CN215795348U - Sample loading box for dust-free room - Google Patents

Abstract

The utility model discloses a sample containing box for a dust-free room, which is characterized by comprising a box body, wherein clamping grooves are formed in the inner bottom surface of the box body and are distributed on the inner bottom surface of the box body in a grid shape; a set of septa inserted into the card slot to form a plurality of compartments with the cartridge body and/or septa; the box body the spacer is dust-free material. The latticed clamping grooves are formed in the bottom of the box body, and the latticed clamping grooves and the spacers are combined to form the compartment matched with the shape and the size of the part so as to fixedly store the part; in addition, as the sample containing box is made of a dust-free material, the sample containing box does not pollute a dust-free chamber and meets the use requirement of the dust-free chamber.

Description

Sample loading box for dust-free room

Technical Field

The utility model relates to the field of semiconductor manufacturing, in particular to a sample loading box for a dust-free room.

Background

In the semiconductor field, particularly in the manufacture of semiconductor devices, it is common to carry out the manufacturing process in a clean room, which is an assembly of a large number of devices. Different parts are required to be matched for use in the operation process of the equipment, and although most of the parts are fixedly assembled on the equipment, part of the parts need to be assembled or replaced according to the use condition. The parts used in the semiconductor field are generally high in precision and expensive and need to be stored properly, and although a specially-made foam box or paper box and other packaging materials are attached to equipment or part manufacturers when providing the parts, the packaging materials are mainly used for solving the problems in the transportation process and are not suitable for the use requirement of a dust-free room, because the cleanliness of the dust-free room is affected by scraps or particles generated by the foam box or the paper box in the use process and the quality of products is seriously affected, so that the parts are generally placed in a common sample plastic bag or a common plastic box when being brought into the dust-free room and are directly stored in the common plastic box in the storage process, but the storage mode has poor protection effect on the parts, is easy to cause the damage or loss of the parts and is especially easy to damage special-shaped parts.

In addition, the parts to be assembled or replaced according to the use condition generally need to be placed on corresponding equipment or production line accessories so as to be found in time when in use. However, at present, because no specific part storage device is arranged in a dust-free room, part of parts can be stored in a scattered manner and cannot be stored in a centralized manner, and the parts cannot be conveniently, directly and quickly obtained when needing to be used; particularly, when the component is crashed, the component cannot be found quickly, which means that the production cannot be restored in time, and the productivity loss will be generated, so that how to store the component becomes a technical problem to be solved in the field.

SUMMERY OF THE UTILITY MODEL

The utility model aims to solve the technical problem of providing a sample containing box for a dust-free room, which can realize the fixed storage of parts, is beneficial to the protection of the parts, particularly the protection of special-shaped parts, and can also realize the centralized classified storage management of the parts in the dust-free room.

In order to solve the above technical problems, the present invention provides a sample loading box for a clean room, comprising:

the clamping grooves are distributed on the inner bottom surface of the box body in a grid shape;

a set of septa inserted into the card slot to form a compartment with the cartridge body and/or septa;

the box body the spacer is dust-free material.

Preferably, the card slots are formed in a regular square grid shape or a regular circular arc grid shape or a combination grid shape of the regular square grid shape and the regular circular arc grid shape.

Preferably, the shape of the spacer is a square straight plate shape or a curved arc shape, and the shape and the size of the spacer are matched with those of the clamping groove.

Preferably, the height of the spacer is less than or equal to the height of the side wall of the box body.

Preferably, the spacer is formed with a slot longitudinally.

Preferably, the inner bottom surface of the box body is recessed inwards to form the clamping groove; or strip-shaped bulges are formed on the bottom surface of the inner part of the box body, and the clamping groove is formed between every two adjacent strip-shaped bulges.

Preferably, the bottom surface of the interior of the box body is provided with strip-shaped bulges, and the clamping groove is formed between every two adjacent strip-shaped bulges.

Preferably, the bottom surfaces of the plurality of compartments are provided with dust-free cloth.

Preferably, the sample loading box further comprises a cover body detachably mounted on the box body.

Preferably, the cover body and the box body are detachably connected through a buckle.

Preferably, the cover body is made of dust-free materials.

The latticed clamping grooves are formed in the bottom of the box body, and the latticed clamping grooves and the spacers are combined to form the compartment matched with the shape and the size of the part so as to fixedly store the part; in addition, as the sample containing box is made of a dust-free material, the sample containing box does not pollute a dust-free chamber and meets the use requirement of the dust-free chamber.

Drawings

In order to more clearly illustrate the technical solution of the present invention, the drawings needed to be used in the present invention are briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to the drawings without creative efforts.

FIG. 1 is a perspective view of one embodiment of a sample kit of the present invention;

FIG. 2 is a top view of the cassette body of one embodiment of the sample loading cassette of the present invention;

FIG. 3 is a schematic diagram of a square grid-shaped card slot of an embodiment of the sample holding box of the present invention;

FIG. 4 is a schematic grid view of a combination of a square grid and a circular arc grid of an embodiment of a sample holding box of the present invention;

FIG. 5 is a schematic view of a planar spacer structure according to an embodiment of the present invention;

FIG. 6 is a schematic view of a circular-arc spacer structure of an embodiment of the sample holding box of the present invention;

FIG. 7 is a schematic view of a pocket formed by a recess in an embodiment of the sample holding box of the present invention;

fig. 8 is a schematic view of a card slot formed by convex strips of an embodiment of the sample box of the utility model.

In the figure, 1-box; 2-a spacer; 3-a cover body; 11-a card slot; 12-a compartment; 13-a bump; 31-snap.

Detailed Description

The technical solutions in the present invention will be described clearly and completely with reference to the accompanying drawings, and it should be understood that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

Referring to fig. 1 to 2, there is shown a sample loading cassette for a clean room of the present invention, comprising:

the box comprises a box body 1, wherein clamping grooves 11 are formed in the inner bottom surface of the box body 1, and the clamping grooves 11 are distributed on the inner bottom surface of the box body 1 in a grid shape;

a set of septa 2, wherein the septa 2 are inserted into the card slot 11 to form a compartment 12 with the box body 1 and/or the septa 2;

the box body 1 and the spacer 2 are made of dust-free materials.

In the embodiment of the utility model, the sample containing box made of the dust-free material meets the requirements of a dust-free room and can be used in the dust-free room; because the clamping grooves 11 distributed in a latticed manner are formed in the bottom surface inside the box body 1, the partition pieces 2 and the clamping grooves 11 can be combined according to the shapes and sizes of the parts to form a compartment 12 suitable for storing the parts, and because the box body 1 and the partition pieces 2 have certain rigidity, the parts can be well protected; in addition, a plurality of compartments 12 with the same or different shapes and sizes can be formed in one sample containing box, different types of parts can be stored, and the parts of different devices in the same production line can be managed in a centralized mode, or the parts of the same device in the same production line can be managed in a centralized mode. It should be noted that the dust-free material in the embodiment of the present invention may be a non-dust-emitting plastic material, such as acrylic plate, or a non-dust-emitting metal material, such as aluminum alloy material, and preferably, a non-dust-emitting plastic material is used.

Referring to fig. 3 and 4, preferably, the card slots 11 are formed in a regular square grid shape or in a regular circular arc grid shape or in a combined grid shape of both the regular square grid shape and the regular circular arc grid shape.

Referring to fig. 5 and 6, preferably, the shape of the spacer 2 is a square straight plate or a curved arc, and the shape and size of the spacer 2 match the shape and size of the slot 11.

In the embodiment of the present invention, because the shapes of the components may be irregular, correspondingly, the slots 11 may be set to be linear or arc, and the correspondingly formed grid may be a square grid, an arc grid, or a combination grid of a square grid and an arc grid; similarly, the spacer 2 is formed in a linear shape corresponding to the linear shape of the card slot 11, the square straight plate-shaped spacer 2 is fitted to the linear card slot 11, and the curved arc-shaped spacer 2 is fitted to the arc-shaped card slot 11.

Preferably, the height of the spacer 2 is less than or equal to the height of the sidewall of the box body 1. The setting of the length dimension of the partition 2 generally follows a setting method by which the length dimension of the partition 2 is set to be flexibly selected in accordance with the formation and size of the parts to form the compartments 12 matching the parts if the bottom surface of the case 1 is formed in a 10 × 10 mesh shape, and the partitions 2 are respectively set to 1/10 case length values, 1/10 case width values, 2/10 case length values, 2/10 case width values, 3/10 case length values, 3/10 case width values, and so on until the same as the length values and width values of the case 1.

Preferably, the spacer 2 is formed with a slot longitudinally. Understandably, two faces of the spacer 2 are all formed with longitudinal slots, and the main function is to insert the 1 length direction spacer 2 of the box body into the slots of the 1 width direction spacer 2 of the box body or insert the 1 width direction spacer 2 of the box body into the slots of the 1 length direction spacer 2 of the box body when forming the compartment 12 so as to form a more stable structure. Preferably, the value of the spacing between the slots is equal to the value of the spacing between the card slots 11.

In a specific embodiment, referring to fig. 7 and 8, the inner bottom surface of the box body 1 is recessed to form the card slot 11; or strip-shaped bulges 13 are formed on the bottom surface of the interior of the box body 1, and the clamping groove 11 is formed between every two adjacent strip-shaped bulges 13. Understandably, for the concave-formed card slot 11, the depth of the card slot 11 needs to be smaller than the thickness of the bottom surface of the box body 1. It should be noted that the insertion groove on the surface of the spacer 2 is generally formed by recessing the surface of the spacer 2, and the depth of the insertion groove is smaller than the thickness of the spacer 2.

Preferably, a dust-free cloth is placed on the bottom surface of the plurality of compartments 12. It should be noted that before the components are placed in the compartment 12 matching with the components, a dust-free cloth can be placed on the bottom surface of the compartment 12, so as to further protect the components and ensure the cleanliness.

Preferably, referring to fig. 1, the sample loading box further comprises a cover body 3 detachably mounted on the box body 1.

Preferably, referring to fig. 1, the cover 3 and the box 1 are detachably connected by a buckle 31.

Preferably, the cover 3 is made of a dust-free material.

In the embodiment of the utility model, the cover body 3 is arranged to further play a role in protecting parts and ensuring cleanliness; the box body 1 and the cover body 3 are in a separated disassembly state before storing parts, the cover body 3 is placed on the periphery of the box body 1, and the spacer 2 and the dust-free cloth are placed on the cover body 3 so as to be assembled in time when needed; in addition, the cover 3 is made of a dust-free material.

In conclusion, the latticed clamping grooves are formed in the bottom of the box body, and the latticed clamping grooves and the spacers are combined to form the compartment 12 matched with the shape and the size of the part so as to fixedly store the part, and the box body and the spacers have certain rigidity, so that the part can be well protected, especially special-shaped parts, and meanwhile, the centralized classified storage management of the parts in a dust-free room can be realized, and diversified requirements of users are met; in addition, as the sample containing box is made of a dust-free material, the sample containing box does not pollute a dust-free chamber and meets the use requirement of the dust-free chamber.

The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the scope of the present invention, and any modifications, equivalent substitutions, improvements and the like made within the spirit and principle of the present invention should be included in the scope of the present invention.

Claims (10)

1. A kind of clean room is with dress appearance box which characterized in that includes:

the clamping grooves are distributed on the inner bottom surface of the box body in a grid shape;

a set of septa inserted into the card slot to form a compartment with the cartridge body and/or septa;

the box body the spacer is dust-free material.

2. The loading cassette according to claim 1, wherein the pockets are formed in a regular square grid pattern or in a regular circular arc grid pattern or in a combined grid pattern of both the regular square grid pattern and the regular circular arc grid pattern.

3. The specimen-containing box according to claim 2, wherein the shape of the spacer is a square straight plate shape or a curved circular arc shape, and the shape and the size of the spacer match the shape and the size of the card slot.

4. The cartridge of claim 3, wherein the height of the spacer is less than or equal to the height of the sidewall of the cartridge body.

5. The cartridge according to claim 4, wherein the spacer is formed with a slot in a longitudinal direction.

6. A sample loading cassette as claimed in claim 1, wherein the internal bottom surface of the cassette body is recessed to form said pockets; or

The bottom surface of the inner part of the box body is provided with strip-shaped bulges, and the clamping groove is formed between every two adjacent strip-shaped bulges.

7. A cartridge according to any one of claims 1 to 6, wherein a dust-free cloth is placed on the bottom surface of the plurality of compartments.

8. The cartridge according to any one of claims 1 to 6, further comprising a cover detachably attached to the cartridge body.

9. The loading cassette of claim 8, wherein the cover is removably connected to the cassette body by a snap fit.

10. A cartridge as in claim 9, wherein the cover is a dust-free material.

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