CN215815820U

CN215815820U - Silicon wafer loading position detection device of wafer inserting machine

Info

Publication number: CN215815820U
Application number: CN202121750266.XU
Authority: CN
Inventors: 沈习部; 朱兴华; 蔺雷亭
Original assignee: Konca Solar Cell Co ltd
Current assignee: Konca Solar Cell Co ltd
Priority date: 2021-07-29
Filing date: 2021-07-29
Publication date: 2022-02-11
Anticipated expiration: 2031-07-29

Abstract

The utility model discloses a silicon wafer loading position detection device of a wafer inserting machine, which comprises a detection box, wherein a through hole is formed in the center of the top of the detection box, a slide rod is connected inside the through hole in a sliding manner, a detection head is installed at the top end of the slide rod, a lower base is installed at the bottom end of the slide rod, which is located inside the detection box, two sides of the lower base are connected with the inner wall of the top of the detection box through connecting springs, an initial position sensor is installed on one side of the bottom of the slide rod, and a pressing induction sheet matched with the initial position sensor for use is fixed inside the bottom of the detection box through an installation seat. The utility model has novel structure and ingenious conception, and detects the silicon wafer by the mechanical transmission type principle, thereby reducing the interference of water turbidity to the sensor, reducing the consumption of clean water during inserting the wafer, and achieving the purposes of reducing water consumption and sewage discharge.

Description

Silicon wafer loading position detection device of wafer inserting machine

Technical Field

The utility model relates to the technical field of accessories of a wafer inserting machine, in particular to a device for detecting a wafer loading position of a silicon wafer of the wafer inserting machine.

Background

The wafer inserting machine solves the problem that the silicon wafer is washed by the tool before being washed, and completely realizes the actions of automatic material distribution, automatic feeding, automatic basket entering, automatic basket changing, full material alarm and the like. After the equipment is used, the basic manual operation of the silicon wafer inserting sheet can be realized, and manual sheet-by-sheet operation is not needed except for material loading and unloading.

The existing wafer inserting machine detects the wafer loading position of a silicon wafer by 3 groups of optical fibers in water, the requirement of the optical fibers on the cleanliness of the water is very high, silicon powder on the silicon wafer drops into the water during the wafer inserting process, the water is turbid seriously, the optical fibers cannot work normally, the turbidity of a large amount of fresh water dilution water is needed, and the water consumption is increased. Therefore, it is necessary to design a silicon chip position detecting device for a wafer inserting machine.

SUMMERY OF THE UTILITY MODEL

Aiming at the situation, the utility model provides the device for detecting the wafer-loading position of the silicon wafer of the wafer inserting machine, which has novel structure and ingenious conception, detects the silicon wafer by a mechanical transmission type principle, reduces the interference of water turbidity to an inductor, reduces the consumption of clean water during wafer inserting, and achieves the purposes of reducing water consumption and sewage discharge.

In order to achieve the purpose, the utility model provides the following technical scheme: the utility model provides a piece position detection device on insert machine silicon chip, includes the detection case, the through-hole has been seted up to the top center department of detection case, the inside sliding connection of through-hole has the slide bar, the detection head is installed on the top of slide bar, the bottom of slide bar is located the internally mounted of detection case has down the base, the both sides of base all are through the top inner wall connection of coupling spring with the detection case down, initial position sensor is installed to bottom one side of slide bar, the bottom of detection case is inside to be fixed with through the mount pad and to push down the response piece with initial position sensor cooperation use.

Preferably, the inside mounting of detection case has spacing slide rail, sliding connection has spacing gyro wheel on the spacing slide rail, spacing gyro wheel is fixed in bottom one side of slide bar.

Preferably, an L-shaped positioning plate is installed on one side of the outer wall of the detection box, an internal thread hole is formed in the center of the L-shaped positioning plate, a threaded rotating handle is fixedly screwed on the internal thread hole, and a pressing seat is fixed at the tail end of the threaded rotating handle.

Preferably, a silica gel sealing ring in contact with the sliding rod is installed in the through hole.

Preferably, the slide bar and the detection head are both stainless steel material members.

The utility model has the beneficial effects that:

1. the silicon chip is detected by a mechanical transmission type principle, so that the interference of water turbidity to the sensor is reduced, the consumption of clean water during inserting can be reduced, and the purposes of reducing water consumption and sewage discharge are achieved;

2. the limiting slide rail and the limiting idler wheel are arranged, so that the motion of the slide bar can be limited, the motion deviation of the slide bar is prevented, and the detection precision is prevented from being influenced;

3. after the detection box is clamped by the L-shaped positioning plate, the threaded rotary handle is rotated, and the detection box is positioned by the pressing seat, so that the fixing stability is good, and the disassembly is convenient.

Drawings

The accompanying drawings, which are included to provide a further understanding of the utility model and are incorporated in and constitute a part of this specification, illustrate embodiments of the utility model and together with the description serve to explain the principles of the utility model and not to limit the utility model. In the drawings:

FIG. 1 is a schematic view of the overall three-dimensional structure of the present invention;

FIG. 2 is a schematic cross-sectional plan view of the inspection box of the present invention;

FIG. 3 is a schematic plan view of the L-shaped positioning plate of the present invention;

reference numbers in the figures: 1. a detection box; 2. a through hole; 3. a silica gel sealing ring; 4. a slide bar; 5. a detection head; 6. An L-shaped positioning plate; 7. a mounting seat; 8. pressing the induction sheet; 9. a lower base; 10. a limiting slide rail; 11. limiting the idler wheel; 12. a connecting spring; 13. an initial position sensor; 14. an internally threaded bore; 15. a threaded knob; 16. and (6) pressing a seat.

Detailed Description

The technical scheme of the utility model is clearly and completely described in the following with reference to the accompanying drawings. In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance.

Example one

As shown in fig. 1 and 2, the present invention provides the following technical solutions: a silicon wafer upper piece position detection device of a wafer inserting machine comprises a detection box 1, a through hole 2 is formed in the center of the top of the detection box 1, a slide rod 4 is connected inside the through hole 2 in a sliding mode, a detection head 5 is installed at the top end of the slide rod 4, a lower base 9 is installed at the bottom end of the slide rod 4 and located inside the detection box 1, two sides of the lower base 9 are connected with the inner wall of the top of the detection box 1 through connecting springs 12, an initial position sensor 13 is installed on one side of the bottom of the slide rod 4, a lower pressing induction piece 8 matched with the initial position sensor 13 for use is fixed inside the bottom of the detection box 1 through an installation seat 7, the detection head 5 can be jacked to move after the silicon wafer inserting machine is positioned, the slide rod 4 is driven to move towards the inside of the detection box 1, the initial position sensor 13 is driven to move downwards, and when the lower pressing induction piece 8 is sensed, the silicon wafer upper piece can be judged to be in place, the silicon chip is detected by a mechanical transmission type principle, so that the interference of water turbidity to the sensor is reduced, the consumption of clean water during inserting can be reduced, and the purposes of reducing water consumption and reducing sewage discharge are achieved.

Preferably, the through hole 2 is internally mounted with a silica gel sealing ring 3 in contact with the sliding rod 4, and the waterproof performance can be improved through the silica gel sealing ring 3.

Preferably, the slide bar 4 and the detection head 5 are both stainless steel components, so that the service life is long, and the corrosion resistance is good.

Example two

In the first embodiment, the sliding rod 4 is prone to shift during movement, which affects the detection precision, referring to fig. 2, as another preferred embodiment, as a difference from the first embodiment, a limiting sliding rail 10 is installed inside the detection box 1, a limiting roller 11 is slidably connected to the limiting sliding rail 10, the limiting roller 11 is fixed on one side of the bottom of the sliding rod 4, and the limiting sliding rail 10 and the limiting roller 11 are arranged, so that a limiting effect can be achieved on the movement of the sliding rod 4, the movement shift of the sliding rod 4 is prevented from occurring, and the detection precision is affected.

EXAMPLE III

In the first embodiment, the detection box 1 is inconvenient to mount, and referring to fig. 1 and fig. 3, as another preferred embodiment, the difference from the first embodiment is that an L-shaped positioning plate 6 is mounted on one side of the outer wall of the detection box 1, an internal threaded hole 14 is formed in the center of the L-shaped positioning plate 6, a threaded knob 15 is screwed and fixed on the internal threaded hole 14, a pressing base 16 is fixed at the tail end of the threaded knob 15, and after the detection box 1 is clamped by the L-shaped positioning plate 6, the threaded knob 15 is rotated to perform positioning by the pressing base 16, so that not only is the fixing stability good, but also the detachment is convenient.

Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that changes may be made in the embodiments and/or equivalents thereof without departing from the spirit and scope of the utility model. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. The utility model provides a piece position detection device on insert machine silicon chip, includes detection case (1), its characterized in that: through-hole (2) have been seted up at the top center department of detection case (1), the inside sliding connection of through-hole (2) has slide bar (4), detection head (5) are installed on the top of slide bar (4), the internally mounted that the bottom of slide bar (4) is located detection case (1) has lower base (9), the both sides of lower base (9) all are through connecting spring (12) and the top inner wall connection of detection case (1), initial position sensor (13) are installed to bottom one side of slide bar (4), the bottom inside of detection case (1) is fixed with and responds to piece (8) with initial position sensor (13) cooperation use down through mount pad (7).

2. The device for detecting the wafer loading position of the wafer inserting machine according to claim 1, characterized in that: the inside mounting of detection case (1) has spacing slide rail (10), sliding connection has spacing gyro wheel (11) on spacing slide rail (10), bottom one side at slide bar (4) is fixed in spacing gyro wheel (11).

3. The device for detecting the wafer loading position of the wafer inserting machine according to claim 1, characterized in that: l shape locating plate (6) are installed to outer wall one side of detection case (1), internal thread hole (14) have been seted up to the center department of L shape locating plate (6), internal thread hole (14) top spin is fixed with screw thread swing handle (15), the tail end of screw thread swing handle (15) is fixed with and presses seat (16).

4. The device for detecting the wafer loading position of the wafer inserting machine according to claim 1, characterized in that: and a silica gel sealing ring (3) in contact with the sliding rod (4) is arranged in the through hole (2).

5. The device for detecting the wafer loading position of the wafer inserting machine according to claim 1, characterized in that: the slide bar (4) and the detection head (5) are both stainless steel components.