CN215728261U

CN215728261U - Low-leakage cantilever type probe card

Info

Publication number: CN215728261U
Application number: CN202121299080.7U
Authority: CN
Inventors: 孙锐锋; 劳杰; 刘志广; 黎华盛
Original assignee: Shenzhen Doctor Technology Co ltd
Current assignee: Shenzhen Doctor Technology Co ltd
Priority date: 2021-06-10
Filing date: 2021-06-10
Publication date: 2022-02-01
Anticipated expiration: 2031-06-10

Abstract

The utility model relates to the technical field of probe cards, and discloses a low-leakage cantilever type probe card.

Description

Low-leakage cantilever type probe card

Technical Field

The utility model relates to the technical field of probe cards, in particular to a low-leakage cantilever type probe card.

Background

A probe card (probe card) is a jig for electrically testing LSI (large scale integrated circuit) chips on a wafer during a wafer testing process in an LSI manufacturing process. The probe card is butted against a wafer prober to serve as a connector between electrodes of an LSI chip and an LSI tester (as a measuring machine). The needles of the probe card are brought into contact with the electrodes of the LSI chip to perform electrical testing for pass/fail testing. The wafer test process is very important and highly dependent on the reliability of the probe card.

The leakage value is one of important performance parameters of the probe card, and for the WAT test probe card, the low leakage standard of the probe card is required to be higher, and the leakage value is as low as 10-15A. However, most of the test probes of the existing cantilever probe card are fixed on the mounting plate by using an integral epoxy resin, and the epoxy resin may be doped with other impurities to reduce the insulation, so that the probe card is likely to generate electric leakage between the probes and the mounting plate in the using process, which affects the test performance of the probe card, and further improvement is needed.

SUMMERY OF THE UTILITY MODEL

The utility model mainly aims to provide a low-leakage cantilever type probe card, and aims to solve the technical problems that the existing probe card is easy to generate electric leakage between a probe and between the probe and a mounting plate in the using process, and the test performance of the probe card is influenced.

In order to achieve the above purpose, the cantilever probe card with low leakage provided by the utility model comprises a ceramic PCB, a fixed seat, a reinforcing plate, a ceramic ring, a test probe and an epoxy resin fixing plate, wherein a through groove is concavely arranged in the middle of the upper end part of the ceramic PCB, the fixed seat is detachably arranged above the through groove, the fixed seat is detachably and fixedly connected with the upper end wall of the ceramic PCB, the reinforcing plate is detachably arranged on the lower end wall of the fixed seat, the upper end wall of the ceramic ring is bonded and fixed on the lower end wall of the reinforcing plate through an epoxy adhesive, the epoxy resin fixing plates are respectively arranged on the lower end wall of the ceramic ring at intervals along the circumferential direction, the test probe is respectively arranged by penetrating through the epoxy resin fixing plates, the front end parts of the test probe are all arranged in a downward bending structure, and a plurality of bonding pads are arranged on the upper end wall of the ceramic PCB along the circumferential direction, and the rear end parts of the test probes are fixedly connected with the welding pads in a welding way respectively.

Further, still include first fastening screw, the recess is equipped with a plurality of first through-holes around leading to the groove, the upper end wall of fixing base is recessed be equipped with a plurality of with the first screw hole of first through-hole one-to-one, first fastening screw wear to locate respectively first through-hole to revolve in first screw is threaded the setting.

Furthermore, the fixing seat further comprises second fastening screws, wherein a second through hole is respectively and concavely formed in two sides of the upper end wall of the fixing seat, a second threaded hole is respectively and concavely formed in two sides of the reinforcing plate, and the second fastening screws are respectively arranged in the second through holes in a penetrating mode and are screwed in the second threaded holes.

Furthermore, the upper end walls of the fixed seat and the reinforcing plate are respectively provided with an observation groove in a concave mode.

Further, still include the handle, the handle all is the setting of U type structure, the handle set up respectively in the both sides of the upper end wall of pottery PCB board, just the both ends of handle equally divide respectively with fixed connection can be dismantled to the upper end wall of pottery PCB board.

Furthermore, the ceramic PCB comprises a third fastening screw, a plurality of third through holes are respectively and concavely formed in two sides of the upper end wall of the ceramic PCB, a third threaded hole is respectively and concavely formed in each of two ends of the handle, and the third fastening screw is respectively arranged in the third through hole in a penetrating manner and is screwed in the third threaded hole.

Furthermore, the fixing seat and the reinforcing plate are both made of stainless steel.

Furthermore, a plurality of strip-shaped welding discs are arranged on the upper end wall of the ceramic PCB along the circumferential direction.

By adopting the technical scheme of the utility model, the utility model has the following beneficial effects: the technical scheme of the utility model is that a through groove is concavely arranged in the middle of the upper end part of a ceramic PCB, a fixed seat is detachably arranged above the through groove, the fixed seat is detachably and fixedly connected with the upper end wall of the ceramic PCB, a reinforcing plate is detachably arranged on the lower end wall of the fixed seat, the upper end wall of a ceramic ring is bonded and fixed on the lower end wall of the reinforcing plate through an epoxy adhesive, epoxy resin fixing plates are respectively arranged on the lower end wall of the ceramic ring at intervals along the circumferential direction, test probes are respectively arranged by penetrating through the epoxy resin fixing plates, the front end parts of the test probes are all arranged in a downward bending structure, a plurality of bonding pads are arranged on the upper end wall of the ceramic PCB along the circumferential direction, the rear end parts of the test probes are respectively fixedly connected with the bonding pads in a welding way, each cantilever type probe is fixed on the ceramic ring through an independent epoxy resin fixing plate, and the probes are not connected with the epoxy resin fixing plates between the probes, the ceramic ring has good insulating property, thereby avoiding the electric leakage between the probe and the mounting plate, effectively reducing the electric leakage value of the probe card, achieving the purpose of effectively preventing the current leakage of the probe card during the test, improving the performance reliability of the probe card, and having simple structure, low manufacturing cost, convenient use and strong practicability.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the structures shown in the drawings without creative efforts.

Fig. 1 is a schematic view of an overall structure of a low leakage cantilever probe card according to the present invention;

fig. 2 is a schematic view of another embodiment of a cantilever probe card with low leakage current according to the present invention;

FIG. 3 is an enlarged view taken at A in FIG. 2;

fig. 4 is a partial structural schematic view of a low leakage cantilever probe card according to the present invention;

fig. 5 is a partially exploded view of a low leakage cantilever probe card according to the present invention.

The implementation, functional features and advantages of the objects of the present invention will be further explained with reference to the accompanying drawings.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

It should be noted that all the directional indicators (such as up, down, left, right, front, and rear … …) in the embodiment of the present invention are only used to explain the relative position relationship between the components, the movement situation, etc. in a specific posture (as shown in the drawing), and if the specific posture is changed, the directional indicator is changed accordingly.

In addition, technical solutions between various embodiments may be combined with each other, but must be realized by a person skilled in the art, and when the technical solutions are contradictory or cannot be realized, such a combination should not be considered to exist, and is not within the protection scope of the present invention.

The utility model provides a low-leakage cantilever type probe card.

As shown in fig. 1 to 5, in an embodiment of the present invention, the low leakage cantilever probe card includes a ceramic PCB 101, a fixing base 102, a reinforcing plate 103, a ceramic ring 104, a test probe 105 and an epoxy fixing plate 106, wherein a through slot 1011 is recessed in a middle of an upper end portion of the ceramic PCB 101, the fixing base 102 is detachably disposed above the through slot 1011, the fixing base 102 is detachably and fixedly connected to an upper end wall of the ceramic PCB 101, the reinforcing plate 103 is detachably disposed on a lower end wall of the fixing base 102, an upper end wall of the ceramic ring 104 is adhesively fixed to a lower end wall of the reinforcing plate 103 by an epoxy adhesive, the epoxy fixing plates 106 are respectively disposed on a lower end wall of the ceramic ring 104 at intervals along a circumferential direction, and the test probe 106 is respectively disposed through the epoxy fixing plate 106, the front end parts of the test probes 105 are arranged in a downward bending structure, the upper end wall of the ceramic PCB 101 is provided with a plurality of bonding pads 107 along the circumferential direction, and the rear end parts of the test probes 106 are fixedly connected with the bonding pads 107 in a welding mode respectively.

Specifically, the fixing device further includes a first fastening screw 108, a plurality of first through holes 1012 are concavely formed around the through slot 1011, a plurality of first threaded holes 1021 corresponding to the first through holes 1012 in a one-to-one manner are concavely formed on the upper end wall of the fixing base 102, and the first fastening screw 108 is respectively inserted into the first through holes 1012 and screwed into the first threaded holes 1021.

Specifically, the fixing device further includes a second fastening screw 109, two sides of the upper end wall of the fixing base 102 are respectively provided with a second through hole 1022 in a concave manner, two sides of the reinforcing plate 103 are respectively provided with a second threaded hole 1031 in a concave manner, and the second fastening screw 109 is respectively inserted into the second through hole 1022 and screwed into the second threaded hole 1031.

Specifically, the upper end walls of the fixing base 102 and the reinforcing plate 103 are respectively provided with a viewing slot 110 in a concave manner.

Specifically, still include handle 111, handle 111 is the setting of U type structure, handle 111 set up respectively in the both sides of the upper end wall of pottery PCB board 101, just the both ends of handle 111 equally divide respectively with fixed connection can be dismantled to the upper end wall of pottery PCB board 101.

Specifically, the ceramic PCB panel 101 further includes a third fastening screw 112, wherein a plurality of third through holes (not shown) are respectively and concavely formed on two sides of the upper end wall of the ceramic PCB panel 101, a third threaded hole (not shown) is respectively and concavely formed on two ends of the handle 111, and the third fastening screw 112 is respectively inserted into the third through hole and screwed into the third threaded hole.

Specifically, the fixing seat 102 and the reinforcing plate 103 are both made of stainless steel.

Specifically, the upper end wall of the ceramic PCB 101 is provided with a plurality of bar-shaped soldering lands 113 in a circumferential direction.

Specifically, the utility model is characterized in that a through groove is concavely arranged in the middle of the upper end part of the ceramic PCB, a fixed seat is detachably arranged above the through groove, the fixed seat is detachably and fixedly connected with the upper end wall of the ceramic PCB, a reinforcing plate is detachably arranged on the lower end wall of the fixed seat, the upper end wall of a ceramic ring is fixedly bonded on the lower end wall of the reinforcing plate through an epoxy adhesive, epoxy resin fixing plates are respectively arranged on the lower end wall of the ceramic ring at intervals along the circumferential direction, test probes are respectively arranged by penetrating through the epoxy resin fixing plates, the front end parts of the test probes are all arranged in a downward bending structure, a plurality of bonding pads are arranged on the upper end wall of the ceramic PCB along the circumferential direction, the rear end parts of the test probes are respectively fixedly connected with the bonding pads in a welding way, each cantilever type probe is fixed on the ceramic ring through adopting an independent epoxy resin fixing plate, and the probes are not connected with the epoxy resin fixing plates between the probes, the ceramic ring has good insulating property, thereby avoiding the electric leakage between the probe and the mounting plate, effectively reducing the electric leakage value of the probe card, achieving the purpose of effectively preventing the current leakage of the probe card during the test, improving the performance reliability of the probe card, and having simple structure, low manufacturing cost, convenient use and strong practicability.

The above description is only a preferred embodiment of the present invention, and not intended to limit the scope of the present invention, and all modifications and equivalents of the technical solutions of the present invention, which are made by using the contents of the present specification and the accompanying drawings, or directly/indirectly applied to other related technical fields, are included in the scope of the present invention.

Claims

1. A low-leakage cantilever type probe card is characterized by comprising a ceramic PCB, a fixed seat, a reinforcing plate, a ceramic ring, a test probe and an epoxy resin fixing plate, wherein a through groove is concavely arranged in the middle of the upper end part of the ceramic PCB, the fixed seat is detachably arranged above the through groove, the fixed seat is detachably and fixedly connected with the upper end wall of the ceramic PCB, the reinforcing plate is detachably arranged on the lower end wall of the fixed seat, the upper end wall of the ceramic ring is fixedly bonded on the lower end wall of the reinforcing plate through an epoxy adhesive, the epoxy resin fixing plate is respectively arranged on the lower end wall of the ceramic ring at intervals along the circumferential direction, the test probe is respectively arranged on the epoxy resin fixing plate in a penetrating manner, the front end parts of the test probes are all arranged in a downward bending structure, and a plurality of bonding pads are arranged on the upper end wall of the ceramic PCB along the circumferential direction, and the rear end parts of the test probes are fixedly connected with the welding pads in a welding way respectively.

2. The cantilever probe card with low leakage of claim 1, further comprising a first fastening screw, wherein a plurality of first through holes are recessed around the through groove, a plurality of first threaded holes corresponding to the first through holes one by one are recessed in an upper end wall of the fixing base, and the first fastening screws are respectively inserted into the first through holes and screwed into the first threaded holes.

3. The cantilever probe card with low leakage of claim 1, further comprising a second fastening screw, wherein a second through hole is respectively recessed at two sides of the upper end wall of the fixing base, a second threaded hole is respectively recessed at two sides of the reinforcing plate, and the second fastening screw is respectively inserted into the second through hole and screwed into the second threaded hole.

4. The cantilever probe card of claim 1, wherein the fixing base and the reinforcing plate are recessed with a viewing slot on the upper end wall.

5. The cantilever probe card with low leakage of claim 1, further comprising handles, wherein the handles are disposed in a U-shaped configuration, the handles are disposed on two sides of the upper end wall of the ceramic PCB respectively, and two ends of the handles are detachably and fixedly connected to the upper end wall of the ceramic PCB respectively.

6. The cantilever probe card with low leakage of claim 5, further comprising a third fastening screw, wherein a plurality of third through holes are respectively recessed on two sides of the upper end wall of the ceramic PCB, a third threaded hole is respectively recessed on two ends of the handle, and the third fastening screw is respectively inserted into the third through holes and screwed into the third threaded hole.

7. The cantilever probe card with low creepage of claim 1, wherein the holder and the stiffener are formed of stainless steel.

8. The low leakage cantilever probe card of claim 1, wherein the upper end wall of the ceramic PCB board is provided with a plurality of bar-shaped bonding pads along a circumferential direction.