CN215965424U

CN215965424U - Sliding semi-closed cleaning device

Info

Publication number: CN215965424U
Application number: CN202120708163.0U
Authority: CN
Inventors: 周夫之; 王羿; 何萍萍; 叶明汉
Original assignee: Shanghai Ruidu Photoelectric Technology Co ltd
Current assignee: Shanghai Ruidu Photoelectric Technology Co ltd
Priority date: 2021-04-08
Filing date: 2021-04-08
Publication date: 2022-03-08
Anticipated expiration: 2031-04-08

Abstract

The utility model relates to the technical field of cleaning devices, in particular to a sliding type semi-closed cleaning device, which comprises: a cleaning mechanism; the protective mechanism is arranged along the circumferential direction of the cleaning mechanism, a circumferential air pipe is arranged on the inner side of the protective mechanism, and the air outlet direction of the circumferential air pipe is obliquely directed to the protective mechanism from top to bottom; and the bearing mechanism is provided with a bearing position, the bottom of the bearing position is provided with an inclined liquid discharge surface, and the bottom of the liquid discharge surface is provided with a liquid discharge hole. Compared with the prior art, the utility model has the advantages that: the cleaning machine can clean objects to be cleaned on the station, and can realize the functions of air showering and air drying; the bearing mechanism has the function of automatically adsorbing the object to be cleaned, and can realize the absolute fixation of the object to be cleaned; the cleaning solution can be prevented from polluting other stations and equipment; the waste liquid can be rapidly recovered, and can be rapidly pumped away to prevent accumulation; and can take out residual gas, reduce the influence to the external environment, prevent that waste liquid steam from polluting operational environment.

Description

Sliding semi-closed cleaning device

Technical Field

The utility model relates to the technical field of cleaning devices, in particular to a sliding type semi-closed cleaning device.

Background

Before the relevant operations, such as plating and etching, are performed on the substrate, the substrate needs to be cleaned, because the degree of cleanliness of the substrate itself has a crucial influence on the subsequent operations and the quality of the product after the operations are completed. The existing cleaning device has the liquid remaining on the bearing mechanism for bearing the substrate after cleaning the substrate, and can also generate steam gas in the cleaning process, the residual liquid and the steam gas can pollute the working environment, and the residual liquid and the gas generated in the cleaning process can be discharged at will to further pollute the external environment.

Meanwhile, in the cleaning process, the high-pressure cleaning liquid impacts the base material, so that the base material is displaced and even falls off from the bearing mechanism.

SUMMERY OF THE UTILITY MODEL

The utility model aims to solve the defects of the prior art, provides a sliding type semi-closed cleaning device, and solves at least one of the following technical problems: the residual liquid after cleaning is accumulated at the lower side of the object to be cleaned and is difficult to recover immediately; the pollution to the working environment after cleaning; the discharge of waste liquid and waste gas pollutes the external environment; the object to be cleaned is difficult to fix in the cleaning process.

In order to achieve the above object, a sliding semi-enclosed cleaning device is designed, comprising: a cleaning mechanism; the protective mechanism is arranged along the circumferential direction of the cleaning mechanism, a circumferential air pipe is arranged on the inner side of the protective mechanism, and the air outlet direction of the circumferential air pipe is obliquely directed to the protective mechanism from top to bottom; the bearing mechanism is provided with a bearing position for bearing an object to be cleaned, the bottom of the bearing position is provided with an inclined liquid discharge surface, and the bottom of the liquid discharge surface is provided with a liquid discharge hole.

The utility model also has the following preferable technical scheme:

the cleaning mechanism comprises a base, and the base is provided with a wind knife assembly and a cleaning spray pipe assembly.

The cleaning nozzle assembly comprises: a plurality of liquid path pipes and nozzles; the liquid pipeline mounting hole is positioned on the base and corresponds to the liquid pipeline; and the liquid pipeline clamp structure is positioned on the lower side of the base and is provided with a liquid pipeline pipe positioning hole corresponding to the liquid pipeline pipe mounting hole.

The inner section of the hydraulic pipeline clamp structure gradually shrinks from top to bottom.

The cleaning device also comprises an air suction pipeline communicated to the inside of the protective cover.

The bearing position is internally provided with a plurality of supporting platforms used for bearing the objects to be cleaned, and the supporting platforms are provided with flanges corresponding to the edges of the objects to be cleaned.

The air knife component is provided with a flat air outlet.

The bearing position is internally provided with a negative pressure adsorption component for fixing the object to be cleaned.

The bottom of bearing the position be and leak hopper-shaped, the outage be located the bottom middle part that bears the position that leaks hopper-shaped.

The cleaning device also comprises a mobile driving mechanism, and the mobile driving mechanism is connected with the cleaning mechanism.

Beneficial effects of the utility model

Compared with the prior art, the utility model has simple and feasible combination structure, easy installation and disassembly and the advantages that: the cleaning machine can clean objects to be cleaned on the station, and can realize the functions of air showering and air drying; the bearing mechanism has the function of automatically adsorbing the object to be cleaned, and can realize the absolute fixation of the object to be cleaned; the cleaning solution can be prevented from polluting other stations and equipment; the waste liquid can be quickly recovered, and can be quickly pumped away, so that the waste liquid is prevented from being accumulated on the bearing mechanism; and can take out residual gas, reduce the influence to the external environment, prevent that waste liquid steam from polluting operational environment.

Drawings

Fig. 1 schematically shows a front view of a slip-type semi-closed washing device of the utility model.

Fig. 2 schematically shows a top view of the slip-type semi-closed cleaning device of the present invention.

Fig. 3 schematically shows the structure of the cleaning mechanism of the present invention.

Fig. 4 shows a schematic illustration of a carrying position of the carrying mechanism according to the utility model.

Fig. 5 schematically shows a cross-sectional view of a slip-type semi-closed cleaning device of the present invention.

Fig. 6 schematically shows an exploded view of the slip-type semi-closed cleaning device of the present invention.

In the figure: 1. the cleaning mechanism 11, the first connecting piece 12, the second connecting piece 13, the liquid path pipe clamp structure 14, the air knife assembly 15, the air suction hole 16, the connecting piece mounting hole 17, the liquid path pipe mounting hole 18, the clamping piece mounting hole 19, the liquid path pipe positioning hole 2, the protection mechanism 21, the circumferential air pipe 22, the air outlet 23 of the circumferential air pipe, the guide rail 24, the glass cover 3, the bearing mechanism 31, the liquid discharge hole 32, the support table 33, the negative pressure adsorption hole 34, the groove 35, the flange 36, the liquid discharge surface 41, the connecting bolt 42 and the connecting block.

Detailed Description

The construction and principles of such a device will be apparent to those skilled in the art from the following further description of the utility model taken in conjunction with the accompanying drawings. It should be understood that the specific embodiments described herein are merely illustrative of the utility model and are not intended to limit the utility model.

The embodiment provides a sliding type semi-closed cleaning device which comprises a moving driving mechanism, a cleaning mechanism 1, a protection mechanism 2 and a bearing mechanism 3, wherein the cleaning mechanism 1 is connected with the moving driving mechanism, and the moving driving mechanism can drive the cleaning mechanism 1 to move; the protection mechanism 2 comprises a protection cover, the protection cover is arranged along the circumferential direction of the cleaning mechanism 1, a circumferential air pipe 21 is arranged on the inner side of the protection cover, and the air outlet direction of the circumferential air pipe 21 is the direction which is obliquely directed to the protection cover from top to bottom; the bearing mechanism 3 is provided with a bearing position for bearing the object to be cleaned, the bottom of the bearing position is provided with an inclined liquid discharge surface 36, and the bottom of the liquid discharge surface 36 is provided with a liquid discharge hole 31.

During the use, drive wiper mechanism 1 and protection machanism 2 removal through removal actuating mechanism, through wiper mechanism 1 wash the operation, through the protection casing restriction washing liquid and the circulation scope of the gas that produces in the cleaning process, sweep the washing liquid on the protection casing inner wall to load-bearing mechanism 3 through circumference tuber pipe 21, bear the weight of the thing of waiting to wash through load-bearing mechanism 3 to collect the washing liquid through drain level 36 after the discharge of flowing back hole 31 discharge the washing liquid.

In some embodiments, the movement driving mechanism is a mechanism capable of realizing multi-directional displacement, such as a multi-axis manipulator, or a mechanism capable of realizing unidirectional movement, such as a linear moving guide rail 23, so that after the movement driving mechanism is connected with the cleaning mechanism 1, the movement driving mechanism can drive the cleaning mechanism 1 to move.

In some embodiments, referring to fig. 1, the cleaning mechanism 1 includes a first connecting member 11 and a second connecting member 12 symmetrically disposed at left and right sides, the first connecting member 11 and the second connecting member 12 are connected to the movement driving mechanism, and a base is connected between the first connecting member 11 and the second connecting member 12, and the base is provided with a wind knife assembly 14 and a cleaning nozzle assembly.

The air knife assembly 14 includes an air knife and an air pipe communicated with the air knife, the air pipe is used for connecting to structures such as a positive pressure pump, and the air knife is preferably provided with a flat air outlet.

The cleaning nozzle assembly comprises: a plurality of liquid path pipes and nozzles; a liquid pipeline mounting hole 17 positioned on the base, wherein the liquid pipeline mounting hole 17 corresponds to the liquid pipeline; and the liquid pipeline clamp structure 13 is positioned on the lower side of the base, and the liquid pipeline clamp structure 13 is provided with a liquid pipeline positioning hole 19 corresponding to the liquid pipeline mounting hole 17.

For example, as shown in fig. 2, 3 and 6, the base is provided with 6-way liquid pipeline mounting holes 17 and clamping piece mounting holes, the clamping piece mounting hole is used for being matched with a connecting block 42 to be connected with the liquid pipeline clamp structure 13, the inner section of the liquid pipeline clamp structure 13, i.e. the cross section of the inner part, gradually shrinks from top to bottom so as to accommodate and restrain the liquid path pipe, and the bottom of the liquid pipeline clamp structure 13 is also provided with 6-way liquid pipeline positioning holes 19, the figure formed by the 6-way liquid pipeline positioning holes 19 is similar to the figure formed by the 6-way liquid pipeline mounting holes 17, and the size of the figure formed by the 6-way liquid pipeline positioning hole 19 is smaller than that of the figure formed by the 6-way liquid pipeline mounting hole 17, the 6-way liquid pipeline and the nozzle sequentially pass through the 6-way liquid pipeline mounting hole 17 and the 6-way liquid pipeline positioning hole 19 and are fixed.

Therefore, through 6 liquid path pipes and nozzles, the corresponding solution is sprayed from the liquid supply system to the upper side of the bearing mechanism 3, and the whole horizontal movement of the cleaning mechanism 1 is driven by the movement driving mechanism, so that the comprehensive cleaning of each position of the surface of the object to be cleaned is realized. Then, can blow out great wind through the air knife under the effect of positive pressure pump to the horizontal migration of whole wiper mechanism 1 is cooperated, all residual liquid on the bottom plate all blows off and treats the thing upper surface of wasing in order to realize comprehensive air-dry function.

In a preferred embodiment, an air suction pipeline is further arranged in the protective cover and used for sucking the air-dried waste gas cleaned in the protective cover. For example, as shown in fig. 2, the base is further provided with an air suction hole 15, the air suction hole 15 is communicated with the space in the protective cover, the air suction hole 15 is connected to the exhaust gas treatment system through an air passage pipeline, and the air passage pipeline is connected to a negative pressure device such as an air suction pump, so that the exhaust gas generated in the local space after cleaning and air drying is quickly absorbed to the exhaust gas treatment system in a negative pressure manner, and the effect of reducing the pollution of the waste liquid steam to the working environment is achieved.

In some embodiments, the protection mechanism 2 employs a glass cover 24, the glass cover 24 is disposed on the circumference of the cleaning mechanism 1, for example, the glass cover 24 is connected to the circumference of the base of the cleaning mechanism 1 by a connecting bolt 41. Therefore, in the process of cleaning and air drying, the glass cover 24 can ensure that liquid cannot be blown away into the whole working environment or liquid drops can be blown onto other stations and the bottom plates between the stations, and cleaning liquid is prevented from polluting the other stations.

Preferably, as shown in fig. 4, a guide rail 23 is disposed on the carrying mechanism 3 along a direction of the linear movement of the glass cover 24, a length of the glass cover 24 in the direction of the linear movement is longer than a length of the guide rail 23, and the glass cover 24 can move along the guide rail 23 under the driving of the movement driving mechanism.

Meanwhile, the glass cover 24 is arranged to limit the flow range of the waste liquid, and the waste liquid generated in the cleaning process cannot flow out of the limit range of the glass cover 24, so that the waste liquid can be effectively collected by the bearing position of the lower bearing mechanism 3 and discharged from the liquid outlet.

However, during the washing and drying process, the waste liquid splashes on the inner wall of the glass cover 24, and the washing mechanism 1 and the glass cover 24 are lifted up to the waiting position without washing and drying. When waiting for the work station, there is a risk of dripping if there are too many liquid beads inside the glass cover 24, and there may be equipment such as a motor or the like not resistant to corrosion directly below it, which may cause a risk of serious damage to other components, so it is important to keep the inside clean.

Therefore, the circumferential air pipe 21 is arranged on the inner side of the glass cover 24 to blow the liquid drops from the glass cover 24 to the carrying position. In a preferred embodiment, an annular multi-channel air duct is disposed on the base of the cleaning mechanism corresponding to the inner side of the glass cover 24 and serves as the circumferential air duct 21, the annular multi-channel air duct is connected to a positive pressure pump and other devices to generate air outlet, and the air duct blows air from top to bottom, so that liquid beads hanging on the wall inside the glass cover 24 are blown onto the carrying mechanism 3, the inner wall of the glass cover 24 is kept clean, and pollution or damage to a substrate or other objects to be cleaned is prevented.

In some embodiments, a plurality of carrying positions for carrying the object to be cleaned are provided in the carrying mechanism 3, an inclined liquid discharge surface 36 is provided at the bottom of the carrying positions, and a liquid discharge hole 31 is provided at the bottom of the liquid discharge surface 36 for discharging the waste liquid.

For example, as shown in fig. 5, the bottom of the bearing position of the bearing mechanism 3 is funnel-shaped, the bottom end of the middle part of the bearing position is the lowest end of the whole funnel-shaped bearing position, the circumferential direction of the lowest end has the liquid discharge surface 36 inclined to the lowest end from top to bottom, and the liquid discharge hole 31 is located at the lowest end position of the funnel-shaped bearing position, namely, the position of the middle part of the bottom end.

In a preferred embodiment, the drainage hole 31 is connected to an external pressure generating assembly, such as a negative pressure pump, through a pipeline, so that a negative pressure is formed between the drainage hole 31 and the pipeline through the pressure generating assembly to pump out residual liquid in the bearing mechanism 3.

After the cleaning liquid flows from the substrate to the bottom plate of the loading position or from the glass cover 24 to the bottom plate, the cleaning liquid can be collected in the drain hole 31 because the bottom plate of the loading position has a drain surface 36 inclined toward the drain hole 31, and when the bottom plate of the loading position is funnel-shaped, the cleaning liquid is collected in the drain hole 31 at the middle position of the bottom end. Preferably, the negative pressure pump can quickly collect the waste liquid collected at the funnel of the bottom plate into the waste liquid bottle through the negative pressure pipeline. This process is not only taken away the waste liquid of funnel-shaped collection on the bottom plate to can also suck away the residual liquid on the bottom plate through the negative pressure, finally realize the bottom plate and do not have the state of residual liquid.

In some embodiments, a plurality of supporting platforms 32 for supporting the object to be cleaned are disposed in the supporting position of the supporting mechanism 3, and a rib 35 is disposed on the supporting platform 32 corresponding to the edge of the object to be cleaned. In a preferred embodiment, the support 32 is disposed at the edge of the object to be cleaned, for example, as shown in fig. 4 and 5, the support 32 is disposed at four corners of the object to be cleaned, a concave groove 34 is disposed on the support 32 along the four corners of the object to be cleaned, and an inner wall of the concave groove 34 is used as a retaining edge 35 for limiting the four corners of the object to be cleaned, so as to position the object to be cleaned.

Thereby, through four settings that are used for placing the branch platform 32 of waiting to wash the thing, guarantee that the thing of waiting to wash is not direct contact with the bottom that bears mechanism 3 to reduced the contact surface, be convenient for wait to wash the last unloading of thing, avoid can not totally will waiting to wash the solution treatment on thing surface clean at the dry in-process of washing. And the setting of flange 35 makes at the removal in-process of load bearing mechanism 3 or at the in-process that washs air-dry, and the thing that waits to wash can not the landing and then influence equipment normal work, has realized treating the physics of wasing the thing fixed and location.

In a preferred embodiment, a negative pressure adsorption component is further arranged in the bearing position and used for fixing the object to be cleaned. For example, as shown in fig. 4, a negative pressure adsorption hole 33 is formed in the downward-recessed groove 34, and the negative pressure adsorption hole 33 is connected to a negative pressure generating device, such as a pump, through an air passage, so that the object to be cleaned can be further fixed by the arrangement of the negative pressure adsorption assembly.

Claims

1. A sliding semi-enclosed cleaning device, comprising:

a cleaning mechanism;

the protective mechanism is arranged along the circumferential direction of the cleaning mechanism, a circumferential air pipe is arranged on the inner side of the protective mechanism, and the air outlet direction of the circumferential air pipe is obliquely directed to the protective mechanism from top to bottom;

the bearing mechanism is provided with a bearing position for bearing an object to be cleaned, the bottom of the bearing position is provided with an inclined liquid discharge surface, and the bottom of the liquid discharge surface is provided with a liquid discharge hole.

2. The slip type semi-enclosed cleaning apparatus of claim 1, wherein said cleaning mechanism comprises a base, said base having a knife assembly and a cleaning nozzle assembly.

3. The slip-type semi-enclosed cleaning apparatus of claim 2, wherein said cleaning nozzle assembly comprises:

a plurality of liquid path pipes and nozzles;

the liquid pipeline mounting hole is positioned on the base and corresponds to the liquid pipeline;

and the liquid pipeline clamp structure is positioned on the lower side of the base and is provided with a liquid pipeline pipe positioning hole corresponding to the liquid pipeline pipe mounting hole.

4. The sliding semi-enclosed cleaning device according to claim 3, wherein the inner cross section of the hydraulic conduit clamp structure is gradually contracted from top to bottom.

5. The skid-mounted semi-enclosed cleaning apparatus of claim 1, further comprising a suction line communicating into the shield.

6. Sliding semi-enclosed cleaning device according to claim 2, characterized in that the air knife assembly is provided with a flat air outlet.

7. Sliding semi-enclosed cleaning device according to claim 1, characterized in that a plurality of support platforms for supporting the objects to be cleaned are provided in said supporting station, and a retaining edge is provided on said support platform corresponding to the edge of said objects to be cleaned.

8. Sliding semi-enclosed cleaning device according to claim 1 or 7, characterized in that a negative pressure suction assembly is provided in said loading position for fixing said object to be cleaned.

9. The sliding semi-enclosed cleaning device according to claim 1, wherein the bottom of the loading position is funnel-shaped, and the drain hole is located at the middle of the bottom end of the funnel-shaped loading position.

10. The sliding semi-enclosed cleaning apparatus of claim 1, further comprising a displacement drive mechanism, said displacement drive mechanism being coupled to said cleaning mechanism.