CN215955678U - Discharge chamber position control device and excimer laser subassembly - Google Patents

Abstract

The utility model relates to the technical field of excimer laser, in particular to a discharge chamber position adjusting device and an excimer laser assembly.

Description

Discharge chamber position control device and excimer laser subassembly

Technical Field

The utility model relates to the technical field of excimer laser, in particular to a discharge cavity position adjusting device and an excimer laser assembly.

Background

Excimer lasers are a class of gas laser devices that use excimer molecules as the working substance. Because the position accuracy is often not enough after the discharge chamber of excimer laser and equipment frame itself location, need carry out the secondary fine setting. At present, the conventional operation means in the debugging process is to adopt a hand-operated wheel, namely, the hand-operated wheel is manually rotated so as to drive the discharge cavity to move to a proper position, and then the hand-operated wheel is loosened.

The current hand-operated wheel adjusting mode is manually operated, the precision is rough, the magnitude below the displacement millimeter cannot be accurately controlled, and the manual operation difference is large. Meanwhile, the manual drive cannot accurately record position information, and the rough estimation results in failure to provide reliable data support subsequent adjustment.

SUMMERY OF THE UTILITY MODEL

The present invention is directed to a discharge chamber position adjustment device and an excimer laser module, so as to solve the above technical problems in the prior art.

In order to solve the technical problem, the utility model provides a discharge chamber position adjusting device, which comprises a support piece, a motor linear driving piece and an adjusting piece, wherein the support piece is arranged on the support piece; the motor linear driving piece is fixed on the supporting piece; the motor linear driving piece is connected with the adjusting piece and used for driving the adjusting piece to do linear motion relative to the supporting piece; the adjusting piece is used for being fixed with a discharge cavity of the excimer laser.

Further, the motor linear driving part comprises a motor and a lead screw and nut mechanism; the motor is fixed on the supporting piece; the power output shaft of the motor is coaxially fixed with the lead screw of the lead screw nut mechanism and is used for driving the lead screw to rotate; and a nut of the screw-nut mechanism is fixed with the adjusting piece and is used for driving the adjusting piece to move linearly.

Furthermore, a limit switch for detecting the movement position of the adjusting piece is arranged on the supporting piece; the limit switch is electrically connected with the motor; when the adjusting piece moves to a preset limit position, the limit switch controls the motor to be powered off and stop working.

Furthermore, a limiting piece is fixed on a nut of the lead screw nut mechanism, and the limiting switch is used for detecting the movement position of the limiting piece.

Further, a guide structure is arranged on the supporting piece and used for guiding the adjusting piece to move along a preset direction.

Further, the guide structure is a guide post and a slide ring; the guide post is fixed on the supporting piece, the sliding ring is sleeved on the guide post in a sliding mode, and the sliding ring is fixed with a nut of the screw-nut mechanism.

Further, the slip ring is a linear bearing.

Further, the adjusting piece is an adjusting cylinder, and the axis of the adjusting cylinder is parallel to the guide pillar; the number of the guide columns is three, the three guide columns are arranged in parallel and in a triangular shape, and the slip ring is sleeved on one of the guide columns; the adjusting piece is placed in a triangle formed by the three guide columns.

Further, the support is a support cylinder; the motor linear driving piece is positioned outside the supporting cylinder, and the adjusting piece is positioned in the supporting cylinder.

The utility model also provides an excimer laser assembly, which comprises an excimer laser and the discharge cavity position adjusting device; the excimer laser comprises a frame and a discharge cavity positioned on the frame; the support piece is fixed with the frame, and the adjusting piece is fixed with the discharge cavity.

By adopting the technical scheme, the utility model has the following beneficial effects:

according to the discharge cavity position adjusting device provided by the utility model, the motor linear driving piece drives the adjusting piece to linearly move relative to the supporting piece by taking the motor as a power source, and the adjusting piece drives the discharge cavity of the excimer laser to linearly move so as to adjust the position of the discharge cavity. Compared with a manual wheel adjusting mode in the prior art, the motor serving as a main power source can be subjected to closed-loop control, so that the movement of the motor can be fed back accurately, the system is convenient to use, the precision is greatly improved, the displacement millimeter and the magnitude can be controlled accurately, the manual influence is avoided, and meanwhile, the position information can be recorded accurately by the electric driving mode, so that reliable data can be provided for subsequent adjustment.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the embodiments or the description in the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and other drawings can be obtained by those skilled in the art without creative efforts.

Fig. 1 is a front view of a discharge chamber position adjustment apparatus provided in an embodiment of the present invention;

FIG. 2 is another schematic structural view of the discharge chamber position adjusting apparatus shown in FIG. 1;

fig. 3 is a sectional view of the discharge chamber position adjusting apparatus shown in fig. 1;

FIG. 4 is a schematic structural diagram of a linear driving element of a motor according to an embodiment of the present invention;

FIG. 5 is a front view of an excimer laser module according to an embodiment of the present invention;

fig. 6 is a left side view of the excimer laser module shown in fig. 5.

Reference numerals:

1-an adjusting part; 2-a limit switch; 3-a limiting part;

4-a support; 5-a motor bracket; 6-bearing seat;

7-locking nails; 8-a lead screw nut mechanism; 9-a motor;

10-a guide post; 11-a support bearing; 12-a slip ring;

13-motor briquetting; 14-a discharge chamber; 15-frame.

Detailed Description

The technical solutions of the present invention will be described clearly and completely with reference to the accompanying drawings, and it should be understood that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.

The present invention will be further explained with reference to specific embodiments.

Fig. 1 is a front view of a discharge chamber position adjustment device according to an embodiment of the present invention, fig. 2 is another schematic structural view of the discharge chamber position adjustment device shown in fig. 1, fig. 3 is a cross-sectional view of the discharge chamber position adjustment device shown in fig. 1, and fig. 4 is a schematic structural view of a motor linear driving member according to an embodiment of the present invention, as shown in fig. 1 to 4, in one aspect, the present invention provides a discharge chamber position adjustment device including a support member 4, a motor linear driving member, and an adjustment member 1; the motor linear driving piece is fixed on the supporting piece 4; the motor linear driving piece is connected with the adjusting piece 1 and used for driving the adjusting piece 1 to do linear motion relative to the supporting piece 4; the adjusting part 1 is intended to be fixed to the discharge chamber 14 of an excimer laser.

According to the discharge cavity position adjusting device provided by the embodiment of the utility model, the motor linear driving part uses the motor 9 as a power source to drive the adjusting part 1 to do linear motion relative to the supporting part 4, and the adjusting part 1 drives the discharge cavity 14 of the excimer laser to move linearly so as to adjust the position of the discharge cavity 14. Compared with a manual wheel adjusting mode in the prior art, the motor 9 serving as a main power source can perform closed-loop control, so that the movement of the motor can be accurately fed back, the system is convenient to use, the precision is greatly improved, the displacement millimeter and the magnitude can be accurately controlled, the manual influence is avoided, and meanwhile, the position information can be accurately recorded by the electric driving mode, and reliable data is provided for subsequent adjustment.

The hand wheel form among the prior art specifically includes hand wheel and cavity connecting cylinder, and the hand wheel is the tube-shape and is provided with the internal thread, and cavity connecting cylinder outer wall is provided with the external screw thread, and the hand wheel cover carries out threaded connection outside the cavity connecting cylinder, and the cavity connecting cylinder is fixed with excimer laser's discharge chamber. During adjustment, the cavity connecting cylinder is driven to do linear motion by rotating the hand wheel by hand, so that the discharge cavity is driven to move back and forth, and when the discharge cavity moves to a proper position, the rear wheel is loosened. The outer ring of the hand wheel is provided with decorative patterns convenient for manual adjustment. A spring is arranged between the cavity connecting cylinder and the hand wheel, one side of the spring is propped against the inner wall of the hand wheel, and the other side of the spring is propped against the inner wall of the cavity connecting cylinder, so that the anti-loosening effect between the cavity connecting cylinder and the hand wheel is achieved. The method has the advantages of rough precision, incapability of accurately controlling the magnitude below the displacement millimeter, large manual operation difference, incapability of accurately recording position information and capability of providing reliable data to support subsequent adjustment.

The linear driving part of the motor can be in various structural forms, and the motor can be used as a power source, and the output of the linear driving part can be linear motion. For example: the linear motor can be directly adopted to output linear motion driving force, the motor 9 with power output as rotary driving force can also be adopted, and the rotary motion is converted into linear motion through the steering mechanism to drive the adjusting part 1 to do linear motion. The steering mechanism can be implemented in various ways, for example: the steering mechanism is a cylindrical cam mechanism which comprises a cylindrical rod, a movable rod and a fixed frame; the cylindrical rod is rotatably arranged on the fixing frame, and a power output shaft of the motor is connected with the cylindrical rod and used for driving the cylindrical rod to rotate; a curved sliding groove is formed in the outer wall of the cylindrical rod along the circumferential direction of the cylindrical rod, one end of the moving rod is located in the curved sliding groove, and the moving rod is connected with the fixing frame in a sliding mode. The power output shaft of the motor drives the cylindrical rod to rotate on the fixing frame, and the moving rod moves linearly in the curved chute on the cylindrical rod while the cylindrical rod rotates. For another example: the steering mechanism is of a gear-rack structure, a motor power output shaft is coaxially fixed with a gear, the gear is meshed with a rack, the rack is fixed with the adjusting part 1, the motor drives the gear to rotate, the gear drives the rack to move linearly, and the rack drives the adjusting part 1 to move linearly. The method also comprises the following steps: the steering mechanism is of a belt wheel structure, a motor power output shaft and a belt wheel are coaxially fixed, the belt wheel is driven to rotate, and meanwhile a belt on the belt wheel moves linearly. The belt can be directly clamped on the belt wheel, and can also be meshed with the belt wheel through a gear structure to carry out power transmission. The steering mechanism can also be a worm gear mechanism, a power output shaft of the motor is coaxially fixed with the worm gear to drive the worm gear to rotate, and meanwhile, the worm gear drives the worm to do linear motion.

Certainly, the above-mentioned method is not an optimal method, and the optimal method of the motor linear driving part is to use the motor 9 and the screw nut mechanism 8 to cooperate, that is, the motor linear driving part includes the motor 9 and the screw nut mechanism 8; the motor 9 is fixed on the support 4; a power output shaft of the motor 9 is coaxially fixed with a lead screw of the lead screw nut mechanism 8 and is used for driving the lead screw to rotate; the nut of the screw nut mechanism 8 is fixed with the adjusting part 1 and is used for driving the adjusting part 1 to move linearly. The screw nut mechanism 8 is the existing mature technology, namely the screw is provided with a thread structure, the nut is sleeved on the screw, the power source drives the screw to rotate, and the nut makes linear motion on the screw, so that the rotary motion is converted into linear motion. In this embodiment, the motor 9 drives the screw rod to rotate, and the nut on the screw rod makes linear motion, and the nut drives the adjusting member 1 to make linear motion. The screw nut mechanism 8 is simple in structure, low in cost and convenient to install and use.

Preferably, the motor linear driving mechanism further comprises a support bearing 11 fixed on the support member 4, the front end of the lead screw nut mechanism 8 is located in the support bearing 11, and the support bearing 11 provides a rotary support for the lead screw. The support bearing 11 is fixed on the bearing seat 6 through the locking nail 7, and the bearing seat 6 is fixed on the support 4. The motor pressing block 13 presses the screw rod on the output shaft of the motor 9, and the motor pressing block 13 is fixed by installing a bolt. The motor 9 is fixed on the support member 4 through the motor bracket 5.

The structural form of the supporting member 4 may be various, for example: the support member 4 is a frame structure, or the support member 4 is a block structure. Preferably, the support 4 is a support cylinder; the linear driving part of the motor is positioned outside the supporting cylinder, and the adjusting part 1 is positioned in the supporting cylinder. Specifically, the outer wall of the supporting cylinder is fixed with a supporting plate, the device is fixed on a frame 15 of the excimer laser through the supporting plate, so that the adjusting part 1 drives a discharge cavity 14 of the excimer laser, and the supporting plate is arranged to facilitate the device to be installed on the excimer laser. The backup pad can form with a supporting cylinder integrated into one piece, also can process backup pad and a supporting cylinder respectively, and rethread bolt is fixed backup pad and a supporting cylinder. The supporting plate can be annular, the end part of the supporting cylinder is fixed with the inner ring of the supporting plate, and the end part of the supporting cylinder can be welded or clamped and fixed with the inner ring of the supporting plate. The supporting plate can also be square, one side edge of the supporting plate is arc-shaped, and the arc-shaped edge is matched with the outer wall of the supporting cylinder to fix the supporting plate on one side of the supporting cylinder.

In some embodiments, the support 4 is provided with a limit switch 2 for detecting the movement position of the adjusting member 1; the limit switch 2 is electrically connected with the motor 9; when the adjusting piece 1 moves to a preset limit position, the limit switch 2 controls the motor 9 to be powered off and stop working. The limit switch 2 is used for controlling the limit position of the adjusting piece 1 and preventing accidents. Preferably, one limit switch 2 is provided at each of both ends of the back and forth movement, so that the movement limit positions of both ends can be detected. The limit switch 2 can directly detect the position of the adjusting part 1, and can also indirectly detect the position of the adjusting part 1 by detecting the nut position of the lead screw and nut mechanism 8. Preferably, the limiting member 3 is fixed on the nut of the screw-nut mechanism 8, and the limiting switch 2 is used for detecting the movement position of the limiting member 3, that is, the nut position of the screw-nut mechanism 8 is detected by arranging the limiting member 3. The limiting part 3 can be a limiting block or a limiting screw, and preferably, the limiting part 3 is a limiting screw fixed on a nut of the screw-nut mechanism 8 and linearly moves together with the nut.

In some embodiments, a guide structure is provided on the support 4 for guiding the movement of the adjusting member 1 in a predetermined direction. The guide structure may have various structural forms, such as: the support 4 is provided with a guide groove, and the adjusting element 1 or the nut of the spindle-nut mechanism 8 is provided with a guide shoe, which moves in the guide groove. Alternatively, a guide block is provided on the support member 4, a guide groove is provided on the adjusting member 1 or the nut of the lead screw-nut mechanism 8, and the guide block moves in the guide groove. Or, the adjusting piece 1 or the screw nut mechanism 8 is provided with a roller, the supporting piece 4 is provided with a slide rail, the roller moves in the slide rail, the slide rail plays a guiding role, and the matching mode of the roller and the pulley can reduce the motion friction and reduce the power loss. Of course, the guiding structure may be one, multiple, single or multiple different structures, and the user may set the guiding structure according to actual needs to meet the requirements.

The above is not the most preferred embodiment, preferably the guiding structures are a guide post 10 and a slip ring 12; the guide post 10 is fixed on the support 4, the sliding ring 12 is slidably sleeved on the guide post 10, and the sliding ring 12 is fixed with the nut of the screw-nut mechanism 8. The slip ring 12 in the present invention is an annular structure that is fitted over the guide post 10 and can slide on the guide post 10, and may have a sliding function. Specifically, both ends of the guide post 10 are fixed on the supporting member 4, and when the supporting member 4 is a supporting cylinder, both ends of the guide post 10 are fixed on the inner walls of both ends of the supporting cylinder. When the nut of the screw nut mechanism 8 moves linearly, the sliding ring 12 moves along with the nut, and the guide pillar 10 plays a role in guiding the movement of the sliding ring 12 in a directional movement manner, so that the adjusting part 1 also moves linearly along the guide pillar 10, and the movement stability of the adjusting part 1 is improved. The friction between the slip ring 12 and the guide post 10 is as small as possible, and the power loss caused by the contact between the slip ring and the guide post is reduced. The slip ring 12 may be of a simple sleeve construction.

Preferably, the sliding ring 12 is a linear bearing, the outer wall of the linear bearing is fixed with a nut, the inner wall of the linear bearing is sleeved on the guide pillar 10, the linear bearing is small in friction force, stable in movement and capable of providing stable linear movement with high precision, so that the movement stability of the adjusting part 1 is improved, the linear bearing is a finished product and can be directly used, the cost is low, and the processing and manufacturing are convenient.

The structure form of the adjusting part 1 can be various, preferably, the adjusting part 1 is an adjusting cylinder, and the axis of the adjusting cylinder is parallel to the guide pillar 10; three guide columns 10 are provided, the three guide columns 10 are parallel and arranged in a triangle, and a slip ring 12 is sleeved on one guide column 10; the adjusting member 1 is placed in the triangle formed by the three guide posts 10. The guide post 10 plays a guiding role for the adjusting cylinder, and meanwhile, the cylindrical adjusting piece 1 is light in weight and large in acting area for the discharge cavity 14, so that the adjusting piece 1 stably pushes the discharge cavity 14.

Fig. 5 is a front view of an excimer laser assembly provided by an embodiment of the present invention, fig. 6 is a left side view of the excimer laser assembly shown in fig. 5, as shown in fig. 5 and fig. 6, another aspect of the embodiment of the present invention further provides an excimer laser assembly, which comprises an excimer laser and the discharge chamber position adjusting device described above; the excimer laser comprises a frame 15 and a discharge chamber 14 positioned on the frame 15; the support 4 is fixed with the frame 15, and the adjusting part 1 is fixed with the discharge chamber 14. When the device is used, the adjusting piece 1 is driven by the linear driving piece to do linear motion on the supporting piece 4, and the adjusting piece 1 drives the discharge cavity 14 to do linear motion, so that the position of the discharge cavity 14 aligned with the molecular laser is adjusted.

According to the excimer laser assembly provided by the embodiment of the utility model, the motor linear driving part uses the motor 9 as a power source to drive the adjusting part 1 to do linear motion relative to the supporting part 4, and the adjusting part 1 drives the discharge cavity 14 of the excimer laser to move linearly so as to adjust the position of the discharge cavity 14. Compared with a manual wheel adjusting mode in the prior art, the motor 9 serving as a main power source can perform closed-loop control, so that the movement of the motor can be accurately fed back, the system is convenient to use, the precision is greatly improved, the displacement millimeter and the magnitude can be accurately controlled, the manual influence is avoided, and meanwhile, the position information can be accurately recorded by the electric driving mode, and reliable data is provided for subsequent adjustment.

The specific structure and implementation of the discharge chamber position adjusting device are the same as those described above, and are not described herein again.

Because the discharge chamber 14 moves relative to the frame 15 and the friction between the discharge chamber and the frame 15 is reduced as much as possible, a sliding rail can be arranged on the frame 15, a pulley is arranged at the bottom of the discharge chamber 14 and moves along the sliding rail, and therefore the friction when the discharge chamber 14 moves is reduced. Two parallel slide rails can be arranged at two ends of the frame 15, pulleys are arranged on two sides of the bottom of the discharge cavity 14, the two pulleys move along the two slide rails respectively, friction is reduced, and the discharge cavity 14 can be stably supported by the pulleys, so that the stability of the discharge cavity 14 during movement is ensured. Of course, the slide rail can be a plurality of more than three, correspondingly, the pulley also sets up a plurality of more than three, a plurality of pulleys and a plurality of pulley one-to-one cooperation. The user can hang the quantity that sets up slide rail and pulley according to the size and the actual demand in discharge chamber to satisfy the demand under the different situation. Or the structure of the pulley sliding rail is replaced by a structure of a sliding block sliding groove, namely, the sliding groove is arranged on the frame 15, the sliding block is arranged at the bottom of the discharge cavity 14 and slides in the sliding groove, and the function of guiding the discharge cavity 14 to move can also be achieved.

In some embodiments, the number of the discharge chamber position adjusting devices is multiple, preferably, the number of the discharge chamber position adjusting devices is two, and the two discharge chamber position adjusting devices are arranged at intervals and simultaneously act on the discharge chamber 14 to drive the discharge chamber 14 to move, so that the discharge chamber 14 moves more stably. Of course, a plurality of discharge chamber position adjusting devices with more than three positions can be arranged, the discharge chamber position adjusting devices are sequentially arranged at intervals along the length direction of the discharge chamber, the discharge chamber 14 is driven by the discharge chamber position adjusting devices to move simultaneously, and a user can select the number of the discharge chamber position adjusting devices according to actual needs.

Preferably, a mounting plate is vertically arranged on the frame 15, the support member 4 of the discharge chamber position adjusting device is fixed on the mounting plate, the motor 9 and the nut screw mechanism 8 are positioned below, and the adjusting member 1 is positioned above. When discharge chamber position control device is a plurality of, a plurality of discharge chamber position control device interval are fixed on the mounting panel in proper order, and the mounting panel is convenient for install discharge chamber position control device on frame 15. Preferably, the upper end of the mounting plate is flush and fixed with the upper end of the frame 15, and the motor 9 and the nut screw mechanism 8 are located at the upper edge of the mounting plate, so that the adjusting part 1 is just connected with the discharge cavity 14 on the frame 15 to drive the discharge cavity 14 to move, and the structure is compact.

Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit the same; while the utility model has been described in detail and with reference to the foregoing embodiments, it will be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; and the modifications or the substitutions do not make the essence of the corresponding technical solutions depart from the scope of the technical solutions of the embodiments of the present invention.

Claims (10)

1. A discharge cavity position adjusting device is characterized by comprising a support piece (4), a motor linear driving piece and an adjusting piece (1);

the motor linear driving piece is fixed on the supporting piece (4); the motor linear driving part is connected with the adjusting part (1) and is used for driving the adjusting part (1) to do linear motion relative to the supporting part (4); the adjusting piece (1) is used for being fixed with a discharge cavity (14) of the excimer laser.

2. The discharge chamber position adjustment device according to claim 1, wherein the motor linear drive comprises a motor (9) and a lead screw-nut mechanism (8);

the motor (9) is fixed on the support piece (4); a power output shaft of the motor (9) is coaxially fixed with a lead screw of the lead screw nut mechanism (8) and is used for driving the lead screw to rotate; and a nut of the screw rod nut mechanism (8) is fixed with the adjusting piece (1) and is used for driving the adjusting piece (1) to move linearly.

3. The discharge chamber position adjusting device according to claim 2, characterized in that a limit switch (2) for detecting the movement position of the adjusting member (1) is arranged on the support member (4); the limit switch (2) is electrically connected with the motor (9); when the adjusting piece (1) moves to a preset limit position, the limit switch (2) controls the motor (9) to stop working after power failure.

4. The discharge chamber position adjusting device according to claim 3, characterized in that a limiting member (3) is fixed on a nut of the lead screw-nut mechanism (8), and the limiting switch (2) is used for detecting the movement position of the limiting member (3).

5. The discharge chamber position adjustment device according to claim 2, characterized in that a guide structure is provided on the support member (4) for guiding the movement of the adjustment member (1) in a preset direction.

6. The discharge chamber position adjustment device according to claim 5, wherein the guide structure is a guide post (10) and a slip ring (12); the guide post (10) is fixed on the supporting piece (4), the sliding ring (12) is sleeved on the guide post (10) in a sliding mode, and the sliding ring (12) is fixed with a nut of the screw and nut mechanism (8).

7. The discharge chamber position adjustment device according to claim 6, characterized in that the slip ring (12) is a linear bearing.

8. The discharge chamber position adjustment device according to claim 6, characterized in that the adjustment member (1) is an adjustment cylinder, the axis of which is parallel to the guide post (10); the number of the guide columns (10) is three, the three guide columns (10) are parallel and arranged in a triangular shape, and the slip ring (12) is sleeved on one of the guide columns (10); the adjusting piece (1) is placed in a triangle formed by the three guide columns (10).

9. The discharge chamber position adjustment device according to claim 1, characterized in that the support member (4) is a support cylinder; the motor linear driving piece is positioned outside the supporting barrel, and the adjusting piece (1) is positioned in the supporting barrel.

10. An excimer laser assembly comprising an excimer laser and a discharge chamber position adjusting device as claimed in any one of claims 1 to 9;

the excimer laser comprises a frame (15) and a discharge cavity (14) positioned on the frame (15); the support piece (4) is fixed with the frame (15), and the adjusting piece (1) is fixed with the discharge cavity (14).

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