CN215713351U - Diffusion pump connecting system of magnetron sputtering production line - Google Patents
Diffusion pump connecting system of magnetron sputtering production line Download PDFInfo
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- CN215713351U CN215713351U CN202121560684.2U CN202121560684U CN215713351U CN 215713351 U CN215713351 U CN 215713351U CN 202121560684 U CN202121560684 U CN 202121560684U CN 215713351 U CN215713351 U CN 215713351U
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- diffusion pump
- magnetron sputtering
- production line
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Abstract
The diffusion pump connecting system of the magnetron sputtering production line comprises a coating space connecting device and a mechanical pump connecting device; the coating space connecting device comprises a first connecting channel; the first connecting channel is of a hollow cylinder structure; one end of the first connecting channel is communicated with the film coating space; the other end of the first connecting channel is connected with a second connecting channel which is vertically connected with the first connecting channel; the application magnetron sputtering production line diffusion pump connected system solve the problem of low vacuum pumping efficiency in the existing coating process, reduce the damage of oil gas back suction to the coating material, improve the coating quality and prolong the service life of the equipment.
Description
Technical Field
The utility model relates to the field of coating processes and equipment manufacturing thereof, in particular to a diffusion pump connecting system of a magnetron sputtering production line.
Background
The vacuum solar heat collecting pipe is a device which is composed of an inner glass pipe with a solar selective absorption coating and a coaxial cover glass pipe, wherein a high vacuum is pumped between interlayers of the inner pipe and the outer pipe, and the device is used for collecting solar heat to heat a fluid medium in the pipe. A plurality of all-glass vacuum solar heat collecting pipes are regularly arranged in an array and assembled with a header pipe, a tailstock, a reflector and the like to form a solar heat collector; the solar water heating system is combined with components such as a circulating pipeline, a water storage tank and the like.
The side wall of the heat collecting pipe can achieve the heat collecting effect only through magnetron sputtering vacuum coating, the existing coating chamber has larger space and can contain more heat collecting pipes, but the power of a diffusion pump required by magnetron sputtering coating is too small; so that the vacuum pumping speed is too slow; in addition, because of the diffusion pump, in the working process, a part of impurities are sucked back to form a film coating bin, so that the film coating effect is influenced.
Disclosure of Invention
The utility model aims to overcome the defects in the prior art and provide a diffusion pump connecting system of a magnetron sputtering production line, so that the problems in the prior art are solved.
In order to achieve the purpose, the utility model adopts the technical scheme that:
the diffusion pump connecting system of the magnetron sputtering production line comprises a coating space connecting device and a mechanical pump connecting device;
the coating space connecting device comprises a first connecting channel 1; the first connecting channel 1 is arranged in a hollow cylinder structure; one end of the first connecting channel 1 is communicated with the film coating space 2; the other end of the first connecting channel 1 is connected with a second connecting channel 3 which is vertically connected with the first connecting channel 1;
the tail end of the first connecting channel 1 is communicated with the center of the side wall at one end of the second connecting channel 3;
a plurality of third connecting channels 4 are vertically communicated and arranged on the side wall of one end of the second connecting channel 3; the tail end of the third connecting channel 4 is connected with a first condensing device; the tail end of the first condensing device is connected with a diffusion pump 5; the bottom of the diffusion pump 5 is connected with a mechanical pump connecting device;
the mechanical pump connection device comprises a fourth connection channel 6 and a fifth connection channel 7; the head end of the fourth connecting channel 6 is connected with the diffusion pump 5; the end of the fifth connecting channel 7 is connected with a mechanical pump; a second condensation device is arranged between the fourth connecting channel 6 and the fifth connecting channel 7.
Further, the first connecting channel 1 is connected with the second connecting channel 3 through a flange; the first condensing device is connected with the third connecting channel 4 through a flange.
Further, the end of the first condensing device is connected with the top of the diffusion pump 5 through a metal bellows 8.
Further, the first condensing means includes a first supporting outer tube 9; a vent pipe 10 is arranged inside the first supporting outer pipe 9; the vent pipe 10 is of a wave-shaped structure; a coolant 11 is filled between the first support outer pipe 9 and the vent pipe 10.
Further, the first condensing means comprises a second supporting outer tube 12; the second supporting outer tube 12 is internally provided with an impurity adsorption block 13; the impurity adsorption block 13 is provided with a plurality of airflow channels 14; the fourth connecting passage 6 and the fifth connecting passage 7 are communicated through an airflow passage 14; the impurity adsorption block 13 includes all existing materials having the ability to adsorb flue gas, liquid oil droplets, and dust particles. A cooling pipeline 17 is wound outside the second supporting outer pipe 12; the inside of the cooling duct 17 is provided with the coolant 11.
Further, the inner surfaces of the metal corrugated pipe 8, the first connecting channel 1, the second connecting channel 3, the third connecting channel 4, the fourth connecting channel 6 and the fifth connecting channel 7 are provided with an anticorrosive coating 15.
Further, a filter screen plate 16 is arranged inside the second connecting channel 3; a filter screen is arranged on the filter screen plate 16. The filter screen is made of all existing materials with the capacity of adsorbing smoke, liquid oil drops and dust particles.
Compared with the prior art, the utility model has at least the following beneficial effects:
the utility model is provided with a coating space connecting device and a mechanical pump connecting device;
according to the coating space connecting device, a plurality of diffusion pumps can be connected in parallel for use, the use requirements of large-scale coating production are met, and the working efficiency is improved; in addition, a first condensing device is arranged on the coating space connecting device; the vent pipe 10 is cooled by the coolant 11, and impurities are condensed in the vent pipe when meeting cold, so that the impurities are prevented from entering a film coating space; to further enhance the filtering effect, further filtering is performed by providing a filter screen 16.
The diffusion pump is connected with the mechanical pump through the mechanical pump connecting device; through the structure that sets up impurity adsorption block 13 and air current channel 14, both guaranteed the normal through of air current, also avoided impurity to get into mechanical pump, played the cooling action to gas simultaneously.
In conclusion, the diffusion pump connecting system of the magnetron sputtering production line solves the problem of low vacuum pumping efficiency in the existing coating process, reduces damage of oil gas reverse absorption to coating materials, improves coating quality and prolongs the service life of equipment.
Drawings
FIG. 1 is a schematic top view of the spatial connection device for coating film of the present invention;
FIG. 2 is a schematic front view of the spatial connection device for coating film according to the present invention.
FIG. 3 is a schematic cross-sectional view of the mechanical pump attachment of the present invention;
FIG. 4 is a schematic cross-sectional view of the impurity adsorbing block 13 according to the present invention;
in the figure: a first connecting channel 1; a film coating space 2; a second connecting channel 3; a third connecting channel 4; a diffusion pump 5; a fourth connecting channel 6; a fifth connecting channel 7; a metal bellows 8; a first supporting outer tube 9; a breather pipe 10; a coolant 11; a second supporting outer tube 12; an impurity adsorption block 13; an airflow passage 14; an anticorrosive coating 15; a filter screen plate 16; the pipe 17 is cooled.
Detailed Description
The principles and features of this invention are described below in conjunction with the following drawings, which are set forth by way of illustration only and are not intended to limit the scope of the utility model.
As shown in the figure:
example 1:
the diffusion pump connecting system of the magnetron sputtering production line comprises a coating space connecting device and a mechanical pump connecting device;
the coating space connecting device comprises a first connecting channel 1; the first connecting channel 1 is arranged in a hollow cylinder structure; one end of the first connecting channel 1 is communicated with the film coating space 2; the other end of the first connecting channel 1 is connected with a second connecting channel 3 which is vertically connected with the first connecting channel 1;
the tail end of the first connecting channel 1 is communicated with the center of the side wall at one end of the second connecting channel 3;
a plurality of third connecting channels 4 are vertically communicated and arranged on the side wall of one end of the second connecting channel 3; the tail end of the third connecting channel 4 is connected with a first condensing device; the tail end of the first condensing device is connected with a diffusion pump 5; the bottom of the diffusion pump 5 is connected with a mechanical pump connecting device;
the mechanical pump connection device comprises a fourth connection channel 6 and a fifth connection channel 7; the head end of the fourth connecting channel 6 is connected with the diffusion pump 5; the end of the fifth connecting channel 7 is connected with a mechanical pump; a second condensation device is arranged between the fourth connecting channel 6 and the fifth connecting channel 7.
Example 2:
on the basis of the embodiment 1, the first connecting channel 1 is connected with the second connecting channel 3 through a flange; the first condensing device is connected with the third connecting channel 4 through a flange.
Example 3:
on the basis of the embodiment 1-2, the end of the first condensing device is connected with the top of the diffusion pump 5 through the metal bellows 8.
Example 4:
on the basis of embodiments 1 to 3, the first condensation device comprises a first supporting outer tube 9; a vent pipe 10 is arranged inside the first supporting outer pipe 9; the vent pipe 10 is of a wave-shaped structure; a coolant 11 is filled between the first support outer pipe 9 and the vent pipe 10.
Example 5:
on the basis of examples 1 to 4, the first condensation device comprises a second supporting outer tube 12; the second supporting outer tube 12 is internally provided with an impurity adsorption block 13; the impurity adsorption block 13 is provided with a plurality of airflow channels 14; the fourth connecting passage 6 and the fifth connecting passage 7 are communicated through an airflow passage 14; the impurity adsorption block 13 includes all existing materials having the ability to adsorb flue gas, liquid oil droplets, and dust particles. A cooling pipeline 17 is wound outside the second supporting outer pipe 12; the inside of the cooling duct 17 is provided with the coolant 11.
Example 6:
on the basis of the embodiments 1 to 5, the inner surfaces of the metal corrugated pipe 8, the first connecting passage 1, the second connecting passage 3, the third connecting passage 4, the fourth connecting passage 6 and the fifth connecting passage 7 are provided with the anticorrosive coatings 15.
Example 7:
on the basis of the embodiments 1 to 6, the inside of the second connecting channel 3 is provided with a filter screen plate 16; a filter screen is arranged on the filter screen plate 16. The filter screen is made of all existing materials with the capacity of adsorbing smoke, liquid oil drops and dust particles.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the utility model, and any modifications, equivalents, improvements and the like that fall within the spirit and principle of the present invention are intended to be included therein.
Claims (7)
1. The diffusion pump connecting system of the magnetron sputtering production line is characterized by comprising a coating space connecting device and a mechanical pump connecting device;
the coating space connecting device comprises a first connecting channel (1); the first connecting channel (1) is arranged to be a hollow cylinder structure; one end of the first connecting channel (1) is communicated with the film coating space (2); the other end of the first connecting channel (1) is connected with a second connecting channel (3) which is vertically connected with the first connecting channel (1);
the tail end of the first connecting channel (1) is communicated with the center of the side wall of one end of the second connecting channel (3);
a plurality of third connecting channels (4) are vertically communicated and arranged on the side wall of the other end of the second connecting channel (3);
the tail end of the third connecting channel (4) is connected with a first condensing device; the tail end of the first condensing device is connected with a diffusion pump (5); the bottom of the diffusion pump (5) is connected with a mechanical pump connecting device; the mechanical pump connection device comprises a fourth connection channel (6) and a fifth connection channel (7); the head end of the fourth connecting channel (6) is connected with the diffusion pump (5); the tail end of the fifth connecting channel (7) is connected with the mechanical pump; a second condensing device is arranged between the fourth connecting channel (6) and the fifth connecting channel (7).
2. The magnetron sputtering production line diffusion pump connection system as claimed in claim 1, wherein the first connection channel (1) and the second connection channel (3) are connected by a flange; the first condensing device is connected with the third connecting channel (4) through a flange.
3. The magnetron sputtering production line diffusion pump connection system according to claim 1, wherein the end of the first condensation device is connected with the top of the diffusion pump (5) through a metal bellows (8).
4. Magnetron sputtering line diffusion pump connection system according to claim 1, characterized in that said first condensation device comprises a first supporting outer tube (9); a vent pipe (10) is arranged inside the first supporting outer pipe (9); the vent pipe (10) is arranged into a wave-shaped structure; a coolant (11) is filled between the first supporting outer pipe (9) and the vent pipe (10).
5. Magnetron sputtering line diffusion pump connection system according to claim 4, characterized in that said first condensation device comprises a second supporting outer tube (12); an impurity adsorption block (13) is arranged in the second supporting outer pipe (12); the impurity adsorption block (13) is provided with a plurality of airflow channels (14); the fourth connecting channel (6) is communicated with the fifth connecting channel (7) through an airflow channel (14); a cooling pipeline (17) is wound outside the second supporting outer pipe (12); the cooling pipe (17) is internally provided with a coolant (11).
6. The magnetron sputtering production line diffusion pump connecting system according to claim 1, wherein the inner surfaces of the metal corrugated pipe (8), the first connecting channel (1), the second connecting channel (3), the third connecting channel (4), the fourth connecting channel (6) and the fifth connecting channel (7) are provided with an anticorrosive coating (15).
7. The magnetron sputtering production line diffusion pump connection system as claimed in claim 1, wherein a filter screen plate (16) is arranged inside the second connection channel (3); a filter screen is arranged on the filter screen plate (16).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121560684.2U CN215713351U (en) | 2021-07-09 | 2021-07-09 | Diffusion pump connecting system of magnetron sputtering production line |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121560684.2U CN215713351U (en) | 2021-07-09 | 2021-07-09 | Diffusion pump connecting system of magnetron sputtering production line |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN215713351U true CN215713351U (en) | 2022-02-01 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202121560684.2U Active CN215713351U (en) | 2021-07-09 | 2021-07-09 | Diffusion pump connecting system of magnetron sputtering production line |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN215713351U (en) |
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2021
- 2021-07-09 CN CN202121560684.2U patent/CN215713351U/en active Active
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