CN215918555U

CN215918555U - Dish brush belt cleaning device and cleaning system

Info

Publication number: CN215918555U
Application number: CN202122128927.1U
Authority: CN
Inventors: 王红磊; 吴凤良; 郝道坤; 胡建平
Original assignee: Zing Semiconductor Corp
Current assignee: Zing Semiconductor Corp
Priority date: 2021-09-02
Filing date: 2021-09-02
Publication date: 2022-03-01
Anticipated expiration: 2031-09-02

Abstract

The application provides a disc brush cleaning device and a cleaning system, which belong to the technical field of silicon wafer polishing, and specifically comprise a box body, a water inlet pipe and a water outlet pipe, wherein a water tank is arranged at the upper part in the box body and is defined by a water tank bottom plate and the side wall of the box body; the water inlet pipe penetrates through the water tank bottom plate from the lower side of the water tank bottom plate to spray water to the disc brush in the water tank; one end of the drain pipe is located on the upper side of the water tank bottom plate, the other end of the drain pipe is located on the lower side of the water tank bottom plate, and at least one drain hole is formed in the root of the drain pipe located on the upper side of the water tank bottom plate. Through the treatment scheme of this application, can follow the drain pipe discharge with the granule, make the abluent cleaner of dish brush, can improve silicon chip product quality, need not artifical cleaning device, reduce equipment down time, saved manpower and materials, improved production efficiency.

Description

Dish brush belt cleaning device and cleaning system

Technical Field

The application relates to the technical field of silicon wafer polishing, in particular to a disc brush cleaning device and a cleaning system.

Background

In final polishing process, the burnishing machine is after accomplishing a silicon chip polishing, dish brush device can rotate to the polishing workstation, carry out polishing workstation's scrubbing work, scrub the action and accomplish the back, can smuggle some polishing grinding's granule secretly between the brush, dish brush device needs the return to belt cleaning device and washes, present belt cleaning device adopts the mode of drain pipe top overflow to carry out the drainage, the granule that washes can deposit in belt cleaning device's bottom, and can't follow the drain pipe and discharge, can make the cleaning performance of dish brush produce the influence after the granule increases, and then cause silicon chip product granule unusual. Moreover, the cleaning device needs to be cleaned manually and periodically, equipment needs to be shut down, the disc brush device is manually moved away, the moisturizing box is cleaned, and therefore the downtime and the manpower waste are increased.

SUMMERY OF THE UTILITY MODEL

In view of the above, embodiments of the present application provide a disc brush cleaning apparatus and a cleaning system, which at least partially solve the problem existing in the prior art that particles entrained on a disc brush are deposited in the apparatus and cannot be discharged.

In a first aspect, an embodiment of the present application further provides a disc brush cleaning device, including a box body, a water inlet pipe and a water discharge pipe, where a water tank is arranged at an upper portion inside the box body, and the water tank is enclosed by a water tank bottom plate and a side wall of the box body; the water inlet pipe penetrates through the water tank bottom plate from the lower side of the water tank bottom plate, and the water inlet pipe sprays water to the disc brushes in the water tank; one end of the drain pipe is located on the upper side of the water tank bottom plate, the other end of the drain pipe is located on the lower side of the water tank bottom plate, and at least one drain hole is formed in the root of the drain pipe located on the upper side of the water tank bottom plate.

According to a concrete implementation of this application embodiment, the basin bottom plate is the slope form for the horizontal plane, the drain pipe is located the lowest position department of basin bottom plate, the inlet tube is located the high position department of basin bottom plate.

According to a specific implementation manner of the embodiment of the application, an included angle between a plane where the water tank bottom plate is located and the horizontal plane ranges from 1 ° to 5 °.

According to a concrete implementation mode of the embodiment of the application, the drain pipe is located the root outside cover of basin bottom plate upside is equipped with the outer loop, be equipped with at least one outer annular ring on the outer loop, the outer annular ring sets up the outer loop is close to the region of basin bottom plate, the outer loop can be relative the drain pipe rotates and makes the outer annular ring with the wash port communicates with each other.

According to a specific implementation manner of the embodiment of the present application, the outer ring hole vertically penetrates through a sidewall of the outer ring.

According to a specific implementation manner of the embodiment of the present application, the number of the outer ring holes corresponds to the number of the drain holes.

According to a specific implementation manner of the embodiment of the present application, the drainage hole vertically penetrates through a pipe wall of the drainage pipe, and the drainage hole is in a cylindrical shape or a prismatic shape.

In a second aspect, an embodiment of the present application further provides a cleaning system, including a disc brush device and the disc brush cleaning device according to any of the foregoing first aspects, where the disc brush device includes a disc brush and a moving member, and the moving member drives the disc brush to move; the dish brush cleaning device cleans the dish brush and comprises a box body, a water inlet pipe and a water outlet pipe, wherein the root of the water outlet pipe, which is positioned on the upper side of the water tank bottom plate, is provided with at least one water outlet hole.

According to a concrete implementation mode of the embodiment of the application, the water tank bottom plate is inclined relative to the horizontal plane, the drain pipe is located at the low position of the water tank bottom plate, and the water inlet pipe is located at the high position of the water tank bottom plate.

Advantageous effects

The dish brush cleaning device in the embodiment of the application changes the drainage mode of the overflow of the drainage pipe, and mainly comprises a drainage hole arranged at the position of the drainage pipe close to the bottom plate of the water tank, namely the drainage hole is positioned at the bottommost part of the water level, so that the cleaned water is drained along the drainage hole, and the particulate matters can be drained from the drainage hole along with the flow of the water, thereby avoiding the accumulation of the particulate matters, enabling the dish brush to be cleaned cleaner, further enabling the silicon wafer polishing workbench to be cleaner, and improving the quality of silicon wafer products; meanwhile, automatic discharge of particles is achieved, manual regular cleaning is not needed, equipment does not need to be shut down, cleaning time and manpower and material resources are saved, and working efficiency is improved.

The bottom plate of the water tank is arranged to be inclined, so that particles can be discharged more easily, and large particles can be prevented from accumulating; the rotatable outer ring with the hole is arranged outside the water discharge pipe, so that the water discharge is adjustable, the device is simple in structure, and the use is more convenient.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings needed to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.

FIG. 1 is a block diagram of a disk brush cleaning apparatus according to an embodiment of the present invention;

FIG. 2 is a block diagram of a drain pipe according to an embodiment of the present invention;

FIG. 3 is a view showing the relative positions of the drain hole and the outer ring hole when the drain pipe is draining;

FIG. 4 is a view showing the relative positions of the drain hole and the outer ring hole when the drain pipe is draining;

FIG. 5 is a diagram illustrating the relative positions of the drain hole and the outer ring hole when the drain pipe is not draining according to an embodiment of the present invention.

In the figure: 1. a box body; 2. a drain pipe; 21. a drain hole; 3. a water inlet pipe; 4. a sink floor; 5. an outer ring; 51. an outer annular ring; 6. particles; 7. disc brushing; 8. a brush; 9. a moving member.

Detailed Description

The embodiments of the present application will be described in detail below with reference to the accompanying drawings.

The following description of the embodiments of the present application is provided by way of specific examples, and other advantages and effects of the present application will be readily apparent to those skilled in the art from the disclosure herein. It is to be understood that the embodiments described are only a few embodiments of the present application and not all embodiments. The present application is capable of other and different embodiments and its several details are capable of modifications and/or changes in various respects, all without departing from the spirit of the present application. It is to be noted that the features in the following embodiments and examples may be combined with each other without conflict. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.

It is noted that various aspects of the embodiments are described below within the scope of the appended claims. It should be apparent that the aspects described herein may be embodied in a wide variety of forms and that any specific structure and/or function described herein is merely illustrative. Based on the present application, one skilled in the art should appreciate that one aspect described herein may be implemented independently of any other aspects and that two or more of these aspects may be combined in various ways. For example, an apparatus may be implemented and/or a method practiced using any number of the aspects set forth herein. Additionally, such an apparatus may be implemented and/or such a method may be practiced using other structure and/or functionality in addition to one or more of the aspects set forth herein.

It should be noted that the drawings provided in the following embodiments are only for illustrating the basic idea of the present application, and the drawings only show the components related to the present application rather than the number, shape and size of the components in actual implementation, and the type, amount and ratio of the components in actual implementation may be changed arbitrarily, and the layout of the components may be more complicated.

In addition, in the following description, specific details are provided to facilitate a thorough understanding of the examples. However, it will be understood by those skilled in the art that the aspects may be practiced without these specific details.

In the silicon chip production process, need to carry out polishing treatment to the silicon chip on the polishing workstation, the granule that produces after the polishing treatment can partially remain on the polishing workstation and influence the quality of silicon chip product, consequently, need come to rinse the polishing workstation with cleaning system, adopts dish brush belt cleaning device usually, and the dish brush returns to dish brush belt cleaning device and washes, and the granule that washes can deposit in dish brush belt cleaning device. Because the granule dead weight reason, the granule is gathered to the bottom of device, and dish brush belt cleaning device adopts the delivery pipe to supply water continuously often, washs the dish brush through delivery pipe spun deionized water, and the water that is higher than the drain pipe overflows the drainage in the drain pipe mode of discharge from the drain pipe top and carries out the drainage, consequently can't discharge the granule of bottom. After the particles are increased, the cleaning effect of the polishing workbench is affected by the disc brush device, and then the particles of the silicon wafer product are abnormal.

It is therefore desirable to design a disk brush cleaning device that can expel particles. The embodiment of the application provides a dish brush belt cleaning device, through set up the wash port on the drain pipe is close to the position of basin bottom, discharges water from the wash port, and the flow of water can drive the granule and flow, and then discharges from the wash port, avoids the granule to pile up in dish brush belt cleaning device.

The disk brush cleaning apparatus of the present application will be described in detail with reference to fig. 1 to 5.

The dish brush cleaning device comprises a box body 1, a water inlet pipe 3 and a water outlet pipe 2, wherein a water tank is arranged at the upper part in the box body 1 and is enclosed by a water tank bottom plate 4 and the side wall of the box body 1; the lower part of the box body 1 is used for installing a water inlet pipe 3 and a water outlet pipe 2, and the water inlet pipe 3 penetrates through the water tank bottom plate 4 from the lower side of the water tank bottom plate 4 to spray water to a disc brush 7 positioned in the water tank; one end of the drain pipe 2 is located on the upper side of the sink bottom plate 4, the other end of the drain pipe 2 is located on the lower side of the sink bottom plate 4, at least one drain hole 21 is arranged at the root of the drain pipe 2 located on the upper side of the sink bottom plate 4, and water and particles 6 on the sink bottom plate 4 can be discharged from the drain hole 21. It should be noted that the water level in the water tank can be adjusted by adjusting the water flow of the water inlet pipe 3 or the number of the drain holes 21 or the size of the drain holes, so as to ensure that the brush 8 on the disc brush 7 can be soaked in water for cleaning.

Furthermore, the water tank bottom plate 4 is inclined relative to the horizontal plane, the drain pipe 2 is located at the lowest position of the water tank bottom plate 4, and the water inlet pipe 3 is located at the high position of the water tank bottom plate 4, so that after water is sprayed out from the water inlet pipe 3 located at the high position, the water can flow to the low position where the drain pipe 2 is located along the downward inclination of the water tank bottom plate 4, and the inclined water tank bottom plate 4 can enable the particles 6 located on the water tank bottom plate 4 to be taken away by water flow more easily and is discharged from the drain hole 21 on the drain pipe 2, so that the water tank bottom plate 4 is arranged to be inclined to be more favorable for discharging the particles 6.

In a preferred embodiment the flume floor 4 is in a plane which is inclined to the horizontal in the range of 1 to 5, more preferably the flume floor 4 is in a plane which is inclined to the horizontal in the range of 2. The water tank bottom plate 4 should not be inclined too much, if the inclination angle is too large, the particles 6 may be more quickly washed to the drain hole 21 by the water, and at this time, if the size of the drain hole 21 is not large enough or the number of the drain holes is not enough, and the particles 6 are not discharged in time, the particles 6 may be accumulated at the drain hole 21, further the water discharge is affected, and the disc brush 7 cannot be normally cleaned.

In one embodiment, the outer ring 5 is sleeved on the outer side of the root part of the drain pipe 2, which is located on the upper side of the water tank bottom plate 4, the outer ring 5 is provided with at least one outer ring hole 51, the outer ring hole 51 is arranged in the area, which is close to the water tank bottom plate 4, of the outer ring 5, the outer ring 5 can rotate relative to the drain pipe 2, so that the outer ring hole 51 is communicated with the drain hole 21, water in the water tank can be drained through the drain pipe 2 via the outer ring hole 51 and the drain hole 21 in sequence, and the size of communication between the outer ring hole 51 and the drain hole 21 can be adjusted by rotating the outer ring 5, so that the size of the drained water can be adjusted to ensure that the water level in the water tank can meet the condition that the brush 8 on the disc brush 7 is immersed in the water.

Specifically, in order to allow the particles 6 to enter the outer ring hole 51 without hindrance, the outer ring hole 51 is provided on the outer ring 5 without a lower bottom wall, that is, the outer ring hole 51 is directly connected to the bottom plate 4 of the water tank, so that the particles 6 can directly slide into the drain pipe 2, and the specific structure can be referred to fig. 2, in which the outer ring hole 51 directly penetrates the lower end of the outer ring 5.

Further, the outer ring hole 51 vertically penetrates the sidewall of the outer ring 5. In addition, the outer ring hole 51 may be disposed to penetrate the sidewall of the outer ring 5 obliquely downward, but the drainage hole 21 needs to be moved downward correspondingly so that the outer ring hole 51 corresponds to the drainage hole 21.

Further, the number of the outer ring holes 51 corresponds to the number of the water discharge holes 21, that is, the outer ring holes 51 correspond to the water discharge holes 21 one by one. In the present embodiment, the number of the outer ring holes 51 and the drain holes 21 is 4, and referring to fig. 3 to 5, fig. 3 is a diagram showing the maximum amount of water to be drained, fig. 4 is a diagram showing the amount of water to be drained when the amount of water to be drained is reduced, and fig. 5 is a diagram showing the relative positions of the outer ring holes 51 and the drain holes 21 when the drainage is stopped, that is, the amount of water to be drained can be adjusted by rotating the outer ring 5. The number of the outer ring 51 and the drain hole 21 is not particularly limited, and other numbers are within the scope of the present application, and the examples are given by reference only in the present embodiment.

In one embodiment, the drainage hole 21 vertically penetrates through the wall of the drainage pipe 2, and the drainage hole 21 is cylindrical or prismatic in shape.

In a second aspect, embodiments of the present application further provide a cleaning system, which includes a disc brush device and a disc brush cleaning device as in any of the foregoing first aspect, the disc brush device includes a disc brush 7 and a moving member 9, and the moving member 9 drives the disc brush 7 to move; dish brush belt cleaning device washs dish brush 7, and dish brush belt cleaning device includes box 1, inlet tube 3 and drain pipe 2, and the root that drain pipe 2 is located 4 upsides in the basin bottom plate is equipped with at least one wash port 21. During the specific use, remove component 9 and drive dish brush 7 and transmit between polishing workstation and dish brush belt cleaning device, remove component 9 and drive dish brush 7, utilize the brush 8 on the dish brush 7 to wash polishing workstation, return dish brush belt cleaning device after the washing and wash dish brush 7.

Furthermore, the sink bottom plate 4 is inclined relative to the horizontal plane, the drain pipe 2 is located at the lower position of the sink bottom plate 4, and the inlet pipe 3 is located at the higher position of the sink bottom plate 4.

Further, the outer ring 5 is sleeved on the outer side of the root part of the drain pipe 2, which is located on the upper side of the water tank bottom plate 4, at least one outer ring hole 51 is arranged on the outer ring 5, the outer ring hole 51 is arranged in the area, which is close to the water tank bottom plate 4, of the outer ring 5, and the outer ring 5 can rotate relative to the drain pipe 2 to enable the outer ring hole 51 to be communicated with the drain hole 21.

The embodiment provided by the utility model aims at the problem that the cleaning effect of the disc brush is influenced because the accumulation of particle impurities in the existing disc brush cleaning device cannot be discharged, the improved disc brush cleaning device is invented, a drain hole is formed in the position, close to the bottom plate of a water tank, of a drain pipe, namely the drain hole is positioned at the bottommost part of the water level, so that the cleaned water is discharged along the drain hole, and the particle substances can be discharged from the drain hole along with the flow of the water, so that the accumulation of the particle substances is avoided, and the disc brush is cleaned more cleanly; meanwhile, automatic discharge of particles is realized, manual regular cleaning is not needed, cleaning time is saved, and working efficiency is improved.

The above description is only for the specific embodiments of the present application, but the scope of the present application is not limited thereto, and any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present application should be covered within the scope of the present application. Therefore, the protection scope of the present application shall be subject to the protection scope of the claims.

Claims

1. A dish brush cleaning device is characterized by comprising a box body, a water inlet pipe and a water outlet pipe, wherein a water tank is arranged at the upper part in the box body and is defined by a water tank bottom plate and the side wall of the box body; the water inlet pipe penetrates through the water tank bottom plate from the lower side of the water tank bottom plate, and the water inlet pipe sprays water to the disc brushes in the water tank; one end of the drain pipe is located on the upper side of the water tank bottom plate, the other end of the drain pipe is located on the lower side of the water tank bottom plate, and at least one drain hole is formed in the root of the drain pipe located on the upper side of the water tank bottom plate.

2. The disc brush cleaning device according to claim 1, wherein the sump floor is inclined with respect to a horizontal plane, the drain pipe is located at a lowest position of the sump floor, and the inlet pipe is located at a high position of the sump floor.

3. The disc brush cleaning device according to claim 2, wherein the angle between the plane of the sink bottom plate and the horizontal plane is in the range of 1-5 °.

4. The disc brush cleaning device according to claim 1, wherein an outer ring is sleeved on the outer side of the root of the drain pipe on the upper side of the sink bottom plate, the outer ring is provided with at least one outer ring hole, the outer ring hole is arranged in a region of the outer ring close to the sink bottom plate, and the outer ring can rotate relative to the drain pipe to enable the outer ring hole to be communicated with the drain hole.

5. The disc brush cleaning device according to claim 4, wherein the outer ring hole vertically penetrates through a side wall of the outer ring.

6. The disc brush cleaning device according to claim 4, wherein the number of the outer ring holes corresponds to the number of the drain holes.

7. The disc brush cleaning device according to claim 1, wherein the drainage hole vertically penetrates through a pipe wall of the drainage pipe, and the drainage hole is in a shape of a cylinder or a prism.

8. A cleaning system comprising a disc brush assembly and a disc brush cleaning assembly according to any of claims 1-7, the disc brush assembly comprising a disc brush and a moving member that moves the disc brush; the dish brush cleaning device cleans the dish brush and comprises a box body, a water inlet pipe and a water outlet pipe, wherein the root of the water outlet pipe, which is positioned on the upper side of the water tank bottom plate, is provided with at least one water outlet hole.

9. The cleaning system of claim 8, wherein the tank floor is sloped with respect to a horizontal plane, the drain pipe is located at a low position of the tank floor, and the inlet pipe is located at a high position of the tank floor.

10. The cleaning system according to claim 8, wherein an outer ring is sleeved on the outer side of the root of the drain pipe on the upper side of the sink bottom plate, at least one outer ring hole is formed in the outer ring, the outer ring hole is formed in a region of the outer ring close to the sink bottom plate, and the outer ring can rotate relative to the drain pipe to enable the outer ring hole to be communicated with the drain hole.