CN215713529U

CN215713529U - Energy-concerving and environment-protective novel annealing stove

Info

Publication number: CN215713529U
Application number: CN202121920848.8U
Authority: CN
Inventors: 张圣耀; 支刚; 赵先锋; 吴有鹏
Original assignee: Shandong Runchen Industry And Trade Co ltd
Current assignee: Shandong Runchen Industry And Trade Co ltd
Priority date: 2021-08-17
Filing date: 2021-08-17
Publication date: 2022-02-01
Anticipated expiration: 2031-08-17

Abstract

The utility model discloses an energy-saving and environment-friendly novel annealing furnace, which comprises an annealing furnace body, a second fixing piece and a shell, the bottom end of the outer surface of the annealing furnace body is provided with a panel, the inner wall of the annealing furnace body is fixedly provided with a first limit plate, and the inner wall of the annealing furnace body is provided with a second limiting plate, the inner wall of the annealing furnace body is fixedly provided with a first coil and a second coil, the rear end of the outer surface of the annealing furnace body is provided with a case, and the side end face of the case is provided with a rotating shaft, one end of the rotating shaft departing from the case is fixedly provided with a clapboard, and a guide groove is arranged in the clapboard, a first fixing piece is arranged on the front end surface of the clapboard, a hydraulic rod is arranged on the rear end surface of the clapboard, the rear end face of the second fixing piece is welded with a connecting frame, a shell is mounted on the outer surface of the annealing furnace body, and a connecting pipe is fixedly embedded in the top end face of the shell. The utility model has the advantages of convenient operation, high heat insulation performance and better practicability.

Description

Energy-concerving and environment-protective novel annealing stove

Technical Field

The utility model relates to the technical field of annealing furnaces, in particular to a novel energy-saving and environment-friendly annealing furnace.

Background

An annealing furnace is a process used in semiconductor device manufacturing that includes heating a plurality of semiconductor wafers to affect their electrical properties. The heat treatment is designed for different effects. The wafer may be heated to activate the dopants, convert the thin film into a thin film or convert the thin film into a wafer substrate interface, densify the deposited thin film, change the state of the grown thin film, repair implanted damage, move dopants or transfer dopants from one thin film to another or from the thin film into the wafer substrate.

However, the existing annealing furnace has poor internal heat preservation, easily causes waste of a large amount of heat energy, and influences actual processing and production in the later period.

SUMMERY OF THE UTILITY MODEL

The utility model aims to provide a novel energy-saving and environment-friendly annealing furnace to solve the problems in the background technology.

In order to achieve the purpose, the utility model provides the following technical scheme: the utility model provides an energy-concerving and environment-protective novel annealing stove, includes annealing stove body, second mounting and shell, the panel is installed to the surface bottom of annealing stove body, the inner wall fixed mounting of annealing stove body has first coil pipe and second coil pipe, quick-witted case is installed to the surface rear end of annealing stove body, and the side end face of machine case is provided with the pivot, the pivot deviates from the one end fixed mounting of quick-witted case and has the baffle, and has seted up the guide way in the baffle, first mounting is installed to the preceding terminal surface of baffle, and the rear end face of baffle installs the hydraulic stem, the rear end face welding of second mounting has the link, the surface mounting of annealing stove body has the shell, and the top face embedding of shell is fixed with the connecting pipe.

Preferably, the bottom end face of the panel is welded with a support frame, and the bottom end face of the support frame is fixedly provided with a base.

Preferably, the inner wall of the annealing furnace body is fixedly provided with a first limiting plate, and the inner wall of the annealing furnace body is provided with a second limiting plate.

Preferably, the connecting frame is slidably sleeved on the guide groove, and the connecting frame is fixedly installed on the air inlet pipe.

Preferably, a fan is arranged in the connecting pipe, and a filter screen and a heating wire are arranged in the shell.

Preferably, the bottom end face embedding of shell is fixed with the intake pipe, and the shell passes through intake pipe and first coil pipe and second coil pipe gaseous intercommunication.

Preferably, the first coil pipe and the second coil pipe are fixedly embedded with air outlet pipes, and the first coil pipe and the second coil pipe are in air communication with the connecting pipe through the air outlet pipes.

Compared with the prior art, the utility model has the following beneficial effects:

1. according to the utility model, by arranging the partition plate, when an operator processes a workpiece, the operator places the workpiece in the partition plate, the workpiece is positioned on the inner walls of the first fixing part and the second fixing part, after the workpiece is placed, the operator opens the hydraulic rod to push the second fixing part to move left and right, the workpiece is clamped and limited when the second fixing part moves, so that the operator can clamp and limit according to the actual size of the workpiece, and when annealing is carried out, the operator can open the power device by an external power supply to drive the partition plate to rotate, so that the workpiece is heated more uniformly when the partition plate rotates, the practicability is higher, and the later operation is more convenient.

2. According to the annealing furnace, the annealing furnace body is arranged, when a worker anneals a workpiece, the worker is connected with the external power supply to turn on the fan and the heating wire, when the fan is started, the air is driven to enter the shell to be heated through the heating wire, the air is fed into the first coil pipe and the second coil pipe after being heated, when the air circulates in the first coil pipe and the second coil pipe, the heat in the annealing furnace body is more uniformly diffused, and the air of the first coil pipe and the second coil pipe flows back into the connecting pipe through the air outlet pipe to be used again, so that the practicability is higher, the heat can be better reused, the practicability is higher, and the processing is more convenient.

Drawings

FIG. 1 is a schematic front view of the present invention;

FIG. 2 is a schematic diagram of the internal structure of the present invention;

FIG. 3 is a schematic side view of the present invention;

fig. 4 is a side view of the second fixing member of the present invention.

In the figure: 1. a support frame; 2. a base; 3. a first coil pipe; 4. a panel; 5. a second coiled tube; 6. an annealing furnace body; 7. a first limit plate; 8. a second limiting plate; 9. a first fixing member; 10. a partition plate; 11. a guide groove; 12. a hydraulic lever; 13. a second fixing member; 14. a chassis; 15. a rotating shaft; 16. an air outlet pipe; 17. a fan; 18. a connecting pipe; 19. filtering with a screen; 20. an electric heating wire; 21. a housing; 22. an air inlet pipe; 23. and a connecting frame.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

In the description of the present invention, it should be noted that the terms "upper", "lower", "inner", "outer", "front", "rear", "both ends", "one end", "the other end", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "disposed," "connected," and the like are to be construed broadly, such as "connected," which may be fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.

Referring to fig. 1 to 4, an embodiment of the present invention includes: a novel energy-saving and environment-friendly annealing furnace comprises an annealing furnace body 6, a second fixing part 13 and a shell 21, wherein a panel 4 is installed at the bottom end of the outer surface of the annealing furnace body 6, a support frame 1 is welded on the bottom end face of the panel 4, a base 2 is fixedly installed on the bottom end face of the support frame 1, a first limiting plate 7 is fixedly installed on the inner wall of the annealing furnace body 6, a second limiting plate 8 is installed on the inner wall of the annealing furnace body 6, a first coil pipe 3 and a second coil pipe 5 are fixedly installed on the inner wall of the annealing furnace body 6, a cabinet 14 is installed at the rear end of the outer surface of the annealing furnace body 6, a rotary shaft 15 is arranged on the side end face of the cabinet 14, a partition plate 10 is fixedly installed at one end of the rotary shaft 15, a guide groove 11 is formed in the partition plate 10, the rotary shaft 15 needs to provide a power device to enable the novel annealing furnace to normally work, and as well known by technical personnel in the field, the power device is installed in the case 14, and the power supply is common, and all of them belong to conventional means or common knowledge, and are not described herein again, and those skilled in the art can make any selection according to their needs or convenience. The power device drives the rotating shaft 15 to rotate.

The front end face of the partition board 10 is provided with the first fixing part 9, the rear end face of the partition board 10 is provided with the hydraulic rod 12, the rear end face of the second fixing part 13 is welded with the connecting frame 23, the connecting frame 23 is sleeved on the guide groove 11 in a sliding mode, the connecting frame 23 is fixedly arranged on the air inlet pipe 22, through the arrangement of the partition board 10, when an operator processes a workpiece, the operator places the workpiece in the partition board 10, the workpiece is located on the inner walls of the first fixing part 9 and the second fixing part 13, after the workpiece is placed, the operator opens the hydraulic rod 12 to push the second fixing part 13 to move left and right, when the second fixing part 13 moves, the workpiece is clamped and limited, the operator can clamp and limit according to the actual size of the workpiece, when annealing is performed, the operator can open the power device through an external power supply to drive the partition board 10 to rotate, the workpiece is heated more uniformly when the partition board 10 rotates, and the practicability is higher, the later operation is more convenient.

The outer surface of the annealing furnace body 6 is provided with a shell 21, the top end surface of the shell 21 is fixedly embedded with a connecting pipe 18, the bottom end surface of the shell 21 is fixedly embedded with an air inlet pipe 22, the shell 21 is in gas communication with a first coil pipe 3 and a second coil pipe 5 through the air inlet pipe 22, an air outlet pipe 16 is fixedly embedded on the first coil pipe 3 and the second coil pipe 5, the first coil pipe 3 and the second coil pipe 5 are in gas communication with the connecting pipe 18 through the air outlet pipe 16, a fan 17 is installed in the connecting pipe 18, a filter screen 19 and an electric heating wire 20 are installed in the shell 21, through the arrangement of the annealing furnace body 6, when a person anneals a workpiece, the fan 17 and the electric heating wire 20 are opened by an external power supply of the person, when the fan 17 is started, the gas is driven to enter the shell 21 to be heated through the electric heating wire 20 and then is fed into the first coil pipe 3 and the second coil pipe 5, the heat in the annealing furnace body 6 is more uniformly diffused when the gas circulates in the first coil pipe 3 and the second coil pipe 5, and the gas of first coil pipe 3 and second coil pipe 5 flows back through outlet duct 16 and uses in connecting pipe 18 once more, makes the practicality higher, and the heat can be better reuse, makes the practicality higher, and it is more convenient to process.

The working principle is as follows: operating personnel adds man-hour to the work piece, the personnel place the work piece in baffle 10, and the work piece is in the inner wall of first mounting 9 and second mounting 13, the personnel open hydraulic stem 12 after placing and promote the second mounting 13 and remove about, carry out centre gripping and spacing to the work piece when second mounting 13 removes, make personnel can carry out centre gripping and spacing according to the actual size of work piece, and when annealing, personnel can external power supply open power device and drive baffle 10 and rotate, it is more even to make the work piece be heated when baffle 10 rotates. Personnel are when annealing the work piece, fan 17 and heating wire 20 are opened to personnel external power supply, fan 17 drives gas entering shell 21 when starting and heats through heating wire 20 in, supply in first coil pipe 3 and second coil pipe 5 after the heating, gas makes the more even divergence of heat in the annealing stove body 6 when circulating in first coil pipe 3 and second coil pipe 5, and the gas of first coil pipe 3 and second coil pipe 5 is used once more in the connecting pipe 18 that flows back through outlet duct 16.

It will be evident to those skilled in the art that the utility model is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the utility model being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.

Claims

1. The utility model provides an energy-concerving and environment-protective novel annealing stove, includes annealing stove body (6), second mounting (13) and shell (21), its characterized in that: the bottom end of the outer surface of the annealing furnace body (6) is provided with a panel (4), the inner wall of the annealing furnace body (6) is fixedly provided with a first coil (3) and a second coil (5), the rear end of the outer surface of the annealing furnace body (6) is provided with a case (14), a rotating shaft (15) is arranged on the side end face of the case (14), a partition plate (10) is fixedly arranged at one end of the rotating shaft (15) deviating from the case (14), a guide groove (11) is arranged in the clapboard (10), a first fixing piece (9) is arranged on the front end face of the clapboard (10), a hydraulic rod (12) is arranged on the rear end face of the partition plate (10), a connecting frame (23) is welded on the rear end face of the second fixing piece (13), the outer surface of the annealing furnace body (6) is provided with a shell (21), and the top end surface of the shell (21) is fixedly embedded with a connecting pipe (18).

2. The energy-saving and environment-friendly novel annealing furnace according to claim 1, characterized in that: the bottom face welding of panel (4) has support frame (1), and the bottom face fixed mounting of support frame (1) has base (2).

3. The energy-saving and environment-friendly novel annealing furnace according to claim 1, characterized in that: the inner wall fixed mounting of annealing stove body (6) has first limiting plate (7), and annealing stove body (6) annealing stove body's (6) inner wall installs second limiting plate (8).

4. The energy-saving and environment-friendly novel annealing furnace according to claim 1, characterized in that: the connecting frame (23) is sleeved on the guide groove (11) in a sliding mode, and the connecting frame (23) is fixedly installed on the air inlet pipe (22).

5. The energy-saving and environment-friendly novel annealing furnace according to claim 1, characterized in that: a fan (17) is installed in the connecting pipe (18), and a filter screen (19) and an electric heating wire (20) are installed in the shell (21).

6. The energy-saving and environment-friendly novel annealing furnace according to claim 1, characterized in that: the bottom end face embedding of shell (21) is fixed with intake pipe (22), and shell (21) pass through intake pipe (22) and first coil pipe (3) and second coil pipe (5) gaseous intercommunication.

7. The energy-saving and environment-friendly novel annealing furnace according to claim 1, characterized in that: an air outlet pipe (16) is fixedly embedded in the first coil pipe (3) and the second coil pipe (5), and the first coil pipe (3) and the second coil pipe (5) are in air communication with the connecting pipe (18) through the air outlet pipe (16).