CN215925061U

CN215925061U - Anti-cracking rotary target assembly

Info

Publication number: CN215925061U
Application number: CN202122201582.8U
Authority: CN
Inventors: 周昭宇; 周志宏; 肖世洪; 雷雨; 汪政军
Original assignee: UV TECH MATERIAL Ltd
Current assignee: UV TECH MATERIAL Ltd
Priority date: 2021-09-10
Filing date: 2021-09-10
Publication date: 2022-03-01
Anticipated expiration: 2031-09-10

Abstract

The utility model relates to the field of rotary target processing, in particular to an anti-cracking rotary target assembly. The utility model provides an anti-cracking rotary target assembly which comprises a back tube and at least two sections of rotary target tubes, wherein the rotary target tubes are axially arranged, sleeved on the outer side of the back tube and rotate around the axis of the back tube along with the back tube, the inner diameter of each rotary target tube is larger than the outer diameter of the back tube, and two adjacent sections of rotary target tubes are spaced by a sufficient distance. According to the anti-cracking rotary target assembly, the rotary target tube is not easy to crack, the service life of the rotary target assembly is long, more time is not required to be consumed for the binding process, and the production efficiency is high.

Description

Anti-cracking rotary target assembly

Technical Field

The utility model relates to the field of rotary target processing, in particular to an anti-cracking rotary target assembly.

Background

In the scenes of magnetron sputtering, vacuum coating and the like, a rotary target tube is often needed, the rotary target tube is mounted on corresponding driving equipment and then driven to rotate by the driving equipment, target atoms on the surface of the rotary target tube are sputtered and separated after being impacted by high-speed particles, and the target atoms impact the surface of a target at a high speed to realize coating. The rotary target tube is usually formed by turning after sintering a raw material blank, and the turned rotary target tube is in a short round tube shape and cannot meet the requirement of a longer coated object, so that a plurality of sections of short rotary target tube shafts are axially arranged and sleeved on the outer side of a stainless steel back tube through a binding process, and the back tube and the plurality of sections of rotary target tubes jointly form a rotary target assembly, so that the rotary target assembly can be put into use. In the rotary target assembly, the bound multiple sections of rotary target tubes are fixedly connected to the outer side of the back tube, and the multiple sections of rotary target tubes rotate around the axis along with the back tube.

In the rotary target assembly, the inner diameter of the rotary target tube is slightly larger than the outer diameter of the back tube, when the binding process is executed, the back tube is firstly vertically arranged and fixed, then a section of rotary target tube to be bound is sleeved outside the vertically arranged back tube, the rotary target tube sleeved on the back tube needs to be aligned with the axis of the back tube, so that gaps between the inner wall of the rotary target tube and the outer wall of the back tube are uniform, then welding flux is poured into the gap between the rotary target tube and the back tube from the upper side until the gap is filled with the welding flux, after the welding flux is cooled, the section of rotary target tube is bound, and is fixedly connected to the back tube. And repeating the operation of the other sections of the rotary target tubes to be bound until all the rotary target tubes are bound to the back tube.

Because the two adjacent sections of the rotary target material tubes cannot be completely attached, and a gap exists between the two sections, the welding agent is easy to overflow from the gap in the process of pouring the welding agent, and is cooled and fixed on the surface of the rotary target material tube, so that the effect of welding the rotary target material tube to the back tube is influenced, and the coating quality of the subsequent sputtering process is also influenced. Therefore, a sealing mechanism is usually required to be detachably mounted between two adjacent sections of rotary target material pipes, and comprises a gasket and a wrapping part, wherein the gasket is annular, the gap between the adjacent rotary target materials is filled up, the gasket is pressed to the top end of the rotary target material pipe below by using the self gravity of the rotary target material pipe above, so that the gap sealing effect is realized, the wrapping part wraps the outer side of the gap, the gasket is wrapped around the gap, the gap is further sealed, and the welding agent is ensured not to overflow from the gap. After the welding agent is cooled and solidified, the wrapping part and the gasket are disassembled, and fine gaps still remain between the two adjacent sections of the rotary target material pipes after the gasket is disassembled due to the fact that the gasket has a certain thickness. In an ideal state, a rotating target material pipe is processed into an integral strip shape and is sleeved outside a stainless steel back pipe, so that the manufactured rotating target material assembly has the best coating effect, but the rotating target material assembly is limited by equipment and a process, the rotating target material pipe can only be processed into a short section in the prior art, a plurality of sections of rotating target material pipes are required to be axially and tightly arranged and are fixed on the back pipe through a binding process, and due to the fact that fine gaps exist between two adjacent sections of rotating target material pipes, target material atoms cannot be sputtered at the fine gaps in the sputtering coating process, and fine unevenness exists in a coating layer of a target object. In order to minimize the unevenness, it is currently common to make two adjacent sections of rotating target tubes as close as possible, and the current technology makes the fine gap between the two sections of rotating target tubes about 0.3 mm.

In addition, the rotary target tube of the rotary target assembly is easy to crack, and the rotary target assembly is discarded after the rotary target tube cracks.

SUMMERY OF THE UTILITY MODEL

The inventor finds that the main reasons for the rotary target material cracking are as follows: when the rotary target assembly is used, the rotary target assembly is driven by the driving equipment to rotate around the axis of the rotary target assembly and is continuously impacted by the high-speed particles, so that the multiple sections of rotary target tubes on the rotary target assembly are heated and heated to expand and stretch, and when the expansion deformation quantity of two adjacent sections of rotary target tubes exceeds a gap value, the two sections of rotary target tubes abut against each other and continuously apply pressure to each other, so that the two sections of rotary target tubes are mutually crushed.

In contrast, the inventor tries to replace the original multi-section rotating target tube with more sections of shorter rotating target tubes of each section to reduce the expansion deformation of each section of rotating target tube, so that the mutual extrusion cracking of the two adjacent sections of rotating target tubes is avoided, but under the condition that the total length of the rotating target assembly is not changed, more sections of rotating target tubes need to be bound, the binding procedure is time-consuming, and the production efficiency is low.

The technical problem to be solved by the utility model is to provide an anti-cracking rotary target assembly, wherein a rotary target tube is not easy to crack, the service life of the rotary target assembly is long, more time is not required to be consumed for a binding process, and the production efficiency is high.

In order to solve the technical problem, the utility model provides an anti-cracking rotary target assembly, which comprises a back tube and at least two sections of rotary target tubes, wherein the rotary target tubes are axially arranged, are sleeved outside the back tube and rotate around the axis of the back tube along with the back tube, the inner diameter of each rotary target tube is larger than the outer diameter of the back tube, and the spacing distance between every two adjacent rotary target tubes is 0.5-0.7 mm.

Further, the length of the rotary target tube is 250 mm-300 mm.

Further, the main material of the rotating target tube is silicon, and/or the back tube is made of stainless steel or titanium alloy.

Further, the back pipe is made of stainless steel or titanium alloy.

Further, the length of the rotary target tube is 250-300 mm; the main material of the rotary target tube is silicon; the back tube is made of stainless steel or titanium alloy.

Further, the at least two sections of rotating target material tubes are sleeved in the middle of the outer side of the back tube, and the end of the back tube extends towards the end and is provided with a mounting part for mounting in the driving and rotating equipment.

Furthermore, a gap is formed between the inner side wall of the rotary target material pipe and the outer side wall of the back pipe, welding agent is injected into the gap, and the rotary target material pipe is fixedly connected with the back pipe through the welding agent.

Further, the flux is indium dioxide.

Has the advantages that: enough gap distance is reserved between two adjacent sections of rotary target tubes of the rotary target assembly, so that even if the two adjacent sections of rotary target tubes expand and stretch by heating, enough space is reserved to avoid mutual propping and squeezing crack, and therefore the rotary target tubes of the rotary target assembly are not easy to crack. Although the gap distance between two adjacent segments of the rotating target tube is slightly increased, the degree of non-uniformity of the coating layer caused by the gap distance is acceptable. In addition, because the length of each section of the rotary target tube does not need to be shortened, more rotary target tubes do not need to be bound on the basis that the total length of the rotary target assembly is not changed, namely, extra time for binding procedures is not needed, and the production efficiency is high.

Drawings

Fig. 1 is a schematic view of a rotary target assembly.

Fig. 2 is a sectional view taken along a-a in fig. 1.

Fig. 3 is an enlarged view of a portion B in fig. 2.

Fig. 4 is an enlarged view of a portion C in fig. 2.

Description of the symbols:

1-rotating the target assembly; 2-a back tube; 21-a mounting portion; 3-rotating the target material tube; 4-voids; 5-fine gaps; z-axis.

Detailed Description

The utility model is described in further detail below with reference to specific embodiments.

Referring to fig. 1 and 2, the rotary target assembly 1 includes a back tube 2 made of stainless steel, the back tube 2 is in a long-strip round tube shape, two end portions of the back tube 2 respectively extend towards the corresponding ends and are provided with mounting portions 21, and the back tube 2 is mounted in a driving device (not shown) in scenes such as magnetron sputtering, vacuum coating and the like through the mounting portions 21 at the two ends.

Six sections of rotary target tubes 3 which are axially arranged are sleeved outside the back tube 2, the inner diameters of the rotary target tubes 3 are larger than the outer diameter of the back tube 2, and the rotary target tubes are sleeved in the middle of the outside of the back tube 2 and expose installation parts 21 at two ends of the back tube 2. The length of each section of the rotary target tube 3 is 250 mm-300 mm, and the main material is silicon. In order to fixedly connect the rotating target tubes 3 to the backing tube 2 and rotate around the axis Z of the backing tube 2 along with the backing tube 2, the rotating target tubes 3 need to be bound.

Binding the rotating target tube 3 requires a binding device (not shown in the figure) and a sealing mechanism (not shown in the figure), wherein the binding device generally has a working platform (not shown in the figure), and the middle of the working platform is recessed to form a cylindrical mounting pit (not shown in the figure) matched with the outer diameter of the back tube 2 for the back tube 2 to be vertically installed. The sealing mechanism comprises a circular gasket (not shown in the figure) and a wrapping part (not shown in the figure), the size of the gasket is matched with the size of the circular cross section of the rotary target tube 3 to be bound, and the wrapping part is detachably wrapped on the outer side of the gasket. The binding device and the sealing mechanism are conventional technologies, and are not described in detail, and the thickness of the gasket used in this embodiment is preferably 1 mm.

And (3) performing binding operation, namely firstly vertically arranging the back pipe 2, installing one end of the back pipe into an installation pit of the working platform, then installing a circular gasket from the upper part of the back pipe 2, sleeving the gasket on the outer side of the back pipe 2 and falling onto the working platform, and aligning the gasket with the axis of the back pipe 2. Then, a section of the rotary target tube 3 to be bound is loaded from the upper part of the back tube 2, so that the rotary target tube 3 is sleeved outside the back tube 2 and aligned with the axis of the back tube 2 and falls on the gasket, gaps 4 (shown in figure 3) between the inner wall of the section of the rotary target tube 3 and the outer wall of the back tube 2 are uniform, and the rotary target tube 3 compresses the gasket to the top surface of the working platform by utilizing self gravity to realize sealing. And then, the outer side of the gasket is wrapped by the wrapping part of the sealing mechanism, so that the sealing effect is further improved.

After sealing is finished, pouring indium dioxide welding agent into a gap 4 between the rotary target material tube 3 and the back tube 2 from the upper part until the welding agent fills the gap 4; after the flux cools, a section of the rotating target tube 3 is fixedly attached to the backing tube 2. Then the wrapping part and the gasket of the sealing mechanism are disassembled, and the binding process of the section of the rotary target tube 3 is completed. The operation of binding the remaining to-be-bound rotary target tube 3 is the same as above, a piece of annular gasket needs to be loaded in advance as described above before each section of the rotary target tube 3 is loaded, then the gasket is compressed to the top end of the lower rotary target tube 3 by the self gravity of the upper rotary target tube 3 to realize the effect of sealing the gap, and the wrapping part is wrapped outside the gasket to further realize sealing, which is not described again here.

After the six sections of the rotary target material tubes 3 are fixedly connected with the back tube 2 through the binding process, the rotary target material assembly 1 is manufactured. Due to the thickness of the gasket, after the gasket is disassembled, a fine gap 5 (see fig. 4) is still left between two adjacent sections of the rotary target tubes 3, so that the two sections of the rotary target tubes 3 are separated by the separation distance of 0.5mm to 0.7 mm. In the subsequent coating process of the rotary target assembly 1, even if two adjacent sections of rotary target tubes 3 expand and stretch by heating, enough space is provided to avoid mutual propping and extrusion cracking.

In this embodiment, the backing tube 2 is made of stainless steel, and the rotary target tube 3 has six segments. In other embodiments, the backing tube may be made of titanium alloy instead, and the length of the backing tube depends on the actual requirement, so the number of the rotating target tubes may be changed to other numbers correspondingly, but the rotating target tubes should have at least two sections.

The above description is only the embodiments of the present invention, and the scope of protection is not limited thereto. The insubstantial changes or substitutions will now be made by those skilled in the art based on the teachings of the present invention, which fall within the scope of the claims.

Claims

1. The anti-cracking rotary target assembly comprises a back tube (2) and at least two sections of rotary target tubes (3), wherein the rotary target tubes (3) are axially arranged, sleeved on the outer side of the back tube (2) and rotate around the axis (Z) of the back tube (2) along with the back tube (2), the inner diameter of each rotary target tube (3) is larger than the outer diameter of the back tube (2), and the anti-cracking rotary target assembly is characterized in that the interval distance between every two adjacent rotary target tubes (3) is 0.5-0.7 mm.

2. The crack-resistant rotary target assembly according to claim 1, wherein the length of the rotary target tube (3) is 250mm to 300 mm.

3. The crack-resistant rotary target assembly according to claim 1, wherein the main material of the rotary target tube (3) is silicon and/or the backing tube (2) is made of stainless steel or titanium alloy.

4. The crack-resistant rotary target assembly as claimed in claim 2, wherein the main material of the rotary target tube (3) is silicon and/or the backing tube (2) is made of stainless steel or titanium alloy.

5. The anti-cracking rotary target assembly according to claim 1, wherein the backing tube (2) is made of stainless steel or titanium alloy.

6. The crack resistant rotary target assembly of claim 1, wherein: the length of the rotary target tube (3) is 250-300 mm; the main material of the rotary target tube (3) is silicon; the back pipe (2) is made of stainless steel or titanium alloy.

7. The crack-resistant rotary target assembly as claimed in claim 1, wherein the at least two segments of rotary target tubes (3) are sleeved in the middle of the outside of the backing tube (2), the end of the backing tube (2) extending towards this end and having a mounting portion (21) for mounting in a drive device.

8. The anti-crack rotary target assembly as claimed in any one of claims 1 to 7, wherein a gap (4) is formed between the inner sidewall of the rotary target tube (3) and the outer sidewall of the backing tube (2), a welding agent is injected into the gap (4), and the rotary target tube (3) is fixedly connected to the backing tube (2) through the welding agent.

9. The crack resistant rotary target assembly of claim 8, wherein the flux is indium dioxide.