CN215713353U - Vacuum coating machine - Google Patents
Vacuum coating machine Download PDFInfo
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- CN215713353U CN215713353U CN202122154588.4U CN202122154588U CN215713353U CN 215713353 U CN215713353 U CN 215713353U CN 202122154588 U CN202122154588 U CN 202122154588U CN 215713353 U CN215713353 U CN 215713353U
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Abstract
The utility model discloses a vacuum film plating machine, which comprises a film plating machine body and a cooling device, wherein the film plating machine body is provided with an inner cavity wall and an outer cavity wall, a connecting strip for realizing fixed connection with the outer cavity wall is arranged on the outer side of the inner cavity wall, a cavity is arranged between the inner cavity wall and the outer cavity wall, an output valve, an input valve and a vacuum pump are arranged on the outer cavity wall, the output valve and the input valve are both communicated with the cavity, the vacuum pump is used for realizing air pressure control in the cavity, the cooling device comprises a first pipeline, a second pipeline, a cooling tank, a cooling liquid tank and a water pump, the first pipeline is communicated with the output valve, the first pipeline is communicated with the cooling tank at one end far away from the output valve, the cooling tank is communicated with the cooling liquid tank, the cooling liquid tank is communicated with the second pipeline, the second pipeline is communicated with the input valve at one end far away from the cooling liquid tank, and the water pump is used for realizing liquid flow circulation of the cooling device, two technical effects of heat insulation and heat dissipation can be achieved simultaneously by arranging the cavity.
Description
Technical Field
The utility model relates to the technical field of coating machines, in particular to a vacuum coating machine.
Background
The vacuum coating machine mainly refers to a coating machine needing to be carried out under a higher vacuum degree, and specifically comprises various types, including vacuum ion evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition and the like; because the cooling structure in the existing film plating machine is single, the cooling effect is poor, and the service life of parts in the film plating machine is short.
Disclosure of Invention
In order to overcome the defects of the prior art, the utility model provides a vacuum coating machine which can effectively solve the problems in the background art.
The technical scheme adopted by the utility model for solving the technical problems is as follows:
a vacuum coating machine comprises a coating machine body and a cooling device, wherein the coating machine body is provided with an inner cavity wall and an outer cavity wall, the outer side of the inner cavity wall is provided with a connecting strip for realizing the fixed connection of the outer cavity wall, a cavity is arranged between the inner cavity wall and the outer cavity wall, the wall of the outer cavity is provided with an output valve, an input valve and a vacuum pump, the output valve and the input valve are both communicated with the cavity, the vacuum pump is used for realizing air pressure control in the cavity, the cooling device comprises a first pipeline, a second pipeline, a cooling tank, a cold liquid tank and a water pump, the first pipeline is communicated with the output valve, one end of the first pipeline far away from the output valve is communicated with the cooling tank, the cooling box is communicated with the cold liquid box, the cold liquid box is communicated with a second pipeline, one end of the second pipeline, far away from the cold liquid box, is communicated with the input valve, and the water pump is used for realizing liquid flowing circulation of the cooling device.
Preferably, the inner cavity wall is provided with an aluminum wall for realizing heat conduction on one surface close to the outer cavity wall.
Preferably, the output valve is arranged on the top surface of the outer cavity wall, and the input valve is arranged on the bottom surface of the outer cavity wall.
Preferably, the top surface of the outer cavity wall is provided with a ventilation valve, the ventilation valve penetrates through the inner cavity wall, and the ventilation valve is used for realizing air pressure regulation in the coating machine body.
Preferably, the side surface of the outer cavity wall is provided with an observation window.
Preferably, the outer cavity wall is further provided with a control panel for controlling the operation of the vacuum pump, and a sealing valve for realizing a sealing effect is arranged at the connection part of the vacuum pump and the cavity.
Compared with the prior art, the utility model has the beneficial effects that:
the cavity can achieve two technical effects of heat insulation and heat dissipation at the same time, when coating operation is carried out, the vacuum pump pumps out air in the cavity, so that the cavity is in a vacuum state, the temperature of the outer cavity wall is lower, the production safety is improved, and the heat insulation effect in the coating machine body can be achieved at the same time of heat insulation, so that the heating speed is improved, and the effects of energy conservation and environmental protection are achieved; when carrying out the cooling operation, the water pump is from the second pipeline with the coolant liquid, get into in the cavity through the input valve, the coolant liquid gets into first pipeline from the delivery valve after filling the cavity, get back to the coolant liquid incasement after the cooling tank cooling, the cooling efficiency is improved, and can open the scavenging valve when the cooling operation owing to be equipped with the scavenging valve, avoid opening because of atmospheric pressure reduces the difficult to that leads to behind the internal temperature reduction of coating machine, can make the coolant liquid not with inner chamber wall direct contact through setting up the aluminium wall simultaneously, the life of extension inner chamber wall.
Drawings
FIG. 1 is a schematic view of a vacuum coater.
FIG. 2 is a second schematic view of a vacuum coater.
Reference numbers in the figures:
1-coating machine body, 11-inner cavity wall, 12-outer cavity wall, 121-output valve, 122-input valve, 123-scavenging valve, 124-observation window, 13-connecting strip, 14-cavity, 2-cooling device, 21-first pipeline, 22-second pipeline, 23-cooling tank, 24-cooling liquid tank, 25-water pump, 3-vacuum pump, 31-control panel, 32-sealing valve and 4-aluminum wall.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
As shown in fig. 1 and 2, a vacuum coating machine comprises a coating machine body 1 and a cooling device 2, wherein the coating machine body 1 is provided with an inner cavity wall 11 and an outer cavity wall 12, a connecting strip 13 for fixedly connecting the inner cavity wall 11 with the outer cavity wall 12 is arranged on the outer side of the inner cavity wall 11, a cavity 14 is arranged between the inner cavity wall 11 and the outer cavity wall 12, the outer cavity wall 12 is provided with an output valve 121, an input valve 122 and a vacuum pump 3, the output valve 121 and the input valve 122 are both communicated with the cavity 14, the vacuum pump 3 is used for controlling the air pressure in the cavity 14, the cooling device 2 comprises a first pipeline 21, a second pipeline 22, a cooling tank 23, a cold liquid tank 24 and a water pump 25, the first pipeline 21 is communicated with the output valve 121, the first pipeline 21 is communicated with the cooling tank 23 at the end far away from the output valve 121, the cooling tank 23 is communicated with the cold liquid tank 24, the cold liquid tank 24 is communicated with the second pipeline 22, the second pipeline 22 is communicated with the input valve 122 at one end far away from the cold liquid tank 24, the water pump 25 is used for realizing the liquid flow circulation of the cooling device 2, the inner cavity wall 11 is provided with the aluminum wall 4 for realizing the heat conduction function at one side close to the outer cavity wall 12, the output valve 121 is arranged at the top surface of the outer cavity wall 12, the input valve 122 is arranged at the bottom surface of the outer cavity wall 12, the top surface of the outer cavity wall 12 is provided with the scavenging valve 123, the scavenging valve 123 penetrates through the inner cavity wall 11, the scavenging valve 123 is used for realizing the air pressure regulation in the film coating machine body 1, the side surface of the outer cavity wall 12 is provided with the observation window 124, the outer cavity wall 12 is further provided with the control panel 31 for controlling the operation of the vacuum pump 3, the sealing valve 32 for realizing the sealing function is arranged at the connection part of the vacuum pump 3 and the cavity 14, two technical effects of heat insulation and heat dissipation can be realized simultaneously by arranging the cavity 14, when the film coating operation is carried out, the vacuum pump 3 pumps out air in the cavity 14, so that the cavity 14 is in a vacuum state, the temperature of the outer cavity wall 12 is lower, the production safety is improved, and the heat insulation effect on the coating machine body 1 can be realized at the same time of heat insulation, so that the heating speed is improved, and the effects of energy conservation and environmental protection are achieved; when cooling operation is carried out, the water pump 25 enables cooling liquid to enter the cavity from the second pipeline 22 through the input valve 122, the cooling liquid enters the first pipeline from the output valve 121 after the cavity 14 is filled with the cooling liquid, the cooling liquid returns to the cooling liquid tank 24 after being cooled by the cooling tank 23, cooling efficiency is improved, the ventilation valve 123 can be opened during cooling operation due to the arrangement of the ventilation valve 123, difficulty in opening due to reduction of air pressure after temperature in the film coating machine body 1 is avoided, meanwhile, the cooling liquid can not be in direct contact with the inner cavity wall 11 through the arrangement of the aluminum wall 4, and service life of the inner cavity wall 11 is prolonged.
It will be evident to those skilled in the art that the utility model is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the utility model being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Claims (6)
1. A vacuum coating machine is characterized in that: comprises a film plating machine body and a cooling device, wherein the film plating machine body is provided with an inner cavity wall and an outer cavity wall, the outer side of the inner cavity wall is provided with a connecting strip for realizing the fixed connection with the outer cavity wall, a cavity is arranged between the inner cavity wall and the outer cavity wall, an output valve, an input valve and a vacuum pump are arranged on the outer cavity wall, the output valve and the input valve are both communicated with the cavity, the vacuum pump is used for realizing air pressure control in the cavity, the cooling device comprises a first pipeline, a second pipeline, a cooling tank, a cold liquid tank and a water pump, the first pipeline is communicated with the output valve, the first pipeline is communicated with a cooling tank at one end far away from the output valve, the cooling tank is communicated with a cold liquid tank, the cooling liquid tank is communicated with a second pipeline, one end of the second pipeline, far away from the cooling liquid tank, is communicated with the input valve, and the water pump is used for realizing liquid flowing circulation of the cooling device.
2. The vacuum coater according to claim 1, wherein: and one surface of the inner cavity wall close to the outer cavity wall is provided with an aluminum wall for realizing the heat conduction effect.
3. The vacuum coater according to claim 1, wherein: the output valve is arranged on the top surface of the outer cavity wall, and the input valve is arranged on the bottom surface of the outer cavity wall.
4. The vacuum coater according to claim 1, wherein: and the top surface of the wall of the outer cavity is provided with a scavenging valve which penetrates through the wall of the inner cavity and is used for realizing the air pressure regulation in the coating machine body.
5. The vacuum coater according to claim 1, wherein: and an observation window is arranged on the side surface of the outer cavity wall.
6. The vacuum coater according to claim 1, wherein: the outer cavity wall is also provided with a control panel for controlling the operation of the vacuum pump, and the vacuum pump is provided with a sealing valve for realizing the sealing function at the joint with the cavity.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122154588.4U CN215713353U (en) | 2021-09-07 | 2021-09-07 | Vacuum coating machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122154588.4U CN215713353U (en) | 2021-09-07 | 2021-09-07 | Vacuum coating machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN215713353U true CN215713353U (en) | 2022-02-01 |
Family
ID=80016320
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202122154588.4U Active CN215713353U (en) | 2021-09-07 | 2021-09-07 | Vacuum coating machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN215713353U (en) |
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2021
- 2021-09-07 CN CN202122154588.4U patent/CN215713353U/en active Active
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