CN215871764U

CN215871764U - Microphone (CN)

Info

Publication number: CN215871764U
Application number: CN202121828730.2U
Authority: CN
Inventors: 石正雨; 张睿; 童贝
Original assignee: AAC Acoustic Technologies Shenzhen Co Ltd
Current assignee: AAC Technologies Holdings Shenzhen Co Ltd
Priority date: 2021-08-05
Filing date: 2021-08-05
Publication date: 2022-02-18
Anticipated expiration: 2031-08-05

Abstract

The utility model provides a microphone which comprises a substrate with a back cavity, a vibrating diaphragm and a back plate, wherein the vibrating diaphragm and the back plate are arranged on the substrate, the vibrating diaphragm is arranged between the substrate and the back plate, a cavity is formed between the vibrating diaphragm and the back plate, and a groove is formed in one side of the back plate, which is far away from the substrate. The microphone of the utility model forms the groove on one side of the back plate far away from the substrate, and when the back plate is loaded by large sound pressure, the groove part is easy to deform, thereby reducing the stress of other positions of the back plate. Meanwhile, because the stress is concentrated on the groove part, one side surface of the backboard corresponding to the groove is kept flat when bearing the tensile stress, so that the backboard is not easy to break and the reliability of the product is improved.

Description

Microphone (CN)

[ technical field ] A method for producing a semiconductor device

The utility model relates to the technical field of microphones, in particular to a microphone.

[ background of the utility model ]

As the application of the microphone is more and more extensive, the requirement on the reliability of the microphone is higher and higher. Taking fig. 1 as an example of a condenser microphone, the microphone 1a includes a substrate 11a having a back cavity, and a diaphragm 12a and a back plate 13a located on the upper portion of the substrate 11a, wherein the diaphragm 12a and the back plate 13a form a capacitance system. External sound pressure causes the diaphragm 12a to move through the through hole 130a of the back plate 13a, and such movement will change the distance between the diaphragm 12a and the back plate 13a, thereby changing the capacitance and ultimately converting into an electrical signal.

In the prior art, a step structure 131a is generally disposed at a position on the backplate 13a connected to the substrate 11a, and when the microphone is subjected to a large sound pressure load, the backplate 13a deforms, so that stress concentration exists at the position on the backplate 13a where the step structure 131a is disposed, and the backplate 13a is easily broken from the step structure 131a, so that the microphone 1a fails.

Therefore, there is a need to provide a new microphone to solve the above technical problems.

[ Utility model ] content

The utility model aims to provide a microphone with high reliability.

In order to achieve the above object, the present invention provides a microphone, which includes a substrate having a back cavity, and a diaphragm and a back plate disposed on the substrate, wherein the diaphragm is disposed between the substrate and the back plate and forms a cavity with the back plate, and a groove is formed on one side of the back plate away from the substrate.

Preferably, the backplate includes backplate middle part, by the outward flange edge of backplate middle part is followed the radial extension of backplate middle part forms backplate edge part and by the backplate step portion that the outward flange bending of backplate edge part extended formation, the backplate middle part is provided with a plurality of through-holes, the backplate edge part one side of backing to the basement is provided with the recess, backplate step portion with the basement meets.

Preferably, the backplate step portion includes a first step portion formed by bending and extending an outer edge of the backplate edge portion along the vibration direction of the diaphragm, and a second step portion formed by bending and extending an edge of the first step portion away from the backplate edge portion along a direction perpendicular to the vibration direction of the diaphragm, and the second step portion is connected to the substrate.

Preferably, the second stepped portion is formed by bending and extending the edge of the first stepped portion, which is far away from the edge portion of the back plate, in a direction away from the center of the back plate.

Preferably, a plane of the edge portion of the back plate is perpendicular to the vibration direction of the diaphragm.

Preferably, a cross section of the groove along the vibration direction of the diaphragm is rectangular or trapezoidal.

Preferably, the groove bottom surface of the groove is parallel to a side surface of the edge portion of the back plate facing the substrate.

Preferably, a cross section of the groove in a direction perpendicular to a vibration direction of the diaphragm is annular.

Preferably, the number of the grooves is plural, and the plural grooves are arranged along the radial direction of the back plate.

Preferably, a cross section of the back plate in a direction perpendicular to a vibration direction of the diaphragm is circular or polygonal.

The utility model has the beneficial effects that: the microphone of this application forms the recess in the one side that the basement was kept away from to the backplate, and when the backplate received big acoustic pressure load, the recess part produced deformation more easily to will reduce the stress of backplate other positions. Meanwhile, because the stress is concentrated on the groove part, one side surface of the backboard corresponding to the groove is kept flat when bearing the tensile stress, so that the backboard is not easy to break and the reliability of the product is improved.

[ description of the drawings ]

Fig. 1 is a schematic structural diagram of a conventional microphone;

fig. 2 is a schematic structural diagram of a microphone according to an embodiment of the utility model;

FIG. 3 is a cross-sectional view taken along line A-A of FIG. 2;

FIG. 4 is an enlarged view taken at A in FIG. 3;

FIG. 5 is a cross-sectional view of the back plate of FIG. 2;

fig. 6 is a sectional view of a microphone according to another embodiment of the present invention;

FIG. 7 is a cross-sectional view of a back plate of a microphone according to yet another embodiment of the present invention;

fig. 8 is a cross-sectional view of a back plate of a microphone according to still another embodiment of the present invention.

[ detailed description ] embodiments

The utility model is further described with reference to the following figures and embodiments.

It should be noted that all directional indicators (such as upper, lower, left, right, front, back, inner, outer, top, bottom … …) in the embodiment of the present invention are only used to explain the relative position relationship between the components in a specific posture (as shown in the figure), and if the specific posture is changed, the directional indicator is changed accordingly.

It will also be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present.

Referring to fig. 2 to 8, the microphone 100 of the present invention includes a substrate 1 having a back cavity, and a diaphragm 2 and a back plate 3 disposed on the substrate 1, wherein the diaphragm 2 is disposed between the substrate 1 and the back plate 3 and forms a cavity with the back plate 3, and a groove 321 is formed on a side of the back plate 3 away from the substrate 1.

In the microphone 100, the groove 321 is formed on the side of the backplate 3 away from the substrate 1, and when the backplate 3 is subjected to a large sound pressure load, the groove 321 is easily deformed, so that the stress at other positions of the backplate 3 is reduced. Meanwhile, because the stress is concentrated on the groove 321, one side surface of the back plate 3 corresponding to the groove 321 is kept flat when bearing the tensile stress, so that the back plate is less prone to fracture, and the reliability of the product is improved.

Further, the substrate 1 includes an annular base 11 enclosed into the back cavity, the back plate 3 is fixed to the annular base 11, and the diaphragm 2 is disposed between the annular base 11 and the back plate 3 to form the microphone 100.

The section of the diaphragm 2 along the direction vertical to the vibration direction is circular or polygonal.

The cross section of the back plate 3 in a direction perpendicular to the vibration direction of the diaphragm 1 is circular (as shown in fig. 5) or polygonal (for example, octagonal as shown in fig. 7 or rectangular as shown in fig. 8).

In an embodiment, referring to fig. 3 and fig. 4 together, the backplate 3 includes a backplate middle portion 31, a backplate edge portion 32 formed by extending an outer edge of the backplate middle portion 31 in a radial direction of the backplate middle portion 31, and a backplate step portion 33 formed by bending and extending an outer edge of the backplate edge portion 32, the backplate middle portion 31 is provided with a plurality of through holes, one side of the backplate edge portion 32 facing away from the substrate 1 is provided with the groove 321, and the backplate step portion 33 is connected to the substrate 1, so as to achieve connection between the backplate 3 and the substrate 1.

When the backplate 3 is subjected to a large sound pressure load, the groove 321 is easily deformed, so that the stress at the backplate step part 33 is reduced, the stress is concentrated at the joint of the groove 321, the backplate edge part 32 and the backplate step part 33, the fracture is less likely to occur, and the product reliability is improved.

In an embodiment, referring to fig. 3 and fig. 4, the back-plate step portion 33 includes a first step portion 331 formed by bending and extending an outer edge of the back-plate edge portion 32 along the vibration direction of the diaphragm 2, and a second step portion 332 formed by bending and extending an edge of the first step portion 331 away from the back-plate edge portion 32 along a direction perpendicular to the vibration direction of the diaphragm 2, where the second step portion 332 is connected to the substrate 1, so as to connect the back plate 3 and the substrate 1.

In an embodiment, referring to fig. 3 and fig. 4, the second step portion 332 is formed by bending and extending the edge of the first step portion 331 away from the edge portion 32 of the backplate to a direction away from the center of the backplate 3 to form the backplate step portion 33.

In an embodiment, referring to fig. 3 and fig. 4, a plane of the back plate edge portion 32 is perpendicular to the vibration direction of the diaphragm 2. Further, the plane of the back plate edge portion 32 is parallel to the plane of the second step portion 332, and the plane of the first step portion 331 is perpendicular to the plane of the second step portion 332.

In one embodiment, the cross section of the groove 321 along the vibration direction of the diaphragm 2 is rectangular (as shown in fig. 3 and 4) or trapezoidal (as shown in fig. 5).

In an embodiment, referring to fig. 3 and fig. 4, the bottom surface of the groove 321 is parallel to a side surface of the backplate edge 32 facing the substrate 1, so that the backplate 3 is less prone to fracture, and the product reliability is improved.

In an embodiment, referring to fig. 1, a cross section of the groove 321 along a direction perpendicular to a vibration direction of the diaphragm 2 is annular.

In an embodiment, the groove 321 may be provided in a plurality, and the plurality of grooves 321 are arranged along a radial direction of the backplate 3 to form the backplate 3.

In the following description, the diaphragm 2 is circular in cross section in a direction perpendicular to the vibration direction thereof, in accordance with a specific embodiment.

While the foregoing is directed to embodiments of the present invention, it will be understood by those skilled in the art that various changes may be made without departing from the spirit and scope of the utility model.

Claims

1. A microphone comprises a substrate with a back cavity, a vibrating diaphragm and a back plate, wherein the vibrating diaphragm and the back plate are arranged on the substrate, the vibrating diaphragm is arranged between the substrate and the back plate and a cavity is formed between the vibrating diaphragm and the back plate, and the microphone is characterized in that: a groove is formed on one side of the back plate, which is far away from the substrate.

2. The microphone of claim 1, wherein: the backplate includes backplate middle part, by the outward flange edge of backplate middle part is followed the backplate edge part that the radial extension in backplate middle part formed and by the backplate step portion that the outward flange bending type of backplate edge part extended formation, the backplate middle part is provided with a plurality of through-holes, the backplate edge part dorsad one side of basement is provided with the recess, backplate step portion with the basement meets.

3. The microphone of claim 2, wherein: the backplate step portion comprises a first step portion formed by bending and extending the outer edge of the edge portion of the backplate along the vibration direction of the diaphragm and a second step portion formed by bending and extending the edge of the edge portion, far away from the edge portion of the backplate, of the first step portion along the direction perpendicular to the vibration direction of the diaphragm, and the second step portion is connected with the substrate.

4. The microphone of claim 3, wherein: the second step part is formed by bending and extending the edge of the first step part, which is far away from the edge part of the back plate, to the direction which is far away from the center of the back plate.

5. The microphone of claim 2, wherein: the plane of the edge part of the back plate is perpendicular to the vibration direction of the vibrating diaphragm.

6. The microphone of claim 2, wherein: the section of the groove along the vibration direction of the diaphragm is rectangular or trapezoidal.

7. The microphone of claim 6, wherein: the groove bottom surface of the groove is parallel to one side surface of the back plate edge part facing the substrate.

8. The microphone of claim 1, wherein: the section of the groove in the direction perpendicular to the vibration direction of the diaphragm is annular.

9. The microphone of claim 1, wherein: the grooves are arranged in a plurality and are arranged along the radial direction of the back plate.

10. The microphone of claim 1, wherein: the section of the back plate along the direction vertical to the vibration direction of the vibrating diaphragm is circular or polygonal.