CN216144752U - Detection apparatus for silicon dioxide polishing solution - Google Patents
Detection apparatus for silicon dioxide polishing solution Download PDFInfo
- Publication number
- CN216144752U CN216144752U CN202120555240.3U CN202120555240U CN216144752U CN 216144752 U CN216144752 U CN 216144752U CN 202120555240 U CN202120555240 U CN 202120555240U CN 216144752 U CN216144752 U CN 216144752U
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- Prior art keywords
- motor
- supporting
- polishing solution
- movable box
- plate
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000005498 polishing Methods 0.000 title claims abstract description 59
- 238000001514 detection method Methods 0.000 title claims abstract description 42
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 32
- 239000000377 silicon dioxide Substances 0.000 title claims abstract description 16
- 235000012239 silicon dioxide Nutrition 0.000 title claims abstract description 9
- 238000009434 installation Methods 0.000 claims abstract description 30
- 230000007246 mechanism Effects 0.000 claims abstract description 25
- 239000007788 liquid Substances 0.000 claims description 7
- 101000579647 Penaeus vannamei Penaeidin-2a Proteins 0.000 description 9
- 230000009471 action Effects 0.000 description 6
- 230000000694 effects Effects 0.000 description 3
- 238000003756 stirring Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 229910052681 coesite Inorganic materials 0.000 description 2
- 229910052906 cristobalite Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052682 stishovite Inorganic materials 0.000 description 2
- 229910052905 tridymite Inorganic materials 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-O Ammonium Chemical compound [NH4+] QGZKDVFQNNGYKY-UHFFFAOYSA-O 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 239000002585 base Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000005238 degreasing Methods 0.000 description 1
- 238000003912 environmental pollution Methods 0.000 description 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
- 239000002932 luster Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 231100000956 nontoxicity Toxicity 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 230000008054 signal transmission Effects 0.000 description 1
- RMAQACBXLXPBSY-UHFFFAOYSA-N silicic acid Chemical compound O[Si](O)(O)O RMAQACBXLXPBSY-UHFFFAOYSA-N 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
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- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
The utility model discloses a detection device of silicon dioxide polishing solution, which comprises a supporting mechanism, a placing table, an installation mechanism, a driving mechanism, a PH detection pen, an alarm and a controller, wherein the supporting mechanism is provided with supporting legs, a supporting bottom plate and a supporting frame, the supporting frame is arranged above the supporting bottom plate, the placing table is arranged on the upper surface of the supporting bottom plate, the installation mechanism is provided with an installation transverse plate and an installation vertical plate, the installation vertical plate is arranged at the rear side of the supporting bottom plate, the driving mechanism is provided with a motor, a rotating shaft, a gear, a moving box and a fixing rod, the moving box is arranged between the installation transverse plates, the PH detection pen is arranged below the moving box, the alarm is arranged above the moving box, the controller is arranged above the installation transverse plate, the PH detection pen is arranged below the moving box, the detection pen is driven by the driving mechanism to move up and down to detect the polishing solution, the alarm is used for alarming when abnormity is detected, and the use is more convenient.
Description
Technical Field
The utility model relates to the technical field of polishing solution detection, in particular to a detection device for a silicon dioxide polishing solution.
Background
The polishing solution is a water-soluble polishing agent without any sulfur, phosphorus and chlorine additives, has good degreasing, rust prevention, cleaning and polishing performances, and can enable metal products to have more luster than the original metal products. The product has the advantages of stable performance, no toxicity, no environmental pollution and the like. The pH value of the polishing solution is the pH value of the polishing solution, and when the pH value of the polishing solution is 9.6, the mechanical action of the polishing solution is far greater than the chemical action, so that the removal rate is high, a high-damage layer is generated on the surface of a polished wafer after polishing, and the roughness is high. When the pH value of the polishing solution is increased to 10.84-11.34 and the mechanical action and the chemical action reach an equivalent state, the uniformity of the chemical action is good, so that the surface tension is small, the consistency of quality treatment is good, and a good surface polishing effect can be obtained; when the pH value is more than 11.67, the SiO2 hydrosol generates water-soluble ammonium silicate under the action of strong alkali, so that SiO2 particles in the silica sol cannot perform a grinding effect and become transparent liquid, and the mechanical effect is basically ineffective, so that the pH value of the polishing solution needs to be detected before the polishing solution is used.
However, the conventional polishing liquid detection device has the following disadvantages:
1. the detection device of current polishing solution needs the manual work to hold the test pen and detect polishing solution, wastes time and energy.
2. The existing polishing solution detection device needs to be manually taken and detected once and again, and is low in detection efficiency.
SUMMERY OF THE UTILITY MODEL
The utility model aims to provide a detection device for a silicon dioxide polishing solution, which aims to solve the problems in the background technology.
In order to achieve the purpose, the utility model provides the following technical scheme: the utility model provides a detection apparatus for silica polishing solution, includes supporting mechanism, places platform, installation mechanism, actuating mechanism, PH test pen, alarm and controller, supporting mechanism is provided with supporting leg, supporting baseplate and support frame, the support frame sets up in the supporting baseplate top, place the upper surface that the platform set up at the supporting baseplate, installation mechanism is provided with installation diaphragm and installation riser, the installation riser sets up the rear side at the supporting baseplate, actuating mechanism is provided with motor, axis of rotation, gear, removal case and dead lever, the removal case sets up between the installation diaphragm, the PH test pen sets up the below at the removal case, the alarm sets up the top at the removal case, the controller sets up the top at the installation diaphragm.
Preferably, the support frame is located the left and right sides of supporting baseplate, place the platform and be located between the support frame to set up to circular, be provided with the mounting groove in the middle of the upper surface of supporting baseplate, the upper surface of placing the platform is even to be provided with the standing groove, place the polishing solution holding vessel in the standing groove, through be provided with a plurality of mounting grooves on placing the bench, make detection device can detect many copies polishing solution in succession, make detection efficiency faster, labour saving and time saving more.
Preferably, the motor is provided with motor one, motor two and motor three, motor one sets up in the mounting groove, motor one connects the lower surface of placing the platform through the connecting axle, motor two is connected with the lower fixed surface of removal case, motor three and one side fixed connection of installation riser, through setting up motor one in the below of placing the platform, motor one rotates and drives the connecting axle and rotate, and the connecting axle drives and places the platform and rotate to make the polishing solution of top rotate and detect, make detection efficiency higher.
Preferably, the installation diaphragm is fixedly connected with the support frames on the left side and the right side, the front side and the rear side of the installation diaphragm are respectively provided with a fixing rod, the fixing rods are connected with the left side and the right side of the movable box, and the fixing rods are arranged between the installation diaphragm and the movable box, so that the movable box is fixed between the installation diaphragm and just above the rear side of the placement table.
Preferably, the left wall and the right wall of the movable box are provided with sliding grooves, the fixed rods are arranged in the sliding grooves, gears are arranged in the movable box and are half-face teeth, racks are arranged on the left side and the right side of the movable box, the racks are attached to the gears, the fixed rods can slide on the left side and the right side of the movable box through the arrangement of the fixed rods in the sliding grooves, and therefore the movable box can move up and down above the placing table.
Preferably, the below of motor two is provided with the connecting rod, the below of connecting rod is provided with the connecting plate, the lower surface and the PH test pen fixed connection of connecting plate, motor three passes through the pivot axis connecting gear, drives the connecting rod through motor two and rotates, thereby the connecting rod drives the connecting plate and rotates the PH test pen that makes the below and rotate and stir the detection to the polishing solution is slow, makes the detection data more accurate to drive the axis of rotation through motor three and rotate, the axis of rotation drives gear revolve, thereby makes the movable box reciprocate, drives the PH test pen of below and reciprocates, detects the polishing solution in the standing groove.
The utility model provides a detection device for silicon dioxide polishing solution, which has the following beneficial effects:
(1) according to the polishing device, the rotating shaft is driven to rotate by the motor III, the rotating shaft drives the gear to rotate, the gear is combined with the racks on the left side and the right side, so that the movable box moves up and down to drive the PH detection pen below the movable box to move up and down to be inserted into polishing liquid for detection, the alarm is arranged above the movable box, the PH value of the PH detection pen is set to be in a specific range, when the PH value in the polishing liquid exceeds the range, a signal is transmitted to the controller, the controller transmits the signal to the alarm, the alarm sounds, the device stops detecting, and polishing liquid with unqualified quality can be taken out manually, so that the detection is more convenient.
(2) According to the utility model, the placing grooves are uniformly arranged on the placing table, the polishing solution storage tank filled with the polishing solution is placed in the uniformly arranged placing grooves, the motor drives the connecting shaft to rotate, the connecting shaft drives the placing table to rotate so as to rotate the polishing solution in the placing grooves, the PH detection pen is just positioned in the placing grooves when descending by adjusting the rotating speed of the motor I and the motor III, so that the device can continuously and automatically detect the multi-component polishing solution, and the detection efficiency is higher.
Drawings
FIG. 1 is a front view of the present invention;
FIG. 2 is a side view of the present invention;
FIG. 3 is a top view of the present invention
Fig. 4 is an enlarged view of the connection of the moving box of the present invention.
In the figure: 1. a placing table; 2. a pH detection pen; 3. an alarm; 4. a controller; 5. a support base plate; 6. a support frame; 7. installing a transverse plate; 8. installing a vertical plate; 9. a rotating shaft; 10. a gear; 11. a mobile box; 12. fixing the rod; 13. a placement groove; 14. a first motor; 15. a second motor; 16. a third motor; 17. a sliding groove; 18. a rack; 19. a connecting plate.
Detailed Description
The technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention.
As shown in fig. 1 to 4, the present invention provides a technical solution: the utility model provides a detection device of silica polish, includes supporting mechanism, places platform 1, installation mechanism, actuating mechanism, PH test pen 2, alarm 3 and controller 4, supporting mechanism is provided with supporting leg, supporting baseplate 5 and support frame 6, support frame 6 sets up in supporting baseplate 5 top, place platform 1 and set up the upper surface at supporting baseplate 5, installation mechanism is provided with installation diaphragm 7 and installation riser 8, installation riser 8 sets up the rear side at supporting baseplate 5, actuating mechanism is provided with motor, axis of rotation 9, gear 10, removal case 11 and dead lever 12, removal case 11 sets up between installation diaphragm 7, PH test pen 2 sets up the below at removal case 11, alarm 3 sets up the top at removal case 11, controller 4 sets up the top at installation diaphragm 7.
The utility model discloses a polishing solution storage tank, including support plate 5, place platform 1, polishing solution storage tank, support frame 6, placing platform 13, placing platform 1 is provided with mounting groove in the middle of the upper surface of support plate 5, the support frame 6 is located the left and right sides of support plate 5, place the platform and be located between support frame 6 to set up to circular, be provided with the mounting groove in the middle of the upper surface of support plate 5, the upper surface of placing platform 1 is even is provided with placing groove 13, the polishing solution storage tank has been placed in placing groove 13, through being provided with a plurality of mounting grooves on placing platform 1, makes detection device can detect many copies polishing solution in succession, makes detection efficiency faster, labour saving and time saving more.
The motor is provided with motor one 14, motor two 15 and motor three 16, motor one 14 sets up in the mounting groove, motor one 14 places the lower surface of platform 1 through the connecting axle connection, motor two 15 and the lower fixed surface of removal case 11 are connected, motor three 16 and one side fixed connection of installation riser 8, through setting up motor one 14 in the below of placing platform 1, motor one 14 rotates and drives the connecting axle and rotate, and the connecting axle drives and places platform 1 and rotate to the polishing solution that makes the top rotates and detects, makes detection efficiency higher.
The mounting transverse plate 7 is fixedly connected with the supporting frames 6 at the left side and the right side, the front side and the rear side of the mounting transverse plate 7 are respectively provided with a fixed rod 12, the fixed rods 12 are connected with the left side and the right side of the movable box 11, and the fixed rods 12 are arranged between the mounting transverse plate 7 and the movable box 11, so that the movable box 11 is fixed between the mounting transverse plates 7 and is just positioned above the rear side of the placing table 1.
The movable box is characterized in that sliding grooves 17 are formed in the left wall and the right wall of the movable box 11, the fixing rods 12 are arranged in the sliding grooves 17, gears 10 are arranged in the movable box 11, the gears 10 are half-face teeth, racks 18 are arranged on the left side and the right side of the movable box 11, the racks 18 are attached to the gears 10, and the fixing rods 12 are arranged in the sliding grooves 17, so that the fixing rods 12 can slide on the left side and the right side of the movable box 11, and the movable box 11 can move up and down above the placing table 1.
The below of motor two 15 is provided with the connecting rod, the below of connecting rod is provided with connecting plate 19, the lower surface and the PH test pen 2 fixed connection of connecting plate 19, motor three 16 passes through axis of rotation 9 and connects gear 10, drives the connecting rod through motor two 15 and rotates, thereby the connecting rod drives connecting plate 19 and rotates and make the PH test pen 2 of below rotate and stir the detection slowly to the polishing solution, it is more accurate to make the test data, and drive axis of rotation 9 through motor three 16 and rotate, axis of rotation 9 drives gear 10 and rotates, thereby make movable box 11 reciprocate, drive the PH test pen 2 of below and reciprocate, detect the polishing solution in the standing groove 13.
It should be noted that, during the operation, a polishing solution storage tank filled with polishing solution is placed in a uniformly arranged placing groove 13, a first motor 14 drives a connecting shaft to rotate, the connecting shaft drives a placing table 1 to rotate so as to enable the polishing solution in the placing groove 13 to rotate, a third motor 16 drives a rotating shaft 9 to rotate, the rotating shaft 9 drives a gear 10 to rotate, the gear 10 is combined with racks 18 on the left side and the right side, so that a moving box 11 is moved up and down to drive a PH detection pen 2 below the moving box to move up and down to be inserted into the polishing solution for detection, a second motor 15 is arranged between the PH detection pen 2 and the lower surface of the moving box 11, the connecting shaft is driven to rotate by the second motor 15, the connecting shaft drives the PH detection pen 2 to slowly rotate to slowly stir the polishing solution so as to enable the detection data to be more accurate, and the rotating speeds of the first motor 14 and the third motor 16 are adjusted, make PH test pen 2 just lie in standing groove 13 when descending, when the PH value that detects out surpassed the scope of settlement, controller 4 gave alarm 3 with the signal transmission, and alarm 3 sounds, and motor stop motion stops to detect simultaneously, and the manual work is taken out unqualified polishing solution.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.
Claims (6)
1. The detection device for the silicon dioxide polishing solution is characterized by comprising a supporting mechanism, a placing table (1), an installing mechanism, a driving mechanism, a PH detection pen (2), an alarm (3) and a controller (4), wherein the supporting mechanism is provided with supporting legs, a supporting bottom plate (5) and a supporting frame (6), the supporting frame (6) is arranged above the supporting bottom plate (5), the placing table (1) is arranged on the upper surface of the supporting bottom plate (5), the installing mechanism is provided with installing transverse plates (7) and installing vertical plates (8), the installing vertical plates (8) are arranged on the rear side of the supporting bottom plate (5), the driving mechanism is provided with a motor, a rotating shaft (9), a gear (10), a moving box (11) and a fixing rod (12), the moving box (11) is arranged between the installing transverse plates (7), the PH detection pen (2) is arranged below the moving box (11), the alarm (3) is arranged above the movable box (11), and the controller (4) is arranged above the installation transverse plate (7).
2. The apparatus for detecting a silica polishing solution according to claim 1, wherein: the polishing liquid storage tank is characterized in that the supporting frames (6) are located on the left side and the right side of the supporting base plate (5), the placing table (1) is located between the supporting frames (6) and is circular, a mounting groove is formed in the middle of the upper surface of the supporting base plate (5), the placing groove (13) is uniformly formed in the upper surface of the placing table (1), and a polishing liquid storage tank is placed in the placing groove (13).
3. The apparatus for detecting a silica polishing solution according to claim 1, wherein: the motor is provided with a first motor (14), a second motor (15) and a third motor (16), the first motor (14) is arranged in the mounting groove, the first motor (14) is connected with the lower surface of the placing table (1) through the connecting shaft, the second motor (15) is fixedly connected with the lower surface of the moving box (11), and the third motor (16) is fixedly connected with one side of the mounting vertical plate (8).
4. The apparatus for detecting a silica polishing solution according to claim 1, wherein: the movable box is characterized in that the installation transverse plate (7) is fixedly connected with the support frames (6) on the left side and the right side, fixing rods (12) are respectively arranged on the front side and the rear side of the installation transverse plate (7), and the fixing rods (12) are connected with the left side and the right side of the movable box (11).
5. The apparatus for detecting a silica polishing solution according to claim 1, wherein: the movable box is characterized in that sliding grooves (17) are formed in the left wall and the right wall of the movable box (11), the fixing rod (12) is arranged in the sliding grooves (17), gears (10) are arranged in the movable box (11), the gears (10) are half-face teeth, racks (18) are arranged on the left side and the right side of the movable box (11), and the racks (18) are attached to the gears (10).
6. The apparatus for detecting a silica polishing solution according to claim 3, wherein: the lower part of the second motor (15) is provided with a connecting rod, a connecting plate (19) is arranged below the connecting rod, the lower surface of the connecting plate (19) is fixedly connected with the PH detection pen (2), and the third motor (16) is connected with the gear (10) through a rotating shaft (9).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120555240.3U CN216144752U (en) | 2021-03-18 | 2021-03-18 | Detection apparatus for silicon dioxide polishing solution |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120555240.3U CN216144752U (en) | 2021-03-18 | 2021-03-18 | Detection apparatus for silicon dioxide polishing solution |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216144752U true CN216144752U (en) | 2022-03-29 |
Family
ID=80800867
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202120555240.3U Expired - Fee Related CN216144752U (en) | 2021-03-18 | 2021-03-18 | Detection apparatus for silicon dioxide polishing solution |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN216144752U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117665220A (en) * | 2024-01-29 | 2024-03-08 | 深圳浩德瑞科技有限公司 | PH value measuring device for alumina polishing solution |
-
2021
- 2021-03-18 CN CN202120555240.3U patent/CN216144752U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117665220A (en) * | 2024-01-29 | 2024-03-08 | 深圳浩德瑞科技有限公司 | PH value measuring device for alumina polishing solution |
| CN117665220B (en) * | 2024-01-29 | 2024-05-03 | 深圳浩德瑞科技有限公司 | PH value measuring device for alumina polishing solution |
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| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20220329 |
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| CF01 | Termination of patent right due to non-payment of annual fee |