CN215713369U - Tubular PECVD equipment and coating film chamber heating device thereof - Google Patents
Tubular PECVD equipment and coating film chamber heating device thereof Download PDFInfo
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- CN215713369U CN215713369U CN202121671641.1U CN202121671641U CN215713369U CN 215713369 U CN215713369 U CN 215713369U CN 202121671641 U CN202121671641 U CN 202121671641U CN 215713369 U CN215713369 U CN 215713369U
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- heating
- graphite boat
- tubular pecvd
- heating device
- coating
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- 238000010438 heat treatment Methods 0.000 title claims abstract description 113
- 239000011248 coating agent Substances 0.000 title claims abstract description 45
- 238000000576 coating method Methods 0.000 title claims abstract description 45
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 title claims abstract description 31
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 33
- 229910002804 graphite Inorganic materials 0.000 claims abstract description 33
- 239000010439 graphite Substances 0.000 claims abstract description 33
- 239000012212 insulator Substances 0.000 claims abstract description 14
- 229910052751 metal Inorganic materials 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 4
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 claims description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 5
- 229910052710 silicon Inorganic materials 0.000 abstract description 5
- 239000010703 silicon Substances 0.000 abstract description 5
- 230000004075 alteration Effects 0.000 abstract description 3
- 230000002035 prolonged effect Effects 0.000 abstract description 2
- 238000000429 assembly Methods 0.000 description 12
- 230000000712 assembly Effects 0.000 description 12
- 238000009826 distribution Methods 0.000 description 8
- 239000007888 film coating Substances 0.000 description 6
- 238000009501 film coating Methods 0.000 description 6
- 235000012431 wafers Nutrition 0.000 description 4
- 230000009286 beneficial effect Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000010248 power generation Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Images
Abstract
The utility model discloses tubular PECVD equipment and a coating cavity heating device thereof. Each group of heating components comprises a plurality of heating rods which are uniformly laid on the surface of the graphite boat along the linear direction, so that the surface of the graphite boat is uniformly heated, and the uneven heating of the graphite boat due to the overlarge size is avoided. The graphite boat is uniformly heated, so that the excessive chromatic aberration of the silicon wafer can be avoided, and the coating quality can be improved. Each heating rod comprises at least two heating wires, a support sleeve wrapped on the periphery of all the heating wires and insulators filled in the support sleeves and used for separating the two adjacent heating wires, the service life of the heating rod is prolonged by changing the type of the heater, the failure rate is reduced, the risk of uneven temperature of a thermal field in a coating cavity is reduced, and the coating quality can still be improved.
Description
Technical Field
The utility model relates to the technical field of semiconductor processing, in particular to a tubular PECVD device and a heating device of a coating cavity thereof.
Background
The tubular PECVD equipment generally utilizes a radio frequency power supply to discharge and ionize process gas to realize film coating, and the film coating is a key link of photovoltaic cell production, so the performance of the tubular PECVD equipment directly influences the efficiency and the capacity of the photovoltaic cell. With the popularization of solar power generation, the size of a silicon wafer of a photovoltaic cell is larger and larger, and accordingly, the diameter of a film coating cavity of a tubular PECVD (plasma enhanced chemical vapor deposition) device and the size of a graphite boat in the cavity are increased, which brings great challenges to the uniformity of the temperature of a thermal field in the cavity.
An infrared lamp tube heater is generally adopted in a coating cavity of the conventional tubular PECVD equipment to heat a graphite boat, and the graphite boat is too large in size, so that the graphite boat is not uniformly heated, the color difference of a silicon wafer is serious, and the coating quality is influenced. In addition, the infrared lamp tube heater has short service life and low reliability, and faults are easy to occur in the film coating process, so that the temperature of a thermal field in the cavity in the film coating process is not uniform, and the film coating quality is still influenced.
Therefore, how to heat the coating chamber of the tubular PECVD apparatus to improve the coating quality is a technical problem to be solved by those skilled in the art.
SUMMERY OF THE UTILITY MODEL
In view of the above, the present invention provides a tubular PECVD apparatus and a heating device of a coating chamber thereof, which utilize heating rods to replace infrared lamp heaters by optimizing the distribution of heating assemblies and the distribution of heating rods in each group of heating assemblies, so as to ensure uniform heating of a graphite boat, avoid serious chromatic aberration, and facilitate improvement of coating quality.
The utility model provides a heating device for a coating cavity of a tubular PECVD (plasma enhanced chemical vapor deposition) device, which comprises two groups of heating components symmetrically arranged at the upper side and the lower side of a graphite boat, wherein each group of heating components comprises a plurality of heating rods uniformly laid on the surface of the graphite boat along a linear direction, and each heating rod comprises:
at least two heating wires;
the support sleeve wraps the peripheries of all the heating wires;
and the insulator is filled in the supporting sleeve and is used for separating two adjacent heating wires.
Preferably, each heating wire is helical.
Preferably, all the heating wires are uniformly distributed in a circular ring shape around the central line of the support sleeve.
Preferably, each heating rod comprises an electrical connector fixedly sleeved on the supporting sleeve.
Preferably, the insulator is a magnesium powder insulator.
Preferably, the support sleeve is a metal sleeve, and each heating rod further comprises an insulating sleeve sleeved on the periphery of the support sleeve.
The tubular PECVD equipment provided by the utility model comprises any one of the coating cavity heating devices.
Compared with the background art, the heating device for the coating cavity of the tubular PECVD equipment comprises two groups of heating assemblies which are symmetrically arranged at the upper side and the lower side of a graphite boat, so that the heating assemblies are ensured to be uniformly distributed in the coating cavity, the temperature of a thermal field of the coating cavity is more uniform, and the graphite boat is favorably and uniformly heated. Each group of heating components comprises a plurality of heating rods which are uniformly laid on the surface of the graphite boat along the linear direction, and the distribution mode of the heating rods is set according to the surface of the graphite boat, so that the surface of the graphite boat is uniformly heated, and the uneven heating of the graphite boat due to the overlarge size is avoided. Obviously, the graphite boat can be uniformly heated by optimizing the distribution mode of the heating assemblies and the distribution mode of the heating rods in each group of heating assemblies, so that the excessive chromatic aberration of the silicon wafer is avoided, and the coating quality is favorably improved.
Furthermore, each heating rod in the utility model comprises at least two heating wires, a support sleeve and an insulator, wherein the support sleeve wraps the peripheries of all the heating wires, and the insulator is filled in the support sleeve and is used for separating two adjacent heating wires.
In conclusion, the heating device of the coating cavity of the tubular PECVD equipment can improve the coating quality.
The tubular PECVD equipment provided by the utility model comprises a coating cavity heating device and has the same beneficial effects.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the provided drawings without creative efforts.
FIG. 1 is a schematic diagram of a heating apparatus of a coating chamber of a tubular PECVD apparatus according to an embodiment of the present invention;
fig. 2 is a structural view of the heating rod of fig. 1.
The reference numbers are as follows:
a coating cavity 01 and a graphite boat 02;
a heating rod 1;
a heating wire 11, a support sleeve 12, an insulator 13, an electrical connector 14, a lead 15 and an insulating sleeve 16.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In order that those skilled in the art will better understand the disclosure, the utility model will be described in further detail with reference to the accompanying drawings and specific examples.
Referring to fig. 1 and 2, fig. 1 is a structural diagram of a heating device of a coating chamber of a tubular PECVD apparatus according to an embodiment of the present invention; fig. 2 is a structural view of the heating rod of fig. 1.
The embodiment of the utility model discloses a coating cavity heating device of tubular PECVD equipment, which comprises two groups of heating assemblies, wherein the two groups of heating assemblies are symmetrically arranged on the upper side and the lower side of a graphite boat 02, so that the heating assemblies are uniformly distributed in a coating cavity 01, the temperature of a thermal field of the coating cavity 01 is more uniform, and the graphite boat 02 is uniformly heated.
Every group heating element includes a plurality of heating rods 1, and graphite boat 02 surface is evenly laid along the linear to every group heating element's heating rod 1, and the distribution mode of heating rod 1 is according to graphite boat 02's surface setting, and graphite boat 02's size is big more, and every group heating element's heating rod 1 quantity is more, ensures graphite boat 02's surface thermally equivalent, avoids graphite boat 02 to be heated inhomogeneous because of the size is too big.
Obviously, the heating device for the coating cavity of the tubular PECVD equipment provided by the utility model can ensure that the graphite boat 02 can be uniformly heated by optimizing the distribution mode of the heating assemblies and the distribution mode of the heating rods 1 in each group of heating assemblies, thereby avoiding overlarge color difference of silicon wafers and being beneficial to improving the coating quality.
Specifically, the top and the bottom of the graphite boat 02 are respectively provided with three heating rods 1, and the heating rods 1 of the two groups of heating assemblies are all arranged in one-to-one symmetry. Of course, four heating rods 1 may be respectively disposed on the top and the bottom of the graphite boat 02, and the number of the heating rods 1 is specifically set according to the width of the graphite boat 02 and the diameter of the coating chamber 01, which is not specifically limited herein.
Each heating rod 1 comprises at least two heating wires 11, a supporting sleeve 12 and an insulator 13, the insulator 13 is filled in the supporting sleeve 12 and used for separating the two adjacent heating wires 11, the heating rods 1 are used for replacing the existing infrared lamp tube heater, the service life of the heater is prolonged by changing the type of the heater, the failure rate is reduced, the risk of uneven temperature of a thermal field in the coating cavity 01 is reduced, and the coating quality can still be improved.
Each heating wire 11 is spiral and has good high temperature resistance. The supporting sleeves 12 are cylindrical, and each supporting sleeve 12 is a high-temperature-resistant and corrosion-resistant metal sleeve, so that the heating wire 11 radiates heat outwards by means of the metal sleeve to achieve the heating purpose. The insulator 13 is a magnesium powder insulator, and has good insulating property. The optimized heating rod 1 has good high-temperature resistance and insulating property and high power density per unit length, and ensures that the heating rod 1 has long service life and high reliability.
In conclusion, the heating device of the coating cavity of the tubular PECVD equipment can improve the coating quality.
All the heating wires 11 are uniformly distributed in a ring shape around the central line of the supporting sleeve 12, so that the heating rod 1 can uniformly radiate heat. Specifically, three heating wires 11 are installed in the support sleeve 12, and the number of the heating wires 11 can also be set according to the width of the graphite boat 02 and the diameter of the coating chamber 01, which is not specifically limited herein.
Each heating rod 1 comprises an electrical connector 14 fixedly sleeved on the support sleeve 12, and the electrical connector 14 is externally connected with a power supply through a lead 15 to ensure that the heating wire 11 is electrified and heated.
Every heating rod 1 is still including the insulating cover 16 that the support cover 12 periphery was located to the cover, and insulating cover 16 is made by insulating material, is cylindricly, and its high temperature resistant, oxidation resistance and corrosion resistance are all higher, and high temperature strength is good, avoids two adjacent heating rod 1 mutual interferences, still can utilize insulating cover 16 to support and protect heating rod 1 simultaneously. The insulating sleeve 16 can have elasticity, so that the insulating sleeve 16 is tightly attached to the heating rod 1 by means of elastic force, and the insulating performance is prevented from being influenced by the fact that the insulating sleeve 16 slides and falls off.
The utility model also discloses tubular PECVD equipment which comprises the coating cavity heating device and has the same beneficial effects.
The tubular PECVD apparatus and the heating device of the coating chamber thereof provided by the present invention are introduced in detail above, and specific examples are applied herein to illustrate the principle and the embodiment of the present invention, and the description of the above embodiments is only used to help understand the core idea of the present invention; meanwhile, for a person skilled in the art, according to the idea of the present invention, there may be variations in the specific embodiments and the application scope, and in summary, the content of the present specification should not be construed as a limitation to the present invention.
Claims (7)
1. The utility model provides a coating film chamber heating device of tubular PECVD equipment which characterized in that, includes two sets of heating element who locates graphite boat (02) upper and lower both sides symmetrically, every group heating element includes that a plurality of are evenly laid heating rod (1) on graphite boat (02) surface along linear, every heating rod (1) includes:
at least two heating wires (11);
a support sleeve (12) which is wrapped on the periphery of all the heating wires (11);
and the insulator (13) is filled in the support sleeve (12) and is used for separating two adjacent heating wires (11).
2. The heating device of the coating chamber of the tubular PECVD apparatus as recited in claim 1, wherein each of the heating wires (11) is helical.
3. The heating device of the coating chamber of the tubular PECVD apparatus according to claim 1, wherein all the heating wires (11) are uniformly distributed in a ring shape around the center line of the support sleeve (12).
4. The heating device of the coating chamber of the tubular PECVD apparatus as recited in claim 1, wherein each heating rod (1) comprises an electrical connector (14) fixedly sleeved on the support sleeve (12).
5. The heating device of the coating chamber of the tubular PECVD apparatus according to claim 1, wherein the insulator (13) is a magnesium powder insulator.
6. The heating device of the coating chamber of the tubular PECVD apparatus as recited in claim 1, wherein the supporting sleeve (12) is a metal sleeve, and each heating rod (1) further comprises an insulating sleeve (16) sleeved on the periphery of the supporting sleeve (12).
7. A tubular PECVD apparatus, comprising the coating chamber heating apparatus of any one of claims 1 to 6.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121671641.1U CN215713369U (en) | 2021-07-21 | 2021-07-21 | Tubular PECVD equipment and coating film chamber heating device thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121671641.1U CN215713369U (en) | 2021-07-21 | 2021-07-21 | Tubular PECVD equipment and coating film chamber heating device thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN215713369U true CN215713369U (en) | 2022-02-01 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202121671641.1U Active CN215713369U (en) | 2021-07-21 | 2021-07-21 | Tubular PECVD equipment and coating film chamber heating device thereof |
Country Status (1)
| Country | Link |
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| CN (1) | CN215713369U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116623154A (en) * | 2023-05-23 | 2023-08-22 | 东莞嘉拓日晟智能科技有限公司 | Novel tubular PECVD (plasma enhanced chemical vapor deposition) equipment and coating process thereof |
-
2021
- 2021-07-21 CN CN202121671641.1U patent/CN215713369U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116623154A (en) * | 2023-05-23 | 2023-08-22 | 东莞嘉拓日晟智能科技有限公司 | Novel tubular PECVD (plasma enhanced chemical vapor deposition) equipment and coating process thereof |
| CN116623154B (en) * | 2023-05-23 | 2024-01-02 | 东莞嘉拓日晟智能科技有限公司 | Tubular PECVD equipment and coating process thereof |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP02 | Change in the address of a patent holder |
Address after: No. 27 Changjiang South Road, Xinwu District, Wuxi City, Jiangsu Province, China Patentee after: Jiangsu micro nano technology Co.,Ltd. Address before: 214000 9-6-2 Xinshuo Road, Xinwu District, Wuxi City, Jiangsu Province Patentee before: Jiangsu micro nano technology Co.,Ltd. |
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| CP02 | Change in the address of a patent holder |