CN215887317U - Energy-saving and consumption-reducing equipment for annealing furnace - Google Patents
Energy-saving and consumption-reducing equipment for annealing furnace Download PDFInfo
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- CN215887317U CN215887317U CN202121713490.1U CN202121713490U CN215887317U CN 215887317 U CN215887317 U CN 215887317U CN 202121713490 U CN202121713490 U CN 202121713490U CN 215887317 U CN215887317 U CN 215887317U
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- annealing furnace
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- 238000000137 annealing Methods 0.000 title claims abstract description 20
- 239000002912 waste gas Substances 0.000 claims abstract description 8
- 230000000694 effects Effects 0.000 claims description 9
- 239000000463 material Substances 0.000 claims description 8
- 238000002485 combustion reaction Methods 0.000 claims description 7
- 235000017166 Bambusa arundinacea Nutrition 0.000 claims description 2
- 235000017491 Bambusa tulda Nutrition 0.000 claims description 2
- 241001330002 Bambuseae Species 0.000 claims description 2
- 235000015334 Phyllostachys viridis Nutrition 0.000 claims description 2
- 239000011425 bamboo Substances 0.000 claims description 2
- 230000009467 reduction Effects 0.000 abstract description 8
- 238000004134 energy conservation Methods 0.000 abstract description 5
- 238000005265 energy consumption Methods 0.000 abstract description 5
- 238000009434 installation Methods 0.000 abstract description 5
- 239000010409 thin film Substances 0.000 description 7
- 235000012431 wafers Nutrition 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000002019 doping agent Substances 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 230000008859 change Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000008439 repair process Effects 0.000 description 1
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Abstract
The utility model belongs to the technical field of consumption reduction equipment, and particularly relates to energy-saving and consumption reduction equipment for an annealing furnace, which aims at the problem that the installation and disassembly of a furnace body and a base are troublesome due to the fact that most of the existing connection modes between the furnace body and the base are connected through bolts. The utility model has reasonable design, and the flow speed of air can be accelerated by the combustion-supporting fan and the waste gas exhaust fan, so that the working efficiency can be improved, and the functions of energy conservation and consumption reduction can be achieved.
Description
Technical Field
The utility model relates to the technical field of consumption reduction equipment, in particular to energy-saving and consumption-reducing equipment for an annealing furnace.
Background
An annealing furnace is a process used in semiconductor device manufacturing that includes heating a plurality of semiconductor wafers to affect their electrical properties. The heat treatment is designed for different effects. The wafer may be heated to activate the dopants, convert the thin film into a thin film or convert the thin film into a wafer substrate interface, densify the deposited thin film, change the state of the grown thin film, repair implanted damage, move dopants or transfer dopants from one thin film to another or from the thin film into the wafer substrate.
Most of the existing connection modes between the furnace body and the base are connected through bolts, so that the defects that the installation and the disassembly of the furnace body and the base are troublesome and labor-consuming are caused, and the energy-saving and consumption-reducing equipment of the annealing furnace is provided for solving the problems.
SUMMERY OF THE UTILITY MODEL
The utility model aims to solve the problem that the installation and the disassembly of a furnace body and a base are troublesome and labor-consuming because the furnace body and the base are mostly connected through bolts in the conventional connecting mode, and provides energy-saving and consumption-reducing equipment for an annealing furnace.
In order to achieve the purpose, the utility model adopts the following technical scheme:
an energy-saving and consumption-reducing device of an annealing furnace comprises a base, wherein a furnace body is movably arranged at the top of the base, circular rings are fixedly arranged at the left side and the right side of the furnace body, hollow cylinders are fixedly arranged at the two sides of the top of the base, U-shaped rods are movably abutted against the inner sides of the hollow cylinders, first springs are fixedly arranged at the bottom ends of the U-shaped rods, the bottom ends of the first springs are fixedly arranged on the inner walls of the bottoms of the hollow cylinders, the outer sides of the U-shaped rods are movably abutted against the inner sides of the circular rings, hollow rods are fixedly arranged at the bottom of the circular rings, horizontal rods are movably arranged at the inner sides of the hollow rods, pull rings are fixedly arranged at one ends of the horizontal rods, second springs are fixedly arranged at the outer sides of the pull rings, one ends of the second springs are fixedly arranged on the hollow rods, the outer sides of the horizontal rods are movably abutted against the inner sides of the U-shaped rods, vertical rods are movably abutted against the outer sides of the horizontal rods, baffles are fixedly arranged at the bottom ends of the vertical rods, the top of the baffle is fixedly provided with a third spring, the top end of the third spring is fixedly arranged at the bottom of the cross rod, and the outer side of the vertical rod is movably abutted against the inner side of the pull ring.
Preferably, a combustion fan is arranged on the inner wall of one side of the furnace body, a waste gas exhaust fan is arranged on the inner wall of the top of the furnace body, and the flow speed of air can be accelerated through the combustion fan and the waste gas exhaust fan, so that the working efficiency can be improved, and the functions of energy conservation and consumption reduction can be achieved.
Preferably, the material frame is fixedly installed on the inner wall of the bottom of the furnace body, the plurality of flame nozzles are arranged at the top of the inner side of the furnace body, and the material frame is arranged, so that a certain placing function is provided for materials.
Preferably, a circular groove is formed in the hollow cylinder, the outer side of the U-shaped rod movably abuts against the inner side of the circular groove, and a certain guiding effect is achieved for the vertical movement of the U-shaped rod through the arranged circular groove.
Preferably, a through hole is formed in the cross rod, the outer side of the vertical rod movably abuts against the inner side of the through hole, and a certain guiding effect is achieved for vertical movement of the vertical rod through the arranged through hole.
Preferably, the bottom of the pull ring is provided with a groove, the top end of the vertical rod is inserted into the inner side of the groove, and the groove is arranged, so that a motion range is provided for the top end of the vertical rod.
According to the energy-saving and consumption-reducing equipment for the annealing furnace, through the arrangement of the first spring, the second spring and the third spring, the U-shaped rod can move vertically downwards through the resetting work of the first spring, so that the outer side of the U-shaped rod is movably abutted against the inner side of the circular ring, the horizontal rod can move horizontally rightwards through the resetting work of the second spring, and the vertical rod can move vertically upwards through the resetting work of the third spring, so that the top end of the vertical rod is inserted into the pull ring, and the rapid installation or disassembly work can be realized between the furnace body and the base;
the utility model has reasonable design, and the flow speed of air can be accelerated by the combustion-supporting fan and the waste gas exhaust fan, so that the working efficiency can be improved, and the functions of energy conservation and consumption reduction can be achieved.
Drawings
FIG. 1 is a schematic structural diagram of an energy saving and consumption reducing apparatus for an annealing furnace according to the present invention;
FIG. 2 is a schematic structural diagram of part A of an energy saving and consumption reducing apparatus for an annealing furnace according to the present invention;
FIG. 3 is a schematic structural diagram of part B of an energy saving and consumption reducing apparatus for an annealing furnace according to the present invention.
In the figure: 1. a base; 2. a furnace body; 3. a circular ring; 4. a hollow cylinder; 5. a first spring; 6. a U-shaped rod; 7. a hollow shaft; 8. a horizontal bar; 9. a second spring; 10. a pull ring; 11. a cross bar; 12. a vertical rod; 13. a baffle plate; 14. a third spring; 15. a combustion fan; 16. a waste gas exhaust fan; 17. a flame nozzle; 18. and (4) a material rack.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments.
Referring to fig. 1-3, an energy-saving and consumption-reducing device for an annealing furnace comprises a base 1, a furnace body 2 is movably mounted at the top of the base 1, circular rings 3 are fixedly mounted at the left and right sides of the furnace body 2, hollow cylinders 4 are fixedly mounted at the top of the base 1, U-shaped rods 6 are movably abutted to the inner sides of the hollow cylinders 4, first springs 5 are fixedly mounted at the bottom ends of the U-shaped rods 6, the bottom ends of the first springs 5 are fixedly mounted on the inner wall of the bottom of the hollow cylinders 4, the outer sides of the U-shaped rods 6 are movably abutted to the inner sides of the circular rings 3, hollow rods 7 are fixedly mounted at the bottom of the circular rings 3, horizontal rods 8 are movably mounted at the inner sides of the hollow rods 7, pull rings 10 are fixedly mounted at one ends of the horizontal rods 8, second springs 9 are fixedly mounted at the outer sides of the pull rings 10, one ends of the second springs 9 are fixedly mounted on the hollow rods 7, and the outer sides of the horizontal rods 8 are movably abutted to the inner sides of the U-shaped rods 6, the outside fixed mounting of cavity section of thick bamboo 4 has horizontal pole 11, and the inboard activity butt of horizontal pole 11 has vertical pole 12, and the bottom fixed mounting of vertical pole 12 has baffle 13, and the top fixed mounting of baffle 13 has third spring 14, and the top fixed mounting of third spring 14 is in the bottom of horizontal pole 11, and the outside activity butt of vertical pole 12 is in the inboard of pull ring 10.
In the utility model, the combustion fan 15 is arranged on the inner wall of one side of the furnace body 2, the waste gas exhaust fan 16 is arranged on the inner wall of the top of the furnace body 2, and the flow speed of air can be accelerated by the combustion fan 15 and the waste gas exhaust fan 16, so that the working efficiency can be improved, and the functions of energy conservation and consumption reduction can be achieved.
In the utility model, a material rack 18 is fixedly arranged on the inner wall of the bottom of the furnace body 2, a plurality of flame nozzles 17 are arranged on the top of the inner side of the furnace body 2, and a certain placing function is provided for materials through the arranged material rack 18.
In the utility model, the hollow cylinder 4 is internally provided with a circular groove, the outer side of the U-shaped rod 6 is movably abutted against the inner side of the circular groove, and the U-shaped rod 6 is guided to move vertically through the circular groove.
In the utility model, the cross rod 11 is internally provided with a through hole, the outer side of the vertical rod 12 is movably abutted against the inner side of the through hole, and a certain guiding effect is realized for the vertical movement of the vertical rod 12 through the arranged through hole.
In the utility model, the bottom of the pull ring 10 is provided with a groove, the top end of the vertical rod 12 is inserted into the inner side of the groove, and the movement range is provided for the top end of the vertical rod 12 through the arranged groove.
The working principle of the energy-saving and consumption-reducing equipment of the annealing furnace is as follows: the reset work of the first spring 5 enables the U-shaped rod 6 to move vertically downwards, so that the outer side of the U-shaped rod 6 is abutted to the inner side of the circular ring 3, the reset work of the second spring 9 enables the horizontal rod 8 to move horizontally rightwards, so that one end of the horizontal rod 8 is inserted into the inner side of the U-shaped rod 6, and finally the reset work of the third spring 14 enables the vertical rod 12 to move vertically upwards, so that the top end of the vertical rod 12 is inserted into the pull ring 10, so that the furnace body 2 and the base 1 can be quickly installed or disassembled, so that the installation time is shortened, the traditional bolt connection mode is broken, and finally, the flow speed of air can be accelerated through the combustion fan 15 and the exhaust fan 16, the work efficiency can be improved, and the functions of energy conservation and consumption reduction are achieved.
Claims (6)
1. The energy-saving and consumption-reducing equipment for the annealing furnace comprises a base (1) and is characterized in that a furnace body (2) is movably mounted at the top of the base (1), circular rings (3) are fixedly mounted on the left side and the right side of the furnace body (2), hollow cylinders (4) are fixedly mounted on the two sides of the top of the base (1), U-shaped rods (6) are movably abutted to the inner sides of the hollow cylinders (4), first springs (5) are fixedly mounted at the bottom ends of the U-shaped rods (6), the bottom ends of the first springs (5) are fixedly mounted on the inner wall of the bottom of the hollow cylinder (4), outer sides of the U-shaped rods (6) are movably abutted to the inner sides of the circular rings (3), hollow rods (7) are fixedly mounted at the bottom of the circular rings (3), horizontal rods (8) are movably mounted on the inner sides of the hollow rods (7), pull rings (10) are fixedly mounted at one ends of the horizontal rods (8), and second springs (9) are fixedly mounted on the outer sides of the pull rings (10), one end fixed mounting of second spring (9) is on cavity pole (7), the outside activity butt of horizon bar (8) is in the inboard of U type pole (6), the outside fixed mounting of cavity section of thick bamboo (4) has horizontal pole (11), the inboard activity butt of horizontal pole (11) has vertical pole (12), the bottom fixed mounting of vertical pole (12) has baffle (13), the top fixed mounting of baffle (13) has third spring (14), the top fixed mounting of third spring (14) is in the bottom of horizontal pole (11), the outside activity butt of vertical pole (12) is in the inboard of pull ring (10).
2. The energy-saving and consumption-reducing equipment for the annealing furnace according to claim 1, characterized in that a combustion fan (15) is arranged on the inner wall of one side of the furnace body (2), and a waste gas exhaust fan (16) is arranged on the inner wall of the top of the furnace body (2).
3. The energy-saving and consumption-reducing equipment for the annealing furnace according to claim 1, characterized in that a material rack (18) is fixedly arranged on the inner wall of the bottom of the furnace body (2), and a plurality of flame nozzles (17) are arranged at the top of the inner side of the furnace body (2).
4. The energy-saving and consumption-reducing equipment for the annealing furnace according to claim 1, wherein the hollow cylinder (4) is internally provided with a circular groove, and the outer side of the U-shaped rod (6) is movably abutted against the inner side of the circular groove.
5. The energy-saving and consumption-reducing equipment for the annealing furnace according to claim 1, wherein the cross rod (11) is provided with a through hole inside, and the outer side of the vertical rod (12) is movably abutted against the inner side of the through hole.
6. The energy-saving and consumption-reducing equipment for the annealing furnace according to claim 1, wherein the bottom of the pull ring (10) is provided with a groove, and the top end of the vertical rod (12) is inserted into the inner side of the groove.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121713490.1U CN215887317U (en) | 2021-07-27 | 2021-07-27 | Energy-saving and consumption-reducing equipment for annealing furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121713490.1U CN215887317U (en) | 2021-07-27 | 2021-07-27 | Energy-saving and consumption-reducing equipment for annealing furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN215887317U true CN215887317U (en) | 2022-02-22 |
Family
ID=80562564
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202121713490.1U Expired - Fee Related CN215887317U (en) | 2021-07-27 | 2021-07-27 | Energy-saving and consumption-reducing equipment for annealing furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN215887317U (en) |
-
2021
- 2021-07-27 CN CN202121713490.1U patent/CN215887317U/en not_active Expired - Fee Related
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20220222 |