CN215800052U

CN215800052U - Optical crystal transfer equipment for proton exchange furnace

Info

Publication number: CN215800052U
Application number: CN202121333356.9U
Authority: CN
Inventors: 颜廷福
Original assignee: Qingdao Furunde Microelectronic Equipment Co ltd
Current assignee: Qingdao Furunde Microelectronic Equipment Co ltd
Priority date: 2021-06-16
Filing date: 2021-06-16
Publication date: 2022-02-11
Anticipated expiration: 2031-06-16

Abstract

The utility model discloses an optical crystal transfer device for a proton exchange furnace, which relates to the technical field of proton exchange, and has the technical scheme that the optical crystal transfer device comprises a frame body, a first heating furnace and a second heating furnace, wherein the frame body is used for supporting the two heating furnaces, and the openings of the two heating furnaces face; the support frame is fixed on one side of the top of the frame body; a sliding frame which is arranged on the supporting frame and can slide up and down on the sliding frame; the lifting power assembly is used for driving the sliding frame to slide up and down; the transfer frame is arranged on the sliding frame and can slide on the sliding frame along the arrangement direction of the two heating furnaces; the transfer power assembly is used for driving the transfer frame to slide; the bracket is arranged on the transfer power assembly and is used for bearing the optical crystal; the bracket moves along with the transfer frame and the sliding frame to realize the transfer of the optical crystal without manual close-range operation, thereby being not easy to cause injury to human bodies.

Description

Optical crystal transfer equipment for proton exchange furnace

Technical Field

The utility model relates to the technical field of proton exchange, in particular to an optical crystal transfer device for a proton exchange furnace.

Background

Annealing proton exchange is one of important methods for producing an optical waveguide on an optical crystal substrate such as LiNbO3 or LiTaO3, and Li + in an optical crystal such as LiNbO3 or LiTaO3 is partially exchanged with H + in a proton source, and the refractive index of extraordinary rays is increased, and the refractive index of ordinary rays is decreased, thereby forming an optical waveguide that operates in a single polarization.

When annealing proton exchange is carried out, the exchange liquid needs to be placed in a heating furnace for heating, the optical crystal is placed in another heating furnace for heating, and after the exchange liquid and the optical crystal are heated to a specified temperature and are kept warm for a period of time, the optical crystal is taken out of the heating furnace and is rapidly placed in the exchange liquid of another heating furnace for proton exchange.

In the prior art, the optical crystal is taken out from a heating furnace and sent into another heating furnace, the operation is carried out manually, the volatilization of gas in the exchange liquid is inevitable, the optical crystal is transferred through manual close-range operation, and the high-temperature and volatile gas easily causes harm to the body of an operator.

SUMMERY OF THE UTILITY MODEL

Aiming at the defects in the prior art, the utility model aims to provide optical crystal transfer equipment for a proton exchange furnace, wherein a bracket moves along with a transfer frame and a sliding frame to transfer an optical crystal, manual close-range operation is not needed, and thus, the damage to a human body is not easy to cause.

In order to achieve the purpose, the utility model provides the following technical scheme: an optical crystal transfer device for a proton exchange furnace comprises a frame body, a first heating furnace and a second heating furnace, wherein the frame body is used for supporting the two heating furnaces, and the openings of the two heating furnaces face to each other;

the support frame is fixed on one side of the top of the frame body;

a sliding frame which is arranged on the supporting frame and can slide up and down on the sliding frame;

the lifting power assembly is used for driving the sliding frame to slide up and down;

the transfer frame is arranged on the sliding frame and can slide on the sliding frame along the arrangement direction of the two heating furnaces;

the transfer power assembly is used for driving the transfer frame to slide;

and the bracket is arranged on the transfer power assembly and is used for carrying the optical crystal.

By adopting the technical scheme, during heating, the bracket slides to the position above a heating furnace for heating the optical crystal by sliding the transfer frame, then the sliding frame slides downwards, the bracket and the optical crystal on the bracket are sent into the heating furnace for heating, the exchange liquid is heated in the other heating furnace, after the heating is finished, the sliding frame slides upwards to take out the bracket and the optical crystal from the heating furnace, then the transfer frame slides to send the bracket and the optical crystal to the position above the other heating furnace, and then the sliding frame slides downwards to send the bracket and the optical crystal into the exchange liquid; the whole process of optical crystal transfer does not need manual close-range operation, so that high temperature and volatile gas are not easy to cause harm to operators.

The utility model is further configured to: the support frame is provided with two vertically arranged guide rods, and the sliding frame is fixedly connected with a guide block which is positioned between the two guide rods and can vertically slide.

By adopting the technical scheme, the guide rod can guide the guide block to slide up and down, so that the sliding frame can be guided to slide.

The utility model is further configured to: the lifting power assembly comprises a lead screw which is rotationally connected to the support frame, and the axis of the lead screw is vertically arranged and is in threaded connection with the guide block;

and the motor is used for driving the lead screw to rotate.

Through adopting above-mentioned technical scheme, through the rotation of lead screw, drive the upper and lower slip of carriage.

The utility model is further configured to: the transfer power assembly is a sliding table cylinder.

The utility model is further configured to: the transfer frame is provided with an extension rod, the extension rod can extend into the heating furnace, and the bracket is fixed at the bottom of the extension rod.

The utility model is further configured to: the top of the bracket is provided with a plurality of vertical notches, and the optical crystal is inserted into the notches.

Through adopting above-mentioned technical scheme, optical crystal is the lamellar structure mostly, in the middle of inserting a notch with each piece is vertical for be difficult to appear blockking between the two adjacent optical crystal, thereby can guarantee the homogeneity of heating and can not influence the effect of proton exchange because blocking each other between two optical crystal.

The utility model is further configured to: the extension rod is rotatably connected to the transfer frame.

The utility model is further configured to: the transfer frame is provided with a motor, belt wheels are fixedly connected to the output end of the motor and one end of the top of the extension rod, and the two belt wheels are driven through a toothed belt.

Through adopting above-mentioned technical scheme, through the rotation of elongation rod, can make optical crystal in the middle of the heating furnace even by the heating to through the rotation of optical crystal and bracket, can stir the exchange liquid, make the exchange liquid everywhere composition more even, thereby improve proton exchange's quality.

In summary, compared with the prior art, the utility model has the following beneficial effects:

1. in the utility model, the bracket moves along with the transfer frame and the sliding frame to transfer the optical crystal without manual close-range operation, thereby being not easy to cause injury to human body;

2. most of the optical crystals are of a sheet structure, and each sheet is vertically inserted into one notch, so that blocking is not easy to occur between two adjacent optical crystals, the heating uniformity can be ensured, and the proton exchange effect cannot be influenced due to mutual blocking between the two optical crystals;

3. through the rotation of the extension rod, the optical crystal can be uniformly heated in the heating furnace, and through the rotation of the optical crystal and the bracket, the exchange liquid can be stirred, so that the components of the exchange liquid are more uniform, and the quality of proton exchange is improved.

Drawings

FIG. 1 is a schematic view of the overall structure of the embodiment;

FIG. 2 is a schematic view of an embodiment embodying a bracket;

FIG. 3 is a schematic diagram of an embodiment embodying a boot block;

FIG. 4 is a schematic view of a bracket of an embodiment;

fig. 5 is a schematic view of an embodiment embodying a pulley.

In the figure: 1. a frame body; 11. heating furnace; 2. a support frame; 21. a guide rod; 3. a carriage; 31. a guide block; 4. a transfer frame; 5. a lifting power assembly; 51. a lead screw; 6. a transfer power assembly; 7. a bracket; 71. a notch; 8. an extension rod; 81. a pulley.

Detailed Description

In order to make the technical solutions of the present invention better understood, the following description of the technical solutions of the present invention with reference to the accompanying drawings of the present invention is made clearly and completely, and other similar embodiments obtained by a person of ordinary skill in the art without any creative effort based on the embodiments in the present application shall fall within the protection scope of the present application. In addition, directional terms such as "upper", "lower", "left", "right", etc. in the following embodiments are directions with reference to the drawings only, and thus, the directional terms are used for illustrating the present invention and not for limiting the present invention.

The utility model is further described with reference to the drawings and the preferred embodiments.

Example (b): the utility model provides an optical crystal shifts equipment for proton exchange furnace, see figure 1 and figure 2, including the support body 1 that is used for carrying out the support to two heating furnaces 11, fixed connection is at support frame 2 of 1 top one side of support body, the setting is on support frame 2 and can be gliding carriage 3 from top to bottom, the setting is on carriage 3 and can be on carriage 3 along two heating furnaces 11 gliding transfer frame 4 of direction of arranging, the setting is used for carrying out the bracket 7 that bears optical crystal on shifting frame 4, the setting is used for driving carriage 3 gliding lift power component 5 from top to bottom and sets up the gliding transfer power component 6 that is used for driving transfer frame 4 on carriage 3 on support frame 2.

When proton exchange is carried out, the optical crystal is supported on a bracket 7, the bracket 7 slides to the upper part of a heating furnace 11 for heating the optical crystal through the sliding of a transfer frame 4, then the sliding frame 3 slides downwards, the bracket 7 and the optical crystal on the bracket 7 are inserted into the heating furnace 11, meanwhile, exchange liquid is heated in another heating furnace 11 for heating, after the optical crystal and the exchange liquid are heated, the sliding frame 3 slides upwards to take the bracket 7 out of the heating furnace 11, then the bracket 7 slides to the upper part of another heating furnace 11 through the sliding of the transfer frame 4, then the sliding frame 3 slides downwards, and the optical crystal on the bracket 7 and the bracket 7 are inserted into the exchange liquid in another heating furnace 11 for proton exchange.

Specifically, referring to fig. 3, two vertically disposed guide rods 21 are fixedly connected to the support frame 2, a guide block 31 fixedly connected to the carriage 3 is disposed between the two movable rods, and both sides of the guide block 31 contact both sides of the two guide rods 21 adjacent to each other, so that the guide block 31 vertically slides between the two guide rods 21 without rotating between the two guide rods 21. The sliding direction of the carriage 3 can be guided by the arrangement of the guide block 31 and the two guide rods 21.

The lifting power assembly 5 is configured to drive the carriage 3 to move linearly, such as a cylinder, a hydraulic cylinder, a lead screw 51, a rack and pinion, etc.

Specifically, in this embodiment, the lifting power assembly 5 includes a screw 51 rotatably connected to the support frame 2 and a motor fixedly connected to the support frame 2, and the motor is configured to drive the screw 51 to rotate; specifically, the axis of the lead screw 51 is vertical and the lead screw 51 is arranged to penetrate through the guide block 31 along the vertical direction, the lead screw 51 is connected with the guide block 31 in a threaded manner, the guide block 31 can be driven to slide up and down through positive rotation and reverse rotation of the lead screw 51, and the sliding frame 3 is driven to slide up and down.

The transfer power assembly 6 is configured to drive the transfer frame 4 to move linearly, such as an air cylinder, a hydraulic cylinder, a lead screw 51, a rack and pinion, and the like.

In this embodiment, the transfer power assembly 6 is provided as a sliding table cylinder, the cylinder body of the cylinder is fixedly connected to the sliding frame 3, and the sliding table is fixedly connected to the transfer frame 4. Specifically, the two heating furnaces 11 are arranged along the horizontal direction, and the sliding direction of the sliding table cylinder sliding table is parallel to the arrangement direction of the two heating furnaces 11.

Specifically, referring to fig. 3 and 4, the transfer frame 4 is provided with an extension bar 8, the length direction of the extension bar 8 is vertical, the extension bar 8 can extend into the heating furnace 11, and the bracket 7 is fixed at the bottom of the extension bar 8. By providing the extension bar 8, the bracket 7 can be smoothly inserted into the heating furnace 11.

Specifically, the top of the bracket 7 is provided with a plurality of vertically arranged notches 71, and most of the optical crystals are arranged in a sheet shape, so that when the optical crystals are supported, two adjacent optical crystals are easy to partially adhere to each other, and therefore superposition of the optical crystals occurs, which not only affects heating uniformity, but also prevents the adhered parts from proton exchange; in the embodiment, each notch 71 corresponds to one optical crystal, the width of each notch 71 is the same as the thickness of each optical crystal piece, and one optical crystal piece is inserted into each notch 71, so that the optical crystal pieces are kept vertical, and two adjacent optical crystal pieces cannot be attached to each other, thereby improving the uniformity of heating and the uniformity of proton exchange.

Specifically, referring to fig. 5, the extension rod 8 is rotatably connected to the transfer frame 4, and the rotation direction of the extension rod 8 is vertical; when the optical crystals are heated, the heating uniformity of each optical crystal can be improved through the rotation of the extension rod 8; when proton exchange is carried out, after proton exchange is carried out on part of exchange liquid close to the optical crystal and the optical crystal, proton exchange can be carried out continuously only when the rest part of protons need to be waited to move to a position close to the optical crystal, so that the uniformity of the proton exchange is not easily ensured, the progress of the proton exchange is slowed down, and the bracket 7 and the optical crystal are driven to rotate by the rotation of the extension rod 8 when the proton exchange is carried out, so that the uniformity of the proton exchange can be improved, and the progress of the proton exchange is accelerated.

Specifically, a motor is fixedly connected to the top of the transfer frame 4, a belt wheel 81 is fixedly connected to both the output end of the motor and one end of the top of the extension rod 8, and the two belt wheels 81 are driven by a toothed belt (not shown). The motor drives the extension rod 8 to rotate through the belt pulley 81 and the toothed belt.

The optical crystal transfer equipment for the proton exchange furnace has the following working principle when in use: when proton exchange is carried out, the optical crystal is supported on a bracket 7, the bracket 7 slides to the upper part of a heating furnace 11 for heating the optical crystal through the sliding of a transfer frame 4, then the sliding frame 3 slides downwards, the bracket 7 and the optical crystal on the bracket 7 are inserted into the heating furnace 11, meanwhile, exchange liquid is heated in another heating furnace 11 for heating, after the optical crystal and the exchange liquid are heated, the sliding frame 3 slides upwards to take the bracket 7 out of the heating furnace 11, then the bracket 7 slides to the upper part of another heating furnace 11 through the sliding of the transfer frame 4, then the sliding frame 3 slides downwards, and the optical crystal on the bracket 7 and the bracket 7 are inserted into the exchange liquid in another heating furnace 11 for proton exchange.

The above description is only a preferred embodiment of the present invention, and the protection scope of the present invention is not limited to the above embodiments, and all technical solutions belonging to the idea of the present invention belong to the protection scope of the present invention. It should be noted that modifications and embellishments within the scope of the utility model may occur to those skilled in the art without departing from the principle of the utility model, and are considered to be within the scope of the utility model.

Claims

1. An optical crystal transfer apparatus for a proton exchange furnace, characterized in that: comprises a frame body (1) which is used for supporting two heating furnaces (11), and the openings of the two heating furnaces (11) face to each other;

the support frame (2) is fixed on one side of the top of the frame body (1);

a sliding frame (3) which is arranged on the support frame (2) and can slide up and down on the sliding frame (3);

the lifting power assembly (5) is used for driving the sliding frame (3) to slide up and down;

a transfer rack (4) which is arranged on the sliding rack (3) and can slide on the sliding rack (3) along the arrangement direction of the two heating furnaces (11);

the transfer power assembly (6) is used for driving the transfer frame (4) to slide;

and a carriage (7) disposed on the transfer power assembly (6) and for carrying the optical crystal.

2. The optical crystal transfer apparatus for a proton exchange furnace as claimed in claim 1, wherein: the support frame (2) is provided with two vertically arranged guide rods (21), and the sliding frame (3) is fixedly connected with a guide block (31) which is positioned between the two guide rods (21) and can vertically slide.

3. The optical crystal transfer apparatus for a proton exchange furnace as claimed in claim 2, wherein: the lifting power assembly (5) comprises a lead screw (51) which is rotatably connected to the support frame (2), and the axis of the lead screw is vertically arranged and is in threaded connection with the guide block (31);

and the motor is used for driving the lead screw (51) to rotate.

4. The optical crystal transfer apparatus for a proton exchange furnace as claimed in claim 1, wherein: the power transfer assembly (6) is a sliding table cylinder.

5. The optical crystal transfer apparatus for a proton exchange furnace as claimed in claim 1, wherein: an extension rod (8) is arranged on the transfer frame (4), the extension rod (8) can extend into the heating furnace (11), and the bracket (7) is fixed at the bottom of the extension rod (8).

6. The optical crystal transfer apparatus for a proton exchange furnace as claimed in claim 5, wherein: the top of the bracket (7) is provided with a plurality of vertical notches (71), and the optical crystal is inserted into the notches (71).

7. The optical crystal transfer apparatus for a proton exchange furnace as claimed in claim 5, wherein: the extension rod (8) is rotatably connected to the transfer frame (4).

8. The optical crystal transfer apparatus for a proton exchange furnace as claimed in claim 7, wherein: the transfer frame (4) is provided with a motor, the output end of the motor and one end of the top of the extension rod (8) are fixedly connected with belt wheels (81), and the two belt wheels (81) realize transmission through a toothed belt.