CN215807853U - Automatic filling system of compound ultrapure ammonia - Google Patents
Automatic filling system of compound ultrapure ammonia Download PDFInfo
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- CN215807853U CN215807853U CN202122057244.1U CN202122057244U CN215807853U CN 215807853 U CN215807853 U CN 215807853U CN 202122057244 U CN202122057244 U CN 202122057244U CN 215807853 U CN215807853 U CN 215807853U
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Abstract
The utility model discloses a composite type automatic filling system for ultrapure ammonia, wherein an ultrapure ammonia product storage tank is connected to a pneumatic clean valve through a diaphragm compressor, the ultrapure ammonia product storage tank is connected to the pneumatic clean valve through a delivery pipe, the ultrapure ammonia product storage tank is communicated with the pneumatic clean valve through a high-purity low-temperature liquid filling pump, the pneumatic clean valve is respectively connected with a first filling pipe, a second filling pipe and a third filling pipe, the first filling pipe is connected with a steel cylinder, the second filling pipe is connected with a liquid phase inlet and outlet of the ammonia storage tank, and the third filling pipe is connected with a liquid phase inlet and outlet of an ultrapure ammonia tank truck. The utility model has the beneficial effects that: the utility model is provided with a plurality of filling modes, which can meet the filling of steel cylinders with different specifications and sizes; the ultra-pure ammonia tank car, the steel cylinder and the ammonia storage tank are all placed on a wagon balance during filling; the wagon balance senses that the filling weight is fed back to the filling pump or the electromagnetic valve, and is automatically closed, so that the automatic filling effect is realized.
Description
Technical Field
The utility model relates to the technical field of gas filling, in particular to a compound type ultrapure ammonia automatic filling system.
Background
Ultra-pure ammonia refers to 99.9999% (6N) or more ammonia. The ultrapure ammonia is mainly applied to the field of novel photoelectronic materials and is an important basic material for preparing GaN by the MOCVD technology. Meanwhile, the ultra-pure ammonia is one of key basic chemical materials in the manufacturing process of the ultra-large scale integrated circuit, and is mainly used for processes such as film forming of a chip and the like.
The filling of high-purity gas is an important link, and the product is easily polluted due to improper operation; chinese patents disclose some technical solutions to the above problems as follows:
1. a high-purity ammonia filling system and a filling method (publication number: CN105864630B) for filling high-purity ammonia by using the high-purity ammonia filling system comprise a product buffer tank, a product tank and a cooling device, wherein the product buffer tank is connected with the extraction end of a high-purity ammonia production line, a first liquid level meter is arranged on the product buffer tank, a liquid phase interface of the product buffer tank is connected with a liquid phase interface of the product tank through a first liquid phase pipeline, the product buffer tank is connected with a liquid phase interface of a tank car through a filling station through a second liquid phase pipeline, a gas phase interface of the product tank is connected with a gas phase interface of the tank car through a gas phase pipeline of the product tank, valves for controlling the on-off of the pipelines are respectively arranged on the first liquid phase pipeline, the second liquid phase pipeline and the gas phase pipeline of the product tank, a second liquid level meter and a temperature sensor are arranged on the product tank, and the cooling device is used for cooling and depressurizing the product tank. The filling system and the filling method can effectively avoid pollution in the filling process, ensure the purity of products, effectively reduce the energy consumption of filling and have good practicability; the filling is carried out by adopting a cooling method.
2. An electronic grade ultra-pure ammonia automatic filling device (publication number: CN102352957B) comprises an ultra-pure ammonia storage tank, a filling pump, an ammonia storage steel cylinder and a cleaning pump, wherein a first main pipeline is arranged between the ultra-pure ammonia storage tank and the filling pump for connection, a second main pipeline is arranged between the filling pump and the ammonia storage steel cylinder for connection, a first branch pipeline is arranged on the second main pipeline and connected to an industrial ammonia recovery tank, a second branch pipeline is arranged on the second main pipeline and connected to the cleaning pump, and a third branch pipeline is arranged between the cleaning pump and the industrial ammonia recovery tank for connection; the first main pipeline is provided with a first valve, the part of the second main pipeline, which is positioned between the filling pump and the first branch pipeline, is provided with a second valve, the first branch pipeline is provided with a third valve, and the second branch pipeline is provided with a fourth valve. In addition, the utility model also provides a filling method of the automatic filling device using the electronic grade ultra-pure ammonia. The utility model has simple and reasonable structure and convenient manufacture and use, does not need workers in the filling process, and realizes the automatic control of the filling process; and filling by using a clean pump.
3. An ultrapure liquid ammonia filling device (publication number: CN 202884466U) comprises an ultrapure ammonia storage tank, a filling pump, an ammonia storage steel cylinder and a cleaning pump, wherein a first main pipeline is arranged between the ultrapure ammonia storage tank and the filling pump for connection, a second main pipeline is arranged between the filling pump and the ammonia storage steel cylinder for connection, a first branch pipeline is arranged on the second main pipeline and connected to an industrial ammonia recovery tank, a second branch pipeline is arranged on the second main pipeline and connected to the cleaning pump, and a third branch pipeline is arranged between the cleaning pump and the industrial ammonia recovery tank for connection; the first main pipeline is provided with a first valve, the part of the second main pipeline, which is positioned between the filling pump and the first branch pipeline, is provided with a second valve, the first branch pipeline is provided with a third valve, and the second branch pipeline is provided with a fourth valve. In addition, the utility model also provides a filling method of the automatic filling device using the electronic grade ultra-pure ammonia. The utility model has simple and reasonable structure and convenient manufacture and use, does not need workers in the filling process, and realizes the automatic control of the filling process; filling by adopting a pressure difference method.
However, the above prior art patents cannot provide the steel cylinder filling with different specifications and sizes, and cannot meet the requirements of special customers for different degrees of special indexes such as metal ions, moisture, light components and the like, and cannot meet the requirements of different filling speeds.
Therefore, it is necessary to provide a compound type ultra-pure ammonia automatic filling system for the above problems.
SUMMERY OF THE UTILITY MODEL
In view of the above-mentioned shortcomings in the prior art, the present invention provides a composite type automatic filling system for ultrapure ammonia, so as to solve the above-mentioned problems.
The utility model provides an automatic system that fills of compound ultrapure ammonia, includes ultrapure ammonia product storage tank, high-purity low temperature filling pump, pneumatic clean valve, ultrapure ammonia tank wagon, steel bottle, ammonia storage tank and diaphragm compressor, ultrapure ammonia product storage tank passes through diaphragm compressor and connects in pneumatic clean valve, ultrapure ammonia product storage tank passes through duct connections in pneumatic clean valve, ultrapure ammonia product storage tank fills the pump through high-purity low temperature liquid and communicates in pneumatic clean valve, pneumatic clean valve is connected with first filling pipe, second respectively and fills dress pipe and third and fill the dress pipe, first filling union coupling steel bottle, the liquid phase access & exit of second filling union coupling ammonia storage tank, the liquid phase access & exit of third filling union coupling ultrapure ammonia tank wagon.
Preferably, the gas phase inlet and outlet of the ultra-pure ammonia tank car and the gas phase inlet and outlet of the ammonia storage tank are both connected with an outlet pipe orifice used for connecting a feeding system or a tail gas absorption system.
Preferably, the first filling tube, the second filling tube and the third filling tube are each provided with a filling valve.
Preferably, the cylinder, ammonia storage tank, and ultra-pure ammonia tank car are placed on a wagon balance when filled.
Preferably, a first switch valve is arranged between the ultra-pure ammonia product storage tank and the diaphragm compressor, a second switch valve is arranged on the delivery pipe, and a third switch valve is arranged between the ultra-pure ammonia product storage tank and the high-purity low-temperature liquid filling pump.
Preferably, the ultra-pure ammonia tank car, cylinder, and ammonia storage tank are placed on a wagon balance during filling.
Compared with the prior art, the utility model has the beneficial effects that: the utility model is provided with a plurality of filling modes, which can meet the filling of steel cylinders with different specifications and sizes; the ultra-pure ammonia tank car, the steel cylinder and the ammonia storage tank are all placed on a wagon balance during filling; the wagon balance senses that the filling weight is fed back to the filling pump or the electromagnetic valve, and is automatically closed, so that the automatic filling effect is realized.
Drawings
Fig. 1 is a schematic structural view of a composite type ultrapure ammonia automatic filling system of the present invention.
Reference numbers in the figures: 1. an ultra-pure ammonia product storage tank; 2. a high-purity low-temperature filling pump; 3. a pneumatic cleaning valve; 4. ultra-pure ammonia tank car; 5. a steel cylinder; 6. an ammonia storage tank; 7. a diaphragm compressor; 8. a delivery pipe; 9. a first filling tube; 10. a second filling tube; 11. a third filling tube; 12. a charging valve; 13. a wagon balance; 14. a first on-off valve; 15. a second on-off valve; 16. and a third on-off valve.
Detailed Description
It should be noted that the embodiments and features of the embodiments may be combined with each other without conflict.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on those shown in the drawings, and are used only for convenience in describing the present invention and for simplicity in description, and do not indicate or imply that the referenced devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and thus, are not to be construed as limiting the present invention. Furthermore, the terms "first", "second", etc. are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first," "second," etc. may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless otherwise specified.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art through specific situations.
The embodiments of the utility model will be described in detail below with reference to the drawings, but the utility model can be implemented in many different ways as defined and covered by the claims.
As shown in fig. 1, a compound type ultrapure ammonia automatic filling system comprises an ultrapure ammonia product storage tank 1, a high-purity low-temperature filling pump 2, a pneumatic clean valve 3, an ultrapure ammonia tank car 4, a steel cylinder 5, an ammonia storage tank 6 and a diaphragm compressor 7, wherein the ultrapure ammonia product storage tank 1 is connected to the pneumatic clean valve 3 through the diaphragm compressor 7, the ultrapure ammonia product storage tank 1 is connected to the pneumatic clean valve 3 through a delivery pipe 8, the ultrapure ammonia product storage tank 1 is communicated to the pneumatic clean valve 4 through the high-purity low-temperature liquid filling pump 2, the pneumatic clean valve 4 is respectively connected with a first filling pipe 9, a second filling pipe 10 and a third filling pipe 11, the first filling pipe 9 is connected to the high-purity low-temperature liquid filling pump 5, the second filling pipe 10 is connected to a liquid-phase steel cylinder inlet and outlet of the ammonia storage tank car 6, and the third filling pipe 11 is connected to a liquid-phase inlet and outlet of the ultrapure ammonia tank car 4.
Further, the gas phase inlets and outlets of the ultra-pure ammonia tank wagon 4 and the ammonia storage tank 6 are connected with outlet pipes used for connecting a feeding system or a tail gas absorption system.
Further, the first filling tube 9, the second filling tube 10 and the third filling tube 11 are provided with filling valves 12.
Further, the cylinder 5, ammonia tank 6, and ultra-pure ammonia tank wagon 4 are placed on a wagon 13 during filling.
Further, a first switch valve 14 is arranged between the ultrapure ammonia product storage tank 1 and the diaphragm compressor 7, a second switch valve 15 is arranged on the delivery pipe 8, and a third switch valve 16 is arranged between the ultrapure ammonia product storage tank 1 and the high-purity low-temperature liquid filling pump 2.
Further, the ultra-pure ammonia tank wagon 4, the steel cylinder 5, and the ammonia storage tank 6 are placed on the wagon balance 13 during filling.
Compared with the prior art, the utility model has the beneficial effects that: the utility model is provided with a plurality of filling modes, which can meet the filling of steel cylinders with different specifications and sizes; the ultra-pure ammonia tank wagon 4, the steel cylinder 5 and the ammonia storage tank are all placed on the wagon balance 13 during filling; the wagon balance 13 senses that the filling weight is fed back to the filling pump or the electromagnetic valve, and the filling pump or the electromagnetic valve is automatically closed, so that the automatic filling effect is realized; the requirements of special customers for different degrees of special indexes such as metal ions, moisture and light components can also meet the requirements of different filling speeds.
Ultrapure ammonia tank wagon 4, steel bottle 5, ammonia storage tank 6 are all put on wagon balance 13 again during the filling, can sense the volume of filling automatically like this at the filling in-process, sense filling weight to feed back to filling pump or solenoid valve if wagon balance 13, carry out self-closing, and then realize automatic filling effect.
The working principle is as follows:
ammonia gas is stored in the product storage tank, and the filling modes of the ammonia gas are three,
in a first manner of filling the container in a manner,
the gas phase of the ultra-pure ammonia product storage tank 1 enters a diaphragm compressor 7 through a first switch valve 14, and then is respectively connected with a first filling pipe 9, a second filling pipe 10 and a third filling pipe 11 through a pneumatic cleaning valve 2, the first filling pipe 9 is connected with a steel cylinder 5, a filling valve 12 on the first filling pipe 9 is opened, and the gas phase enters the steel cylinder 5; the second filling pipe 10 is connected with the ammonia storage tank 6, the filling valve 12 on the second filling pipe 10 is opened, the gas phase enters the ammonia storage tank 6, the third filling pipe 11 is connected with the ultra-pure ammonia tank wagon 4, the filling valve 12 on the third filling pipe 11 is opened, and the gas phase enters the tank wagon 7; because the boiling point of ammonia is lower than that of water, the gas-phase filling mode can obtain the ultra-pure ammonia with lower metal ions and moisture impurity content, and meets the clients with strict requirements on moisture and metal ions.
The second filling mode is as follows:
the liquid phase of the ultra-pure ammonia product storage tank 1 is input into a pneumatic cleaning valve 3 through a delivery pipe 8 under the action of pressure difference, and then is respectively connected with a first filling pipe 9, a second filling pipe 10 and a third filling pipe 11 through the pneumatic cleaning valve 3, the first filling pipe 9 is connected with a steel cylinder, a filling valve 12 on the first filling pipe 9 is opened, and the liquid phase enters the steel cylinder 5; the second filling pipe 10 is connected with the ammonia storage tank 6, the filling valve 12 on the second filling pipe 10 is opened, the liquid phase enters the ammonia storage tank 6, the third filling pipe 11 is connected with the ultra-pure ammonia tank wagon 4, the filling valve 12 on the third filling pipe 11 is opened, and the liquid phase enters the tank wagon 7; wherein the steel cylinder 5 is in a vacuum state to provide pressure difference; wherein the gas phase of the ammonia storage tank 6 or the tank wagon 7 enters a raw material pipeline or an ammonia production hydraulic section; the mode is liquid-phase filling, can provide ultra-pure ammonia with lower impurities of light components (hydrogen, oxygen, nitrogen, argon, carbon monoxide, carbon dioxide and the like), has lower energy consumption and moderate filling speed, and is suitable for conventional production.
The third filling mode is as follows:
the liquid phase of the ultra-pure ammonia product storage tank 1 enters a pneumatic cleaning valve under the action of a high-purity low-temperature filling pump 2, then is respectively connected with a first filling pipe 9, a second filling pipe 10 and a third filling pipe 11 through a pneumatic cleaning valve 3, the first filling pipe 9 is connected with a steel cylinder 5, a filling valve 12 on the first filling pipe 9 is opened, and the liquid phase enters the steel cylinder 5; the second filling pipe 10 is connected with the ammonia storage tank 6, the filling valve 12 on the second filling pipe 10 is opened, the liquid phase enters the ammonia storage tank 6, the third filling pipe 11 is connected with the ultra-pure ammonia tank wagon 4, the filling valve on the third filling pipe is opened, and the liquid phase enters the ultra-pure ammonia tank wagon 4; the gas phase of the ammonia storage tank 6 or the ultra-pure ammonia tank wagon 4 enters a raw material pipeline or an ammonia water preparation section; the method is liquid-phase filling, can provide ultra-pure ammonia with lower light component impurities (hydrogen, oxygen, nitrogen, argon, carbon monoxide, carbon dioxide and the like), has high filling speed, and is suitable for large-scale rapid filling operation.
The filling mode is automatic filling, and the pneumatic valves (the high-purity low-temperature filling pump 2, the pneumatic clean valve 3 and the filling valve 13) at the filling inlets are linked with the wagon balance 13, so that the automatic filling of the ultra-pure ammonia can be realized by setting the linkage value of the wagon balance 13.
The above description is only a preferred embodiment of the present invention, and not intended to limit the scope of the present invention, and all modifications of equivalent structures and equivalent processes, which are made by using the contents of the present specification and the accompanying drawings, or directly or indirectly applied to other related technical fields, are included in the scope of the present invention.
Claims (6)
1. The utility model provides an automatic system that fills of compound ultrapure ammonia which characterized in that: including ultrapure ammonia product storage tank (1), high-purity low temperature filling pump (2), pneumatic clean valve (3), ultrapure ammonia tank wagon (4), steel bottle (5), ammonia storage tank (6) and diaphragm compressor (7), ultrapure ammonia product storage tank (1) is connected in pneumatic clean valve (3) through conveyer pipe (8), ultrapure ammonia product storage tank (1) communicates in pneumatic clean valve (4) through high-purity cryogenic liquid filling pump (2), pneumatic clean valve (4) are connected with first filling pipe (9), second filling pipe (10) and third filling pipe (11) respectively, steel bottle (5) is connected in first filling pipe (9), the liquid phase access & exit of ammonia storage tank (6) is connected in second filling pipe (10), the third filling pipe (11) is connected with a liquid phase inlet and a liquid phase outlet of the ultra-pure ammonia tank car (4).
2. The compound type ultrapure ammonia automatic filling system according to claim 1, wherein: and gas phase outlets and inlets of the ultra-pure ammonia tank wagon (4) and the ammonia storage tank (6) are connected with outlet pipe orifices used for connecting a feeding system or a tail gas absorption system.
3. The compound type ultrapure ammonia automatic filling system according to claim 1, wherein: the first filling pipe (9), the second filling pipe (10) and the third filling pipe (11) are all provided with filling valves (12).
4. The compound type ultrapure ammonia automatic filling system according to claim 1, wherein: the steel cylinder (5), the ammonia storage tank (6) and the ultra-pure ammonia tank car (4) are placed on a wagon balance (13) during filling.
5. The compound type ultrapure ammonia automatic filling system according to claim 1, wherein: a first switch valve (14) is arranged between the ultrapure ammonia product storage tank (1) and the diaphragm compressor (7), a second switch valve (15) is arranged on the delivery pipe (8), and a third switch valve (16) is arranged between the ultrapure ammonia product storage tank (1) and the high-purity low-temperature liquid filling pump (2).
6. The compound type ultrapure ammonia automatic filling system according to claim 1, wherein: the ultra-pure ammonia tank wagon (4), the steel cylinder (5) and the ammonia storage tank (6) are all placed on the wagon balance (13) during filling.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122057244.1U CN215807853U (en) | 2021-08-27 | 2021-08-27 | Automatic filling system of compound ultrapure ammonia |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122057244.1U CN215807853U (en) | 2021-08-27 | 2021-08-27 | Automatic filling system of compound ultrapure ammonia |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN215807853U true CN215807853U (en) | 2022-02-11 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202122057244.1U Active CN215807853U (en) | 2021-08-27 | 2021-08-27 | Automatic filling system of compound ultrapure ammonia |
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| CN (1) | CN215807853U (en) |
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2021
- 2021-08-27 CN CN202122057244.1U patent/CN215807853U/en active Active
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