CN216006089U

CN216006089U - Electrical automation control device of crystal growth equipment

Info

Publication number: CN216006089U
Application number: CN202122026548.1U
Authority: CN
Inventors: 王家武; 杨定永; 阿凤雄; 罗应强; 张顺祥
Original assignee: Yunnan Quankong Electromechanical Co ltd
Current assignee: Yunnan Quankong Electromechanical Co ltd
Priority date: 2021-08-26
Filing date: 2021-08-26
Publication date: 2022-03-11
Anticipated expiration: 2031-08-26

Abstract

The utility model discloses an electrical automatic control device of crystal growth equipment, which comprises a control device body, wherein a heat dissipation window is fixedly arranged on the side wall of the control device body, telescopic rods are welded at four corners of the bottom end of the control device body, and an installation mechanism is fixedly arranged at the bottom end of each telescopic rod; the semiconductor refrigeration device is simple to operate and convenient to install, the installation efficiency is improved, the heat dissipation is rapid, and the risk is reduced.

Description

Electrical automation control device of crystal growth equipment

Technical Field

The utility model relates to the technical field of crystal growth equipment, in particular to an electrical automatic control device of the crystal growth equipment.

Background

The crystal growth equipment is called a crystal pulling furnace, a single crystal furnace or a semiconductor crystal growth furnace, is necessary equipment in the process of converting polycrystalline silicon into monocrystalline silicon, and the monocrystalline silicon is a basic raw material in photovoltaic power generation and semiconductor industries. Monocrystalline silicon is one of the most important monocrystalline materials in the world as a key supporting material of the modern information society, and not only is the main functional material for developing computers and integrated circuits, but also the main functional material for photovoltaic power generation and solar energy utilization.

The electric automatic control equipment in the growth equipment is formed by combining a plurality of electric elements and is used for controlling the crystal growth equipment, so that the controlled equipment is ensured to run safely and reliably. Electric automation control equipment is at the during operation, and inside electric original paper can produce a large amount of heat and can't in time spill, increases the risk of inside original paper and wire short circuit, and electric automation control equipment is when the installation simultaneously, and the installed part structure is complicated, reduces the installation effectiveness.

SUMMERY OF THE UTILITY MODEL

The utility model mainly aims to provide an electrical automation control device of crystal growth equipment, which can effectively solve the problems in the background technology.

In order to achieve the purpose, the utility model adopts the technical scheme that:

an electrical automatic control device of crystal growth equipment comprises a control device body, wherein a heat dissipation window is fixedly installed on the side wall of the control device body, telescopic rods are welded at four corners of the bottom end of the control device body, and an installation mechanism is fixedly installed at the bottom end of each telescopic rod;

the inside top of controlling means body is riveted with the protecting crust, the inside riveting of protecting crust has servo motor, servo motor's output welding has the second screw rod, the other end of second screw rod passes through the bearing and is connected with the lateral wall rotation of protecting crust, the fan has been cup jointed to the screw thread on the outer wall of second screw rod, the passageway has been seted up to the bottom of protecting crust, the riveting has the protection network on the passageway, the outside of passageway and the bottom that is located the protecting crust have the semiconductor refrigeration piece through the mounting bracket riveting, fan and passageway phase-match.

Preferably, a first spring is movably sleeved outside the telescopic rod, the top end of the first spring is connected with the bottom end of the control device body in a welding mode, and the bottom end of the first spring is connected with the mounting mechanism in a welding mode.

Preferably, installation mechanism includes fixing base and removal seat, the equal fixed mounting in fixing base and the bottom of removing the seat has tight seat of clamp, the inner wall fixed mounting who presss from both sides tight seat has the multiunit second spring, the other end and the grip block fixed connection of second spring.

Preferably, two groups of clamping plates are arranged in the mounting mechanism.

Preferably, the welding of one side upper end of fixing base has the dead lever, one side lower extreme of fixing base is rotated through the bearing and is connected with first screw rod, the dead lever cup joints with removing the seat activity, first screw rod cup joints with removing a seat screw thread.

Preferably, one end of the fixed rod is fixedly provided with a first limit block; a second limiting block is fixedly mounted at one end of the first screw rod, and a rotating handle is fixedly mounted at the other end of the first screw rod.

Preferably, the top end of the protective shell is fixedly provided with a limiting slide rail matched with the fan.

Preferably, the inner wall of the control device body is riveted with a temperature sensor.

Compared with the prior art, the utility model has the following beneficial effects: the utility model relates to an electrical automatic control device of crystal growth equipment, when in use, a movable seat moves along a first screw rod by rotating a rotating handle, the movable seat approaches to a fixed seat so that two groups of clamping plates clamp a connecting piece, under the elastic force recovery action of a second spring, the clamping plates are prevented from loosening, so that a control device body is fixed on the connecting piece, the operation is simple, the installation efficiency is improved, the working environment temperature in the control device body is detected by a temperature sensor, monitoring information is transmitted to a controller, the controller controls a servo motor to start to drive the second screw rod to rotate, so that a fan moves along the balance of the second screw rod, the stable movement of the fan is maintained by the arrangement of a limiting slide rail, the fan starts to convey cold air generated by a semiconductor refrigeration sheet to an original in the control device body through a channel, so that heat generated by the operation of the original is emitted through a heat radiation window, the risk is reduced.

Drawings

FIG. 1 is a schematic structural view of the present invention;

FIG. 2 is a side view of the mounting mechanism of the present invention;

FIG. 3 is a schematic view of the structure of the mounting mechanism of the present invention;

FIG. 4 is a schematic diagram of the internal structure of the control device body according to the present invention.

In the figure: 1. a control device body; 101. a heat dissipation window; 2. a telescopic rod; 201. a first spring; 3. an installation mechanism; 301. a fixed seat; 302. a movable seat; 303. fixing the rod; 304. a first stopper; 305. a first screw; 306. a second limiting block; 307. a clamping seat; 308. a second spring; 309. a clamping plate; 3010. A handle is rotated; 4. a protective shell; 401. a servo motor; 402. a second screw; 403. a limiting slide rail; 404. A fan; 405. a channel; 406. a semiconductor refrigeration sheet; 5. a temperature sensor.

Detailed Description

In order to make the technical means, the creation characteristics, the achievement purposes and the effects of the utility model easy to understand, the utility model is further described with the specific embodiments.

As shown in fig. 1, 2, 3 and 4, an electrical automation control device for crystal growth equipment comprises a control device body 1, wherein heat dissipation windows 101 are fixedly installed on the side wall of the control device body 1, telescopic rods 2 are welded at four corners of the bottom end of the control device body 1, and an installation mechanism 3 is fixedly installed at the bottom end of each telescopic rod 2;

the inside top riveting of controlling means body 1 has protecting crust 4, the inside riveting of protecting crust 4 has servo motor 401, servo motor 401's output welding has second screw rod 402, the other end of second screw rod 402 passes through the bearing and is connected with the lateral wall rotation of protecting crust 4, the screw thread has cup jointed fan 404 on the outer wall of second screw rod 402, passageway 405 has been seted up to the bottom of protecting crust 4, the riveting has the protection network on the passageway 405, the outside of passageway 405 and the bottom that is located protecting crust 4 have riveted semiconductor refrigeration piece 406 through the mounting bracket, fan 404 and passageway 405 phase-match.

Referring to fig. 2, the first spring 201 is movably sleeved outside the telescopic rod 2, the top end of the first spring 201 is welded to the bottom end of the control device body 1, and the bottom end of the first spring 201 is welded to the mounting mechanism 3, so that the vibration force applied to the control device body 1 is buffered, and the internal components are protected.

Referring to fig. 2 and 3, the mounting mechanism 3 includes a fixed base 301 and a movable base 302, a clamping base 307 is fixedly mounted at the bottom end of each of the fixed base 301 and the movable base 302, a plurality of sets of second springs 308 are fixedly mounted on the inner wall of the clamping base 307, and the other ends of the second springs 308 are fixedly connected to a clamping plate 309.

Referring to fig. 2 and 3, two sets of clamping plates 309 are disposed in the mounting mechanism 3 to facilitate the fixed mounting of the mounting mechanism 3 and the connecting member.

Referring to fig. 2 and 3, a fixed rod 303 is welded at an upper end of one side of the fixed seat 301, a first screw 305 is rotatably connected to a lower end of one side of the fixed seat 301 through a bearing, the fixed rod 303 is movably sleeved with the movable seat 302, and the first screw 305 is in threaded sleeve with the movable seat 302, so that the fixed seat 301 and the movable seat 302 are driven to approach or separate from each other when the first screw 305 rotates.

Referring to fig. 2 and 3, a first limiting block 304 is fixedly installed at one end of the fixing rod 303; a second limiting block 306 is fixedly installed at one end of the first screw 305, and a rotating handle 3010 is fixedly installed at the other end of the first screw 305, so that the movable seat 302 is prevented from being separated from the fixed rod 303 and the first screw 305.

Referring to fig. 4, a limiting slide rail 403 matched with the fan 404 is fixedly installed at the top end of the protective shell 4, so as to keep the fan 404 moving stably.

Referring to fig. 4, a temperature sensor 5 is riveted to an inner wall of the control device body 1 to facilitate temperature detection.

It should be noted that, the utility model is an electrical automatic control device for crystal growth equipment, when in use, each set of installation mechanism 3 is placed on a connecting piece on the crystal growth equipment, the movable seat 302 moves along the first screw 305 by rotating the rotary handle 3010, the fixed rod 303 is arranged to keep the movable seat 302 always running in balance and stable, the movable seat 302 approaches to the fixed seat 301 to make two sets of clamping plates 309 clamp the connecting piece, under the elastic force recovery action of the second spring 308, the clamping plates 309 are prevented from loosening, so that the control device body 1 is fixed on the connecting piece, the arrangement of the telescopic rod 2 and the first spring 201 can reduce the vibration force encountered by the control device body 1 in work, the working environment temperature inside the control device body 1 is detected by the temperature sensor 5, when the temperature exceeds the set safety value, the monitoring information is transmitted to the controller, the controller controls servo motor 401 to start, drives second screw 402 to rotate, makes fan 404 move along its equilibrium, and the setting of spacing slide rail 403 has kept fan 404's stable removal, and fan 404 starts to carry the cold air that semiconductor chilling plate 406 produced to the inside original paper of controlling means body 1 through passageway 405 fast for the heat that the original paper work produced is passed through heat dissipation window 101 and is dispelled.

The foregoing shows and describes the general principles and broad features of the present invention and advantages thereof. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, which are described in the specification and illustrated only to illustrate the principle of the present invention, but that various changes and modifications may be made therein without departing from the spirit and scope of the present invention, which fall within the scope of the utility model as claimed. The scope of the utility model is defined by the appended claims and equivalents thereof.

Claims

1. The utility model provides a crystal growth equipment electrical automation control device, includes controlling means body (1), its characterized in that: a heat dissipation window (101) is fixedly installed on the side wall of the control device body (1), telescopic rods (2) are welded at four corners of the bottom end of the control device body (1), and an installation mechanism (3) is fixedly installed at the bottom end of each telescopic rod (2);

the inside top of controlling means body (1) is riveted with protecting crust (4), the inside riveting of protecting crust (4) has servo motor (401), the output welding of servo motor (401) has second screw rod (402), the other end of second screw rod (402) passes through the bearing and is connected with the lateral wall rotation of protecting crust (4), fan (404) have been cup jointed to the screw thread on the outer wall of second screw rod (402), passageway (405) have been seted up to the bottom of protecting crust (4), the riveting has the protection network on passageway (405), the outside of passageway (405) and the bottom that is located protecting crust (4) have semiconductor refrigeration piece (406) through the mounting bracket riveting, fan (404) and passageway (405) phase-match.

2. The electrical automation control device of a crystal growth apparatus of claim 1, wherein: the outer portion of the telescopic rod (2) is movably sleeved with a first spring (201), the top end of the first spring (201) is connected with the bottom end of the control device body (1) in a welded mode, and the bottom end of the first spring (201) is connected with the installation mechanism (3) in a welded mode.

3. The electrical automation control device of a crystal growth apparatus of claim 1, wherein: installation mechanism (3) include fixing base (301) and remove seat (302), the equal fixed mounting in bottom of fixing base (301) and removal seat (302) has tight seat (307) of clamp, the inner wall fixed mounting who presss from both sides tight seat (307) has multiunit second spring (308), the other end and the clamp plate (309) fixed connection of second spring (308).

4. A crystal growth apparatus electrical automation control apparatus as claimed in claim 3, characterized in that: two groups of clamping plates (309) are arranged in the mounting mechanism (3).

5. A crystal growth apparatus electrical automation control apparatus as claimed in claim 3, characterized in that: the welding of one side upper end of fixing base (301) has dead lever (303), one side lower extreme of fixing base (301) is connected with first screw rod (305) through the bearing rotation, dead lever (303) cup joint with removal seat (302) activity, first screw rod (305) cup joint with removal seat (302) screw thread.

6. The crystal growth apparatus electrical automation control device of claim 5, characterized in that: a first limiting block (304) is fixedly arranged at one end of the fixing rod (303); one end of the first screw (305) is fixedly provided with a second limiting block (306), and the other end of the first screw (305) is fixedly provided with a rotating handle (3010).

7. The electrical automation control device of a crystal growth apparatus of claim 1, wherein: and a limiting slide rail (403) matched with the fan (404) is fixedly mounted at the top end of the protective shell (4).

8. The electrical automation control device of a crystal growth apparatus of claim 1, wherein: the inner wall of the control device body (1) is riveted with a temperature sensor (5).