make the pull rod drive the sealed piece of second and produce the removal, and to the spring extrusion, through being provided with the sealed piece of first sealed piece and second, can avoid the inside medicament of chemical tank to break away from inside it, realized that the medicament puts in convenient function, solved the inside medicament of cleaning machine main part and fused insufficient problem, improved the cleaning efficiency of cleaning machine main part.

Description

Full-automatic silicon wafer cleaning machine with cooling device

Technical Field

The utility model relates to the field of silicon wafer cleaning machines, in particular to a full-automatic silicon wafer cleaning machine with a cooling device.

Background

With the progress of science and technology, the continuous research on solar energy conversion, the solar silicon wafer can be applied in a large area, and the silicon wafer can be put into use only by comprehensively cleaning the silicon wafer during production and manufacturing, so that a silicon wafer cleaning machine is commonly used.

The silicon wafer cleaning machine generally uses chemical reagents to clean the silicon wafer so as to dissolve impurities on the outer surface of the silicon wafer, and because the existing silicon wafer cleaning machine cannot fully stir the chemical reagents when the chemical reagents are put into the silicon wafer cleaning machine, the chemicals and water are not fully fused, so that the cleaning efficiency of cleaning equipment is reduced; therefore, the full-automatic silicon wafer cleaning machine with the cooling device is provided for solving the problems.

SUMMERY OF THE UTILITY MODEL

In order to make up for the defects of the prior art and solve the problem of insufficient fusion of the internal medicament of the cleaning machine body, the utility model provides a full-automatic silicon wafer cleaning machine with a cooling device.

The technical scheme adopted by the utility model for solving the technical problems is as follows: the utility model relates to a full-automatic silicon wafer cleaning machine with a cooling device, which comprises a cleaning machine main body and cooling liquid; the inside of the cleaning machine body is provided with cooling liquid; the inside medicament feeding mechanism that is provided with of cleaning machine main part, and medicament feeding mechanism include motor, puddler, chemical tank, first sealed piece, the sealed piece of second, pull rod and spring, the motor rigid coupling is in cleaning machine main part outer wall, the puddler rotates to be connected inside the cleaning machine main part, chemical tank intercommunication rigid coupling is in cleaning machine main part outer wall, first sealed piece glues in cleaning machine main part inner wall, the sealed piece of second is laminated in first sealed piece outer wall, pull rod one end is laminated in cleaning machine main part inner wall, the spring rigid coupling is in cleaning machine main part inner wall through being provided with first sealed piece and the sealed piece of second for can avoid chemical tank and the inside medicament of cleaning machine main part to break away from it inside, thereby cause the medicament to spill, avoid causing certain pollution to the external environment.

Preferably, the cleaning machine main part is internally provided with moving mechanism, and moving mechanism includes storage box, bull stick, gear and rack, storage box sliding connection is inside the cleaning machine main part, the bull stick rotates to be connected inside the cleaning machine main part, gear inner wall rigid coupling in bull stick outer wall, the positive meshing of rack has the gear, through the moving mechanism who sets up for thereby operating personnel takes out the storage box at the inside liquid medicine that can avoid touching the cleaning machine main part, has improved operating personnel's work efficiency.

Preferably, the cleaning machine main body is internally provided with a sliding groove, the sliding groove is internally and slidably connected with a pull rod, and the pull rod can only move a corresponding distance in the moving range of the sliding groove by virtue of the sliding groove, so that the moving range of the pull rod is limited, and the pull rod is prevented from being separated from the cleaning machine main body.

Preferably, pull rod outer wall rigid coupling has the arc handle, through the handle that the pull rod outer wall set up, makes operating personnel can be comparatively convenient when drawing the pull rod, and the handle is through being curved setting for the radian that can laminate operating personnel hand more.

Preferably, the filter liquor holes are formed in the storage box at equal intervals, and the filter liquor holes formed in the storage box make water flow in the storage box capable of remaining in the cleaning machine main body through the filter liquor holes when the storage box is lifted, so that the weight of the storage box when lifted is reduced.

Preferably, rack bottom rigid coupling has the fixed plate, and the fixed plate laminates in cleaning machine main part inner wall, through being provided with the fixed plate for thereby the fixed plate laminating can avoid the rack to remove and break away from inside the cleaning machine main part to the gear outer wall, plays spacing effect to the rack.

The utility model has the advantages that:

1. according to the utility model, the motor is started to drive the stirring rod to stir the interior of the cleaning machine main body, the pull rod is pulled to drive the second sealing block to move and extrude the spring, and the first sealing block and the second sealing block are arranged, so that the medicament in the medicament box can be prevented from being separated from the interior of the medicament box, the function of convenience in medicament feeding is realized, the problem of insufficient medicament fusion inside the cleaning machine main body is solved, and the cleaning efficiency of the cleaning machine main body is improved;

2. according to the utility model, the rotating rod is rotated to drive the gear to rotate, the movable rack driven by the gear moves, and the fixed plate is arranged to be attached to the outer wall of the gear, so that the rack can be prevented from moving to be separated from the inside of the cleaning machine main body, the rack is limited, the function of taking out the storage box is realized, the problem of inconvenience in taking out the storage box is solved, and the adaptability of the cleaning machine main body is improved.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without inventive exercise.

Fig. 1 is a schematic perspective view of a main body of a cleaning machine according to a first embodiment;

FIG. 2 is a schematic sectional view of a main body of the cleaning machine according to the first embodiment;

FIG. 3 is a schematic diagram of a structure shown in FIG. 2 according to a first embodiment;

fig. 4 is a schematic structural view of the rubber sleeve of the second embodiment.

In the figure: 1. a washer body; 2. cooling liquid; 3. a motor; 4. a stirring rod; 5. a kit; 6. A first seal block; 7. a second seal block; 8. a pull rod; 9. a spring; 10. a chute; 11. a storage box; 12. a filtrate well; 13. a rotating rod; 14. a gear; 15. a rack; 16. a fixing plate; 17. a rubber sleeve.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

Example one

Referring to fig. 1-3, a full-automatic silicon wafer cleaning machine with a cooling device comprises a cleaning machine main body 1 and a cooling liquid 2; a cooling liquid 2 is arranged inside the cleaning machine main body 1; the cleaning machine is characterized in that a medicament feeding mechanism is arranged inside the cleaning machine main body 1 and comprises a motor 3, a stirring rod 4, a medicament box 5, a first sealing block 6, a second sealing block 7, a pull rod 8 and a spring 9, wherein the motor 3 is fixedly connected to the outer wall of the cleaning machine main body 1, the stirring rod 4 is rotatably connected to the inside of the cleaning machine main body 1, the medicament box 5 is fixedly connected to the outer wall of the cleaning machine main body 1 in a communicating manner, the first sealing block 6 is adhered to the inner wall of the cleaning machine main body 1, the second sealing block 7 is adhered to the outer wall of the first sealing block 6, one end of the pull rod 8 is adhered to the inner wall of the cleaning machine main body 1, and the spring 9 is fixedly connected to the inner wall of the cleaning machine main body 1; when the cleaning machine works, the motor 3 is started to drive the stirring rod 4 to stir the interior of the cleaning machine main body 1, a certain amount of medicament can be stored by arranging the medicament box 5, so that the time for workers to take the medicament back and forth is reduced, the pull rod 8 is pulled to drive the second sealing block 7 to move and extrude the spring 9, so that the spring 9 generates elastic deformation, the handle arranged on the outer wall of the pull rod 8 facilitates the operators to pull the pull rod 8, the handle is arranged in an arc shape to be more suitable for the radian of the hands of the operators, the slide groove 10 is arranged to enable the pull rod 8 to move for a corresponding distance only in the moving range of the slide groove 10, so that the moving range of the pull rod 8 is limited, and the pull rod 8 is prevented from being separated from the interior of the cleaning machine main body 1, through being provided with first sealed piece 6 and the sealed piece 7 of second for can avoid the inside medicament of chemical tank 5 and cleaning machine main part 1 to break away from it inside, thereby cause the medicament to spill, avoid causing certain pollution to external environment.

The washing machine is characterized in that a moving mechanism is arranged inside the washing machine main body 1 and comprises a storage box 11, a rotating rod 13, a gear 14 and a rack 15, the storage box 11 is connected inside the washing machine main body 1 in a sliding mode, the rotating rod 13 is connected inside the washing machine main body 1 in a rotating mode, the inner wall of the gear 14 is fixedly connected to the outer wall of the rotating rod 13, and the front face of the rack 15 is meshed with the gear 14; when the washing machine is in use, one end of the storage box 11 slides in the washing machine main body 1, so that the other end of the storage box 11 can play a role in fixing the moving direction of one end of the storage box 11 in the moving process, and the phenomenon of deviation is avoided, the filtrate hole 12 formed in the storage box 11 enables water flow in the storage box 11 to be retained in the washing machine main body 1 through the filtrate hole 12 when the storage box 11 is lifted, so that the weight of the lifted storage box 11 is reduced, when an operator needs to carry the storage box 11, the operation can be convenient and fast through the groove formed in the outer wall of the storage box 11, the rotating rod 13 is enabled to drive the gear 14 to rotate through rotating the rotating rod 13, the moving rack 15 driven by the gear 14 moves, and the fixing plate 16 is arranged, so that the rack 15 can be prevented from moving and separating from the inside of the washing machine main body 1 after the fixing plate 16 is attached to the outer wall of the gear 14, play spacing effect to rack 15, laminate in rack 15 outer wall through storage box 11 other end bottom for operating personnel can be convenient for take out storage box 11, and through the moving mechanism who sets up, thereby make operating personnel take out storage box 11 at the liquid medicine that can avoid touching cleaning machine main part 1 inside, improved operating personnel's work efficiency.

A sliding groove 10 is formed in the cleaning machine main body 1, and a pull rod 8 is connected to the inside of the sliding groove 10 in a sliding manner; during operation, through being provided with spout 10 for pull rod 8 only can move corresponding distance in the displacement range of spout 10, thereby plays the effect of restriction to the home range of pull rod 8, avoids pull rod 8 to break away from the inside of cleaning machine main part 1.

An arc-shaped handle is fixedly connected to the outer wall of the pull rod 8; during operation, through the handle that 8 outer walls of pull rod set up, make operating personnel can be comparatively convenient when drawing and get pull rod 8, the handle is through being curved setting for the radian of operating personnel hand that can laminate more.

Filtrate holes 12 are formed in the storage box 11 at equal intervals; when the washing machine works, the filtrate holes 12 formed in the storage box 11 enable the storage box 11 to be lifted, and meanwhile, water flow in the storage box 11 can be reserved in the washing machine main body 1 through the filtrate holes 12, so that the weight of the storage box 11 when lifted is reduced.

The bottom end of the rack 15 is fixedly connected with a fixed plate 16, and the fixed plate 16 is attached to the inner wall of the cleaning machine main body 1; during operation, through being provided with fixed plate 16 for behind fixed plate 16 laminating to the gear 14 outer wall, thereby can avoid rack 15 to remove and break away from cleaning machine main part 1 inside, play spacing effect to rack 15.

Example two

Referring to fig. 4, in a first comparative example, as another embodiment of the present invention, a rubber sleeve 17 is glued on an outer wall of the gear 14, and the rubber sleeve 17 is made of rubber; during operation is through being provided with rubber sleeve 17 for operating personnel makes the comfort level of operating personnel hand obtain promoting through the sticky rubber sleeve 17 of gear 14 outer wall when rotating gear 14, and can increase frictional force, avoids operating personnel's hand to break away from the 14 outer walls of gear.

The working principle is that the motor 3 is started to drive the stirring rod 4 to stir the interior of the cleaning machine main body 1, a certain amount of medicament can be stored by arranging the medicament box 5, so that the time for workers to take the medicament back and forth is reduced, the pull rod 8 is pulled to drive the second sealing block 7 to move and extrude the spring 9, so that the spring 9 generates elastic deformation, the handle arranged on the outer wall of the pull rod 8 facilitates the operators to pull the pull rod 8, the handle is arranged in an arc shape to be more suitable for the radian of the hands of the operators, the slide groove 10 is arranged to enable the pull rod 8 to move for a corresponding distance only in the moving range of the slide groove 10, so that the moving range of the pull rod 8 is limited, and the pull rod 8 is prevented from being separated from the interior of the cleaning machine main body 1, through being provided with first sealed piece 6 and the sealed piece 7 of second for can avoid the inside medicament of chemical tank 5 and cleaning machine main part 1 to break away from it inside, thereby cause the medicament to spill, avoid causing certain pollution to external environment.

One end of the storage box 11 slides in the washing machine main body 1, so that the other end of the storage box 11 can play a role in fixing the moving direction of one end of the storage box 11 in the moving process, the phenomenon of deviation is avoided, the filtrate hole 12 formed in the storage box 11 is used for lifting the storage box 11, and simultaneously, water flow in the storage box 11 can be reserved in the washing machine main body 1 through the filtrate hole 12, so that the weight of the storage box 11 when lifted is reduced, when an operator needs to carry the storage box 11, the operation can be convenient and fast, the rotating rod 13 is rotated to drive the gear 14 to rotate, the movable rack 15 driven by the gear 14 is moved, and the fixed plate 16 is arranged, so that the rack 15 can be prevented from moving and separating from the inside of the washing machine main body 1 after the fixed plate 16 is attached to the outer wall of the gear 14, play spacing effect to rack 15, laminate in rack 15 outer wall through storage box 11 other end bottom for operating personnel can be convenient for take out storage box 11, and through the moving mechanism who sets up, thereby make operating personnel take out storage box 11 at the liquid medicine that can avoid touching cleaning machine main part 1 inside, improved operating personnel's work efficiency.

In the description herein, references to the description of "one embodiment," "an example," "a specific example" or the like are intended to mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the utility model. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

The foregoing shows and describes the general principles, essential features, and advantages of the utility model. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, which are described in the specification and illustrated only to illustrate the principle of the present invention, but that various changes and modifications may be made therein without departing from the spirit and scope of the present invention, which fall within the scope of the utility model as claimed.

Claims

1. The utility model provides a full-automatic silicon chip cleaning machine with cooling device which characterized in that: comprises a cleaning machine main body (1) and cooling liquid (2); the cleaning machine main body (1) is internally provided with cooling liquid (2);

the cleaning machine is characterized in that a medicament feeding mechanism is arranged inside the cleaning machine main body (1), the medicament feeding mechanism comprises a motor (3), a stirring rod (4), a medicament box (5), a first sealing block (6), a second sealing block (7), a pull rod (8) and a spring (9), the motor (3) is fixedly connected to the outer wall of the cleaning machine main body (1), the stirring rod (4) is rotatably connected to the inside of the cleaning machine main body (1), the medicament box (5) is communicated with the outer wall of the cleaning machine main body (1), the first sealing block (6) is adhered to the inner wall of the cleaning machine main body (1), the second sealing block (7) is adhered to the outer wall of the first sealing block (6), one end of the pull rod (8) is adhered to the inner wall of the cleaning machine main body (1), and the spring (9) is fixedly connected to the inner wall of the cleaning machine main body (1).

2. The full-automatic silicon wafer cleaning machine with the cooling device as claimed in claim 1, wherein: cleaning machine main part (1) inside is provided with moving mechanism, and moving mechanism includes storage box (11), bull stick (13), gear (14) and rack (15), storage box (11) sliding connection is inside cleaning machine main part (1), bull stick (13) rotate to be connected inside cleaning machine main part (1), gear (14) inner wall rigid coupling is in bull stick (13) outer wall, rack (15) openly meshes there is gear (14).

3. The full-automatic silicon wafer cleaning machine with the cooling device as claimed in claim 2, wherein: a sliding groove (10) is formed in the cleaning machine main body (1), and a pull rod (8) is connected to the inside of the sliding groove (10) in a sliding mode.

4. The full-automatic silicon wafer cleaning machine with the cooling device as claimed in claim 3, wherein: an arc-shaped handle is fixedly connected to the outer wall of the pull rod (8).

5. The full-automatic silicon wafer cleaning machine with the cooling device as claimed in claim 4, wherein: filtrate holes (12) are formed in the storage box (11) at equal intervals.

6. The full-automatic silicon wafer cleaning machine with the cooling device as claimed in claim 5, wherein: the bottom end of the rack (15) is fixedly connected with a fixing plate (16), and the fixing plate (16) is attached to the inner wall of the cleaning machine main body (1).