CN215864620U

CN215864620U - Silicon carbide ceramic wafer sintering furnace

Info

Publication number: CN215864620U
Application number: CN202120559592.6U
Authority: CN
Inventors: 王晨皎; 王斌; 刘鹏
Original assignee: Ningxia Beifu Technology Co ltd
Current assignee: Ningxia Beifu Technology Co ltd
Priority date: 2021-03-18
Filing date: 2021-03-18
Publication date: 2022-02-18
Anticipated expiration: 2031-03-18

Abstract

The silicon carbide ceramic chip sintering furnace of the utility model comprises a protective cover, a sealed hearth, an electric heating device, a ceramic chip lining plate, a vacuum-pumping pipeline and an inert gas pipeline, the inner side of the protective cover is fixedly connected with the outer side of the sealed hearth, the electric heating device is positioned in the sealed hearth, the lower end of the ceramic plate lining plate is fixedly connected with the bottom of the electric heating device, the vacuumizing pipeline and the inert gas pipeline penetrate through the protective cover and the side wall of the sealed hearth and extend into the sealed hearth, the sealed hearth comprises a stainless steel plate layer, a carbon felt layer and a graphite plate layer, the outer wall of the stainless steel plate layer is fixedly connected with the inner wall of the protective cover through a bracket, the carbon felt layer is positioned at the inner side of the stainless steel plate layer, the graphite plate layer is positioned at the inner side of the carbon felt layer, the stainless steel plate layer, the carbon felt layer and the graphite plate layer are respectively provided with a plurality of corresponding through holes, and the graphite plate layer is fixed on the carbon felt layer through bolts.

Description

Silicon carbide ceramic wafer sintering furnace

Technical Field

The utility model relates to the technical field of silicon carbide product processing, in particular to a silicon carbide ceramic wafer sintering furnace.

Background

The silicon carbide ceramic wafer sintering furnace is used for sintering the blank of the silicon carbide into the ceramic wafer at high temperature. The lining of the silicon carbide ceramic wafer sintering furnace contains a carbon felt layer for heat preservation and heat insulation. Contain tiny hole in the carbon felt layer, the air in the hole is difficult to be taken away, and simultaneously, because the sintering furnace is not complete anaerobic state, the part that carbon felt layer and furnace are adjacent also contacts oxygen and carbon dioxide easily, under high temperature state, carbon felt layer and air or carbon dioxide take place the reaction and produce carbon monoxide, carbon felt layer after the reaction also can become powdered by fibrous form, thereby reduce the life of carbon felt layer, and the live time has been of a specified duration, also can reduce the thermal-insulated ability on carbon felt layer, the powder that produces among the carbonization process can produce negative effects to the potsherd simultaneously.

Disclosure of Invention

In view of the above, it is necessary to provide a silicon carbide ceramic wafer sintering furnace for preventing carbonization of a carbon felt.

A silicon carbide ceramic wafer sintering furnace comprises a protective cover, a sealed hearth, an electric heating device, a ceramic wafer lining plate, a vacuum-pumping pipeline and an inert gas pipeline, the inner side of the protective cover is fixedly connected with the outer side of the sealed hearth, the electric heating device is positioned in the sealed hearth, the lower end of the ceramic plate lining plate is fixedly connected with the bottom of the electric heating device, the vacuumizing pipeline and the inert gas pipeline penetrate through the protective cover and the side wall of the sealed hearth and extend into the sealed hearth, the sealed hearth comprises a stainless steel plate layer, a carbon felt layer and a graphite plate layer, the outer wall of the stainless steel plate layer is fixedly connected with the inner wall of the protective cover through a bracket, the carbon felt layer is positioned at the inner side of the stainless steel plate layer, the graphite plate layer is positioned at the inner side of the carbon felt layer, the stainless steel plate layer, the carbon felt layer and the graphite plate layer are respectively provided with a plurality of corresponding through holes, and the graphite plate layer is fixed on the carbon felt layer through bolts.

Preferably, the protection casing includes four supporting legs, cylindric casing, sealed lid, the upper end of four supporting legs and the bottom fixed connection of cylindric casing, cylindric casing level are placed, and one side of cylindric casing is opened, and sealed lid and one side pin joint of cylindric casing, the opposite side of sealed lid and cylindric casing pass through hasp fixed connection.

Preferably, the sealing cover is provided with a handle to facilitate opening or closing of the sealing cover.

Preferably, the sealed furnace chamber is cubic, and sealed furnace chamber includes furnace body and lid, the outer wall of furnace body and the inner wall fixed connection of cylindric casing, the outside of lid and the inboard fixed connection of sealed lid, the lid is the rectangle, and the size of lid and the opening size phase-match of furnace body to make furnace body and lid form sealed cavity.

Preferably, the electric heating device comprises two supporting frame bodies and a plurality of electric heating rods, the supporting frame bodies are rectangular, two ends of each electric heating rod are fixedly connected with the supporting frame bodies, the electric heating rods are uniformly distributed on the supporting frame bodies, and the ceramic plate lining plates are erected on the electric heating rods at the bottoms of the supporting frame bodies.

Has the advantages that: the silicon carbide ceramic chip sintering furnace of the utility model comprises a protective cover, a sealed hearth, an electric heating device, a ceramic chip lining plate, a vacuum-pumping pipeline and an inert gas pipeline, the inner side of the protective cover is fixedly connected with the outer side of the sealed hearth, the electric heating device is positioned in the sealed hearth, the lower end of the ceramic plate lining plate is fixedly connected with the bottom of the electric heating device, the vacuumizing pipeline and the inert gas pipeline penetrate through the protective cover and the side wall of the sealed hearth and extend into the sealed hearth, the sealed hearth comprises a stainless steel plate layer, a carbon felt layer and a graphite plate layer, the outer wall of the stainless steel plate layer is fixedly connected with the inner wall of the protective cover through a bracket, the carbon felt layer is positioned at the inner side of the stainless steel plate layer, the graphite plate layer is positioned at the inner side of the carbon felt layer, the stainless steel plate layer, the carbon felt layer and the graphite plate layer are respectively provided with a plurality of corresponding through holes, and the graphite plate layer is fixed on the carbon felt layer through bolts. The carbon felt is separated from the interior of the sealed hearth by the graphite plate, so that the temperature of a carbon felt layer can be effectively reduced, and the reaction of air and the carbon felt layer is reduced.

Drawings

Fig. 1 is a schematic view of a preferred angle structure of a silicon carbide ceramic wafer sintering furnace according to the present invention.

FIG. 2 is a schematic view of another preferred angle structure of the sintering furnace for silicon carbide ceramic wafers according to the present invention.

FIG. 3 is a schematic view of a partial structure of a sintering furnace for a silicon carbide ceramic wafer according to the present invention.

In the figure: the device comprises a silicon carbide ceramic wafer sintering furnace 10, a protective cover 20, supporting legs 201, a cylindrical shell 202, a sealing cover 203, a sealing hearth 30, a stainless steel plate layer 301, a carbon felt layer 302, a graphite plate layer 303, a furnace body 304, a cover body 305, an electric heating device 40, a supporting frame 401, an electric heating rod 402, a ceramic wafer lining plate 50, a vacuumizing pipeline 60 and an inert gas pipeline 70.

Detailed Description

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to these drawings without creative efforts.

Referring to fig. 1 to 3, a silicon carbide ceramic wafer sintering furnace 10 includes a protective cover 20, a sealed furnace chamber 30, an electric heating device 40, a ceramic wafer lining plate 50, a vacuum pumping pipeline 60, and an inert gas pipeline 70, wherein an inner side of the protective cover 20 is fixedly connected with an outer side of the sealed furnace chamber 30, the electric heating device 40 is located in the sealed furnace chamber 30, a lower end of the ceramic wafer lining plate 50 is fixedly connected with a bottom of the electric heating device 40, the vacuum pumping pipeline 60 and the inert gas pipeline 70 penetrate through the protective cover 20 and a side wall of the sealed furnace chamber 30 to extend into the sealed furnace chamber 30, the sealed furnace chamber 30 includes a stainless steel plate layer 301, a carbon felt layer 302, and a graphite plate layer 303, an outer wall of the stainless steel plate layer 301 is fixedly connected with an inner wall of the protective cover 20 through a bracket, the carbon felt layer 302 is located on an inner side of the stainless steel plate layer 301, the graphite plate layer 303 is located on an inner side of the carbon felt layer 302, and the stainless steel plate layer 301, The carbon felt layer 302 and the graphite plate layer 303 are respectively provided with a plurality of corresponding through holes, and the graphite plate layer 303 is fixed on the carbon felt layer 302 through bolts.

The graphite plate layer 303 has good heat insulation capability, so that when high temperature conduction in the hearth is conducted from the graphite plate to the carbon felt layer 302, the temperature is greatly reduced, and the reaction of the carbon felt with carbon dioxide or oxygen is reduced. Meanwhile, the graphite plate layer 303 also isolates external air, so that the carbon felt cannot contact the air, and the phenomenon that the carbon felt is changed into powder from fiber after reaction can be avoided.

Fix the graphite cake through the bolt, under the effect of bolt, relative extrusion takes place for graphite cake and corrosion resistant plate to make the carbon felt can be compacter, reduced the air volume that holds in the space, help reducing the reaction that carbon felt layer 302 took place.

Further, the protection cover 20 includes four support legs 201, a cylindrical housing 202, and a sealing cover 203, wherein the upper ends of the four support legs 201 are fixedly connected with the bottom of the cylindrical housing 202, the cylindrical housing 202 is horizontally placed, one side of the cylindrical housing 202 is open, the sealing cover 203 is pivoted with one side of the cylindrical housing 202, and the other side of the sealing cover 203 is fixedly connected with the cylindrical housing 202 through a buckle.

Further, a handle is provided on the sealing cover 203 to facilitate opening or closing the sealing cover 203.

Further, the sealed furnace 30 is cube-shaped, the sealed furnace 30 includes a furnace body 304 and a cover body 305, an outer wall of the furnace body 304 is fixedly connected with an inner wall of the cylindrical housing 202, an outer side of the cover body 305 is fixedly connected with an inner side of the sealing cover 203, the cover body 305 is rectangular, and a size of the cover body 305 is matched with a size of an opening of the furnace body 304, so that the furnace body 304 and the cover body 305 form a sealed cavity.

Further, the electric heating device 40 includes two support frame bodies 401 and a plurality of electric heating rods 402, the support frame bodies 401 are rectangular, two ends of the electric heating rods 402 are fixedly connected with the support frame bodies 401, the electric heating rods 402 are uniformly distributed on the support frame bodies 401, and the ceramic plate lining plate 50 is erected on the electric heating rods 402 at the bottom of the support frame bodies 401.

While the utility model has been described with reference to a preferred embodiment, it will be understood by those skilled in the art that various changes in form and detail may be made therein without departing from the spirit and scope of the utility model.

Claims

1. The utility model provides a carborundum potsherd fritting furnace which characterized in that: including protection casing, sealed furnace, electric heater unit, potsherd welt, evacuation pipeline, inert gas pipeline, the inboard and sealed furnace's of protection casing outside fixed connection, electric heater unit are arranged in sealed furnace, the lower extreme of potsherd welt and electric heater unit's bottom fixed connection, evacuation pipeline and inert gas pipeline pass protection casing, sealed furnace's lateral wall and stretch into to sealed furnace in, sealed furnace includes corrosion resistant plate layer, carbon felt layer, graphite sheet layer, the outer wall on corrosion resistant plate layer passes through support fixed connection with the inner wall of protection casing, and the carbon felt layer is located corrosion resistant plate layer's inboard, and the graphite sheet layer is located the inboard on carbon felt layer, corrosion resistant plate layer, carbon felt layer, graphite sheet layer are equipped with a plurality of corresponding through-holes respectively to fix graphite sheet layer on carbon felt layer through the bolt.

2. The silicon carbide ceramic wafer sintering furnace of claim 1 wherein: the protection casing includes four supporting legs, cylindric casing, sealed lid, the upper end of four supporting legs and the bottom fixed connection of cylindric casing, cylindric casing level are placed, and one side of cylindric casing is opened, and sealed lid passes through hasp fixed connection with one side pin joint of cylindric casing, the opposite side of sealed lid and cylindric casing.

3. The silicon carbide ceramic wafer sintering furnace of claim 2 wherein: the sealing cover is provided with a handle so as to be convenient for opening or closing the sealing cover.

4. The silicon carbide ceramic wafer sintering furnace of claim 2 wherein: the sealed furnace chamber is cubic, and sealed furnace chamber includes furnace body and lid, the outer wall of furnace body and the inner wall fixed connection of cylindric casing, the outside of lid and the inboard fixed connection of sealed lid, the lid is the rectangle, and the size of lid and the opening size phase-match of furnace body to make furnace body and lid form sealed cavity.

5. The silicon carbide ceramic wafer sintering furnace of claim 1 wherein: the electric heating device comprises two supporting frame bodies and a plurality of electric heating rods, wherein the supporting frame bodies are rectangular, two ends of each electric heating rod are fixedly connected with the supporting frame bodies, the electric heating rods are uniformly distributed on the supporting frame bodies, and the ceramic plate lining plates are erected on the electric heating rods at the bottoms of the supporting frame bodies.