CN216107183U

CN216107183U - Vacuum coating machine with automatic conveying function

Info

Publication number: CN216107183U
Application number: CN202122677992.XU
Authority: CN
Inventors: 许亮
Original assignee: Jiangsu Dingkai Electronic Technology Co ltd
Current assignee: Jiangsu Dingkai Electronic Technology Co ltd
Priority date: 2021-11-03
Filing date: 2021-11-03
Publication date: 2022-03-22
Anticipated expiration: 2031-11-03

Abstract

The utility model belongs to the technical field of vacuum coating machines, and particularly relates to a vacuum coating machine with an automatic conveying function. According to the utility model, the transmission mechanism is arranged on the surface of the coating machine body, so that workpieces placed on the surface of the transmission belt can be conveniently conveyed and transported by using the transmission mechanism, labor is saved, and the working efficiency is effectively improved.

Description

Vacuum coating machine with automatic conveying function

Technical Field

The utility model relates to the technical field of vacuum coating machines, in particular to a vacuum coating machine with an automatic conveying function.

Background

The blank coating mainly refers to a coating needing to be carried out under higher vacuum degree, and the typical pretreatment procedures are as follows: and opening a vacuum pump for vacuum pumping, filling nitrogen after the vacuum degree in the cavity reaches a certain high vacuum degree, performing vacuum pumping and nitrogen filling again after the vacuum degree reaches a certain low vacuum degree, and keeping for a period of time after the set nitrogen filling times are reached, so that the workpiece is fully heated, and the moisture on the surface of the workpiece is reduced. And then vacuumizing is started again, HMDS gas is filled, HMDS liquid medicine is stopped to be filled after the set time, and the maintenance stage is started, so that the silicon wafer is fully reacted with HMDS. When the set holding time is reached, the evacuation is started again. Nitrogen is filled in to complete the whole operation process, but the vacuum coating machine in the prior art has the following problems in the use process:

the vacuum coating machine adopts manual work to transmit the work piece in the use, wastes time and energy, and artifical intensity of labour is big, and the exhaust emission that produces in the coating operation in-process is inconvenient filters the purification, pollutes operational environment.

SUMMERY OF THE UTILITY MODEL

Technical problem to be solved

Aiming at the defects of the prior art, the utility model provides a vacuum coating machine with an automatic conveying function, which solves the problems that the vacuum coating machine adopts manual work to convey workpieces in the using process, wastes time and labor, has high labor intensity, and causes waste gas generated in the coating operation process to be inconvenient to discharge, filter and purify and pollute the working environment.

The second technical proposal.

The utility model specifically adopts the following technical scheme for realizing the purpose:

the utility model provides a vacuum coating machine with automatically function of carrying, includes the coating machine body, coating machine body surface is provided with transport mechanism, transport mechanism's surface is provided with the transmission band, the fixed surface of transmission band installs the rubber groove, the top of coating machine body is provided with the cylinder, the end fixing of cylinder has the sealed cowling, filtering mechanism is installed to one side of coating machine body.

Further, transport mechanism is including fixing the motor on coating machine body surface, the output of motor is fixed with the drive roll and the tip of drive roll rotates through the bearing and connects the coating machine body, the surface of coating machine body rotates through the bearing has the time to move the roller, the surface of coating machine body is located and moves the roller and drive roll between the roller through the bearing rotation has the auxiliary roller, the surface of drive roll, time moves the roller and the auxiliary roller all with the transmission band transmission of laminating mutually.

Furthermore, the filtering mechanism comprises a filtering box fixed on one side of the coating machine body, an air suction pump is fixed at the top of the filtering box, an air suction hose is fixed at the end of the air suction pump, the end of the air suction hose penetrates through the coating machine body and the sealing cover and extends to the inside of the coating machine body and the sealing cover, a limiting plate is fixed on the inner wall of the filtering box, an activated carbon filtering plate slides on the surface of the limiting plate, and an exhaust pipe is fixed at the bottom of the filtering box.

Furthermore, a box door is arranged on the surface of the filtering mechanism, and a handle is fixed on the surface of the box door.

Furthermore, a collecting tank is fixed on one side of the coating machine body and is close to the lower part of one side of the transmission mechanism.

(III) advantageous effects

Compared with the prior art, the utility model provides a vacuum coating machine with an automatic conveying function, which has the following beneficial effects:

according to the utility model, the transmission mechanism is arranged on the surface of the coating machine body, so that workpieces placed on the surface of the transmission belt can be conveniently conveyed and transported by using the transmission mechanism, labor is saved, and the working efficiency is effectively improved.

Drawings

FIG. 1 is a schematic structural view of the present invention;

FIG. 2 is a front cross-sectional view of a vacuum coating machine with an automatic conveying function according to the present invention;

FIG. 3 is a right sectional view of the vacuum coater with automatic feeding function of the present invention.

In the figure: 1. a film plating machine body; 2. a transport mechanism; 201. a motor; 202. a drive roll; 203. a secondary moving roller; 204. an auxiliary roller; 3. a conveyor belt; 4. a rubber groove; 5. a cylinder; 6. a sealing cover; 7. a filtering mechanism; 701. a filter box; 702. a getter pump; 703. a suction hose; 704. a limiting plate; 705. an activated carbon filter plate; 706. an exhaust duct; 8. a box door; 9. and (4) collecting the tank.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

Examples

As shown in fig. 1-3, a vacuum coating machine with an automatic conveying function according to an embodiment of the present invention includes a coating machine body 1, a conveying mechanism 2 is disposed on a surface of the coating machine body 1, a conveying belt 3 is disposed on a surface of the conveying mechanism 2, a rubber groove 4 is fixedly mounted on a surface of the conveying belt 3, an air cylinder 5 is disposed on a top of the coating machine body 1, a sealing cover 6 is fixed to an end of the air cylinder 5, and a filtering mechanism 7 is mounted on one side of the coating machine body 1; set up transmission device 2 through the surface at coating machine body 1, conveniently utilize transmission device 2 to place the work piece to the transmission belt 3 surface and convey the transportation, use manpower sparingly, effectively improve work efficiency, one side through coating machine body 1 sets up filter mechanism 7, conveniently utilize the exhaust gas extraction of breathing in hose 703 of aspirator pump 702 one end to producing in the seal cover 6 to carry to the rose box 701 inside, and then make things convenient for activated carbon filter 705 to carry out filtration purification to the exhaust gas of carrying, discharge by exhaust pipe 706 again, the protection operational environment.

As shown in fig. 1 and fig. 2, in some embodiments, the transmission mechanism 2 includes a motor 201 fixed on the surface of the coater body 1, a driving roller 202 is fixed at the output end of the motor 201, the end of the driving roller 202 is rotatably connected to the coater body 1 through a bearing, a secondary roller 203 is rotatably arranged on the surface of the coater body 1 through a bearing, an auxiliary roller 204 is rotatably arranged between the secondary roller 203 and the driving roller 202 on the surface of the coater body 1 through a bearing, and the surfaces of the driving roller 202, the secondary roller 203 and the auxiliary roller 204 are all attached to the transmission belt 3 for transmission; through the setting of transport mechanism 2, conveniently through starter motor 201, drive time and move roller 203 and rotate, and then make the transmission band 3 transmission on surface for the work piece transmits the operation of transporting in the rubber slot 4 on transmission band 3 surface.

As shown in fig. 3, in some embodiments, the filtering mechanism 7 includes a filtering tank 701 fixed on one side of the coater body 1, a suction pump 702 is fixed on the top of the filtering tank 701, a suction hose 703 is fixed on the end of the suction pump 702, the end of the suction hose 703 penetrates through the coater body 1 and the sealing cover 6 and extends to the inside, a limiting plate 704 is fixed on the inner wall of the filtering tank 701, an activated carbon filtering plate 705 slides on the surface of the limiting plate 704, and an exhaust pipe 706 is fixed on the bottom of the filtering tank 701; through the setting of filtering mechanism 7, conveniently connect the waste gas of the production in the sealed cowling 6 of breathing in hose 703 extraction through aspirator pump 702, and then carry to the inside of rose box 701, and then utilize active carbon filter 705 to filter purification, discharge through exhaust pipe 706 at last.

As shown in fig. 3, in some embodiments, a door 8 is provided on a surface of the filter mechanism 7, and a handle is fixed to a surface of the door 8; through the setting of chamber door 8, conveniently open chamber door 8 and change the effect of clearance to active carbon filter 705.

As shown in fig. 1, in some embodiments, a collecting tank 9 is fixed on one side of the coater body 1, and the collecting tank 9 is close to the lower part of one side of the conveying mechanism 2; through the setting of collecting vat 9, conveniently utilize collecting vat 9 to collect the effect of storage, conveniently collect the work piece that conveying mechanism 2 department transmitted and transported.

Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that changes may be made in the embodiments and/or equivalents thereof without departing from the spirit and scope of the utility model. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. The utility model provides a vacuum coating machine with automatic conveying function, includes coating machine body (1), its characterized in that: coating machine body (1) surface is provided with transport mechanism (2), the surface of transport mechanism (2) is provided with transmission band (3), the fixed surface of transmission band (3) installs rubber groove (4), the top of coating machine body (1) is provided with cylinder (5), the end fixing of cylinder (5) has sealed cowling (6), filtering mechanism (7) are installed to one side of coating machine body (1).

2. The vacuum coating machine with automatic conveying function as claimed in claim 1, wherein: transport mechanism (2) are including fixing motor (201) on coating machine body (1) surface, the output of motor (201) is fixed with drive roll (202) and the tip of drive roll (202) passes through the bearing and rotates connection coating machine body (1), the surface of coating machine body (1) rotates through the bearing has time movable roller (203), the surface of coating machine body (1) is located between time movable roller (203) and drive roll (202) and rotates through the bearing and has supplementary roller (204), the surface of drive roll (202), time movable roller (203) and supplementary roller (204) all laminates the transmission with transmission band (3) mutually.

3. The vacuum coating machine with automatic conveying function as claimed in claim 1, wherein: the filter mechanism (7) comprises a filter box (701) fixed on one side of a film coating machine body (1), a suction pump (702) is fixed to the top of the filter box (701), a suction hose (703) is fixed to the end of the suction pump (702), the end of the suction hose (703) penetrates through the film coating machine body (1) and a sealing cover (6) and extends to the inside, a limiting plate (704) is fixed to the inner wall of the filter box (701), an active carbon filter plate (705) slides on the surface of the limiting plate (704), and an exhaust pipe (706) is fixed to the bottom of the filter box (701).

4. The vacuum coating machine with automatic conveying function as claimed in claim 1, wherein: the surface of the filtering mechanism (7) is provided with a box door (8), and the surface of the box door (8) is fixed with a handle.

5. The vacuum coating machine with automatic conveying function as claimed in claim 1, wherein: a collecting tank (9) is fixed on one side of the coating machine body (1), and the collecting tank (9) is close to the lower part of one side of the transmission mechanism (2).