CN216095203U - Cleaning device for semiconductor processing - Google Patents
Cleaning device for semiconductor processing Download PDFInfo
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- CN216095203U CN216095203U CN202121701042.XU CN202121701042U CN216095203U CN 216095203 U CN216095203 U CN 216095203U CN 202121701042 U CN202121701042 U CN 202121701042U CN 216095203 U CN216095203 U CN 216095203U
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- cleaning
- hanging basket
- workbench
- conveying belt
- semiconductor processing
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Abstract
The utility model discloses a cleaning device for semiconductor processing, which comprises a workbench, wherein a PLC control system is arranged in the workbench, the surface of the workbench is respectively provided with a waiting area, a cleaning tank, an air drying box and a discharging area, the four areas are distributed in a cross shape, the centers of the four areas are provided with a rotary lifting mechanism, a hanging basket is placed in the waiting area, semiconductor raw materials are placed in the hanging basket, the waiting area is connected with an input conveying belt, and the discharging area is connected with an output conveying belt; the rotary hoisting mechanism comprises a stepping motor, a mounting plate is fixedly arranged at the top of an output shaft of the stepping motor, an electric push rod is fixedly arranged on the mounting plate, a cross is arranged at the end part of a piston rod of the electric push rod, four air claws are respectively arranged at the lower end of the cross, and a hanging basket can be grabbed by the air claws. The rotary lifting mechanism is adopted, so that the hanging baskets can be respectively conveyed into the cleaning tank for cleaning, the air drying box for air drying and the conveying line for outputting, the working efficiency is improved, the labor intensity of workers is reduced, the labor cost is saved, and the product quality is ensured.
Description
Technical Field
The utility model relates to the technical field of semiconductor production and processing, in particular to a cleaning device for semiconductor processing.
Background
However, the raw materials need to be cleaned in the traditional semiconductor production process, the cleaning generally needs to manually convey the materials to a cleaning pool to be washed by water, the efficiency and the effect are general, the cleaning is time-consuming and labor-consuming, and therefore the technical problem needs to be solved.
SUMMERY OF THE UTILITY MODEL
The present invention is directed to overcoming the disadvantages and drawbacks of the prior art and providing a cleaning apparatus for semiconductor processing.
In order to achieve the purpose, the utility model adopts the technical scheme that: the utility model provides a belt cleaning device for semiconductor processing, includes the workstation, the inside PLC control system that sets up of workstation, its innovation point lies in: a waiting area, a cleaning tank, an air drying box and a discharging area are respectively arranged on the surface of the workbench and are distributed in a cross shape, a rotary lifting mechanism is arranged at the center of the four areas, a hanging basket is placed in the waiting area, semiconductor raw materials are placed in the hanging basket, the waiting area is connected with an input conveying belt, and the discharging area is connected with an output conveying belt; the rotary lifting mechanism comprises a stepping motor, a mounting plate is fixedly arranged at the top of an output shaft of the stepping motor, an electric push rod is fixedly arranged on the mounting plate, a cross is arranged at the end part of a piston rod of the electric push rod, four air claws are respectively arranged at the lower end of the cross, and the air claws can grasp the hanging basket.
Furthermore, cleaning fluid is injected into the cleaning tank, and ultrasonic cleaning is adopted.
Furthermore, fans are arranged on the four walls of the air drying box.
Furthermore, the workbench is provided with a rectangular groove for placing an input conveying belt and an output conveying belt.
After adopting the structure, the utility model has the beneficial effects that:
the utility model has simple structure, convenience and practicability; adopt rotatory hoisting machine to construct can get into the hanging flower basket respectively in the washing tank wash, enter the air-dry incasement and air-dry, export from the output transfer chain at last, improved washing work efficiency, reduced workman's intensity of labour, practice thrift the human cost, guaranteed product quality.
Drawings
FIG. 1 is a top view of the present invention;
fig. 2 is a front view of the present invention.
Description of reference numerals:
1 workbench, 2 waiting area, 3 cleaning tank, 4 air drying box, 5 discharging area, 6 rotating hoisting mechanism, 61 stepping motor, 62 mounting plate, 63 electric push rod, 64 cross, 65 air claw, 7 hanging basket, 8 input conveyer belt, 9 output conveyer belt and 10 rectangular groove.
Detailed Description
The utility model will be further described with reference to the accompanying drawings.
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be described in detail with reference to the accompanying drawings and the detailed description. It should be understood that the detailed description and specific examples, while indicating the utility model, are intended for purposes of illustration only and are not intended to limit the scope of the utility model.
Referring to fig. 1-2, a cleaning device for semiconductor processing comprises a workbench 1, wherein a PLC control system is arranged inside the workbench 1, a to-be-positioned area 2, a cleaning tank 3, an air drying box 4 and a discharging area 5 are respectively arranged on the surface of the workbench 1, the four areas are distributed in a cross shape, a rotary lifting mechanism 6 is arranged at the center of the four areas, a hanging basket 7 is placed in the to-be-positioned area 2, semiconductor raw materials are placed in the hanging basket 7, the to-be-positioned area 2 is connected with an input conveyor belt 8, and the discharging area 5 is connected with an output conveyor belt 9; the rotary hoisting mechanism 6 comprises a stepping motor 61, an installation plate 62 is fixedly arranged at the top of an output shaft of the stepping motor 61, an electric push rod 63 is fixedly arranged on the installation plate 62, a cross 64 is arranged at the end part of a piston rod of the electric push rod 63, four air claws 65 are respectively arranged at the lower end of the cross 64, and the air claws 65 can grasp the hanging basket 7. Specifically, the input conveyer belt 8 conveys the hanging basket filled with the semiconductor raw materials to the waiting area 2, then the electric push rod 63 descends, the air claw 65 grasps the hanging basket 7, the electric push rod 63 ascends, the stepping motor 61 rotates to rotate the hanging basket 7 to be above the cleaning tank 3, the electric push rod 63 descends, the hanging basket 7 is placed on the cleaning tank 3 for cleaning, after cleaning is completed, the hanging basket 7 ascends and rotates to be above the air drying box 4 and descends into the air drying box 4 for air drying, and then the hanging basket ascends and rotates to the output conveyer belt 9 for discharging; the first hanging basket is in an air-drying type, the second hanging basket is cleaned, the third hanging basket is positioned in the waiting area, and the rest is done in the same way, so that automatic cleaning and drying are realized; the waiting area 2 is arranged by adopting a groove and is used for positioning the hanging basket 7; and the PLC control system is electrically connected with each mechanism and is used for setting and controlling the mechanisms.
In this embodiment, the cleaning liquid is injected into the cleaning tank 3, and ultrasonic cleaning is performed. Ultrasonic cleaning is prior art, and its specific structure and theory of operation are not elucidated in this application.
In this embodiment, the air drying box 4 is provided with fans on four walls. 4 open-top of air-dry box for carry out the lift of hanging flower basket, four fans air-dry the semiconductor raw materials in the hanging flower basket simultaneously, improve air-dry efficiency.
In this embodiment, set up rectangular channel 10 on the workstation 1 and be used for placing input conveyer belt and output conveyer belt to make input conveyer belt and output conveyer belt more can with wait to position district 2 and ejection of compact district 5 butt joint smoothly.
The above description is only for the purpose of illustrating the technical solutions of the present invention and not for the purpose of limiting the same, and other modifications or equivalent substitutions made by those skilled in the art to the technical solutions of the present invention should be covered within the scope of the claims of the present invention without departing from the spirit and scope of the technical solutions of the present invention.
Claims (4)
1. The utility model provides a belt cleaning device for semiconductor processing, includes the workstation, the inside PLC control system that sets up of workstation, its characterized in that: a waiting area, a cleaning tank, an air drying box and a discharging area are respectively arranged on the surface of the workbench and are distributed in a cross shape, a rotary lifting mechanism is arranged at the center of the four areas, a hanging basket is placed in the waiting area, semiconductor raw materials are placed in the hanging basket, the waiting area is connected with an input conveying belt, and the discharging area is connected with an output conveying belt; the rotary lifting mechanism comprises a stepping motor, a mounting plate is fixedly arranged at the top of an output shaft of the stepping motor, an electric push rod is fixedly arranged on the mounting plate, a cross is arranged at the end part of a piston rod of the electric push rod, four air claws are respectively arranged at the lower end of the cross, and the air claws can grasp the hanging basket.
2. A cleaning apparatus for semiconductor processing according to claim 1, wherein: and cleaning fluid is injected into the cleaning tank, and ultrasonic waves are adopted for cleaning.
3. A cleaning apparatus for semiconductor processing according to claim 1, wherein: and fans are arranged on the four walls of the air drying box.
4. A cleaning apparatus for semiconductor processing according to claim 1, wherein: the workbench is provided with a rectangular groove for placing an input conveying belt and an output conveying belt.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121701042.XU CN216095203U (en) | 2021-07-24 | 2021-07-24 | Cleaning device for semiconductor processing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121701042.XU CN216095203U (en) | 2021-07-24 | 2021-07-24 | Cleaning device for semiconductor processing |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216095203U true CN216095203U (en) | 2022-03-22 |
Family
ID=80723102
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202121701042.XU Active CN216095203U (en) | 2021-07-24 | 2021-07-24 | Cleaning device for semiconductor processing |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN216095203U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117947532A (en) * | 2024-03-20 | 2024-04-30 | 苏州市吴中喷丝板有限公司 | Cleaning equipment for spinneret plate and cleaning method thereof |
-
2021
- 2021-07-24 CN CN202121701042.XU patent/CN216095203U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117947532A (en) * | 2024-03-20 | 2024-04-30 | 苏州市吴中喷丝板有限公司 | Cleaning equipment for spinneret plate and cleaning method thereof |
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