CN216039789U

CN216039789U - Vacuum coating device for precision machining of neutral density filter

Info

Publication number: CN216039789U
Application number: CN202122114903.0U
Authority: CN
Inventors: 王海龙; 龚正红; 马志福
Original assignee: Kunming Yulong Photoelectric Technology Co ltd
Current assignee: Kunming Yulong Photoelectric Technology Co ltd
Priority date: 2021-09-03
Filing date: 2021-09-03
Publication date: 2022-03-15
Anticipated expiration: 2031-09-03

Abstract

The utility model discloses a vacuum coating device for precision processing of a neutral density filter, which comprises a bottom plate, wherein the top of the bottom plate is fixedly connected with a vacuum coating box, one side of the vacuum coating box is fixedly connected with an air storage chamber, a vacuum pump is fixedly connected between the air storage chamber and the vacuum coating box through a pipeline, the bottom of an inner cavity of the vacuum coating box is fixedly connected with a motor, the output end of the motor is fixedly connected with a placing plate, the placing plate is connected with a connecting rod through a rotating assembly, and the outer surface of the connecting rod is fixedly connected with a substrate frame, so that the device can automatically regulate and control the temperature inside the vacuum coating box through a temperature regulating mechanism, thereby preventing the temperature inside the vacuum coating box from being too high or too low, further enabling the inside of the vacuum coating box to be always within the proper temperature range for coating substrates, and the device has a simple structure, the temperature automatic regulation effect is good, so that the device has high practicability.

Description

Vacuum coating device for precision machining of neutral density filter

Technical Field

The utility model relates to the technical field of precision machining of optical filters, in particular to a vacuum coating device for precision machining of a neutral density optical filter.

Background

Filters are optical devices used to select a desired wavelength band of radiation. The optical filter has the common property that no optical filter can make the imaging of the celestial body brighter, because all the optical filters absorb certain wavelengths, so that the object becomes darker, vacuum coating refers to a method for heating metal or nonmetal materials under a high vacuum condition to evaporate and condense the metal or nonmetal materials on the surface of a coating piece (metal, semiconductor or insulator) to form a thin film, the optical filter needs to be coated during the processing process, but the existing coating device has certain defects in use, such as coating is not uniform enough, so that the coating effect of a finished product is not good, in addition, the proper temperature increase in the coating process can promote the bonding force between a substrate and deposited molecules, so that the coating of the optical filter is tighter, but the coating is deteriorated if the temperature is too high, the existing device cannot automatically regulate and control the temperature inside a vacuum chamber in use, therefore, the phenomenon that the temperature is too high or too low possibly exists during plating, and the quality of the plating is further seriously influenced, and therefore, the vacuum coating device for the precision machining of the neutral density filter is provided.

SUMMERY OF THE UTILITY MODEL

The utility model aims to provide a vacuum coating device for precision processing of a neutral density filter, which aims to solve the problems in the background technology.

In order to solve the technical problems, the utility model provides the following technical scheme: the utility model provides a vacuum coating device for precision finishing of neutral density light filter, includes the bottom plate, the top fixedly connected with vacuum coating case of bottom plate, one side fixedly connected with reservoir of vacuum coating case, pass through pipeline fixedly connected with vacuum pump between reservoir and the vacuum coating case, the inner chamber bottom fixedly connected with motor of vacuum coating case, the board is placed to the output fixedly connected with of motor, it is connected with the connecting rod through rotatory subassembly to place the board, the outer fixed surface of connecting rod is connected with the substrate frame, place the top middle-end fixedly connected with membrane material evaporation post of board, one side inner wall of vacuum coating case is provided with the temperature adjusting mechanism.

Preferably, the temperature adjusting mechanism comprises an expansion tank fixedly connected with the inner wall of the vacuum coating tank, the upper side and the lower side of the expansion tank are fixedly connected with exhaust ports, the other side of each exhaust port is fixedly connected with an adjusting tank, a slide bar is fixedly connected inside the adjusting tank, a magnetic slide block is movably connected to one side of the outer surface of the slide bar, an adjusting spring is sleeved on the other side of the outer surface of the slide bar, a sliding rheostat is movably connected to one side, far away from the expansion tank, of the adjusting tank through a magnetic slide button, and the sliding rheostat is fixedly connected with the inner wall of the vacuum coating tank, so that the coating quality is greatly improved.

Preferably, the rotating assembly comprises an inner gear ring plate fixedly connected with the inner wall of the placing plate, the inner part of the inner gear ring plate is meshed with four driven gears, the four driven gears are arranged in four groups, the circle center of the inner gear ring plate is distributed in an annular array, and the four driven gears are fixedly connected with four connecting rods respectively, so that the film coating quality is further improved.

Preferably, the top fixedly connected with membrane material import of membrane material evaporation column, the top of membrane material import extends to the outside of vacuum coating case, the inside fixedly connected with electric heat bar of membrane material evaporation column, the fixed surface of membrane material evaporation column is connected with a plurality of shower nozzle to the practicality of this device has been improved greatly.

Preferably, the front end surface of the vacuum coating box is fixedly connected with a controller and an observation window, and the outer surface of the controller is fixedly connected with a control button, so that the device is more convenient to control.

Preferably, sealing sleeves are arranged at the joint of the vacuum coating box and the vacuum pump pipeline and the joint of the gas storage chamber and the vacuum pump pipeline, and gas-tight materials are arranged inside the sealing sleeves, so that the gas tightness of the device is greatly improved.

Compared with the prior art, the utility model has the following beneficial effects:

1. according to the utility model, by arranging the film material evaporation column, the expansion tank, the exhaust port, the adjusting tank, the slide rod, the magnetic slider, the adjusting spring, the slide rheostat and the magnetic slide button, the temperature inside the vacuum coating tank can be automatically regulated and controlled through the temperature regulating mechanism, so that the temperature inside the vacuum coating tank is prevented from being too high or too low, and further the inside of the vacuum coating tank can be always in the appropriate temperature range of substrate coating;

2. the device is also provided with the motor, the inner gear ring plate, the driven gear, the connecting rod and the substrate frame, so that the connecting rod and the substrate frame can be driven by the rotating component to rotate around the film material evaporation column, and the device can uniformly coat the film on the optical filter, thereby greatly improving the quality of products.

Drawings

The accompanying drawings, which are included to provide a further understanding of the utility model and are incorporated in and constitute a part of this specification, illustrate embodiments of the utility model and together with the description serve to explain the principles of the utility model and not to limit the utility model. In the drawings:

FIG. 1 is a front view of the present invention in its entirety;

FIG. 2 is a schematic view of the internal structure of the whole body of the present invention;

FIG. 3 is an enlarged view of the utility model at A in FIG. 2;

FIG. 4 is a schematic view of the internal structure of the laying board of the present invention;

in the figure: 1. a base plate; 2. vacuum coating box; 3. an air storage chamber; 4. a vacuum pump; 5. a motor; 6. placing the plate; 7. an inner gear ring plate; 8. a driven gear; 9. a connecting rod; 10. a substrate holder; 11. a membrane material evaporation column; 12. a membrane material inlet; 13. a spray head; 14. a slide rheostat; 15. an expansion tank; 16. an adjusting box; 17. a slide bar; 18. adjusting the spring; 19. a magnetic slider; 20. an exhaust port; 21. a magnetic slide button; 22. a controller; 23. and (4) an observation window.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

Referring to fig. 1-4, the utility model provides a vacuum coating device for precision machining of a neutral density filter, which comprises a base plate 1, wherein a vacuum coating box 2 is fixedly connected to the top of the base plate 1, an air storage chamber 3 is fixedly connected to one side of the vacuum coating box 2, a vacuum pump 4 is fixedly connected between the air storage chamber 3 and the vacuum coating box 2 through a pipeline, a motor 5 is fixedly connected to the bottom of an inner cavity of the vacuum coating box 2, a placing plate 6 is fixedly connected to the output end of the motor 5, the placing plate 6 is connected with a connecting rod 9 through a rotating assembly, a substrate frame 10 is fixedly connected to the outer surface of the connecting rod 9, a film material evaporation column 11 is fixedly connected to the middle end of the top of the placing plate 6, and a temperature adjusting mechanism is arranged on the inner wall of one side of the vacuum coating box 2.

In a preferred embodiment, the temperature adjusting mechanism comprises an expansion tank 15 fixedly connected with the inner wall of the vacuum coating tank 2, the upper side and the lower side of the expansion tank 15 are fixedly connected with exhaust ports 20, the other side of the exhaust ports 20 is fixedly connected with an adjusting tank 16, a slide rod 17 is fixedly connected inside the adjusting tank 16, one side of the outer surface of the slide rod 17 is movably connected with a magnetic slider 19, the other side of the outer surface of the slide rod 17 is sleeved with an adjusting spring 18, one side of the adjusting tank 16, far away from the expansion tank 15, is movably connected with a slide rheostat 14 through a magnetic slide button 21, the slide rheostat 14 is fixedly connected with the inner wall of the vacuum coating tank 2, and the temperature inside the vacuum coating tank 2 can be automatically adjusted by the temperature adjusting mechanism, so that the temperature inside the vacuum coating tank 2 can be always in a relatively proper range.

In a preferred embodiment, the rotating assembly comprises an inner gear ring plate 7 fixedly connected with the inner wall of the placing plate 6, the inner gear ring plate 7 is meshed with four driven gears 8, the driven gears 8 are provided with four groups, the centers of circles of the inner gear ring plate 7 are distributed in an annular array, the four driven gears 8 are respectively fixedly connected with four connecting rods 9, and the rotating assembly is used for driving the connecting rods 9 and the substrate frame 10 to rotate while revolving around the film material evaporation column 11, so that the substrate can be coated more uniformly.

In a preferred embodiment, a film material inlet 12 is fixedly connected to the top of the film material evaporation column 11, the top of the film material inlet 12 extends to the outside of the vacuum coating box 2, an electric heating rod is fixedly connected to the inside of the film material evaporation column 11, and a plurality of nozzles 13 are fixedly connected to the outer surface of the film material evaporation column 11, wherein the electric heating rod is electrically connected to the slide rheostat 14, so that the slide rheostat 14 can adjust the heat generation amount of the electric heating rod by controlling the current amount of the electric heating rod, and further, the temperature inside the vacuum coating box 2 can be adjusted.

In a preferred embodiment, a controller 22 and an observation window 23 are fixedly connected to the front end surface of the vacuum coating box 2, a control button is fixedly connected to the outer surface of the controller 22, and the controller 22 can be used for rapidly controlling the electric appliances in the device.

In a preferred embodiment, sealing sleeves are arranged at the connecting part of the vacuum coating box 2 and the pipeline of the vacuum pump 4 and the connecting part of the air storage chamber 3 and the pipeline of the vacuum pump 4, an air-tight material is arranged inside the sealing sleeves, and the air leakage phenomenon of the vacuum coating box 2 and the air storage chamber 3 can be avoided by using the air-tight material inside the sealing sleeves.

The working principle of the utility model is as follows: when the device is used, an operator firstly puts a film material into the film material evaporation column 11 through the film material inlet 12, then starts the electric heating rod in the film material evaporation column 11, so that the electric heating rod heats and evaporates the film material, when the film material is heated, argon in the expansion tank 15 expands rapidly, so that the pressure in the expansion tank 15 rises continuously, the thrust of the argon pressure in the adjusting tank 16 is increased gradually, when the thrust of the argon pressure is greater than the elastic force of the adjusting spring 18, the air pressure pushes the magnetic slider 19 to compress the adjusting spring 18, and meanwhile, the magnetic slider 19 drives the magnetic slide button 21 to move by utilizing the principle of opposite attraction, so that the magnetic slide button 21 increases the resistance value in the slide rheostat 14, the current passed by the electric heating rod is reduced, and finally the temperature in the vacuum coating tank 2 is reduced gradually due to heat release, because the elastic force of the adjusting spring 18 and the telescopic length of the adjusting spring 18 are changed linearly, an operator can control the resistance value inside the slide rheostat 14 by controlling the length of the adjusting spring 18, so that the temperature inside the vacuum coating box 2 can be controlled, thereby greatly improving the film coating effect of the device, and in the film coating process, an operator can start the motor 5 through the controller 22, so that the motor 5 drives the placing plate 6 to rotate, when the placing plate 6 rotates, the inner gear ring plate 7 is driven to rotate, thereby utilize the meshing connected mode between internal gear ring board 7 and the driven gear 8 for internal gear ring board 7 can drive the rotation of driven gear 8, finally makes connecting rod 9 and substrate frame 10 carry out the rotation when encircleing the revolution of coating material evaporation post 11, thereby makes the substrate can be more even when the coating film, and then has improved the coating film quality greatly.

It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.

Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that changes may be made in the embodiments and/or equivalents thereof without departing from the spirit and scope of the utility model. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. The utility model provides a vacuum coating device for precision finishing of neutral density filter, includes bottom plate (1), its characterized in that: the vacuum coating device is characterized in that the vacuum coating box (2) is fixedly connected to the top of the bottom plate (1), the air storage chamber (3) is fixedly connected to one side of the vacuum coating box (2), the vacuum pump (4) is fixedly connected between the air storage chamber (3) and the vacuum coating box (2) through a pipeline, the motor (5) is fixedly connected to the bottom of the inner cavity of the vacuum coating box (2), the plate (6) is placed in the fixedly connected to the output end of the motor (5), the plate (6) is connected with the connecting rod (9) through a rotating component, the substrate frame (10) is fixedly connected to the outer surface of the connecting rod (9), the film evaporation column (11) is fixedly connected to the middle end of the top of the plate (6), and the temperature adjusting mechanism is arranged on the inner wall of one side of the vacuum coating box (2).

2. The vacuum coating apparatus according to claim 1, wherein: the temperature adjusting mechanism comprises an expansion tank (15) fixedly connected with the inner wall of the vacuum coating tank (2), exhaust ports (20) are fixedly connected to the upper side and the lower side of the expansion tank (15), an adjusting tank (16) is fixedly connected to the other side of the exhaust ports (20), a sliding rod (17) is fixedly connected to the inside of the adjusting tank (16), a magnetic sliding block (19) is movably connected to one side of the outer surface of the sliding rod (17), an adjusting spring (18) is sleeved on the other side of the outer surface of the sliding rod (17), a sliding rheostat (14) is movably connected to one side, away from the expansion tank (15), of the adjusting tank (16) through a magnetic sliding button (21), and the sliding rheostat (14) is fixedly connected with the inner wall of the vacuum coating tank (2).

3. The vacuum coating apparatus according to claim 1, wherein: the rotating assembly comprises an inner gear ring plate (7) fixedly connected with the inner wall of the placing plate (6), the inner gear ring plate (7) is meshed with driven gears (8), the driven gears (8) are provided with four groups, the circle centers of the inner gear ring plate (7) are distributed in an annular array mode, and the driven gears (8) are fixedly connected with four connecting rods (9) respectively.

4. The vacuum coating apparatus according to claim 1, wherein: the top fixedly connected with membrane material import (12) of membrane material evaporation column (11), the top of membrane material import (12) extends to the outside of vacuum coating case (2), the inside fixedly connected with electric heat bar of membrane material evaporation column (11), the fixed surface of membrane material evaporation column (11) is connected with a plurality of shower nozzle (13).

5. The vacuum coating apparatus according to claim 1, wherein: the front end surface of the vacuum coating box (2) is fixedly connected with a controller (22) and an observation window (23), and the outer surface of the controller (22) is fixedly connected with a control button.

6. The vacuum coating apparatus according to claim 1, wherein: sealing sleeves are arranged at the joint of the vacuum coating box (2) and the pipeline of the vacuum pump (4) and the joint of the gas storage chamber (3) and the pipeline of the vacuum pump (4), and gas-tight materials are arranged inside the sealing sleeves.