CN216053071U

CN216053071U - FOUP radio frequency reading and writing platform

Info

Publication number: CN216053071U
Application number: CN202122436713.0U
Authority: CN
Inventors: 金星勋; 丁亮亮; 高超; 王飞; 田格
Original assignee: Wuxi Xinheng Information Technology Co ltd
Current assignee: Wuxi Xinheng Information Technology Co ltd
Priority date: 2021-10-11
Filing date: 2021-10-11
Publication date: 2022-03-15
Anticipated expiration: 2031-10-11

Abstract

The utility model provides a FOUP radio frequency reading and writing table, which comprises a reading and writing table, a positioning switch, a sensor, a display screen, an RFID reading and writing main board and an upper computer, wherein the reading and writing table is connected with the upper computer through the RFID reading and writing main board; the upper surface of the reading and writing machine table 1 is provided with a positioning switch and a display screen, the positioning switch and the display screen are both electrically connected to the upper computer, the display screen is arranged at one side close to manual operation, and the sensor is positioned below the positioning switch and connected to the upper computer; an RFID read-write mainboard is installed in the read-write machine platform, and triggers the action of reading a label or writing information into the label through an upper computer and feeds the information back to the upper computer through a serial port; the utility model can automatically analyze the FOUP type, lock the RF tag, provide detailed operation information and abnormal alarm, trace data and process abnormal problems, and the equipment end can not actively send information, thereby prolonging the service life of the equipment end electronics, supporting the output of standard interface protocol information and facilitating the acquisition of information by a third party system.

Description

FOUP radio frequency reading and writing platform

Technical Field

The utility model mainly relates to the field of radio frequency reading and writing tables, in particular to a FOUP radio frequency reading and writing table.

Background

Open unified pod, also known as FOUP, is a container used in semiconductor manufacturing to protect, transport, and store wafers, which is critical in the semiconductor manufacturing process. Each FOUP has various connection plates, pins and holes so that the FOUP is located on a load port and manipulated by the automated material handling system. FOUPs also contain RF tags, allowing operators to identify them through various tools. The writing of the initialization information of the RF tag in the FOUP requires professional equipment to operate, the requirement is very strict, the information reading is required to have very high accuracy, the industrial grade of the equipment is high, the stability of long-time continuous operation is high, and the simplicity of a user interaction interface is high.

A common RF device reading and writing desk can only satisfy reading and writing of an RF tag, and cannot satisfy the increasing requirements for industrialization and informatization in the construction process of an intelligent factory:

1. the FOUP type cannot be automatically analyzed, manual judgment is needed, and misjudgment can be caused;

2. the locking of the RF tag cannot be carried out, and tag information can be tampered;

3. detailed operation information and abnormal alarm are not available, and the reason of the abnormality cannot be quickly judged after the abnormality occurs;

4. the equipment machine continuously sends heartbeat signals, and reads and writes software for detection, so that the software cannot effectively monitor and process problems after the equipment is easy to operate and abnormal;

5. the upper computer alarm and the lower computer alarm are asynchronous, so that the difficulty of judging problems by personnel is easily increased;

6. standard interface protocol information cannot be output, and a third-party system cannot acquire the standard interface protocol information.

SUMMERY OF THE UTILITY MODEL

Aiming at the defects in the prior art, the utility model provides a FOUP radio frequency reading and writing table, which comprises a reading and writing table 1, a positioning switch 2, a sensor, a display screen 3, an RFID reading and writing main board and an upper computer;

the upper surface of the reading and writing machine table 1 is provided with a positioning switch 2 and a display screen 3, the positioning switch 2 and the display screen 3 are both electrically connected to an upper computer, the display screen 3 is arranged at one side close to manual operation, and the sensor is positioned below the positioning switch 2 and connected to the upper computer;

an RFID reading and writing mainboard is installed in the reading and writing machine table 1, and the RFID reading and writing mainboard triggers the action of reading a label or writing information into the label through an upper computer and feeds the information back to the upper computer through a serial port.

Preferably, the RFID read-write main board comprises a single chip microcomputer and a TI chip, and the TI chip locks the fixed address bit of the RF tag.

Preferably, the upper surface of the reading and writing machine table 1 is provided with a plurality of through holes 4 near the periphery of the positioning switch 2, and the through holes 4 correspond to the hole sites at the bottom of the FOUP to be detected.

Preferably, the positioning switch 2 is circular in a top view state, and a round corner is arranged at the top of the positioning switch 2.

Preferably, a tri-color lamp 5 is installed on one side, close to manual operation, of the reading and writing machine table 1, and the tri-color lamp 5 is electrically connected to the upper computer.

Preferably, the periphery of the upper surface of the reading and writing machine table 1 is provided with a limit strip 6.

Preferably, callus on the sole 7 is installed all around to the bottom of reading and writing board 1, position about callus on the sole 7 passes through the bolt regulation.

The utility model has the beneficial effects that:

1. the FOUP type is automatically analyzed without manual judgment, so that misjudgment is avoided;

2. the RF tag can be locked, tag information cannot be tampered, and loss and disorder of information after the tag is changed are avoided;

3. detailed operation information and abnormal alarm are provided, and data tracing and abnormal problem processing can be rapidly carried out;

4. the upper computer and the equipment synchronously display key information, so that the difficulty in judging the abnormal problems by personnel can be reduced, and the personnel are not influenced to carry out abnormal analysis and judgment no matter whether software or hardware has single information abnormality;

5. the equipment end cannot actively send information, the service life of the equipment end electronics is prolonged, and the active access mode of the upper computer can monitor the equipment in a limited way and judge the abnormality of the equipment, so that the problem is conveniently handled; 6. and the standard interface protocol information is supported and output, so that a third-party system can conveniently obtain the information.

Drawings

FIG. 1 is a block diagram of the present invention;

FIG. 2 is a front view of the present invention;

FIG. 3 is a flow chart of the use of the present invention;

in the figure, the position of the upper end of the main shaft,

1. a read-write machine; 2. a positioning switch; 3. a display screen; 4. a through hole; 5. a three-color lamp; 6. a limiting strip; 7. a foot pad.

Detailed Description

In order to make the technical solutions of the present invention better understood and make the above features, objects, and advantages of the present invention more comprehensible, the present invention is further described with reference to the following examples. The examples are intended to illustrate the utility model only and are not intended to limit the scope of the utility model.

As shown in fig. 1 to 3, the present invention includes: the system comprises a reading and writing machine table 1, a positioning switch 2, a sensor, a display screen 3, an RFID reading and writing main board and an upper computer;

In this implementation, the RFID read/write motherboard preferably includes a single chip microcomputer and a TI chip, and the TI chip locks the fixed address bit of the RF tag.

The structure is arranged, and the RF reading and writing antenna is controlled by the logic judgment module to read and lock data in the RF tag. The read-write RF tag is an RI-TRP-DR2B series, and the tag signal control chip adopts a TMS3705 model of TI. The logic judgment module converts an RF label serial port locking command transmitted by the upper computer into a digital signal which can be identified by the TI chip through a serial port, so that the TI chip is driven to lock the fixed address bit of the RF label.

In this implementation, preferably, through holes 4 are formed in the periphery, close to the positioning switch 2, of the upper surface of the reading and writing machine table 1, the through holes 4 are multiple, and the positions of the through holes 4 correspond to the hole positions of the bottoms of the FOUPs to be detected.

By the arrangement of the structure, the requirement for judgment of personnel is lowered and the possibility of causing judgment errors is eliminated by automatically judging the type of the FOUP, and the method specifically comprises the following steps: the hole site that discerns the FOUP bottom through the sensor switches on the condition, inserts the sensor signal into logic judgment module, and logic judgment module converts the high-low level signal in the sensor into 0,1 digital information, passes to the host computer through the serial ports mode, and the host computer carries out automatic judgement with received sensor information, analyzes out the FOUP type. And the upper computer analysis mode is obtained by retrieving through a preset FOUP type table.

The logic judgment module is a PCB circuit board, wherein the core component is a singlechip, and the singlechip is responsible for receiving, converting and transmitting signals.

In this embodiment, the positioning switch 2 is preferably circular in a plan view, and a rounded corner is provided at the top of the positioning switch 2.

Set up above-mentioned structure, utilize positioning switch to be for the accuracy place FOUP on the reading and writing board, reach the purpose of accurate detection, simultaneously in order to guarantee the integrality of product outward appearance, therefore set the positioning switch top of location usefulness into the hemisphere type.

In the implementation, preferably, a tri-color lamp 5 is installed on one side of the reading and writing machine table 1 close to the manual operation, and the tri-color lamp 5 is electrically connected to the upper computer.

By adopting the structure, the real-time use state of the whole device can be clearly distinguished by using the three-color lamp, wherein the green lamp represents the power-on state; when the yellow light represents reading and writing data, the yellow light flashes or the red light represents a fault state.

In this embodiment, it is preferable that the periphery of the upper surface of the reader/writer board 1 is provided with the limit strips 6.

Preferred in this implementation, callus on the sole 7 is installed all around to the bottom of reading and writing board 1, position about callus on the sole 7 passes through the bolt regulation.

Set up above-mentioned structure, utilize callus on the sole adjustment read write board height all around, reach under the user state, read write board surface level's purpose, and then guarantee the accurate nature of detection.

In addition, when the label reader is used, on one hand, the mode that whether the equipment is on line is monitored by accessing the equipment in real time through the upper computer, so that the purpose of reducing the abnormality of the equipment such as equipment signal interruption and the like in label reading and writing is achieved;

on the other hand, action and abnormity in the upper computer capturing equipment or operation are achieved, and the purpose of synchronously displaying related information in the upper computer and the equipment screen is specifically as follows: the upper computer captures the operation behavior of personnel, receives the equipment read-write, locking or abnormal information fed back by the logic processing module, displays the information in the software of the upper computer after the arrangement of the upper computer, transmits the corresponding information to the logic processing module through a serial port for conversion, and controls the display screen of the equipment to synchronously display the information.

The above-described embodiments are merely illustrative of the principles and utilities of the present patent application and are not intended to limit the present patent application. Modifications and variations can be made to the above-described embodiments by those skilled in the art without departing from the spirit and scope of this patent application. Accordingly, it is intended that all equivalent modifications or changes which can be made by those skilled in the art without departing from the spirit and technical concepts disclosed in the present application shall be covered by the claims of this patent application.

Claims

1. A FOUP radio frequency reading and writing table is characterized by comprising a reading and writing table (1), a positioning switch (2), a sensor, a display screen (3), an RFID reading and writing main board and an upper computer;

the upper surface of the reading and writing machine table (1) is provided with a positioning switch (2) and a display screen (3), the positioning switch (2) and the display screen (3) are both electrically connected to an upper computer, the display screen (3) is arranged on one side close to manual operation, and the sensor is positioned below the positioning switch (2) and connected to the upper computer;

an RFID reading and writing mainboard is installed in the reading and writing machine table (1), and the RFID reading and writing mainboard triggers the action of reading a label or writing information into the label through an upper computer and feeds the information back to the upper computer through a serial port.

2. The FOUP rf read-write station of claim 1, wherein: the RFID read-write main board comprises a single chip microcomputer and a TI chip, and the TI chip locks the fixed address bit of the RF tag.

3. The FOUP rf read-write station of claim 2, wherein: the reading and writing board (1) upper surface is provided with through-hole (4) near around positioning switch (2), through-hole (4) are provided with a plurality ofly, the position of through-hole (4) corresponds with the hole site of the FOUP bottom of waiting to examine.

4. The FOUP rf read-write station of claim 3, wherein: the overlook state of the positioning switch (2) is circular, and the top of the positioning switch (2) is provided with a round angle.

5. The FOUP rf reader station of claim 4, wherein: the three-color lamp (5) is installed on one side, close to manual operation, of the reading and writing machine table (1), and the three-color lamp (5) is electrically connected to the upper computer.

6. The FOUP rf read-write station of claim 5, wherein: and limiting strips (6) are arranged around the upper surface of the read-write machine table (1).

7. The FOUP rf read-write station of claim 6, wherein: foot pads (7) are installed all around to the bottom of reading and writing board (1), position about foot pad (7) pass through the bolt regulation.