CN215810787U

CN215810787U - Polishing pad surface detection device

Info

Publication number: CN215810787U
Application number: CN202122035419.9U
Authority: CN
Inventors: 蒋策策
Original assignee: Zing Semiconductor Corp
Current assignee: Zing Semiconductor Corp
Priority date: 2021-08-26
Filing date: 2021-08-26
Publication date: 2022-02-11
Anticipated expiration: 2031-08-26

Abstract

The application provides a polishing pad surface detection device, which belongs to the technical field of polishing pads and specifically comprises a guide rail panel and a bracket arranged below the guide rail panel, wherein the guide rail panel is erected above the polishing pad through the bracket; the device also comprises a screw rod penetrating through the guide rail panel, wherein the end part of the screw rod, which is positioned on the lower side of the guide rail panel, is detachably connected with a probe, and the probe is used for detecting the distance from the probe to the polishing pad; the screw rod is positioned on the upper side of the guide rail panel and is connected with an adjusting component, and the adjusting component is used for adjusting the height of the probe from the polishing pad; the screw rod is positioned on the upper side of the guide rail panel and is also connected with a height instrument, and the height instrument is electrically connected with the probe; the guide rail panel is provided with a sliding guide rail, the adjusting component is internally provided with a driving motor, and the screw rod slides along the sliding guide rail under the action of the driving motor so as to drive the probe to move on the surface of the polishing pad. Through the processing scheme of this application, avoid the error that artifical detection arouses, it is extravagant to reduce the polishing pad, and convenient to use has improved detection efficiency and rate of accuracy.

Description

Polishing pad surface detection device

Technical Field

The application relates to a polishing pad technical field especially relates to a polishing pad surface detection device.

Background

The chemical mechanical polishing is an indispensable key process in the chip and silicon chip manufacturing industry, the polishing pad is an indispensable key consumable in the chemical mechanical polishing process, the flatness and the defects of the polishing pad have decisive significance on the product quality, but the polishing pad belongs to a normal consumable, the polishing pad needs to be replaced when the polishing pad is used for a certain service life, and the surface flatness of the attached polishing pad needs to be checked after the replacement is finished; if the polishing pad is replaced due to erroneous judgment during inspection, the polishing pad is wasted.

SUMMERY OF THE UTILITY MODEL

Accordingly, embodiments of the present invention provide a polishing pad surface inspection apparatus that at least partially solves the problems of the prior art.

The embodiment of the application provides a polishing pad surface detection device, which comprises a guide rail panel and a bracket arranged below the guide rail panel, wherein the guide rail panel is erected above a polishing pad through the bracket;

the device also comprises a screw rod penetrating through the guide rail panel, wherein a probe is detachably connected to the end part of the screw rod, which is positioned on the lower side of the guide rail panel, and the probe is used for detecting the distance from the probe to the polishing pad; the screw rod is positioned on the upper side of the guide rail panel and is connected with an adjusting component, and the adjusting component is used for adjusting the height of the probe from the polishing pad; the screw rod is positioned on the upper side of the guide rail panel and is also connected with a height instrument, and the height instrument is electrically connected with the probe;

the polishing device is characterized in that a sliding guide rail is arranged on the guide rail panel, a driving motor is arranged in the adjusting component, and the screw rod slides along the sliding guide rail under the action of the driving motor so as to drive the probe to move on the surface of the polishing pad.

According to a specific implementation manner of the embodiment of the application, the height meter is provided with a switch button, a zero calibration button and an alarm, and when the probe detects a convex area or a concave area on the polishing pad, the alarm gives an alarm.

According to a specific implementation manner of the embodiment of the application, a first alarm gear and a second alarm gear are arranged in the alarm, and the first alarm gear is used for indicating that the probe detects the convex area; the second alarm position is used for indicating that the probe detects a concave area.

According to a concrete implementation mode of the embodiment of the application, the height instrument is further provided with a display panel, and the display panel displays the height value detected by the probe.

According to a specific implementation manner of the embodiment of the application, the sliding guide rail is arranged in a spiral shape which is coiled around the center point of the guide rail panel, and the edge of the sliding guide rail is in a sawtooth shape.

According to a concrete implementation mode of this application embodiment, the probe includes clamping part and contact site, the clamping part with screw rod swing joint, the contact site be used for with the polishing pad contact, the clamping part with contact site integrated into one piece.

According to a specific implementation manner of the embodiment of the application, the probe is a surface contact probe, the surface contact probe is used for the polishing pad with a groove on the surface, a clamping part of the surface contact probe is a cylinder, a contact part of the surface contact probe is a circular truncated cone, and the bottom surface of the circular truncated cone is in contact with the polishing pad;

or, the probe is a point contact type probe, the point contact type probe is used for the polishing pad without a groove on the surface, the clamping part of the point contact type probe is a cylinder, the contact part of the point contact type probe is in a bullet head shape, and the head part of the bullet head is contacted with the polishing pad.

According to a specific implementation manner of the embodiment of the application, the screw is provided with an illuminating component at the lower side of the guide rail panel, and light emitted by the illuminating component is directed at the contact part of the probe and the polishing pad.

According to a specific implementation manner of the embodiment of the application, the illumination component comprises a laser lamp and a fixed arm, and the laser lamp is fixed on the screw rod through the fixed arm.

According to a specific implementation manner of the embodiment of the application, the adjusting member is in threaded connection with a screw height adjusting knob, and the screw height adjusting knob is perpendicular to the screw.

Advantageous effects

According to the polishing pad surface detection device in the embodiment of the application, the guide rail panel, the driving motor and the movably connected probe are arranged, so that the probe can automatically detect the flatness of the surface of the polishing pad along the track of the sliding guide rail, and can give a warning when surface abnormality is detected, so that detection personnel can conveniently check the surface; the appropriate probe can be replaced for different types of polishing pads, and the use is convenient; the polishing pad waste caused by misjudgment caused by manual inspection can be avoided by using a mechanized detection device, and the detection efficiency and the accuracy are also improved.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings needed to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.

FIG. 1 is a block diagram of a polishing pad surface inspection apparatus according to an embodiment of the present invention;

FIG. 2 is a block diagram of a height gauge according to an embodiment of the present invention;

FIG. 3 is a block diagram of a surface contact probe in accordance with one embodiment of the present invention;

FIG. 4 is a block diagram of a point contact probe according to an embodiment of the present invention;

FIG. 5 is a schematic diagram of a movement trace of a surface contact probe according to an embodiment of the present invention;

fig. 6 is a schematic diagram of a movement track of a point contact type probe according to an embodiment of the present invention.

In the figure: 1. a support; 2. a guide rail panel; 3. a polishing pad; 31. a grooved polishing pad; 311. a surface contact probe movement trajectory; 32. a non-grooved polishing pad; 321. a point contact probe movement trajectory; 4. a screw; 5. a probe; 51. a surface contact probe; 511. a surface contact probe clamping part; 512. a surface contact probe contact portion; 52. a point contact type probe; 521. a point contact probe clamping part; 522. a point contact probe contact portion; 6. an adjustment member; 7. a screw height adjustment knob; 8. a drive motor; 9. a height gauge; 91. a switch button; 92. a zero calibration button; 93. an alarm; 94. a display panel; 10. a fixed arm; 11. a laser light.

Detailed Description

The embodiments of the present application will be described in detail below with reference to the accompanying drawings.

The following description of the embodiments of the present application is provided by way of specific examples, and other advantages and effects of the present application will be readily apparent to those skilled in the art from the disclosure herein. It is to be understood that the embodiments described are only a few embodiments of the present application and not all embodiments. The present application is capable of other and different embodiments and its several details are capable of modifications and/or changes in various respects, all without departing from the spirit of the present application. It is to be noted that the features in the following embodiments and examples may be combined with each other without conflict. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.

It is noted that various aspects of the embodiments are described below within the scope of the appended claims. It should be apparent that the aspects described herein may be embodied in a wide variety of forms and that any specific structure and/or function described herein is merely illustrative. Based on the present application, one skilled in the art should appreciate that one aspect described herein may be implemented independently of any other aspects and that two or more of these aspects may be combined in various ways. For example, an apparatus may be implemented and/or a method practiced using any number of the aspects set forth herein. Additionally, such an apparatus may be implemented and/or such a method may be practiced using other structure and/or functionality in addition to one or more of the aspects set forth herein.

It should be noted that the drawings provided in the following embodiments are only for illustrating the basic idea of the present application, and the drawings only show the components related to the present application rather than the number, shape and size of the components in actual implementation, and the type, amount and ratio of the components in actual implementation may be changed arbitrarily, and the layout of the components may be more complicated.

In addition, in the following description, specific details are provided to facilitate a thorough understanding of the examples. However, it will be understood by those skilled in the art that the aspects may be practiced without these specific details.

The embodiment of the application provides a polishing pad surface detection device, and the device includes guide rail panel 2 and sets up in guide rail panel 2 below support 1, and support 1 sets up along guide rail panel 2's periphery, and guide rail panel 2 erects in polishing pad 3 top through the support. Specifically, the central point of the guide rail panel 2 is just opposite to the central point of the polishing pad 3, the guide rail panel 2 can be set to be circular or rectangular, if the guide rail panel is circular, the diameter of the guide rail panel is larger than that of the polishing pad 3, if the guide rail panel is rectangular, the length of the short side of the rectangle is larger than that of the polishing pad 3, and the specific shape of the guide rail panel 2 can be replaced by other shapes according to actual requirements.

The polishing pad surface detection device also comprises a screw rod 4 penetrating through the guide rail panel 2, the end part of the screw rod 4, which is positioned on the lower side of the guide rail panel 2, is detachably connected with a probe 5, and the probe 5 is used for detecting the distance from the probe 5 to the polishing pad 3. Considering that there are different types of polishing pads 3, including a grooved surface polishing pad 31 and a non-grooved surface polishing pad 32, when different types of polishing pads 3 are inspected, it is necessary to replace different types of probes 5, and therefore, the screw 4 and the probes 5 are provided in a detachable connection.

Specifically, the end part of the screw rod 4 is a hollow structure, the probe 5 can be inserted into the hollow structure and fixed through a connecting piece, and the connecting piece can be a common connecting piece such as a positioning pin, a bolt and the like; or the end part of the screw rod 4 is provided with a magnetic attraction structure for magnetically attracting the probe 5; or the end part of the screw rod 4 is arranged into a petal body structure, and the probe 5 can go deep into the petal body structure and is clamped and fixed through a screwing component sleeved on the petal body structure. It should be noted that the specific connection manner of the screw 4 and the probe 5 is not limited to the embodiment.

More specifically, the screw 4 is connected with an adjusting member 6, the adjusting member 6 is located on the upper side of the guide panel 2, and the adjusting member 6 is used for adjusting the height of the probe 5 from the polishing pad 3. Specifically, the adjusting member 6 is sleeved on the screw 4, and the distance from the screw 4 to the polishing pad 3 can be adjusted by rotating the screw 4, so as to adjust the height from the probe 5 to the polishing pad 3. The screw rod 4 is located the upside of guide rail panel 2 and still is connected with height instrument 9, and height instrument 9 is connected with probe 5 electricity, and height instrument 9 can receive the probe 5 that probe 5 detected apart from the height of polishing pad 3 to judge according to the height value whether polishing pad 3 surface is level and smooth, also judge that whether there is protruding or depressed area on polishing pad 3 surface promptly.

The guide panel 2 is provided with a sliding guide rail, the adjusting member 6 is internally provided with a driving motor 8, and the screw rod 4 slides along the sliding guide rail under the action of the driving motor 8 so as to drive the probe 5 to move on the surface of the polishing pad 3.

Further, considering that the polishing pad 3 is a disk, if the surface of the polishing pad 3 needs to be detected completely, the sliding guide rail on the guide rail panel 2 may be set to be spiral around the center point of the guide rail panel 2, and the edge of the sliding guide rail is serrated. Specifically, the driving motor 8 is connected with a gear, the gear is meshed with the saw teeth of the sliding guide rail, and when the detection is started, the driving motor 8 drives the gear to be in contact with the saw teeth on the inner side of the sliding guide rail and drives the screw rod 4 to move along the sliding guide rail.

In one embodiment, the height gauge 9 is provided with a switch button 91, a zero calibration button 92 and an alarm 93, the switch button 91 is used for controlling the power on-off of the probe 5 and the height gauge 9, the zero calibration button 92 is used for zeroing the height value when the probe 5 is in surface contact with the central point of the polishing pad 3, when the probe 5 moves along the sliding guide rail on the polishing pad 3 and meets a convex or concave area, the height value detected by the probe 5 changes, and the alarm 93 gives an alarm for reminding a tester of the surface unevenness of the polishing pad 3.

Further, a first alarm gear position and a second alarm gear position are arranged in the alarm 93, and the first alarm gear position is used for indicating that the probe 5 detects the convex area; the second alarm position is used to indicate that the probe 5 detects a recessed region, and the alarm 93 gives an alarm when the probe 5 detects a raised region or a recessed region. For example, the alarm 93 issues an alarm when the height value detected when the probe 5 encounters a protrusion exceeds a first alarm gear position, and the alarm 93 issues an alarm when the height value detected when the probe 5 encounters a recessed area exceeds a second alarm gear position.

Or only one alarm shift position can be set in the alarm 93 according to the requirement, wherein the alarm shift position is used for indicating that the probe detects a convex region or a concave region when the probe 5 detects the convex region or the concave region, and the alarm 93 gives an alarm when the convex region or the concave region is detected.

In one embodiment, the height gauge 9 is further provided with a display panel 94, and the display panel 94 is used for displaying the height value detected by the probe 5, so that a tester can conveniently check the specific protrusion or depression degree of the polishing pad 3.

Further, the probe 5 comprises a clamping portion and a contact portion, the clamping portion is movably connected with the screw rod 4, the contact portion is used for being in contact with the polishing pad 3, and the clamping portion and the contact portion are integrally formed.

Since the conventional polishing pad 3 includes the grooved polishing pad 31 and the non-grooved polishing pad 32, the probe 5 needs to be replaced with a different type of polishing pad 3 to make the test more accurate. Thus, the probe 5 may be a surface contact probe 51 or a point contact probe 52, the surface contact probe 51 being used for the surface grooved polishing pad 31, and the point contact probe 52 being used for the surface non-grooved polishing pad 32. When the probe 5 is set as the surface contact probe 51, the surface contact probe clamping portion 511 has a cylindrical structure, referring to fig. 3, the surface contact probe contacting portion 512 is a circular truncated cone, a lower bottom surface of the circular truncated cone contacts the groove polishing pad 31, an upper bottom surface of the circular truncated cone is connected to the surface contact probe clamping portion 511, and a diameter of the upper bottom surface of the circular truncated cone is the same as a diameter of the bottom surface of the cylinder. When the probe 5 is provided as the point contact type probe 52, referring to fig. 4, the point contact type probe clamping part 521 has a cylindrical structure, the point contact type probe contacting part 522 has a bullet shape, a head of the bullet contacts the non-grooved polishing pad 32, and a tail of the bullet is connected to the point contact type probe clamping part 521 with the same diameter at the connection.

In a specific use process, if the grooved polishing pad 31 uses the point-contact probe 52, when the point-contact probe 52 moves to the groove region, because the contact area between the point-contact probe 52 and the polishing pad 3 is small, it is detected that an abnormal depressed region exists on the surface of the grooved polishing pad 31, and a normal groove is mistakenly judged as the surface unevenness of the grooved polishing pad 31, so that the grooved polishing pad 31 needs to use the surface-contact probe 51 with a large contact area; similarly, if the non-grooved polishing pad 32 uses the surface contact probe 51, when the surface contact probe 52 moves to the recessed area, the contact surface of the surface contact probe 52 will cover the recessed area, so that the surface of the non-grooved polishing pad 32 is not detected as the abnormal recessed area, and the surface of the non-grooved polishing pad 32 is mistakenly judged as flat, and therefore the non-grooved polishing pad 32 needs to select the point contact probe 52 with a smaller contact area.

For the detection, the movement locus of the surface contact probe 51 on the grooved polishing pad 31 is shown in fig. 5, and the movement locus of the point contact probe 52 on the non-grooved polishing pad 32 is shown in fig. 6.

In one embodiment, the screw 4 is provided with an illumination member at the lower side of the guide panel 2, and the light emitted from the illumination member is directed toward the contact portion of the probe 5 and the polishing pad 3. Specifically, the illumination component includes laser lamp 11 and fixed arm 10, and laser lamp 11 passes through fixed arm 10 to be fixed on screw rod 4, and laser lamp 11 is connected with height instrument 9 electricity, and when height instrument 9 monitored that the polishing pad 3 surface has protruding region or sunken region and send out the police dispatch newspaper, trigger laser lamp 11 and open, shine the abnormal part of polishing pad 3, makes things convenient for the tester to look over the affirmation.

In one embodiment, the adjusting member 6 is threaded with a screw height adjusting knob 7, the screw height adjusting knob 7 is perpendicular to the screw 4, and when the screw height adjusting knob 7 is screwed, it can contact the screw 4 and clamp the screw 4 to fix the screw.

When specifically using, put polishing pad surface detection device in the top of the polishing pad 3 after the laminating, adjusting screw 4 makes the probe contact polishing pad 3's surface, and press zero calibration button 92 and make high instrument 9 zero calibration, press shift knob 91, drive motor 8 drives the gear revolve, begin work, drive screw 4 carries out clockwise circular motion along the sliding guide on the guide rail panel 2, probe 5 detects along clockwise on polishing pad 3, can send out the police dispatch newspaper if detect arch or when sunken, drive motor 8 drives gear anticlockwise revolution when detecting finishing, reset and return initial point, in order to wait to detect next polishing pad 3.

The embodiment of the utility model provides a polishing pad surface detection device for solving the problem that the flatness of a polishing pad after being attached is judged to have errors by manpower, which is used for detecting the attached polishing pad, can avoid misjudgment caused by manual inspection by using mechanized detection, reduces the waste of the polishing pad and improves the detection efficiency and the detection accuracy.

The above description is only for the specific embodiments of the present application, but the scope of the present application is not limited thereto, and any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present application should be covered within the scope of the present application. Therefore, the protection scope of the present application shall be subject to the protection scope of the claims.

Claims

1. The polishing pad surface detection device is characterized by comprising a guide rail panel and a bracket arranged below the guide rail panel, wherein the guide rail panel is erected above a polishing pad through the bracket;

2. The polishing pad surface detecting apparatus according to claim 1, wherein the height gauge is provided with a switch button, a zero calibration button, and an alarm which gives an alarm when the probe detects a convex region or a concave region on the polishing pad.

3. The polishing pad surface detection apparatus of claim 2, wherein a first alarm gear and a second alarm gear are provided in the alarm, the first alarm gear being used to indicate that the probe detects a raised area; the second alarm position is used for indicating that the probe detects a concave area.

4. The apparatus of claim 2, wherein the height gauge further comprises a display panel, the display panel displaying the height value detected by the probe.

5. The polishing pad surface detection apparatus of claim 1, wherein the sliding guide is configured as a spiral that spirals around a center point of the guide panel, and wherein an edge of the sliding guide is serrated.

6. The apparatus of claim 1, wherein the probe comprises a clamping portion and a contact portion, the clamping portion is movably connected to the screw, the contact portion is configured to contact the polishing pad, and the clamping portion and the contact portion are integrally formed.

7. The polishing pad surface detection apparatus according to claim 6, wherein the probe is a surface contact probe for the polishing pad having a groove on a surface thereof, a clamping portion of the surface contact probe is a cylindrical body, a contact portion of the surface contact probe is a circular truncated cone, and a bottom surface of the circular truncated cone contacts the polishing pad;

8. The apparatus of claim 1, wherein the screw is provided with an illuminating member at a lower side of the guide panel, and the illuminating member emits light toward a contact portion of the probe with the polishing pad.

9. The polishing pad surface detection apparatus of claim 8, wherein the illumination member comprises a laser light and a fixed arm, the laser light being fixed to the screw by the fixed arm.

10. The polishing pad surface detecting apparatus according to claim 1, wherein a screw height adjusting knob is threadedly connected to the adjusting member, the screw height adjusting knob being perpendicular to the screw.