CN216006010U - Anti-pollution observation window used for Parylene deposition chamber - Google Patents
Anti-pollution observation window used for Parylene deposition chamber Download PDFInfo
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- CN216006010U CN216006010U CN202122302030.6U CN202122302030U CN216006010U CN 216006010 U CN216006010 U CN 216006010U CN 202122302030 U CN202122302030 U CN 202122302030U CN 216006010 U CN216006010 U CN 216006010U
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- observation window
- polyimide film
- window glass
- deposition chamber
- film heater
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- 229920000052 poly(p-xylylene) Polymers 0.000 title claims abstract description 33
- 230000008021 deposition Effects 0.000 title claims abstract description 20
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims abstract description 48
- 239000005357 flat glass Substances 0.000 claims abstract description 42
- 229920001721 polyimide Polymers 0.000 claims abstract description 38
- 229910052697 platinum Inorganic materials 0.000 claims abstract description 24
- 230000006835 compression Effects 0.000 claims abstract description 17
- 238000007906 compression Methods 0.000 claims abstract description 17
- 238000004321 preservation Methods 0.000 claims abstract description 17
- 238000007789 sealing Methods 0.000 claims abstract description 15
- 210000004907 gland Anatomy 0.000 claims abstract description 11
- 239000010408 film Substances 0.000 claims description 25
- 238000000151 deposition Methods 0.000 claims description 18
- 238000011109 contamination Methods 0.000 claims description 10
- 239000011521 glass Substances 0.000 claims description 6
- 230000002265 prevention Effects 0.000 claims description 6
- 239000010409 thin film Substances 0.000 claims description 6
- 238000001771 vacuum deposition Methods 0.000 claims description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 2
- 239000004809 Teflon Substances 0.000 claims 1
- 229920006362 Teflon® Polymers 0.000 claims 1
- 239000003292 glue Substances 0.000 claims 1
- 239000010453 quartz Substances 0.000 claims 1
- 238000012423 maintenance Methods 0.000 abstract description 6
- 238000000576 coating method Methods 0.000 description 9
- 238000010438 heat treatment Methods 0.000 description 7
- 239000011248 coating agent Substances 0.000 description 6
- 238000012544 monitoring process Methods 0.000 description 5
- 238000010030 laminating Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000009434 installation Methods 0.000 description 3
- 239000000178 monomer Substances 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 230000003749 cleanliness Effects 0.000 description 2
- 238000005336 cracking Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000007774 longterm Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000009529 body temperature measurement Methods 0.000 description 1
- 230000003139 buffering effect Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 239000002897 polymer film coating Substances 0.000 description 1
- -1 polytetrafluoroethylene Polymers 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000005019 vapor deposition process Methods 0.000 description 1
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Abstract
The utility model relates to an anti-pollution observation window used in a Parylene deposition chamber, which comprises an observation window flange, a sealing rubber ring, observation window glass, an annular polyimide film heater, a film type platinum resistor, a heat preservation compression ring, a gland flange, a pre-tightening screw and a temperature control module; the inner side of the observation window glass is tightly contacted with a sealing rubber ring on the observation window flange, and an annular polyimide film heater and a film type platinum resistor are pasted on the outer side; the heat preservation compression ring is pressed on the outer edges of the heater and the observation window glass; the gland flange is pressed on the heat-preservation compression ring and is fixed with the observation window flange through a pre-tightening screw; the temperature control module enables the temperature of the observation window glass to be maintained within a preset temperature range through the film type platinum resistor and the annular polyimide film heater. The utility model discloses utilize annular polyimide film heater to carry out the effective accuse temperature more than 100 ℃ to observation window glass, can prevent that the observation window from being polluted by the rete of growing to the later maintenance is convenient, simple structure, and is with low costs.
Description
Technical Field
The utility model belongs to the technical field of vacuum coating, concretely relates to anti-pollution observation window that Parylene deposition chamber used.
Background
Parylene (the Chinese name: Parylene) is a generic name of a series of high polymers, and a Parylene film grown through vacuum vapor deposition has good electrical property, thermal property, chemical stability and biocompatibility, and is widely applied to the aspects of aerospace, electronic industry, biomedical treatment, cultural relic protection and the like. As an environment-friendly coating process, Parylene has been gradually applied to various fields of scientific research, electronic industry, biomedical industry and the like, and has wide market prospect and great economic benefit.
The Parylene film is prepared by adopting a vapor deposition process, and in a vacuum condition, a Parylene material is fully vaporized in an evaporation chamber environment at 150 ℃; then cracking the mixture into active monomer micromolecules with good substrate adaptability in a 680 ℃ cracking furnace; finally, the active monomer micromolecules fall on the surface of the base material in a deposition chamber at 25 ℃ to grow a polymer film coating which is completely covered and has uniform thickness. But the observation window subassembly surface of installation on the deposit room also can be by even growth rete, causes the pollution to the observation window, influences observation effect, and along with the extension of deposition time, the observation window also can lose its performance of observing and monitoring film forming condition gradually, for avoiding the performance degradation of observation window, still need dismantle and artifical clearance to the observation window after accomplishing the coating film at every turn, causes the inconvenience of production and maintenance.
In addition, the adaptability of the film layer to the base material is strong, so that the Parylene coating process can also cause film layer pollution to monitoring equipment placed in a deposition chamber, and particularly, an optical instrument is inconvenient to be applied to monitoring of the Parylene coating process.
SUMMERY OF THE UTILITY MODEL
In order to solve the traditional observation window that adopts at present under the deposit room 25 ℃ vacuum environment, the Parylene rete also can coat observation window and rubber ring gap, all need the clearance after the coating at every turn, and along with the problem that clearance number of times's increase glass produced mar easily or damaged, the utility model provides an anti-pollution observation window that Parylene deposit room used, this anti-pollution observation window utilizes active monomer micromolecule after the Parylene schizolysis can not "grow" out the rete and can keep the clear characteristic of substrate at the substrate surface more than 100 ℃, adopts annular polyimide film heater to heat the glass of observation window, makes its temperature keep more than 100 ℃ to prevent that the observation window from being contaminated by the Parylene rete.
The utility model provides a technical scheme that technical problem adopted as follows:
an anti-pollution observation window used by a Parylene deposition chamber comprises an observation window flange arranged on the side wall of a vacuum deposition chamber, and further comprises a sealing rubber ring, an observation window glass, an annular polyimide film heater, a film type platinum resistor, a heat preservation compression ring, a gland flange, a pre-tightening screw and a temperature control module;
the observation window flange is provided with a dovetail rubber ring groove for accommodating the sealing rubber ring and a screw hole matched with the pre-tightening screw; the inner side of the observation window glass is tightly contacted with the sealing rubber ring, the outer side of the observation window glass is pasted with the annular polyimide film heater, and the film type platinum resistor is pasted at the edge of the outer side of the observation window glass; the heat-preservation compression ring is pressed on the outer edges of the annular polyimide film heater and the observation window glass, and the heat-preservation compression ring is provided with a notch which is superposed with the outlet positions of the annular polyimide film heater and the film type platinum resistor; the gland flange is pressed on the heat-preservation compression ring and is fixed with the observation window flange through the pre-tightening screw; the control lines of the annular polyimide film heater and the film type platinum resistor are respectively connected with the temperature control module, the temperature control module collects temperature data of the observation window glass through the film type platinum resistor to form closed-loop temperature control of the annular polyimide film heater, and the temperature of the observation window glass is maintained within a preset temperature range.
The utility model discloses following beneficial effect has:
the utility model discloses a paste annular polyimide film heater on observation window glass, can realize carrying out the effective accuse temperature more than 100 ℃ to observation window glass, thereby prevent that the observation window from being polluted by the Parylene rete of growth, Parylene coating deposit room observation window's cleanliness and high light transmissivity have been guaranteed, for carrying out optics observation and monitoring through optical window in the deposit room outside and providing probably, owing to left out after the coating film to dismantle and the artifical maintenance operation link of clearing up the internal surface of observation window, therefore later maintenance is convenient, and this observation window simple structure, low cost, annular polyimide film heater has the laminating degree good simultaneously, the heating area is big and the stable characteristics of accuse temperature, but high temperature 150 ℃ lower long-term work.
Drawings
FIG. 1 is an exploded view of an anti-contamination viewing window for a Parylene deposition chamber according to the present invention;
FIG. 2 is a cross-sectional view of the contamination prevention observation window shown in FIG. 1;
FIG. 3 is a schematic structural view of the thermal compression ring shown in FIGS. 1 and 2;
in the figure: 1. the device comprises an observation window flange 2, a sealing rubber ring 3, observation window glass 4, an annular polyimide film heater 5, a film type platinum resistor 6, a heat preservation compression ring 7, a gland flange 8 and a pre-tightening screw.
Detailed Description
The technical solution of the present invention will be described in detail with reference to the accompanying drawings and preferred embodiments.
The utility model provides an anti-pollution observation window that Parylene deposition chamber used, as shown in fig. 1 and fig. 2, this anti-pollution observation window still includes sealed rubber ring 2, observation window glass 3, annular polyimide film heater 4, film type platinum resistance 5, heat preservation clamping ring 6, gland flange 7, pretension screw 8 and temperature control module including setting up observation window flange 1 on vacuum deposition chamber's lateral wall.
Specifically, as shown in fig. 1 and 2, a dovetail-shaped rubber ring groove is formed in the observation window flange 1, the sealing rubber ring 3 is installed in the dovetail-shaped rubber ring groove, the dovetail-shaped rubber ring groove can prevent the rubber ring from falling off, so that subsequent installation of glass is facilitated, and screw holes in threaded fit with the pre-tightening screws 8 are uniformly distributed around the observation window flange 1.
The inner side of the observation window glass 3 is closely contacted with the sealing rubber ring 2, the annular polyimide film heater 4 which can meet the working temperature of 150 ℃ and is provided with a rubber surface (such as 3M7431D rubber) is adhered to the outer side of the observation window glass 3, the corresponding glass area in the middle of the ring is an effective light hole, and meanwhile, in order to ensure that the middle of the observation window has enough observation light holes, the annular polyimide film heater 4 is designed to occupy 50 percent of the total area of the observation window glass 3. The observation window glass 3 is made of high-temperature-resistant quartz glass which can resist the temperature of more than 350 ℃, has the thermal conductivity coefficient of 0.00367 Cal/(cm.s.. degree.C) at the temperature of 100 ℃, has good thermal conductivity and can be heated to the preset temperature (more than 100 ℃) under the heating action of the annular polyimide film heater 4. Because annular polyimide film heater 4 can be with observation window glass 3 seamless laminating, consequently the laminating degree is good, simultaneously because annular polyimide film heater 4 and 3 face contactions of observation window glass, heating more even than conventional heater strip etc. heating, heating efficiency is higher, heating area is bigger, the accuse temperature is stable to annular polyimide film can be high temperature resistant more than 280 ℃, consequently can work for a long time under high temperature 150 ℃.
The thin-film platinum resistor 5 is adhesively attached to the outer edge of the observation window 3, for example by GD414, in order to record the temperature of the observation window 3 in real time. Alternatively, the thin film type platinum resistor 5 employs a thin film type Pt100 platinum resistor to achieve more accurate temperature measurement of the observation window glass 3.
The heat-preservation compression ring 6 is pressed on the outer edges of the annular polyimide film heater 4 and the observation window glass 3, a notch is arranged on the heat-preservation compression ring 6, the width of the notch is 4mm-5mm, and during installation, the notch is superposed with the outgoing line positions of the annular polyimide film heater 4 and the film type platinum resistor 5.
As shown in fig. 3, the heat-insulating press ring 6 is a protection ring with steps, the inner surface of the protection ring is in contact with the annular polyimide film heater 4, and the steps are covered on the outer edge of the periphery of the observation window glass 3, so that the effects of buffering protection and heat insulation on the observation window glass 3 are achieved.
The gland flange 7 is pressed on the heat-preservation compression ring 6 and is pre-tightened through the pre-tightening screw 8 and the screw hole in the observation window flange 1, so that the gland flange 7 is fixed with the observation window flange 1, and the sealing between the sealing rubber ring 2 and the observation window glass 3 is realized under the pressure of the gland flange 7.
The control lines of the annular polyimide film heater 4 and the film type platinum resistor 5 are respectively connected with the temperature control module, the temperature control module collects temperature data of the observation window glass 3 through the film type platinum resistor 5 to form closed-loop temperature control on the annular polyimide film heater 4, so that the temperature of the observation window glass 3 is maintained in a preset temperature range (for example, 100-120 ℃), the effective temperature control on the observation window glass 3 is realized, a film layer is prevented from being generated on the surface of glass in a deposition chamber, the observation window is free of film layer pollution in the Parylene vacuum coating deposition process, and good light transmission is kept. The utility model provides a temperature control module can adopt controlling means such as temperature controller among the prior art (abbreviate for the temperature controller) to realize, and here is no longer repeated.
Optionally, the utility model discloses the material of well sealing rubber ring 2 and heat preservation clamping ring 6 is polytetrafluoroethylene, has the advantage that heat resistance is good, can satisfy the temperature requirement of observation window glass 3 and annular polyimide film heater 4.
The utility model discloses a paste annular polyimide film heater on observation window glass, can realize carrying out the effective accuse temperature more than 100 ℃ to observation window glass, thereby prevent that the observation window from being polluted by the Parylene rete of growth, Parylene coating deposit room observation window's cleanliness and high light transmissivity have been guaranteed, for carrying out optics observation and monitoring through optical window in the deposit room outside and providing probably, owing to left out after the coating film to dismantle and the artifical maintenance operation link of clearing up the internal surface of observation window, therefore later maintenance is convenient, and this observation window simple structure, low cost, annular polyimide film heater has the laminating degree good simultaneously, the heating area is big and the stable characteristics of accuse temperature, but high temperature 150 ℃ lower long-term work.
The technical features of the embodiments described above may be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the embodiments described above are not described, but should be considered as being within the scope of the present specification as long as there is no contradiction between the combinations of the technical features.
The above-mentioned embodiments only represent some embodiments of the present invention, and the description thereof is specific and detailed, but not to be construed as limiting the scope of the present invention. It should be noted that, for those skilled in the art, without departing from the spirit of the present invention, several variations and modifications can be made, which are within the scope of the present invention. Therefore, the protection scope of the present invention should be subject to the appended claims.
Claims (10)
1. An anti-pollution observation window used by a Parylene deposition chamber is characterized by comprising an observation window flange (1) arranged on the side wall of a vacuum deposition chamber, a sealing rubber ring (2), an observation window glass (3), an annular polyimide film heater (4), a film type platinum resistor (5), a heat preservation compression ring (6), a gland flange (7), a pre-tightening screw (8) and a temperature control module;
the observation window flange (1) is provided with a dovetail-shaped rubber ring groove for accommodating the sealing rubber ring (2) and a screw hole matched with the pre-tightening screw (8); the inner side of the observation window glass (3) is tightly contacted with the sealing rubber ring (2), the outer side of the observation window glass (3) is pasted with the annular polyimide film heater (4), and the film type platinum resistor (5) is pasted at the edge of the outer side of the observation window glass (3); the heat-preservation compression ring (6) is pressed on the outer edges of the annular polyimide film heater (4) and the observation window glass (3), and the heat-preservation compression ring (6) is provided with a notch which is superposed with the outlet positions of the annular polyimide film heater (4) and the film type platinum resistor (5); the gland flange (7) is pressed on the heat-preservation compression ring (6) and is fixed with the observation window flange (1) through the pre-tightening screw (8); the control lines of the annular polyimide film heater (4) and the film type platinum resistor (5) are respectively connected with the temperature control module, the temperature control module collects temperature data of the observation window glass (3) through the film type platinum resistor (5) to form closed-loop temperature control on the annular polyimide film heater (4), and the temperature of the observation window glass (3) is maintained within a preset temperature range.
2. A contamination prevention viewport for a Parylene deposition chamber, in accordance with claim 1, wherein the annular polyimide film heater (4) has an area of 50% of the total area of the viewport (3).
3. A contamination prevention observation window for Parylene deposition chamber according to claim 1, wherein the ring-shaped polyimide film heater (4) is adhered to the outer side of the observation window glass (3) by 3M7431D glue.
4. The contamination prevention sight window for Parylene deposition chamber as claimed in claim 1, wherein the heat retaining ring (6) is shaped as a stepped retainer, the inner surface of the retainer contacting the annular polyimide film heater (4), the step wrapping the outer edge of the sight glass (3).
5. The contamination prevention viewport for a Parylene deposition chamber of claim 1, wherein the thin film type platinum resistor (5) is a thin film type Pt100 platinum resistor.
6. The antipollution viewing window for a Parylene deposition chamber according to claim 1, wherein the thin film platinum resistor (5) is glued by GD414 at the edge of the outside of the viewing window glass (3).
7. A contamination window for use in a Parylene deposition chamber as claimed in claim 1, wherein the width of the gap is 4mm-5 mm.
8. The contamination window of claim 1, wherein the predetermined temperature range is 100 ℃ to 120 ℃.
9. The anti-contamination viewing window for Parylene deposition chamber of claim 1, wherein the sealing rubber ring (2) and the thermal compression ring (6) are made of teflon.
10. The contamination prevention viewport for a Parylene deposition chamber as claimed in claim 1, wherein the viewport (3) is made of quartz and has a thermal conductivity of 0.00367Cal/(cm. s. degree. C) at 100 ℃.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122302030.6U CN216006010U (en) | 2021-09-23 | 2021-09-23 | Anti-pollution observation window used for Parylene deposition chamber |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122302030.6U CN216006010U (en) | 2021-09-23 | 2021-09-23 | Anti-pollution observation window used for Parylene deposition chamber |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216006010U true CN216006010U (en) | 2022-03-11 |
Family
ID=80530421
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202122302030.6U Active CN216006010U (en) | 2021-09-23 | 2021-09-23 | Anti-pollution observation window used for Parylene deposition chamber |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN216006010U (en) |
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2021
- 2021-09-23 CN CN202122302030.6U patent/CN216006010U/en active Active
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20231110 Address after: Room 405, Building 1, 3E Industrial Park, No. 18 Chunyao Road, Caohu Street, Suzhou City, Jiangsu Province, 215002 Patentee after: Suzhou Hangdong Vacuum Technology Co.,Ltd. Address before: 102400 1203, 12 / F, building 1, courtyard 6, Funing street, Fangshan District, Beijing Patentee before: Beijing Shengtai Oriental Technology Co.,Ltd. Patentee before: Qinhuangdao Jinghe Intelligent Equipment Co.,Ltd. |