CN216049698U

CN216049698U - Multispectral near-infrared film thickness measuring instrument

Info

Publication number: CN216049698U
Application number: CN202122582973.9U
Authority: CN
Inventors: 施永扬
Original assignee: Hangzhou Yangtao Technology Co ltd
Current assignee: Hangzhou Yangtao Technology Co ltd
Priority date: 2021-10-26
Filing date: 2021-10-26
Publication date: 2022-03-15
Anticipated expiration: 2031-10-26

Abstract

The utility model relates to the field of film thickness measurement, in particular to a multispectral near-infrared film thickness measuring instrument which comprises a base and a spectrum seat, wherein a support is arranged between the base and the spectrum seat, two ends of the support are respectively and fixedly connected with the base and the spectrum seat, a spectrum receiver and a processor for recording and calculating data received by the spectrum receiver are arranged in the base, a spectrum cavity is arranged in the spectrum seat, an emission hole facing the spectrum receiver is formed in the spectrum seat, the emission hole enables the outside to be communicated with the spectrum cavity, a halogen lamp for emitting a spectrum is arranged in the spectrum cavity, the halogen lamp is opposite to the emission hole, and a bias disc is arranged in the spectrum cavity; the utility model aims to overcome the defects of the prior art and provide a multispectral near-infrared film thickness measuring instrument, so that the effect of measuring the film thickness by switching spectrums with different wavelengths is realized.

Description

Multispectral near-infrared film thickness measuring instrument

Technical Field

The utility model relates to the field of film thickness measurement, in particular to a multispectral near-infrared film thickness measuring instrument.

Background

The film thickness measuring instrument is mainly used for measuring the thickness of a film, and the intensity of the film is attenuated when a spectrum with different wavelengths penetrates through the film with different thicknesses, and meanwhile, light with specific wavelengths is absorbed due to certain specific molecular bonds. The absorption degree of the light with specific wavelength corresponding to the molecular bonds in the material is in a proportional relation with the number of the molecules contained in the material, the light with specific wave bands is irradiated on a measured object, and the scattered light is detected by the temperature-controlled PbS photosensitive element. The photosensitive element converts the optical signal into an electric signal to be output, the percentage content of the measured component in the measured object is obtained through analysis of the processor, the numerical value is displayed in percentage, for the film with uniform material, all the components are generally uniformly distributed in the film, and the thickness numerical value of the film can be obtained through measuring the content of the measured component in a certain area. Therefore, how to design a film thickness measuring apparatus, the film thickness measuring apparatus can switch the spectra with different wavelengths to measure the film thickness becomes a technical problem to be solved urgently by those skilled in the art.

SUMMERY OF THE UTILITY MODEL

In view of this, the present invention provides a multi-spectrum near-infrared film thickness measuring apparatus to overcome the defects of the prior art, so as to realize the effect of switching the spectrums with different wavelengths to measure the film thickness.

In order to solve the technical problems, the technical scheme of the utility model is as follows:

a multispectral near-infrared film thickness measuring instrument comprises a base and a spectrum seat, wherein a support is arranged between the base and the spectrum seat, two ends of the support are fixedly connected with the base and the spectrum seat respectively, a spectrum receiver and a processor used for recording and calculating data received by the spectrum receiver are arranged in the base, a spectrum cavity is arranged in the spectrum seat, an emission hole facing the spectrum receiver is formed in the spectrum seat, the emission hole enables the outside to be communicated with the spectrum cavity, a halogen lamp used for emitting a spectrum is arranged in the spectrum cavity and is right opposite to the emission hole, a polarizing disc is arranged in the spectrum cavity, a power assembly used for driving the polarizing disc to rotate is arranged on the spectrum seat, a plurality of polarizing plates used for changing the spectrum emitted by the halogen lamp are annularly arranged on the polarizing disc, when the device is used, the halogen lamp, one of the plurality of polaroids and the emission hole are sequentially arranged according to the emission path of the spectrum.

Compared with the prior art, the utility model has the advantages that:

before the thickness of the film is to be detected, the halogen lamp is electrified to emit light, the light-gathering cover gathers light emitted by the halogen lamp, the light emitted by the halogen lamp irradiates the spectrum receiver through the polaroid, the emission hole and the transparent plate, the spectrum receiver receives the spectrum, the processor records data received by the spectrum receiver, an operator places the film between the emission hole and the transparent plate, the film absorbs part of the spectrum, the processor records the data received by the spectrum receiver again, the processor compares and calculates the two times of data to obtain the thickness of the film, when the spectrum needs to be switched, the power assembly controls the polarizer and the polaroid to rotate, the polarizer drives the indicating wheel disc to rotate through the connecting shaft, the polaroid on the spectrum emission path of the halogen lamp is changed accordingly, and the operation is repeated, so that the measurement of different thicknesses of the film can be realized.

Furthermore, the power assembly comprises a connecting shaft which is rotatably connected with the spectrum cavity, one end of the connecting shaft is fixedly connected with the polarizing disc, the other end of the connecting shaft is fixedly provided with an indicating wheel disc which is used for holding the rotating indicating wheel disc, and the indicating wheel disc is located in the external space to realize manual adjustment of the polarizing disc of the spectrum emission path of the halogen lamp.

Furthermore, the indication wheel disc is circumferentially provided with spectrum codes for identifying the positions of the polaroids, and the spectrum seat is also provided with a fixed pointer for corresponding to the spectrum codes, so that the specified polaroids are adjusted to be positioned on a spectrum emission path.

Further, power component includes motor power, motor power includes stiff end and output shaft end, the stiff end with spectrum intracavity wall fixed connection, the output shaft end with polarisation dish fixed connection realizes that control polarisation dish rotates.

Further, the base is internally provided with a detection groove, the detection groove faces one side of the emission hole and is provided with an opening, the processor and the spectrum receiver are arranged in the detection groove, the detection groove is internally provided with a transparent plate for sealing the opening of the detection groove, and the spectrum receiver is subjected to dustproof operation.

Furthermore, the side of the transparent plate is slidably provided with a cleaning block, and the cleaning block is abutted to the upper surface of the transparent plate to clean the transparent plate.

Furthermore, a light-gathering cover used for gathering light of the halogen lamp is arranged on the outer side of the halogen lamp, so that light gathering of the halogen lamp is achieved.

Drawings

FIG. 1 is a schematic axial side view of the present invention;

FIG. 2 is a schematic cross-sectional view of the present invention showing a shaft side depression angle;

FIG. 3 is a schematic axial side bottom view of the present invention;

FIG. 4 is a schematic cross-sectional view of the axial elevation of the present invention.

Reference numerals: 10. a base; 11. a support; 12. a spectrum base; 20. a transparent plate; 21. a cleaning block; 22. a detection tank; 23. a processor; 24. a spectral receiver; 30. a spectral cavity; 31. an emission aperture; 32. a power motor; 33. biasing the optical disc; 34. a polarizer; 35. a light-gathering cover; 36. a halogen lamp; 37. fixing the pointer; 38. a connecting shaft; 39. the wheel is indicated.

Detailed Description

The following detailed description of the embodiments of the present invention is provided in order to make the technical solution of the present invention easier to understand and understand.

Referring to fig. 1, 2, 3 and 4, the present embodiment provides a multispectral near-infrared film thickness measuring apparatus, which is mainly used for switching spectra with different wavelengths to measure the film thickness.

A multispectral near-infrared film thickness measuring instrument comprises a base 10 and a spectrum seat 12, wherein a support 11 is arranged between the base 10 and the spectrum seat 12, two ends of the support 11 are respectively fixedly connected with the base 10 and the spectrum seat, a spectrum receiver 24 and a processor 23 for recording and calculating data received by the spectrum receiver 24 are arranged in the base 10, a spectrum cavity 30 is arranged in the spectrum seat 12, an emission hole 31 facing the spectrum receiver 24 is arranged on the spectrum seat 12, the emission hole 31 enables the outside to be communicated with the spectrum cavity 30, a halogen lamp 36 for emitting a spectrum is arranged in the spectrum cavity 30, the halogen lamp 36 is opposite to the emission hole 31, a bias disc 33 is arranged in the spectrum cavity 30, a power assembly for driving the bias disc 33 to rotate is arranged on the spectrum seat 12, a plurality of polarization sheets 34 for changing the spectrum emitted by the halogen lamp 36 are annularly arranged on the bias disc 33, in use of the device, the halogen lamp 36, one of the plurality of polarizing plates 34, and the emission hole 31 are arranged in order according to the emission path of the spectrum.

Specifically, the method comprises the following steps:

with reference to fig. 3 and 4, in order to manually adjust the polarizer 33 of the spectrum emission path of the halogen lamp 36, the power assembly includes a connecting shaft 38 rotatably connected to the spectrum cavity 30, one end of the connecting shaft 38 is fixedly connected to the polarizer 33, the other end of the connecting shaft 38 is fixedly provided with an indicating wheel disc 39 for handheld rotation, and the indicating wheel disc 39 is located in an external space to manually adjust the polarizer 33 of the spectrum emission path of the halogen lamp 36.

In order to adjust the designated polarizer 34 to be located on the spectral emission path, as shown in fig. 3 and 4, the indicating wheel 39 is circumferentially provided with a spectral code for identifying the position of the polarizer 34, and the spectrum holder 12 is further provided with a fixed pointer 37 for corresponding to the spectral code, so as to adjust the designated polarizer 34 to be located on the spectral emission path.

Referring to fig. 4, in order to control the rotation of the eccentric disc 33, the power assembly includes a power motor 32, the power motor 32 includes a fixed end and an output shaft end, the fixed end is fixedly connected to the inner wall of the spectrum cavity 30, and the output shaft end is fixedly connected to the eccentric disc 33, so as to control the rotation of the eccentric disc 33.

Referring to fig. 1 and 2, in order to perform a dustproof operation on the spectrum receiver 24, a detection groove 22 is disposed inside the base 10, an opening is disposed on one side of the detection groove 22 facing the emission hole 31, the processor 23 and the spectrum receiver 24 are disposed inside the detection groove 22, and a transparent plate 20 for sealing the opening of the detection groove 22 is disposed inside the detection groove 22, so as to perform a dustproof operation on the spectrum receiver 24.

As shown in fig. 1 and 2, in order to clean the transparent plate 20, a cleaning block 21 is slidably disposed on the transparent plate 20, and the cleaning block 21 abuts against the upper surface of the transparent plate 20 to clean the transparent plate 20.

As shown in fig. 2 and 4, in order to condense the halogen lamp 36, a condensing cover 35 for condensing the halogen lamp 36 is provided outside the halogen lamp 36, so that the halogen lamp 36 is condensed.

The implementation principle is as follows: before the film thickness is to be detected, the reciprocating sliding cleaning block 21 is manually pressed, the cleaning block 21 cleans the upper surface of the transparent plate 20, the halogen lamp 36 is electrified to emit light, the light-gathering cover 35 gathers light emitted by the halogen lamp 36, the light emitted by the halogen lamp 36 irradiates the spectrum receiver 24 through the polarizer 34, the emission hole 31 and the transparent plate 20, the spectrum receiver 24 receives a spectrum, the processor 23 records data received by the spectrum receiver 24, an operator puts a film between the emission hole 31 and the transparent plate 20, the film absorbs part of the spectrum, the processor 23 records the data received by the spectrum receiver 24 again, the processor 23 compares the two data to calculate the film thickness, when the spectrum needs to be switched, the power motor 32 controls the polarizer 33 and the polarizer 34 to rotate through an output shaft end, the polarizer 33 drives the indicating wheel disc 39 to rotate through the connecting shaft 38, so that the fixed pointer 37 points at the spectrum code on the indicating wheel disc 39, the polaroid 34 between the halogen lamp 36 and the emission hole 31 is changed accordingly, the spectrum emitted from the emission hole 31 is changed accordingly, or the indicating wheel disc 39 is manually rotated to enable the fixed pointer 37 to point to the spectrum code on the indicating wheel disc 39, the indicating wheel disc 39 drives the polarizer 33 and the polaroid 34 to rotate through the connecting shaft 38, the polaroid 34 between the halogen lamp 36 and the emission hole 31 is changed accordingly, the spectrum emitted from the emission hole 31 is changed accordingly, and the measurement of different film thicknesses can be realized by repeating the operations.

The above are only typical examples of the present invention, and besides, the present invention may have other embodiments, and all technical solutions formed by equivalent substitutions or equivalent transformations fall within the scope of the present invention.

Claims

1. The multispectral near-infrared film thickness measuring instrument comprises a base (10) and a spectrum seat (12), wherein a support (11) is arranged between the base (10) and the spectrum seat (12), two ends of the support (11) are respectively fixedly connected with the base (10) and the spectrum seat, the multispectral near-infrared film thickness measuring instrument is characterized in that a spectrum receiver (24) and a processor (23) used for recording and calculating data received by the spectrum receiver (24) are arranged inside the base (10), a spectrum cavity (30) is arranged inside the spectrum seat (12), a transmitting hole (31) facing the spectrum receiver (24) is formed in the spectrum seat (12), the transmitting hole (31) enables the outside to be communicated with the spectrum cavity (30), a halogen lamp (36) used for transmitting a spectrum is arranged inside the spectrum cavity (30), the halogen lamp (36) is over against the transmitting hole (31), a bias disc (33) is arranged inside the spectrum cavity (30), the spectrum base (12) is provided with a power assembly for driving the polarizing disc (33) to rotate, a plurality of polarizing plates (34) for changing the spectrum emitted by the halogen lamp (36) are annularly arranged on the polarizing disc (33), and when the device is used, the halogen lamp (36), one of the polarizing plates (34) and the emission hole (31) are sequentially arranged according to the emission path of the spectrum.

2. The multispectral near-infrared film thickness measuring instrument according to claim 1, wherein the power assembly comprises a connecting shaft (38) rotatably connected with the spectrum cavity (30), one end of the connecting shaft (38) is fixedly connected with the eccentric disc (33), the other end of the connecting shaft (38) is fixedly provided with an indicating wheel disc (39) for handheld rotation, and the indicating wheel disc (39) is located in an external space.

3. The multispectral near-infrared film thickness measuring instrument according to claim 2, wherein the indicating wheel (39) is provided with a spectrum code for identifying the position of the polarizer (34) in the circumferential direction, and the spectrum seat (12) is further provided with a fixed pointer (37) for corresponding to the spectrum code.

4. The multispectral near-infrared film thickness measuring instrument according to claim 1, wherein the power assembly comprises a power motor (32), the power motor (32) comprises a fixed end and an output shaft end, the fixed end is fixedly connected with the inner wall of the spectrum cavity (30), and the output shaft end is fixedly connected with the bias disc (33).

5. The film thickness measuring instrument according to claim 2 or 4, wherein a detection groove (22) is provided inside the base (10), the detection groove (22) is provided with an opening on a side facing the emission hole (31), the processor (23) and the spectrum receiver (24) are provided inside the detection groove (22), and a transparent plate (20) for closing the opening of the detection groove (22) is provided inside the detection groove (22).

6. The apparatus according to claim 5, wherein the transparent plate (20) is provided with a cleaning block (21) in a sliding manner, and the cleaning block (21) abuts against the upper surface of the transparent plate (20).

7. The multispectral near-infrared film thickness measuring instrument according to claim 1, wherein a light-collecting cover (35) for collecting light from the halogen lamp (36) is provided outside the halogen lamp (36).