CN215676892U - Continuous thickness detection equipment for thin sheet pieces - Google Patents
Continuous thickness detection equipment for thin sheet pieces Download PDFInfo
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- CN215676892U CN215676892U CN202122147777.9U CN202122147777U CN215676892U CN 215676892 U CN215676892 U CN 215676892U CN 202122147777 U CN202122147777 U CN 202122147777U CN 215676892 U CN215676892 U CN 215676892U
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Abstract
The utility model relates to the technical field of detection, and discloses a thin sheet piece continuous thickness detection device, which comprises a conveying mechanism, a first detection mechanism and a second detection mechanism, wherein the conveying mechanism is configured to convey a thin sheet piece along a first direction; and the thickness detection mechanism comprises a plurality of thickness detection heads arranged on one side of the conveying mechanism, and the thickness detection heads are arranged at intervals at least along a second direction perpendicular to the first direction and used for continuously detecting the thickness of the sheet piece at different positions of the sheet piece conveyed through the laser detection position synchronously with the conveying of the sheet piece. The method has the advantages that the method can carry out multi-point detection on the sheet member such as a sheet-shaped wafer, and the overall thickness condition of the sheet member can be fed back more comprehensively.
Description
Technical Field
The utility model relates to the technical field of detection, in particular to a device for detecting the continuous thickness of a thin sheet piece.
Background
With the development of the industrialization level, the detection automation equipment is developed at a high speed in recent years.
The wafer is a silicon wafer used for manufacturing a silicon semiconductor integrated circuit, and is called a wafer because it has a circular shape. During the production process, the wafer needs to be subjected to thickness detection. The existing equipment detection can not realize multi-point detection of sheet pieces such as sheet wafers and the like, and can not feed back the overall thickness condition of the sheet pieces more comprehensively.
Therefore, a continuous thickness detection device for thin sheets is continuously provided, which can perform multi-point detection on thin sheets such as thin sheets of wafers, and can feed back the thickness condition of the whole thin sheets more comprehensively.
SUMMERY OF THE UTILITY MODEL
The utility model aims to provide a piece continuous thickness detection device which can carry out multi-point detection on a piece such as a sheet wafer and feed back the overall thickness condition of the piece more comprehensively.
In order to achieve the purpose, the utility model adopts the following technical scheme:
a thin-sheet piece continuous thickness detection apparatus comprising:
a conveying mechanism configured to convey a sheet member in a first direction;
and the thickness detection mechanism comprises a plurality of thickness detection heads arranged on one side of the conveying mechanism, and the thickness detection heads are arranged at intervals at least along a second direction perpendicular to the first direction and used for continuously detecting the thickness of the sheet piece at different positions of the sheet piece conveyed through the laser detection position synchronously with the conveying of the sheet piece.
Further, the thickness detection head is a coaxial confocal laser detection head configured to emit coaxial confocal laser light for detecting the thickness of the thin sheet member.
Further, the thickness detection heads are three.
Further, the conveying mechanism includes:
a first position detecting member, provided on a side immediately upstream of the laser detection station, configured to detect a sheet member to be conveyed into the laser detection station and generate a docking signal;
and the controller is electrically connected with the first position detection piece and the thickness detection mechanism respectively, and can control each thickness detection head to start detection according to the positioning signal.
Further, the conveying mechanism further comprises:
a second position detecting member provided on a side immediately downstream of the laser detection position, configured to detect a sheet member completely moved out of the laser detection position and generate a position signal;
the controller can also control each thickness detection head to stop detecting according to the position output signal.
Further, the conveying mechanism further comprises:
one end of the first conveying belt extends to the initial feeding port, and the other end of the first conveying belt extends to one side close to the upstream of the laser detection position;
one end of the second conveying belt penetrates through the laser detection position and is in butt joint communication with the first conveying belt, and the other end of the second conveying belt extends to a final feeding position;
the controller can also control the first conveying belt to stop running and the second conveying belt to start running according to the positioning signal.
Further, the first conveying belt and the second conveying belt are round belt lines for carrying and conveying thin sheet pieces in line contact, and the belt cross section of each round belt line is round;
and/or, the thin sheet member continuous thickness detection apparatus further comprises:
the third position detection piece is arranged on one side of the initial feeding port and is configured to detect feeding of the thin sheet piece so as to generate a feeding signal, and the controller can also control the first conveying belt to run according to the feeding signal.
Further, still include:
a fourth position detecting member disposed at the final blanking position and configured to detect final blanking of the sheet member to generate a final blanking signal;
a discharging assembly configured to discharge the thin sheet piece on the final discharging position according to a final discharging signal.
Further, the thickness detection mechanism further includes:
a first positioning component;
the second positioning component is arranged on the first positioning component, and the thickness detection mechanism is arranged on the first positioning component;
wherein the first and second positioning assemblies are configured to adjust a position of the thickness detection mechanism in a third direction and the first direction, the third direction extending in a vertical direction and being perpendicular to the first and second directions, respectively.
Further, one conveying mechanism and one thickness detection mechanism are matched to form a group of continuous thickness detection lines for the thin sheet pieces, and at least two groups of continuous thickness detection lines for the thin sheet pieces are formed; and/or, the thin sheet member continuous thickness detection apparatus further comprises:
the conveying mechanism and the thickness detection mechanism are arranged in the cabinet.
The utility model has the beneficial effects that:
the utility model conveys the thin sheet piece along a first direction by the conveying mechanism; the thickness detection mechanism comprises a plurality of thickness detection heads arranged on one side of the conveying mechanism, the thickness detection heads are arranged at intervals at least along a second direction perpendicular to the first direction and used for continuously detecting the thicknesses of different positions of the sheet piece conveyed through the laser detection position along with the synchronous conveying of the sheet piece.
Drawings
FIG. 1 is a schematic view of the whole of the continuous thickness detection device for thin sheet members provided by the present invention;
FIG. 2 is a schematic view of the apparatus for inspecting continuous thickness of thin sheet pieces provided by the present invention with the cabinet hidden;
fig. 3 is a partial view at a conveying mechanism of the continuous thickness detection apparatus for thin sheets provided by the present invention;
fig. 4 is a schematic view of a thickness detection mechanism provided by the present invention.
In the figure:
100. a wafer;
x, a first direction; y, a second direction; z, a third direction;
1. a conveying mechanism; 11. a first position detecting member; 12. a second position detecting member; 13. a first conveyor belt; 14. a second conveyor belt; 15. a fourth position detecting member;
2. a thickness detection mechanism; 21. a thickness detection head; 22. a first positioning component; 23. a second positioning component;
3. a cabinet.
Detailed Description
In order to make the technical problems solved, the technical solutions adopted and the technical effects achieved by the present invention clearer, the technical solutions of the present invention are further described below by way of specific embodiments with reference to the accompanying drawings.
In the description of the present invention, unless expressly stated or limited otherwise, the terms "connected," "connected," and "fixed" are to be construed broadly, e.g., as meaning permanently connected, removably connected, or integral to one another; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
In the present invention, unless otherwise expressly stated or limited, "above" or "below" a first feature means that the first and second features are in direct contact, or that the first and second features are not in direct contact but are in contact with each other via another feature therebetween. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.
In the description of the present embodiment, the terms "upper", "lower", "left", "right", and the like are used based on the orientations and positional relationships shown in the drawings only for convenience of description and simplification of operation, and do not indicate or imply that the referred device or element must have a specific orientation, be configured and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first" and "second" are used only for descriptive purposes and are not intended to have a special meaning.
As shown in fig. 1-4, the present embodiment provides a continuous thickness detection apparatus for thin sheets, which is used to perform multi-point detection on thin sheets such as a thin sheet-like wafer 100, and more comprehensively feedback the thickness of the thin sheet. In the figure, X denotes a direction, Y denotes a second direction, and Z denotes a third direction. The continuous thickness detection device for thin sheets comprises a conveying mechanism 1 and a thickness detection mechanism 2. The conveying mechanism 1 is configured to convey a sheet member in a first direction; the thickness detection mechanism 2 includes a plurality of thickness detection heads 21 provided on one side of the conveying mechanism 1, and the thickness detection heads 21 are arranged at intervals from each other at least in a second direction perpendicular to the first direction for continuously detecting the thickness of different positions of the sheet member conveyed through the laser detection position in synchronization with the conveyance of the sheet member. The continuous thickness detection equipment for the thin sheet pieces further comprises a cabinet 3, and the conveying mechanism 1 and the thickness detection mechanism 2 are arranged in the cabinet 3.
Further, as shown in fig. 1-4, a conveying mechanism 1 and a thickness detection mechanism 2 cooperate to form a set of continuous thickness detection lines for sheet members, and there are at least two sets of continuous thickness detection lines for sheet members.
The present embodiment conveys a sheet member in a first direction by a conveying mechanism 1; the thickness detection mechanism 2 comprises a plurality of thickness detection heads 21 arranged on one side of the conveying mechanism 1, and the thickness detection heads 21 are arranged at intervals at least along a second direction perpendicular to the first direction and used for continuously detecting the thickness of different positions of a sheet piece conveyed through the laser detection position synchronously with the conveying of the sheet piece.
Specifically, the thickness detection head 21 is a coaxial confocal laser detection head, the thickness detection head 21 is configured to emit coaxial confocal laser for detecting the thickness of the thin sheet, and the coaxial confocal laser detection head and the thickness detection principle are all the prior art and are not described in detail.
Further, as shown in fig. 2 to 3, in the present embodiment, there are three thickness detection heads 21. The three thickness detection heads 21 are arranged at intervals from each other in the second direction for continuously detecting the thickness of different positions of the sheet member conveyed through the laser detection position in synchronization with the conveyance of the sheet member in the first direction. The number of the thickness detection heads 21 may be two, four or more according to actual detection requirements.
Further, in order to be suitable for detecting thin sheet members with different sizes and thicknesses, the thickness detection mechanism 2 further comprises a first positioning assembly 22 and a second positioning assembly 23. The second positioning component 23 is arranged on the first positioning component 22, and the thickness detection mechanism 2 is arranged on the first positioning component 22; wherein the first positioning assembly 22 and the second positioning assembly 23 are configured to adjust the position of the thickness detection mechanism 2 in a third direction and the first direction, the third direction extending in the vertical direction and being perpendicular to the first direction and the second direction, respectively. Specifically, in this embodiment, the first positioning component 22 is a linear displacement adjusting device extending along the first direction, and specifically includes a conventional slide block and a conventional driving screw motor.
Further, as shown in fig. 2 to 4, in the present embodiment, the conveying mechanism 1 includes a first position detecting member 11 and a controller (not shown). A first position detecting member 11 disposed on a side immediately upstream of the laser detection station and configured to detect a sheet member to be conveyed into the laser detection station and generate a docking signal; the controller is respectively electrically connected with the first position detection piece 11 and the thickness detection mechanism 2, and the controller can control each thickness detection head 21 to start detection according to the position entering signal, so that the thickness detection of the sheet piece to be conveyed into the laser detection position by the thickness detection mechanism 2 can be automatically detected and controlled through the first position detection piece 11 and the controller. The controller is an existing PLC controller or other existing controllers, and is not specifically limited or described in detail.
Further, as shown in fig. 2 to 4, in the present embodiment, the conveying mechanism 1 further includes a second position detecting member 12. A second position detecting member 12 disposed on a side immediately downstream of the laser detection position, the second position detecting member 12 being configured to detect a thin sheet member completely moved out of the laser detection position and generate a position signal; the controller can also control each thickness detection head 21 to stop detecting according to the position-out signal, so that each thickness detection head 21 is prevented from working all the time, working energy consumption is reduced, and the service life is prolonged.
Further, as shown in fig. 2 to 4, in the present embodiment, the conveying mechanism 1 further includes a first conveying belt 13 and a second conveying belt 14. One end of the first conveying belt 13 extends to the initial feeding port, and the other end of the first conveying belt 13 extends to one side close to the upstream of the laser detection position; one end of the second conveying belt 14 penetrates through the laser detection position and is in butt joint communication with the first conveying belt 13, and the other end of the second conveying belt 14 extends to a final feeding position; the controller can also control the first conveying belt 13 to stop running and the second conveying belt 14 to start running according to the positioning signal, so that the overall power consumption of the conveying mechanism 1 is reduced, and the first conveying belt 13 and the second conveying belt 14 are started to work when sheet pieces need to be conveyed.
Specifically, as shown in fig. 2 to 4, in this embodiment, the first conveyor belt 13 and the second conveyor belt 14 are circular belt lines for carrying and conveying thin sheet members in line contact, a belt cross section of the circular belt line is circular, and details of the circular belt line as an existing structure are not repeated.
In addition, as shown in fig. 2 to 4, in the present embodiment, the thin sheet member continuous thickness detection apparatus further includes a third position detection member (not shown in the drawings). The third position detection piece is arranged on one side of the initial feeding port and is configured to detect feeding of the sheet piece so as to generate a feeding signal, and the controller can also control the first conveying belt 13 to run according to the feeding signal, so that feeding automation of the first conveying belt 13 is realized.
Further, as shown in fig. 2 to 4, the thin sheet member continuous thickness detecting apparatus further includes a fourth position detecting member 15 and a discharging assembly (not shown in the drawings). The fourth position detecting member 15 is disposed at the final blanking position, and the fourth position detecting member 15 is configured to detect final blanking of the sheet member to generate a final blanking signal; the discharging assembly is configured to discharge the thin sheet piece at the final discharging position according to the final discharging signal. Specifically, the first position detector 11, the second position detector 12, the third position detector and the fourth position detector 15 are all existing grating position sensors, and are not described in detail. The discharge assembly can be an existing vacuum chuck clamping discharge clamp or other existing discharge devices, and is not described in detail.
The above description is only a preferred embodiment of the present invention, and for those skilled in the art, the present invention should not be limited by the description of the present invention, which should be interpreted as a limitation.
Claims (10)
1. A continuous thickness detection device for thin sheet members, comprising:
a conveying mechanism (1) configured to convey a thin sheet member in a first direction;
the thickness detection mechanism (2) comprises a plurality of thickness detection heads (21) arranged on one side of the conveying mechanism (1), and the thickness detection heads (21) are arranged at intervals at least along a second direction perpendicular to the first direction and used for continuously detecting the thickness of different positions of the thin sheet piece conveyed through the laser detection position synchronously with the conveying of the thin sheet piece.
2. The continuous thickness detection apparatus of thin-sheet pieces according to claim 1, characterized in that the thickness detection head (21) is a coaxial confocal laser detection head configured to emit coaxial confocal laser light for detecting the thickness of thin-sheet pieces.
3. The continuous thickness detection device of thin sheet elements according to claim 1, characterized in that said thickness detection heads (21) are three in number.
4. The thin sheet element continuous thickness detection apparatus according to any one of claims 1 to 3, characterized in that the transport mechanism (1) comprises:
a first position detecting member (11) provided on a side immediately upstream of the laser detection station and configured to detect a sheet member to be conveyed into the laser detection station and generate a docking signal;
and the controller is respectively and electrically connected with the first position detection piece (11) and the thickness detection mechanism (2), and can control each thickness detection head (21) to start detection according to the positioning signal.
5. The thin-sheet piece continuous thickness detection apparatus according to claim 4, characterized in that the transport mechanism (1) further comprises:
a second position detecting member (12) disposed on a side immediately downstream of the laser detection position and configured to detect a sheet member completely moved out of the laser detection position and generate a position signal;
wherein the controller can also control each thickness detection head (21) to stop detecting according to the position output signal.
6. The thin-sheet piece continuous thickness detection apparatus according to claim 5, characterized in that the transport mechanism (1) further comprises:
a first conveyor belt (13), one end of which extends to the initial feeding port and the other end of which extends to one side close to the upstream of the laser detection position;
one end of the second conveying belt (14) penetrates through the laser detection position and is in butt joint communication with the first conveying belt (13), and the other end of the second conveying belt extends to a final discharging position;
the controller can also control the first conveying belt (13) to stop running and the second conveying belt (14) to start running according to the docking signal.
7. The continuous thickness detection apparatus of thin-sheet pieces according to claim 6, characterized in that the first conveyor belt (13) and the second conveyor belt (14) are circular belt lines for carrying thin-sheet pieces in line contact, the belt cross-section of the circular belt lines being circular;
and/or, the thin sheet member continuous thickness detection apparatus further comprises:
the third position detection piece is arranged on one side of the initial feeding port and is configured to detect feeding of the thin sheet piece so as to generate a feeding signal, and the controller can also control the first conveying belt (13) to run according to the feeding signal.
8. The thin sheet member continuous thickness detection apparatus according to any one of claims 6 to 7, further comprising:
a fourth position detecting member (15) disposed at the final blanking position and configured to detect final blanking of the thin sheet member to generate a final blanking signal;
a discharging assembly configured to discharge the thin sheet piece on the final discharging position according to a final discharging signal.
9. The thin-sheet piece continuous thickness detection apparatus according to claim 1, wherein the thickness detection mechanism (2) further comprises:
a first positioning assembly (22);
the second positioning component (23) is arranged on the first positioning component (22), and the thickness detection mechanism (2) is arranged on the first positioning component (22);
wherein the first and second positioning assemblies (22, 23) are configured to adjust the position of the thickness detection mechanism (2) in a third direction and the first direction, the third direction extending in a vertical direction and being perpendicular to the first and second directions, respectively.
10. The thin sheet member continuous thickness detection apparatus according to claim 1, wherein one of the conveying mechanisms (1) and one of the thickness detection mechanisms (2) cooperate to form one set of thin sheet member continuous thickness detection lines, the thin sheet member continuous thickness detection lines having at least two sets; and/or, the thin sheet member continuous thickness detection apparatus further comprises:
the machine cabinet (3), the conveying mechanism (1) and the thickness detection mechanism (2) are arranged in the machine cabinet (3).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122147777.9U CN215676892U (en) | 2021-09-07 | 2021-09-07 | Continuous thickness detection equipment for thin sheet pieces |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122147777.9U CN215676892U (en) | 2021-09-07 | 2021-09-07 | Continuous thickness detection equipment for thin sheet pieces |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN215676892U true CN215676892U (en) | 2022-01-28 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202122147777.9U Active CN215676892U (en) | 2021-09-07 | 2021-09-07 | Continuous thickness detection equipment for thin sheet pieces |
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| Country | Link |
|---|---|
| CN (1) | CN215676892U (en) |
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2021
- 2021-09-07 CN CN202122147777.9U patent/CN215676892U/en active Active
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