CN215678631U

CN215678631U - Rotating device

Info

Publication number: CN215678631U
Application number: CN202121867726.7U
Authority: CN
Inventors: 于翔; 程实然; 张怀东; 杨超全; 崔虎山; 刘朋飞; 胡冬冬; 许开东
Original assignee: Jiangsu Leuven Instruments Co Ltd
Current assignee: Jiangsu Leuven Instruments Co Ltd
Priority date: 2021-08-10
Filing date: 2021-08-10
Publication date: 2022-01-28
Anticipated expiration: 2031-08-10

Abstract

The utility model discloses a rotating device, comprising: a platform plate; the driving and rotating part comprises a driving and rotating mechanism and a bearing part, the driving and rotating mechanism is arranged on the platform plate and can drive the bearing part to rotate, and the bearing part is used for bearing a sample to be tested; the cover cap is arranged on the platform plate and forms an installation cavity with the platform plate in a surrounding mode, and the sample to be tested is located in the installation cavity; and the ventilation component comprises an air supply part and an exhaust part, wherein the air supply part is used for supplying clean gas into the mounting cavity, and the exhaust part is used for exhausting the gas in the mounting cavity. Adopt above-mentioned structure, the gas in the installation cavity can be in a mobile state, and clean air can be constantly inputed, and the inside gas of installation cavity then can constantly flow out, can guarantee atmosphere and the cleanliness factor in the installation cavity betterly, and this also has positive meaning to the accuracy that improves the sample that awaits measuring and detect.

Description

Rotating device

Technical Field

The utility model relates to the technical field of mechanical devices, in particular to a rotating device.

Background

In the fields of wafer detection, wafer contamination collection and the like, a rotating device is required to rotate a wafer waiting test sample, and at present, the rotating device is generally used in an open environment, so that the cleanliness of the gas around the sample to be tested is difficult to control.

SUMMERY OF THE UTILITY MODEL

The utility model aims to provide a rotating device which can ensure the cleanliness of the gas around a sample to be measured.

To solve the above technical problem, the present invention provides a rotation device, including: a platform plate; the driving and rotating part comprises a driving and rotating mechanism and a bearing part, the driving and rotating mechanism is arranged on the platform plate and can drive the bearing part to rotate, and the bearing part is used for bearing a sample to be tested; the cover cap is arranged on the platform plate and forms an installation cavity with the platform plate in a surrounding mode, and the sample to be tested is located in the installation cavity; and the ventilation component comprises an air supply part and an exhaust part, wherein the air supply part is used for supplying clean gas into the mounting cavity, and the exhaust part is used for exhausting the gas in the mounting cavity.

By adopting the structure, the sample to be detected can be placed in the bearing part, and the driving mechanism can rotate the bearing part through driving and further realize the driving and rotating of the sample to be detected so as to complete the detection of the sample to be detected in a matching way.

Meanwhile, an installation cavity can be formed by enclosing the cover cap and the platform plate, and a sample to be tested can also be positioned in the installation cavity; the gas supply part can supply clean gas into the installation cavity, and the exhaust part is used for exhausting the gas in the installation cavity. So, the gas in the installation cavity can be in a mobile state, and clean air can be constantly input, and the inside gas of installation cavity then can constantly flow out, can guarantee atmosphere and cleanliness factor in the installation cavity betterly, and this also has positive meaning to the accuracy that improves the sample that awaits measuring and detect.

Optionally, the driving mechanism includes a rotating shaft, and the rotating shaft is fixedly connected with the bearing part; the bearing part is a negative pressure sucker and is provided with at least one negative pressure adsorption hole, the rotating shaft is provided with a negative pressure channel, one end of the negative pressure channel is communicated with the negative pressure adsorption hole, and the other end of the negative pressure channel is a suction port.

Optionally, the rotation driving mechanism includes a rotating shaft, the bearing portion is provided with a first mounting hole and a second mounting hole which are communicated with each other, an included angle is formed between an axial direction of the first mounting hole and an axial direction of the second mounting hole, and the rotating shaft is inserted into the first mounting hole; the clamping device is characterized by further comprising a fastening piece, wherein an external thread is arranged on the fastening piece, an internal thread is arranged in the second mounting hole, and the fastening piece is assembled in the second mounting hole in a threaded mode and abuts against the outer wall of the rotating shaft tightly.

Optionally, a sealing member is disposed between an inner wall of the first mounting hole and an outer wall of the rotating shaft.

Optionally, the driving mechanism includes a driving power member and a rotating shaft, the rotating shaft is fixedly connected to the bearing portion, the driving power member is mounted on the platform plate, and the driving power member is in transmission connection with the rotating shaft.

Optionally, the support device further comprises a limiting component, wherein the limiting component is mounted on the platform plate and used for inhibiting the bearing part from deviating in the rotating process.

Optionally, the limiting component is provided with a limiting hole, the bearing part is provided with an insertion section, the insertion section is inserted into the limiting hole, and the outer wall of the insertion section is in clearance fit with the inner wall of the limiting hole.

Optionally, the exhaust part is a separate component and is mounted on the platform plate; the material of shroud, the landing slab, spacing part with the portion of exhausting is corrosion-resistant material, perhaps, the shroud, the landing slab, spacing part with the portion of exhausting coating has corrosion-resistant coating.

Optionally, the top wall of the cover cap is provided with a detection port, and the side wall of the cover cap is provided with an inlet and an outlet of the sample to be detected.

Optionally, the system further comprises a manipulator for moving the sample to be tested.

Optionally, the manipulator and the bearing part are made of antistatic materials, or the manipulator and the bearing part are coated with antistatic coatings.

Optionally, the deck plate is further configured with leveling members.

Drawings

FIG. 1 is a schematic structural diagram of a rotary device according to an embodiment of the present invention;

FIG. 2 is a schematic view of the structure of FIG. 1 from another perspective;

FIG. 3 is a cross-sectional view of FIG. 1;

FIG. 4 is a partial enlarged view of portion B of FIG. 3;

fig. 5 is a schematic structural diagram of fig. 1 with a sample to be measured removed.

The reference numerals in fig. 1-5 are illustrated as follows:

1, a platform plate, 11 fixing screws and 12 adjusting screws;

2 driving parts, 21 driving mechanisms, 211 rotating shafts, 211a negative pressure channels, 211b suction joints, 212 driving power parts, 22 bearing parts, 221 plug sections, 23 fastening parts, 24 sealing parts, 25 fixing plates, 26 supporting plates, 27 connecting plates and 271 positioning pins;

3, a cover, a 31 detection port, a 32 inlet and a 33 installation cavity;

4 an exhaust part;

5 a limiting part and 51 a limiting hole;

6, a mechanical arm;

a, a sample to be tested.

Detailed Description

In order to make the technical solutions of the present invention better understood by those skilled in the art, the present invention will be further described in detail with reference to the accompanying drawings and specific embodiments.

The terms "first," "second," and the like, herein are used for convenience in describing two or more structures or components that are identical or similar in structure and/or function and do not denote any particular limitation in order and/or importance.

Referring to fig. 1 to 5, fig. 1 is a schematic structural diagram of an embodiment of a rotating apparatus according to the present invention, fig. 2 is a schematic structural diagram of fig. 1 from another view angle, fig. 3 is a cross-sectional view of fig. 1, fig. 4 is a partial enlarged view of a portion B in fig. 3, and fig. 5 is a schematic structural diagram of fig. 1 with a sample to be tested removed.

As shown in fig. 1 to 3, the present invention provides a rotating apparatus including: a platform plate 1; the driving and rotating part 2 comprises a driving and rotating mechanism 21 and a bearing part 22, the driving and rotating mechanism 21 is arranged on the platform plate 1 and can drive the bearing part 22 to rotate, and the bearing part 22 is used for bearing a sample A to be tested; the cover cap 3 is arranged on the platform plate 1 and forms an installation cavity 33 with the platform plate 1 in an enclosing mode, and the sample A to be tested is located in the installation cavity 33; the ventilation member includes a gas supply portion for supplying clean gas into the mounting chamber 33 and a gas discharge portion 4 for discharging gas in the mounting chamber 33.

By adopting the structure, the sample A to be detected can be placed in the bearing part 22, and the driving mechanism 21 can drive the bearing part 22 to rotate so as to further realize the driving and rotating of the sample A to be detected, so that the detection of the sample A to be detected is completed in a matching manner.

Meanwhile, an installation cavity 33 can be formed by enclosing the cover cap 3 and the platform plate 1, and the sample A to be tested can also be positioned in the installation cavity 33; the gas supply unit can supply the cleaning gas into the mounting chamber 33, and the gas discharge unit 4 can discharge the gas in the mounting chamber 33. So, the gas in installation cavity 33 can be in a mobile state, and clean air can be constantly input, and the inside gas of installation cavity 33 then can constantly flow out, can guarantee atmosphere and cleanliness factor in installation cavity 33 better, and this also has positive meaning to the accuracy that improves the sample A that awaits measuring and detect.

Here, the embodiment of the present invention is not limited to the structural form of the gas supply portion as long as it can supply the cleaning gas with high cleanliness. As an exemplary scheme, the gas supply part may include a blower for supplying gas and a filtering mechanism for filtering the gas supplied from the blower to ensure cleanliness. The type of gas supplied from the gas supply unit is not limited, and is related to a specific detection requirement, and the like, and if cleanliness is required only, the gas supply unit may directly supply clean air, and if an atmosphere is required, a specific type of gas, such as an inert atmosphere created by an inert gas such as nitrogen, may be supplied.

The exhaust portion 4 is mainly used for exhausting gas in the installation cavity 33, and may be an exhaust hole provided in the platen plate 1 and/or the cover 3. Alternatively, the exhaust unit 4 may be a separate component, and in this case, it may be connected to the platen 1 and/or the cover 3 by a connecting member in the form of a screw or the like to lead out the gas in the installation cavity 33.

The bearing part 22 is mainly used for bearing the sample a to be measured, and the structural form thereof may be selected from many forms as long as the bearing function can be realized. In an exemplary scheme, the bearing part 22 may be a negative pressure sucker to adsorb the sample a to be tested under the action of negative pressure, so that the bearing fixation of the sample a to be tested may be more reliable; the specific design of the negative pressure pumping pipeline is not limited, and only the negative pressure adsorption force can be ensured.

With reference to fig. 3 and 4, in the embodiment of the drawings, the driving mechanism 21 may further include a rotating shaft 211, and the rotating shaft 211 and the bearing portion 22 may be fixedly connected to drive the bearing portion 22 to rotate; the negative pressure channel 211a may be disposed on the rotating shaft 211, and specifically may be disposed coaxially with the rotating shaft 211, that is, the rotating shaft 211 may be a hollow shaft, and of course, the negative pressure channel 211a may also be disposed on a partial shaft section of the rotating shaft 211, which may also be implemented; the bearing part 22 may be provided with at least one negative pressure adsorption hole, one end of the negative pressure channel 211a may be communicated with the negative pressure adsorption hole, the other end of the negative pressure channel 211a may be a suction port, the suction port may be configured with a suction joint 211b for connecting with an external suction device or a vacuum source, so that a continuous negative pressure can be generated in the negative pressure channel 211a, and then the sample a to be tested may be adsorbed and fixed through the negative pressure adsorption hole.

There may be many options for the connection manner of the rotating shaft 211 and the bearing part 22, such as interference fit, threaded connection, welding, etc., as long as reliable connection between the rotating shaft 211 and the bearing part 22 can be ensured.

In the embodiment of the drawings, as shown in fig. 4, the bearing portion 22 may be provided with a first mounting hole (not labeled) and a second mounting hole (not labeled), which are communicated with each other, an axial direction of the first mounting hole may form an included angle with an axial direction of the second mounting hole, and the rotating shaft 211 may be inserted into the first mounting hole; and a fastening piece 23 may be further included, the fastening piece 23 may be provided with an external thread, the second mounting hole may be provided with an internal thread, and the fastening piece 23 may be screwed into the second mounting hole and abut against the outer wall of the rotating shaft 211, so as to fasten and connect the rotating shaft 211 and the bearing part 22.

The specific value of the included angle between the first mounting hole and the second mounting hole is not limited herein, and preferably, the first mounting hole and the second mounting hole may be vertically arranged, which further facilitates the fixed connection of the fastening piece 23 to the rotating shaft 211 and the bearing part 22. Further, the outer wall of the rotating shaft 211 can be provided with a groove body, when the rotating shaft 211 is installed, the groove body of the outer wall of the rotating shaft 211 can be opposite to the second installation hole, when the tightening piece 23 is assembled, the end portion of the tightening piece 23 can be screwed into the groove body, and therefore the positioning effect of the tightening piece 23 on the rotating shaft 211 is better.

The tightening piece 23 may in particular be a set screw or a set screw-like member, such as a cylinder or the like, which is provided with an external thread at least in sections of the outer wall, and the second mounting hole may be provided with the aforementioned internal thread at least in sections. During assembly, the tightening member 23 can be screwed by an operating tool such as a screwdriver to complete the threaded assembly of the tightening member 23 and the second mounting hole.

Further, a sealing element 24 can be arranged between the inner wall of the first mounting hole and the outer wall of the rotating shaft 211, so that the sealing property between the first mounting hole and the rotating shaft 211 can be ensured, further negative pressure leakage can be avoided to a greater extent, and the adsorption fixing effect of the bearing part 22 on the sample a to be tested can be well ensured.

The driving mechanism 21 may further include a driving power member 212, the driving power member 212 may specifically be a power element capable of outputting rotational displacement, such as a motor, and the aforementioned rotating shaft 211 may be a rotating shaft of the driving power member 212, or the rotating shaft 211 and the driving power member 212 may also be mutually independent, at this time, the driving power member 212 and the rotating shaft 211 may be in transmission connection, so as to drive the rotating shaft 211 to rotate by the driving power member 212, and a specific transmission connection manner may be gear transmission, pulley transmission, sprocket transmission, and the like. In fact, since the rotation speed of the sample a to be measured is not required to be high, a speed reduction mechanism may be provided, in this case, the rotation shaft 211 may be an output shaft of the speed reduction mechanism, and of course, the rotation shaft 211 and the speed reduction mechanism may be independent of each other, and in this case, a transmission connection structure between the output shaft of the speed reduction mechanism and the rotation shaft 211 needs to be provided.

The driving power member 212 may be installed on the platform board 1, and the specific installation manner may be that the driving power member is installed through a bracket, and the structural form of the bracket is not limited herein as long as the technical effect of reliable installation can be satisfied. In the embodiment shown in the drawings, as shown in fig. 3, the bracket may include a fixing plate 25, a supporting plate 26 and a connecting plate 27, the rotation driving power component 212 may be mounted on the fixing plate 25, the fixing plate 25 may be mounted on the connecting plate 27 through the supporting plate 26, and the connecting plate 27 may be mounted on the platform plate 1, and the specific mounting manner may be screw connection or the like; further, the connecting plate 27 may be further provided with positioning members in the form of positioning pins 271 and the like to determine the installation position of the connecting plate 27 on the platform plate 1, in specific practice, the connecting plate 27 may be positioned by the positioning pins 271, and then the connecting plate 27 and the platform plate 1 are fixedly connected by fixing connecting members such as screws, so that the installation of the fixing connecting members may be relatively convenient.

Further, a limiting component 5 can be further included, and the limiting component 5 can be installed on the platform plate 1 and used for inhibiting the bearing part 22 from deviating in the rotating process.

The limiting component 5 may be a limiting plate, a limiting block, a limiting rod, or other limiting elements in various forms as long as the above limiting effect can be achieved. In the embodiment of the drawings, as shown in fig. 4, the limiting part 5 may be provided with a limiting hole 51, so that the limiting part 5 may be an annular member as a whole, the bearing part 22 may have an insertion section 221, the insertion section 221 may be inserted into the limiting hole 51, and an outer wall of the insertion section 221 may be in clearance fit with an inner wall of the limiting hole 51; so set up, when bearing portion 22 exists slight off tracking, the outer wall of grafting section 221 can contact with the inner wall of spacing hole 51 to restrain bearing portion 22's further off tracking, and the interact between spacing hole 51 and the grafting section 221 can also assist bearing portion 22 to ajust.

When specifically using, the landing slab 1 can be installed in other equipment, and the mounting means can be through set screw 11 installation, and landing slab 1 can also be configured with leveling part to guarantee the roughness of landing slab 1. Referring to fig. 1 and 2, the leveling member may be specifically an adjusting screw 12, or may be an adjusting screw rod.

Further, a manipulator 6 may be further included for moving the sample a to be measured.

Referring to fig. 5, the side wall of the cover 3 may be provided with an access 32 for the sample a to be tested, and when in use, the manipulator 6 may move the sample a to be tested out of or into the mounting cavity 33 through the access 32. The top wall of the cover 3 may be provided with a detection port 31 for detecting the sample a to be detected in cooperation with a specific detection device.

Here, the material of each component in the rotating device is not limited in the embodiments of the present invention, and those skilled in the art can select the material according to actual needs when implementing the embodiments of the present invention.

However, in practical practice, if the rotating device provided by the present invention is applied to some scenes with corrosive liquid, for example, when the sample a to be tested is a wafer, a corrosive scanning liquid drop needs to be used in metal contamination detection, and in this case, the materials of the parts, such as the cover 3, the platform plate 1, the limiting part 5, and the exhaust part 4, which are likely to contact with the scanning liquid drop all need to be corrosion-resistant materials, or at least need to be coated with a corrosion-resistant coating, so as to ensure the corrosion resistance and the service life of the device itself.

The type of the corrosion-resistant material may be selected from many kinds, and in particular, the person skilled in the art may determine the type of the corrosion-resistant material according to the nature of the corrosive liquid which may be actually contacted. As an exemplary scheme, the corrosion-resistant material may be a non-metal material such as PP (polypropylene) or PVC (Polyvinyl chloride), which can better resist corrosion of acid and alkali substances.

The manipulator 6, the carrier 22, and other parts that directly contact the sample a to be measured may be made of an antistatic material or coated with an antistatic coating. The antistatic material may be ceramic or PEEK (poly-ether-ketone) material.

The foregoing is only a preferred embodiment of the present invention, and it should be noted that it is obvious to those skilled in the art that various modifications and improvements can be made without departing from the principle of the present invention, and these modifications and improvements should also be considered as the protection scope of the present invention.

Claims

1. A rotary device, comprising:

a platform plate (1);

the driving and rotating part (2) comprises a driving and rotating mechanism (21) and a bearing part (22), the driving and rotating mechanism (21) is installed on the platform plate (1) and can drive the bearing part (22) to rotate, and the bearing part (22) is used for bearing a sample (A) to be tested;

the cover cap (3) is arranged on the platform plate (1) and surrounds the platform plate (1) to form an installation cavity (33), and the sample (A) to be tested is positioned in the installation cavity (33);

and a ventilation member including a gas supply portion for supplying a cleaning gas into the mounting cavity (33) and an exhaust portion (4) for exhausting the gas in the mounting cavity (33).

2. The rotating device according to claim 1, characterized in that the driving mechanism (21) comprises a rotating shaft (211), the rotating shaft (211) being secured to the carrying portion (22);

the bearing part (22) is a negative pressure sucker and is provided with at least one negative pressure adsorption hole, the rotating shaft (211) is provided with a negative pressure channel (211a), one end of the negative pressure channel (211a) is communicated with the negative pressure adsorption hole, and the other end of the negative pressure channel (211a) is a suction opening.

3. The rotating device according to claim 1, wherein the rotating mechanism (21) comprises a rotating shaft (211), the bearing portion (22) is provided with a first mounting hole and a second mounting hole which are communicated, the axial direction of the first mounting hole and the axial direction of the second mounting hole form an included angle, and the rotating shaft (211) is inserted into the first mounting hole;

the clamping device is characterized by further comprising a fastening piece (23), wherein an external thread is arranged on the fastening piece (23), an internal thread is arranged in the second mounting hole, and the fastening piece (23) is assembled in the second mounting hole in a threaded mode and abuts against the outer wall of the rotating shaft (211).

4. A rotating device according to claim 3, wherein a seal (24) is provided between an inner wall of the first mounting hole and an outer wall of the rotating shaft (211).

5. The rotating device according to claim 1, wherein the rotating mechanism (21) comprises a rotating power member (212) and a rotating shaft (211), the rotating shaft (211) is fixedly connected with the bearing part (22), the rotating power member (212) is mounted on the platform plate (1), and the rotating power member (212) is in transmission connection with the rotating shaft (211).

6. The rotating device according to any one of claims 1-5, further comprising a stopper member (5), wherein the stopper member (5) is mounted to the deck plate (1) for inhibiting the deflection of the bearing portion (22) during rotation.

7. The rotating device according to claim 6, wherein the limiting component (5) is provided with a limiting hole (51), the bearing part (22) is provided with an insertion section (221), the insertion section (221) is inserted into the limiting hole (51), and the outer wall of the insertion section (221) is in clearance fit with the inner wall of the limiting hole (51).

8. The rotating device according to claim 6, wherein the exhaust part (4) is a separate component and is mounted to the platform plate (1);

the shroud (3), landing slab (1) spacing part (5) with the material of exhaust portion (4) is corrosion-resistant material, perhaps, shroud (3) landing slab (1) spacing part (5) with exhaust portion (4) coating has the corrosion-resistant coating.

9. Rotating device according to any one of claims 1 to 5, characterized in that the top wall of the cover (3) is provided with a detection port (31) and the side walls of the cover (3) are provided with an access port (32) for the sample (A) to be tested.

10. The rotating device according to any one of claims 1 to 5, further comprising a manipulator (6) for moving the sample (A) to be tested.

11. The rotating device according to claim 10, characterized in that the robot arm (6) and the carrier (22) are made of antistatic material or the robot arm (6) and the carrier (22) are coated with antistatic coating.

12. Swivel arrangement according to any of claims 1-5, characterized in that the platform plate (1) is further provided with levelling means.