CN215856465U - Novel electrode structure - Google Patents
Novel electrode structure Download PDFInfo
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- CN215856465U CN215856465U CN202121227369.8U CN202121227369U CN215856465U CN 215856465 U CN215856465 U CN 215856465U CN 202121227369 U CN202121227369 U CN 202121227369U CN 215856465 U CN215856465 U CN 215856465U
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Abstract
The utility model discloses a novel electrode structure, comprising: the electrode is provided with a connecting end at the upper end, a cooling water channel is arranged in the electrode, and a water outlet is formed in the side surface of the cooling water channel at the lower end of the electrode; the electrode block is connected to the side face of the lower end of the electrode; the water pipe, the water pipe sets up in the cooling water course, through adapter sealing connection between the lower extreme of water pipe and the under shed of cooling water course, the water pipe lower extreme is connected with into water elbow. The utility model has the beneficial effects that: when the electrode cooling device is used, the top of the electrode is the highest temperature position, so that important cooling is needed, cooling water enters the position of a cooling water channel at the top of the electrode through a water pipe, cooling water can be fully cooled to the top of the electrode, and the top of the electrode is prevented from being damaged due to overhigh temperature.
Description
Technical Field
The utility model belongs to the field of monocrystalline silicon production equipment, and particularly relates to a novel electrode structure.
Background
The monocrystalline furnace is necessary equipment in the process of converting polycrystalline silicon into monocrystalline silicon, the monocrystalline silicon is one of the most important monocrystalline materials in the world at present as a key supporting material of the modern information society, and the monocrystalline furnace is not only a main functional material for developing computers and integrated circuits, but also a main functional material for photovoltaic power generation and utilizing solar energy.
The electrode is an important part in single crystal furnace equipment and has the function of electrifying and heating a heater in the whole furnace body. In the use process, the electrode is connected with the furnace chassis, and the whole furnace body needs to be sealed. Meanwhile, the electrode part is generally high in temperature during use and needs to be cooled.
In summary, in order to solve the existing technical problems, the utility model designs a novel electrode structure which has a simple structure, can be rapidly cooled and has a good cooling effect.
Disclosure of Invention
The utility model aims to solve the technical problems in the prior art and designs a novel electrode structure which is simple in structure, can be rapidly cooled and has a good cooling effect.
The purpose of the utility model can be realized by the following technical scheme:
a novel electrode structure comprising:
the electrode is provided with a connecting end at the upper end, a cooling water channel is arranged in the electrode, and a water outlet is formed in the side surface of the cooling water channel at the lower end of the electrode;
the electrode block is connected to the side face of the lower end of the electrode;
the water pipe, the water pipe sets up in the cooling water course, through adapter sealing connection between the lower extreme of water pipe and the under shed of cooling water course, the water pipe lower extreme is connected with into water elbow.
Furthermore, an electrode sheath is sleeved on the upper end of the electrode, and an electrode protecting cover is arranged in the middle of the electrode sheath.
Further, the electrode middle part has the bulge loop, the bulge loop upper surface is equipped with the insulating piece, the bulge loop lower surface is equipped with down the insulating piece.
Furthermore, a sealing ring is arranged above the convex ring.
Furthermore, a temperature control switch is arranged on the side surface of the lower end of the electrode.
Compared with the prior art, the utility model has reasonable structure and arrangement: when the electrode cooling device is used, the top of the electrode is the highest temperature position, so that important cooling is needed, cooling water enters the position of a cooling water channel at the top of the electrode through a water pipe, cooling water can be fully cooled to the top of the electrode, and the top of the electrode is prevented from being damaged due to overhigh temperature.
Drawings
FIG. 1 is a general schematic view of the novel electrode structure;
FIG. 2 is a structural diagram of the novel electrode;
referring to fig. 1-2, wherein: 1. an electrode; 11. a connecting end; 12. a cooling water channel; 13. a water outlet; 14. a convex ring; 2. an electrode block; 3. a water pipe; 31. an adapter; 32. a water inlet elbow; 41. an electrode sheath; 42. an electrode protecting cover; 51. an insulating sheet is arranged; 52. a lower insulating sheet; 53. a seal ring; 6. a temperature control switch.
Detailed Description
The technical solution of the present invention is further illustrated by the following examples. In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
The first embodiment is as follows:
a novel electrode structure comprising:
the electrode comprises an electrode 1, wherein a connecting end 11 is arranged at the upper end of the electrode 1, a cooling water channel 12 is arranged in the electrode 1, and a water outlet 13 is formed in the side surface of the lower end of the electrode 1 of the cooling water channel 12;
the electrode block 2 is connected to the side surface of the lower end of the electrode 1;
Specifically, the electrode 1 is connected with a furnace chassis of a single crystal furnace, the connecting end 11 on the electrode 1 is provided with a thread structure and is connected with a heater of the single crystal furnace, the electrode block 2 on the electrode 1 is connected with an external circuit through an aluminum row or a cable to electrify the electrode 1, the temperature of the electrode 1 is generally high when the electrode 1 is used, therefore, the electrode 1 structure needs to be cooled in time, when the electrode 1 is used, the water inlet elbow 32 enters low-temperature cooling water into the water pipe 3, the cooling water reaches the part of the cooling water channel 12 positioned in the connecting end 11 through the water pipe 3 to directly cool the connecting end 11, the connecting end 11 with the highest temperature on the electrode 1 is prevented from being burnt out, the cooling water flows downwards in the cooling water channel 12, the middle part of the electrode 1 is cooled gradually and sealed by the adapter 31, the cooling water cannot leak out from the lower ends of the cooling water channel 12 and the water pipe 3, and is finally discharged from the water outlet 13, thereby forming a complete water cooling loop.
Example two:
the difference between the second embodiment and the first embodiment is that the electrode 1 is sleeved with an electrode sheath 41, and the middle part of the electrode sheath 41 is provided with an electrode protective cover 42.
Specifically, the electrode sheath 41 and the electrode protecting cover 42 can prevent impurities such as dust from entering the furnace during use.
Example three:
the difference between the third embodiment and the first embodiment is that the electrode 1 has a convex ring 14 in the middle, the upper surface of the convex ring 14 is provided with an upper insulation sheet 51, and the lower surface of the convex ring 14 is provided with a lower insulation sheet 52.
Specifically, the convex ring 14 is the joint of the electrode 1 and the single crystal furnace equipment, and the upper insulation sheet 51 and the lower insulation sheet 52 can ensure the insulation between the electrode 1 and the single crystal furnace equipment, thereby ensuring the safety of the whole furnace body.
Example four:
the difference between the fourth embodiment and the first embodiment is that a sealing ring 53 is arranged above the convex ring 14.
Specifically, the sealing ring 53 can ensure the sealing property of the connection between the electrode 1 and the single crystal furnace, and ensure the vacuum environment in the use process inside the furnace body.
Example five:
the difference between the fifth embodiment and the first embodiment is that the side surface of the lower end of the electrode 1 is provided with a temperature control switch 6.
Specifically, temperature detect switch 6 can be in real time convenient accurate monitoring the temperature, in case electrode 1 reaches the temperature value of predetermineeing, temperature detect switch 6 signals power cut-off, prevents to make electrode 1 burn out because of the high temperature.
What has been described herein is merely a preferred embodiment of the utility model, and the scope of the utility model is not limited thereto. Modifications, additions, or substitutions by those skilled in the art to the specific embodiments described herein are intended to be within the scope of the utility model.
Claims (5)
1. A novel electrode structure, comprising:
the electrode is provided with a connecting end at the upper end, a cooling water channel is arranged in the electrode, and a water outlet is formed in the side surface of the cooling water channel at the lower end of the electrode;
the electrode block is connected to the side face of the lower end of the electrode;
the water pipe, the water pipe sets up in the cooling water course, through adapter sealing connection between the lower extreme of water pipe and the under shed of cooling water course, the water pipe lower extreme is connected with into water elbow.
2. The novel electrode structure as claimed in claim 1, wherein the electrode is sleeved with an electrode sheath, and the electrode sheath is provided with an electrode protecting cover in the middle.
3. The novel electrode structure of claim 1, wherein the middle part of the electrode is provided with a convex ring, the upper surface of the convex ring is provided with an upper insulation sheet, and the lower surface of the convex ring is provided with a lower insulation sheet.
4. The novel electrode structure of claim 3, wherein a sealing ring is arranged above the convex ring.
5. The novel electrode structure of claim 1, wherein a temperature-controlled switch is provided on the side of the lower end of the electrode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121227369.8U CN215856465U (en) | 2021-06-02 | 2021-06-02 | Novel electrode structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121227369.8U CN215856465U (en) | 2021-06-02 | 2021-06-02 | Novel electrode structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN215856465U true CN215856465U (en) | 2022-02-18 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202121227369.8U Active CN215856465U (en) | 2021-06-02 | 2021-06-02 | Novel electrode structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN215856465U (en) |
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2021
- 2021-06-02 CN CN202121227369.8U patent/CN215856465U/en active Active
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