CN215974576U - Quartz boat cleaning carrier with inclination function - Google Patents
Quartz boat cleaning carrier with inclination function Download PDFInfo
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- CN215974576U CN215974576U CN202121412486.1U CN202121412486U CN215974576U CN 215974576 U CN215974576 U CN 215974576U CN 202121412486 U CN202121412486 U CN 202121412486U CN 215974576 U CN215974576 U CN 215974576U
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- portal frame
- horizontal displacement
- movable portal
- vertical
- quartz boat
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Abstract
The utility model discloses a quartz boat cleaning carrier with an inclination function, which comprises two guide rail seats, a movable portal frame, a horizontal displacement guide mechanism, a horizontal displacement driving mechanism, a vertical displacement driving mechanism and a lifting appliance assembly, wherein the two guide rail seats are fixed on the top of a cleaning box in parallel, the two end parts of the bottom side of the movable portal frame are respectively in sliding connection with the corresponding guide rail seats through the horizontal displacement guide mechanism, the horizontal displacement driving mechanism capable of driving the movable portal frame to horizontally displace is installed at the bottom of the movable portal frame, the two vertical displacement driving mechanisms capable of independently acting are symmetrically arranged on the movable portal frame, and the lifting appliance assembly is installed on the movable portal frame through the two vertical lifting mechanisms. The cleaning carrier has a reasonable structural design, has an inclined function, can quickly discharge redundant residual liquid in the quartz boat, is convenient for subsequent treatment, and saves the consumption of flushing water resources.
Description
Technical Field
The utility model relates to the technical field of semiconductor cleaning equipment, in particular to a quartz boat cleaning carrier with an inclination function.
Background
The silicon chip diffusion process is to insert the silicon chip on a quartz boat, then to place the quartz boat and the silicon chip into a quartz tube and a high temperature diffusion furnace, then to introduce a certain amount of gas containing diffusion source at the tail of the furnace tube, and to perform chemical reaction with the silicon chip by the diffusion source gas under the high temperature condition, to complete the diffusion process. After each diffusion process, a certain amount of diffused particles remain on the surface of the quartz boat, and the quartz boat is directly contacted with the silicon wafer, so the cleanliness of the surface of the quartz boat directly influences the quality of the whole diffusion process.
When the quartz boat is cleaned, cleaning liquid is mostly poured into the cleaning groove, then the quartz boat is placed into the cleaning groove, and the quartz boat is cleaned in a soaking mode. The quartz boat cleaning equipment needs to use a quartz boat cleaning carrier to carry and convey the quartz boat.
The traditional quartz boat cleaning carrier has the defects in the use process, and firstly, the traditional quartz boat cleaning carrier cannot drive a quartz boat to perform stable displacement and is poor in safety; and secondly, the quartz boat does not have the inclination function, so that the cleaned quartz boat stores cleaning liquid. Therefore, there is a need for improved and optimized cleaning of conventional quartz boats.
SUMMERY OF THE UTILITY MODEL
The present invention is directed to overcome the above problems in the prior art, and provides a quartz boat cleaning carrier with a tilting function.
In order to achieve the technical purpose and achieve the technical effect, the utility model is realized by the following technical scheme:
the utility model provides a quartz boat washs carrier with slope function, this washing carrier include guide rail seat, movable portal frame, horizontal displacement guiding mechanism, horizontal displacement actuating mechanism, vertical displacement actuating mechanism and hoist subassembly, the guide rail seat is total two and parallel are fixed in the top of wasing the case, the bottom side both ends of movable portal frame carry out sliding connection through horizontal displacement guiding mechanism with the guide rail seat that corresponds respectively, the horizontal displacement actuating mechanism that can drive it and carry out horizontal displacement is installed to the bottom of movable portal frame, the symmetry is equipped with two vertical displacement actuating mechanisms that can independent action on the movable portal frame, the hoist subassembly is installed jointly through two vertical elevating system to movable portal frame.
Further, in the above quartz boat cleaning carrier with tilting function, the horizontal displacement guide mechanism is a linear guide rail pair composed of a rail and a slider, the slider is fixed at the bottom end of the movable portal frame, and the rail is fixed on the guide rail seat.
Further, in the quartz boat cleaning carrier with the tilting function, the horizontal displacement driving mechanism comprises a horizontal displacement driving motor, a horizontal displacement driving shaft, a driving gear and a rack, an output shaft of the horizontal displacement driving motor is in transmission connection with the horizontal displacement driving shaft through a belt pulley, the horizontal displacement driving shaft is rotatably supported by a movable portal frame, the rack is fixed on the inner side of the guide rail seat along the length direction of the guide rail seat, and the driving gear meshed with the rack is fixed on a shaft body of the horizontal displacement driving shaft.
Further, in the quartz boat cleaning carrier with the tilting function, the vertical displacement driving mechanism comprises a vertical displacement driving motor, a steering gear set, a driving screw rod, a driven screw rod sleeve, a mounting plate, a guide rod and a guide sleeve, the vertical displacement driving motor is fixed on the outer side of a top plate of the movable portal frame, the driving screw rod is arranged along the vertical direction and is rotatably supported by the movable portal frame, guide rods are symmetrically fixed on the movable portal frame at two sides of the driving screw rod, an output shaft of the vertical displacement driving motor is in transmission connection with the driving screw rod through a steering gear set, a driven screw rod sleeve engaged with the driving screw rod is sleeved on the outer side of the driving screw rod, a guide sleeve capable of sliding along the axial direction of the guide rod is sleeved on the guide rod, the driven screw rod sleeve and the guide sleeve are fixed on the inner side of the mounting plate together, and the mounting frame convenient for fixedly mounting the lifting appliance assembly is fixed on the outer side of the mounting plate.
Further, among the above-mentioned quartz boat cleaning carrier that has the slope function, the hoist subassembly includes vertical jib, connector, horizontal jib and lifting hook, the top and the installing frame of vertical jib are fixed, and the bottom is connected with horizontal jib through the connector, install a plurality of lifting hooks on the horizontal jib.
Furthermore, in the quartz boat cleaning carrier with the tilting function, a clamping groove convenient for clamping the transverse suspender is formed in the bottom end of the connector, and a moving space convenient for the transverse suspender to tilt is reserved above the clamping groove clamped in the transverse suspender; the connector is located draw-in groove top department and wears to be equipped with first bolt, the matched with circle is perforated in the bottom of vertical jib, the connector is located draw-in groove department and wears to be equipped with the second bolt, set up the waist shape perforation that is convenient for it to make the slope action on the horizontal jib.
The utility model has the beneficial effects that:
the cleaning carrier has a reasonable structural design, has an inclined function, can quickly discharge redundant residual liquid in the quartz boat, is convenient for subsequent treatment, and saves the consumption of flushing water resources; the stable carrying operation of quartz boat workpieces can be completed, the problems of fragility and unsafety are avoided, and a great deal of waste of time and labor is avoided.
Of course, it is not necessary for any one product that embodies the utility model to achieve all of the above advantages simultaneously.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to the drawings without creative efforts.
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a schematic structural view of the present invention with spreader components omitted;
FIG. 3 is a schematic structural diagram of a connector according to the present invention;
FIG. 4 is a partial schematic view of the transverse hanger bar of the present invention;
in the drawings, the components represented by the respective reference numerals are listed below:
6-cleaning carrier, 1-guide rail seat, 2-movable portal frame, 3-vertical displacement driving motor, 4-steering gear set, 5-driving screw rod, 6-driven screw rod sleeve, 7-mounting plate, 8-guide rod, 9-horizontal displacement driving motor, 10-horizontal displacement driving shaft, 11-driving gear, 12-rack, 13-auxiliary guide plate, 14-guide seat, 15-slide block, 16-rail bar, 17-vertical suspender, 18-connector, 18 a-clamping groove, 18 b-first bolt, 18 c-second bolt, 19-transverse suspender, 19 a-kidney-shaped perforation, 20-suspender and 7-quartz boat workpiece.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
A quartz boat cleaning carrier with an inclination function is shown in figures 1-4 and comprises a guide rail seat 1, a movable portal frame 2, a horizontal displacement guide mechanism, a horizontal displacement driving mechanism, a vertical displacement driving mechanism and a lifting appliance assembly. The guide rail seats 1 are two in total and are fixed on the top of the cleaning box 1 in parallel, two end parts of the bottom side of the movable portal frame 2 are in sliding connection with the corresponding guide rail seats through a horizontal displacement guide mechanism respectively, and the driving box 2 mainly provides safety protection for the movable portal frame 2. The bottom of movable portal frame 2 is installed and is driven its horizontal displacement actuating mechanism that carries out horizontal displacement, and movable portal frame 2 goes up the symmetry and is equipped with two vertical displacement actuating mechanisms that can independent action, and movable portal frame 2 installs the hoist subassembly through two vertical elevating system jointly.
In this embodiment, the horizontal displacement guide mechanism is a linear guide pair composed of a rail 16 and a slider 15, the slider 15 is fixed to the bottom end of the movable portal frame 2, and the rail 16 is fixed to the guide rail base 1. In order to further improve the guiding effect, an auxiliary guide plate 13 is further fixed on the movable portal frame 2, a guide seat 14 is fixed on the guide rail seat 1, and the auxiliary guide plate 13 is slidably connected with the guide seat 14.
In this embodiment, the horizontal displacement driving mechanism includes a horizontal displacement driving motor 9, a horizontal displacement driving shaft 10, a driving gear 11 and a rack 12, an output shaft of the horizontal displacement driving motor 9 is in transmission connection with the horizontal displacement driving shaft 10 through a belt pulley, the horizontal displacement driving shaft 10 is rotatably supported by the movable gantry 2, the rack 12 is fixed on the inner side of the guide rail seat 1 along the length direction thereof, and the driving gear 11 meshed with the rack 12 is fixed on a shaft body of the horizontal displacement driving shaft 10.
In this embodiment, vertical displacement actuating mechanism includes vertical displacement driving motor 3, steering gear group 4, drive lead screw 5, driven lead screw cover 6, mounting panel 7, guide bar 8 and uide bushing, and vertical displacement driving motor 3 is fixed in the roof outside of movable portal frame 2, and drive lead screw 5 sets up and provides the rotation support by movable portal frame 2 along vertical direction, and movable portal frame 2 is located the bilateral symmetry of drive lead screw 5 and is fixed with guide bar 8. An output shaft of the vertical displacement driving motor 3 is in transmission connection with a driving screw rod 5 through a steering gear set 4, a driven screw rod sleeve 6 meshed with the driving screw rod 5 is sleeved on the outer side of the driving screw rod 5, and a guide sleeve capable of sliding along the axial direction of the guide rod 8 is sleeved on the guide rod. The driven screw rod sleeve 6 and the guide sleeve are jointly fixed on the inner side of the mounting plate 7, and the mounting frame convenient for fixedly mounting the lifting appliance assembly is fixed on the outer side of the mounting plate 7.
In this embodiment, the hoist subassembly includes vertical jib 17, connector 18, horizontal jib 19 and lifting hook 20, and vertical jib 17's top is fixed with the installing frame, and the bottom is connected with horizontal jib 19 through connector 18, installs a plurality of lifting hooks 20 on the horizontal jib 19.
In this embodiment, as shown in fig. 3 and 4, a clamping groove 18a for conveniently clamping the transverse suspension rod 19 is formed at the bottom end of the connecting head 18, and a movable space for facilitating the tilting movement of the transverse suspension rod 19 is reserved above the clamping groove 18a after the clamping of the transverse suspension rod 19. The first bolt 18b is arranged at the entity position above the clamping groove in a penetrating way on the connector 18, and the matched round through hole is arranged at the bottom end of the vertical suspender 17. The second bolt 18c is inserted into the joint 18a at the slot 18a, and a kidney-shaped through hole 19a for facilitating the tilting of the horizontal suspender 19 is formed on the horizontal suspender.
One specific application of this embodiment is:
after the quartz boat workpieces 7 are hung on the lifting appliance component, the movable portal frame 2 moves to the position above the corresponding groove along the X axis to drive the Y axis A side to move downwards, so that the quartz boat workpieces 7 are inclined; the Y-axis moves downwards on both sides, the Y-axis A side stops when reaching the position, the B side continues moving, and the reciprocating motion is carried out until both sides reach the designated position, and at the moment, the quartz boat workpiece 7 is completely immersed in the solution; starting a liquid circulation system to ensure that the quartz boat workpieces 7 are fully contacted with the solution; after cleaning, moving the Y-axis B side upwards for a certain distance to incline the quartz boat workpiece; and (3) slowly moving the two sides of the Y axis upwards at the same time, stopping when the side B of the Y axis reaches the position, continuously moving the side A, and reciprocating until the side A reaches the specified suspension position, wherein the quartz boat workpieces 7 are completely exposed.
The preferred embodiments of the utility model disclosed above are intended to be illustrative only. The preferred embodiments are not exhaustive and do not limit the utility model to the precise embodiments. Obviously, many modifications and variations are possible in light of the above teaching. The embodiments were chosen and described in order to best explain the principles of the utility model and the practical application, to thereby enable others skilled in the art to best utilize the utility model. The utility model is limited only by the claims and their full scope and equivalents.
Claims (6)
1. The utility model provides a quartz boat washs carrier with slope function which characterized in that: this wash carrier includes guide rail seat, movable portal frame, horizontal displacement guiding mechanism, horizontal displacement actuating mechanism, vertical displacement actuating mechanism and hoist subassembly, the guide rail seat is total two and parallel fixation in the top of wasing the case, the bottom side both ends of movable portal frame carry out sliding connection through horizontal displacement guiding mechanism with the guide rail seat that corresponds respectively, the horizontal displacement actuating mechanism that can drive it and carry out horizontal displacement is installed to the bottom of movable portal frame, the symmetry is equipped with two vertical displacement actuating mechanisms that can the independent action on the movable portal frame, the hoist subassembly is installed jointly through two vertical elevating system to movable portal frame.
2. The quartz boat cleaning carrier with tilting function according to claim 1, wherein: the horizontal displacement guide mechanism is a linear guide rail pair consisting of a rail bar and a slide block, the slide block is fixed at the bottom end part of the movable portal frame, and the rail bar is fixed on a guide rail seat.
3. The quartz boat cleaning carrier with tilting function according to claim 1, wherein: horizontal displacement actuating mechanism includes horizontal displacement driving motor, horizontal displacement drive shaft, drive gear and rack, horizontal displacement driving motor's output shaft carries out the transmission through belt pulley and horizontal displacement drive shaft and is connected, the horizontal displacement drive shaft is provided to rotate by movable portal frame and supports, the inboard of guide rail seat is fixed with the rack along its length direction, the axis body of horizontal displacement drive shaft is fixed with the drive gear with rack toothing.
4. The quartz boat cleaning carrier with tilting function according to claim 1, wherein: the vertical displacement driving mechanism comprises a vertical displacement driving motor, a steering gear set, a driving screw rod, a driven screw rod sleeve, a mounting plate, a guide rod and a guide sleeve, the vertical displacement driving motor is fixed on the outer side of a top plate of the movable portal frame, the driving screw rod is arranged along the vertical direction and is rotatably supported by the movable portal frame, guide rods are symmetrically fixed on the movable portal frame at two sides of the driving screw rod, an output shaft of the vertical displacement driving motor is in transmission connection with the driving screw rod through a steering gear set, a driven screw rod sleeve engaged with the driving screw rod is sleeved on the outer side of the driving screw rod, a guide sleeve capable of sliding along the axial direction of the guide rod is sleeved on the guide rod, the driven screw rod sleeve and the guide sleeve are fixed on the inner side of the mounting plate together, and the mounting frame convenient for fixedly mounting the lifting appliance assembly is fixed on the outer side of the mounting plate.
5. The quartz boat cleaning carrier with tilting function according to claim 4, wherein: the lifting appliance assembly comprises a vertical lifting rod, a connector, a transverse lifting rod and a lifting hook, wherein the top end of the vertical lifting rod is fixed with the mounting frame, the bottom end of the vertical lifting rod is connected with the transverse lifting rod through the connector, and the transverse lifting rod is provided with the lifting hook.
6. The quartz boat cleaning carrier with tilting function according to claim 5, wherein: a clamping groove convenient to clamp into the transverse suspender is formed in the bottom end of the connector, and a movable space convenient for the transverse suspender to tilt is reserved above the clamping groove clamped into the transverse suspender; the connector is located draw-in groove top department and wears to be equipped with first bolt, the matched with circle is perforated in the bottom of vertical jib, the connector is located draw-in groove department and wears to be equipped with the second bolt, set up the waist shape perforation that is convenient for it to make the slope action on the horizontal jib.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121412486.1U CN215974576U (en) | 2021-06-24 | 2021-06-24 | Quartz boat cleaning carrier with inclination function |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121412486.1U CN215974576U (en) | 2021-06-24 | 2021-06-24 | Quartz boat cleaning carrier with inclination function |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN215974576U true CN215974576U (en) | 2022-03-08 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202121412486.1U Active CN215974576U (en) | 2021-06-24 | 2021-06-24 | Quartz boat cleaning carrier with inclination function |
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| Country | Link |
|---|---|
| CN (1) | CN215974576U (en) |
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2021
- 2021-06-24 CN CN202121412486.1U patent/CN215974576U/en active Active
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