CN215675959U - Cooling liquid adding equipment and etching system - Google Patents
Cooling liquid adding equipment and etching system Download PDFInfo
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- CN215675959U CN215675959U CN202122086011.4U CN202122086011U CN215675959U CN 215675959 U CN215675959 U CN 215675959U CN 202122086011 U CN202122086011 U CN 202122086011U CN 215675959 U CN215675959 U CN 215675959U
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Abstract
The utility model provides cooling liquid adding equipment and an etching system, which are used for adding cooling liquid to a temperature control device, wherein the temperature control device comprises a liquid adding opening, and the cooling liquid adding equipment comprises: the liquid storage barrel is used for storing the cooling liquid, is arranged on the temperature control device and is provided with a liquid outlet; the first end of the liquid feeding pipe extends into the cooling liquid of the liquid storage barrel through the liquid outlet, and the second end of the liquid feeding pipe extends into the liquid feeding port; the air bag is arranged on the liquid feeding pipe and is positioned between the first end of the liquid feeding pipe and the second end of the liquid feeding pipe, and is used for changing the air pressure in the liquid feeding pipe, extruding the air bag, and adding the cooling liquid by utilizing the siphon effect, so that a manual pouring method is avoided, the cooling liquid is prevented from being spilled in the adding process, and the labor is saved; the adding process of the cooling liquid is carried out in a semi-closed environment, and the influence of volatilization of the fluorine-containing compound on the TVOC environment is effectively reduced.
Description
Technical Field
The utility model relates to the field of semiconductors, in particular to cooling liquid adding equipment and an etching system.
Background
An accessory device of the dry etching equipment is a temperature control device, the temperature control device needs to be added with cooling liquid to maintain operation, when the cooling liquid in the temperature control device is reduced to an alarm line after long-time consumption, the cooling liquid needs to be added into the temperature control device to ensure the normal operation of the equipment, in the prior art, the cooling liquid is added by a manual pouring method, but because the weight of the cooling liquid in a single barrel is 20kg, and a liquid filling opening of the temperature control device is higher above the ground, the load is larger for workers during manual pouring, the pouring speed and the pouring quantity of the cooling liquid are difficult to control, and the cooling liquid is easy to spill; meanwhile, the cooling liquid is a fluorine-containing compound, and the volatilization of the fluorine-containing compound can affect the TVOC (Total Volatile Organic Compounds) and cause fluorine pollution in the air during the liquid adding process, thereby affecting the health of workers.
SUMMERY OF THE UTILITY MODEL
The utility model aims to provide cooling liquid adding equipment and an etching system, which can ensure that the cooling liquid is accurately and conveniently added and reduce the pollution to the environment.
In order to achieve the above object, the present invention provides a coolant addition apparatus for adding coolant to a temperature control device including a liquid addition port, including:
the liquid storage barrel is used for storing the cooling liquid, is arranged on the temperature control device and is provided with a liquid outlet;
the first end of the liquid feeding pipe extends into the cooling liquid in the liquid storage barrel through the liquid outlet, and the second end of the liquid feeding pipe extends into the liquid feeding port;
the gasbag, set up in on the liquid feeding pipe and be located the first end of liquid feeding pipe with between the second end of liquid feeding pipe, be used for changing atmospheric pressure in the liquid feeding pipe, in order to incite somebody to action coolant liquid in the stock solution bucket is inhaled through the siphon effect in the temperature control device.
Optionally, the liquid outlet is higher than the liquid filling port in the vertical direction.
Optionally, the material of the liquid feeding pipe is an elastic material.
Optionally, the part between the first end of the liquid feeding pipe and the air bag is in an inverted U shape.
Optionally, the air bag is detachably connected with the liquid feeding pipe.
Optionally, the liquid feeding pipe includes first pipe portion and second pipe portion, the one end of first pipe portion is the first end of liquid feeding pipe, the one end of second pipe portion is the second end of liquid feeding pipe, the gasbag cup joints with interference fit's mode the other end of first pipe portion with on the other end of second pipe portion.
Optionally, the outer diameter of the balloon is larger than the outer diameter of the filler pipe.
Optionally, the cooling liquid adding apparatus further includes:
the first sealing plug is arranged on the liquid outlet, and the first end of the liquid feeding pipe penetrates through the first sealing plug and extends into the liquid storage barrel;
the second seals the stopper, set up in on the filling opening, the second end of filling tube runs through the second seals the stopper and stretches into in the filling opening.
Optionally, the first sealing plug and the second sealing plug are both provided with a plurality of through holes, and the liquid storage barrel is communicated with the atmosphere through the through holes.
Optionally, the cooling liquid adding apparatus further includes:
the clamp is arranged between the second end of the liquid feeding pipe and the air bag and used for clamping the liquid feeding pipe so as to seal the liquid feeding pipe.
The utility model also provides an etching system, which comprises dry etching equipment, the temperature control device and the cooling liquid adding equipment, wherein the temperature control device is used for providing cooling liquid for the dry etching equipment so as to adjust the temperature of the dry etching equipment.
The utility model provides cooling liquid adding equipment and an etching system, which are used for adding cooling liquid to a temperature control device, wherein the temperature control device comprises a liquid adding opening, and the cooling liquid adding equipment comprises: the liquid storage barrel is used for storing the cooling liquid, is arranged on the temperature control device and is provided with a liquid outlet; the first end of the liquid feeding pipe extends into the cooling liquid of the liquid storage barrel through the liquid outlet, and the second end of the liquid feeding pipe extends into the liquid feeding port; the gasbag, set up in on the liquid feeding pipe and be located the first end of liquid feeding pipe with between the second end of liquid feeding pipe, be used for changing atmospheric pressure in the liquid feeding pipe through the extrusion the gasbag, usable siphon effect inhales the temperature control device with the coolant liquid in the stock solution bucket in, realize the interpolation of coolant liquid, avoided the coolant liquid to spill at the interpolation in-process, saved the manpower simultaneously.
In addition, set up the first stopper of sealing on the liquid outlet set up the second on the filling opening and seal the stopper, make the addition process of coolant liquid go on in semi-closed environment, effectively reduced the influence that fluorine-containing compound volatilizees and cause environment TVOC, avoided the harm to staff's health simultaneously.
Drawings
FIG. 1 is a schematic diagram of a coolant addition by manual pouring;
FIG. 2 is a line graph of the indoor TVOC content with coolant addition using FIG. 1;
fig. 3 is a schematic structural diagram of a cooling liquid adding apparatus according to an embodiment of the present invention;
FIG. 4 is a schematic structural diagram of an airbag according to an embodiment of the present invention;
fig. 5 is a perspective view of a first closure plug according to an embodiment of the present invention;
FIG. 6 is a line graph of the indoor TVOC content when the coolant addition apparatus of FIG. 3 is in use;
wherein the drawings are described as follows:
100. 200-a temperature control device; 102. 202-a filling opening; 104. 204-a liquid storage barrel; 106-a funnel; 205-a liquid outlet; 206-a filling tube; 208-air bag; 209 a-first interface; 209 b-second interface; 210 a-a first closure plug; 210 b-a second closure; 211-perforation; 213-through hole.
Detailed Description
When the cooling liquid of the temperature control device is consumed below the alarm line, the cooling liquid needs to be added to the temperature control device, fig. 1 is a schematic structural diagram of the cooling liquid addition by manual dumping, as shown in fig. 1, the temperature control device 100 includes a liquid filling opening 102, and a mouth of a funnel 106 is arranged in the liquid filling opening 102; the liquid storage barrel 104 is used for storing the cooling liquid and pouring the cooling liquid into the funnel 106. The position of the liquid adding opening 102 is different for different temperature control devices 100, but the liquid adding opening 102 is far away from the ground, and the diameter of the liquid adding opening 102 is smaller; the weight of the liquid storage barrel 104 and the cooling liquid inside the liquid storage barrel is generally 20kg, if the cooling liquid is added in a direct pouring mode, the load on workers is large, the pouring speed and the pouring quantity of the cooling liquid are not easy to control, and the cooling liquid is very easy to spill. If set up on the filling opening 102 funnel 106, can increase the scope that the coolant liquid emptys, nevertheless funnel 106 directly cup joints in filling opening 102 needs the staff to hand in order to fix at the liquid feeding in-process, prevents funnel 106 drops, has increased the demand to the manpower.
Meanwhile, in the process of adding the cooling liquid to the temperature control device 100 in a manual dumping manner, the cooling liquid is exposed to the air in a large area, the cooling liquid is a fluorine-containing compound, and the volatilization of the fluorine-containing compound can be caused in the open liquid adding process, so that the TVOC content of the environment is influenced. FIG. 2 is a line graph showing the TVOC content in the room when the coolant is added using FIG. 1, and as shown in FIG. 2, at time t1, before the coolant is added, the TVOC content in the room is 593 μ g/m3(ii) a the time t2 is the time in the liquid adding process, and the TVOC content in the chamber rises to 814 mu g/m3(ii) a the time t3 is the time when the liquid feeding is finished, and the TVOC content in the chamber reaches the peak value at the time1298. mu.g/m3(ii) a time t4 is a time one hour after the end of the liquid addition, when the TVOC content in the chamber has slowly fallen back to the normal level. The content of indoor TVOC specified by national standard should be less than 600 mu g/m3And during charging using the cooling liquid adding apparatus, the indoor TVOC content is increased to 1298 μ g/m3Far beyond the range specified by the national standard, the health of workers is affected.
To further clarify the objects, advantages and features of the present invention, a more particular description of the utility model will be rendered by reference to specific embodiments thereof which are illustrated in the appended drawings. It is to be noted that the drawings are in greatly simplified form and are not to scale, but are merely intended to facilitate and clarify the explanation of the embodiments of the present invention. Further, the structures illustrated in the drawings are often part of actual structures. In particular, the drawings may have different emphasis points and may sometimes be scaled differently.
Fig. 3 is a schematic structural diagram of a cooling liquid adding apparatus provided in this embodiment, and as shown in fig. 3, the cooling liquid adding apparatus is configured to add cooling liquid to a temperature control device 200, and the cooling liquid adding apparatus includes: a liquid storage barrel 204, a liquid filling pipe 206 and an air bag 208.
Specifically, the temperature control device 200 includes a liquid filling port 202, the height of the temperature control device 200 is generally 90cm, and the liquid filling port 202 is disposed on a side surface of the temperature control device 200. The position of the liquid filling port 202 can be different for different temperature control devices 200, in this embodiment, the liquid filling port 202 is arranged at a position 30cm higher than the temperature control device 200 in the vertical direction, the liquid filling port 202 is a hollow pipe with a length greater than 5cm, the opening direction of the hollow pipe is upward, and a certain angle is formed between the hollow pipe and the temperature control device 200, and the angle is smaller than 90 degrees.
The liquid storage barrel 204 is used for storing the cooling liquid, and the liquid storage barrel 204 is disposed on the temperature control device 200 and has a liquid outlet 205. Further, the first end of liquid feeding pipe 206 is passed through the liquid outlet stretches into in the coolant liquid of stock solution bucket, the second end stretches into in the liquid feeding mouth, just be provided with on the liquid feeding pipe 206 gasbag 208, just gasbag 208 is located the first end of liquid feeding pipe 206 with between the second end of liquid feeding pipe 206.
In this embodiment, since the liquid storage barrel 204 is disposed on the temperature control device 200, the position of the liquid outlet 205 in the vertical direction is higher than the position of the liquid filling port 202 in the vertical direction; and the part between the first end of the filling pipe 206 and the air bag 208 is bent into an inverted U shape.
The filling tube 206 is divided into a first tube part 206a and a second tube part 206b, one end of the first tube part 206a is a first end of the filling tube 206, one end of the second tube part 206b is a second end of the filling tube 206, and the air bag 208 is sleeved on the other end of the first tube part 206a and the other end of the second tube part 206b in an interference fit manner.
The air bag 208 is pressed, the air in the air bag 208 and the first tube portion 206a is discharged, the air bag 208 is released, the cooling liquid in the liquid storage barrel 204 is sucked into the first tube portion 206a and at least fills the inverted U-shaped portion of the first tube portion 206a, a siphon phenomenon is generated, the cooling liquid automatically flows into the liquid adding port 202 through the liquid adding tube 206, and the addition of the cooling liquid to the temperature control device 200 is completed.
The outer diameter of the balloon 208 is larger than the inner diameter of the filler tube 206, the present invention does not limit the outer shape of the balloon 208, and only the coolant sucked into the balloon 208 after it is squeezed and released is required to fill the inverted U-shaped portion of the first tube 206a, in this embodiment, the balloon 208 is an ellipsoid.
Fig. 4 is a schematic structural view of the airbag 208 provided in this embodiment, as shown in fig. 4, the airbag 208 is a cavity with two open ends, and two ends of the airbag 208 are respectively provided with a first interface 209a and a second interface 209b, the first interface 209a and the second interface 209b are respectively connected with the liquid feeding pipe 206, and the airbag 208 and the liquid feeding pipe 206 can be integrally connected or detachably connected. Wherein the detachable connection may be an interference fit of the first interface 209a and one end of the first tube portion 206a, and an interference fit of the second interface 209b and one end of the second tube portion 206 b; or the first interface 209a and the second interface 209b are internally provided with screw threads, the first pipe part 206a and the second pipe part 206b are externally provided with matched screw threads, and the filling pipe 206 and the air bag 208 are connected through screw connection.
Further, the material of the air bag 208 and the material of the filler pipe 206 are both elastic materials, in this embodiment, the elastic materials are rubber.
With continued reference to fig. 3, the coolant addition apparatus further includes: first sealing stopper 210a and second sealing stopper 210b, first sealing stopper 210a set up in on the liquid outlet 205, second sealing stopper 210b set up in on the filling opening 202, first sealing stopper 210a with the material of second sealing stopper 210b is elastic material, for example first sealing stopper 210a with the material of second sealing stopper 210b is rubber.
Fig. 5 is the perspective view of the first sealing stopper 210a that the embodiment provided, as shown in fig. 5, first sealing stopper 210a is round platform form, the small circle diameter of first sealing stopper 210a is less than the internal diameter of liquid outlet 205, the great circle diameter of first sealing stopper 210a is greater than the internal diameter of liquid outlet 205, will first sealing stopper 210a small circle end stretches into in the liquid outlet 205 with liquid outlet 205 interference fit makes its better closure liquid outlet 205. Perforated holes 211 are formed in the first sealing plug 210a, the perforated holes 211 are in clearance fit with the liquid adding pipes 206, the inner diameters of the perforated holes 211 are larger than the outer diameters of the liquid adding pipes 206, the friction between the perforated holes 211 and the liquid adding pipes 206 is reduced, separation is performed after liquid adding is facilitated, and the first ends of the liquid adding pipes 206 extend into the liquid storage barrel 204 through the perforated holes 211 in the cooling liquid. In this embodiment, the first end of the liquid feeding pipe 206 extends to the bottom of the liquid storage barrel 204, so as to prevent the liquid feeding pipe 206 from exposing the surface of the cooling liquid during the liquid feeding process, thereby stopping the liquid feeding.
The structure of the second sealing plug 210b is the same as that of the first sealing plug 210a, and the second end of the filler tube 206 penetrates through the second sealing plug 210b and extends into the filling opening 202.
The first sealing plug 210a and the second sealing plug 210b enable the whole adding process of the cooling liquid to be carried out in a closed environment, and TVOC pollution caused by volatilization of the cooling liquid is avoided.
In other alternative embodiments, the first and second closures 210a, 210b may be cylindrical or two cylinders of different sizes may be stacked.
Further, in the process of adding the cooling liquid, the cooling liquid in the liquid storage barrel 204 gradually decreases, the cooling liquid in the temperature control device 200 continuously increases, and the difference between the air pressure in the liquid storage barrel 204 and the air pressure in the temperature control device 200 gradually increases, which may cause the down flow speed of the cooling liquid to slow down or even stop. Therefore, the first sealing plug 210a and the second sealing plug 210b are provided with a plurality of through holes 213, and the through holes 213 communicate the liquid storage barrel 204 with the atmosphere, so that the air pressure in the liquid storage barrel 204 and the air pressure in the temperature control device 200 are maintained in a balanced state, and the adding speed of the cooling liquid is further stabilized.
The diameter of the through hole 213 is smaller than 5mm, the diameter of the through hole 213 is reduced to reduce the volatilization of the cooling liquid, so that the pollution to the environment and the damage to the health of workers are reduced.
The coolant addition apparatus may further include a clip. In practical application, the clip is clipped on the second tube part 206b to close the filling tube 206, and the air bag 208 is pressed to discharge the air in the air bag 208 into the liquid storage barrel 204 along the first tube part 206 a; releasing the bladder 208, sucking the coolant and filling the portion of the first pipe portion 206a having the inverted U-shape with the coolant; the clamp is taken down, the liquid feeding pipe 206 is opened, a siphon effect is generated due to hydraulic pressure and gravity, and the cooling liquid in the liquid storage barrel 204 automatically flows into the temperature control device 200 along the liquid feeding pipe 206 to complete liquid feeding. Further, when the addition of the coolant in the temperature control device 200 is completed, the clamp is re-clamped on the second pipe portion 206b, and the coolant is prevented from further flowing downward; the air bag 208 is pressed to press the cooling liquid in the first tube 206a back into the liquid storage barrel 204, and the first end of the liquid feeding tube 206 is separated from the cooling liquid in the liquid storage barrel 204.
In alternative embodiments, a portion between the second end of the filler tube 206 and the balloon 208 may be bent to close the filler tube 206.
FIG. 6 is a line graph showing the TVOC content in the room using the coolant adding apparatus shown in FIG. 3, where as shown in FIG. 6, time t1 is a time before the coolant is added, and the TVOC content in the room is 593 μ g/m3(ii) a the time t3 is the end time of liquid feeding, and the TVOC content in the chamber is 326 mug/m3And in the whole liquid adding process, the TVOC content in the room is not increased. Therefore, by using the cooling liquid adding equipment in the embodiment, the influence of volatilization of the fluorine-containing compound on the TVOC (transient volatile organic compound) environment is effectively reduced.
The embodiment also provides an etching system, which comprises dry etching equipment, a temperature control device 200 and the cooling liquid adding equipment, wherein the temperature control device 200 is used for providing cooling liquid for the dry etching equipment so as to adjust the temperature of the dry etching equipment. The coolant adding apparatus adds the coolant into the temperature control device 200 through the liquid feeding pipe 206 to maintain the normal operation of the temperature control device 200.
In summary, the cooling liquid adding apparatus for adding cooling liquid to the temperature control device 200 according to the embodiment of the present invention includes: a liquid storage barrel 204 for storing the cooling liquid, wherein the liquid storage barrel 204 is disposed on the temperature control device 200 and has a liquid outlet 205; a liquid feeding pipe 206, a first end of which extends into the cooling liquid of the liquid storage barrel 204 through the liquid outlet 205, and a second end of which extends into the liquid feeding port 202; the air bag 208 is arranged on the liquid feeding pipe 206 and is positioned between the first end of the liquid feeding pipe 206 and the second end of the liquid feeding pipe 206, and is used for changing the air pressure in the liquid feeding pipe 206, extruding the air bag 208 and adding the cooling liquid by utilizing the siphon effect, so that the manual pouring method is avoided, the cooling liquid is prevented from spilling in the adding process, and meanwhile, the labor force is saved; set up on the liquid outlet 205 first seal stopper 210a set up on the filling opening 202 the second seal stopper 210b, and first seal stopper 210a reaches set up a plurality of on the second seal stopper 210b through-hole 213 makes the addition process of coolant liquid go on in semi-enclosed environment, has effectively reduced the influence that fluorine-containing compound volatilizees and causes environment TVOC, avoids the harm to the staff's health simultaneously.
The above description is only a preferred embodiment of the present invention, and does not limit the present invention in any way. It will be understood by those skilled in the art that various changes, substitutions and alterations can be made herein without departing from the spirit and scope of the utility model as defined by the appended claims.
Claims (11)
1. A coolant liquid adding apparatus for adding coolant liquid to a temperature control device including a liquid adding port, comprising:
the liquid storage barrel is used for storing the cooling liquid, is arranged on the temperature control device and is provided with a liquid outlet;
the first end of the liquid feeding pipe extends into the cooling liquid in the liquid storage barrel through the liquid outlet, and the second end of the liquid feeding pipe extends into the liquid feeding port;
the gasbag, set up in on the liquid feeding pipe and be located the first end of liquid feeding pipe with between the second end of liquid feeding pipe, be used for changing atmospheric pressure in the liquid feeding pipe, in order to incite somebody to action coolant liquid in the stock solution bucket is inhaled through the siphon effect in the temperature control device.
2. The coolant adding apparatus as set forth in claim 1, wherein said liquid outlet is vertically higher than said liquid adding port.
3. The coolant adding apparatus as claimed in claim 1, wherein said filler pipe is made of an elastic material.
4. A coolant addition apparatus as set forth in claim 1 or 3, wherein a portion between said first end of said filler pipe and said air bag has an inverted U-shape.
5. The coolant adding apparatus as set forth in claim 1, wherein said air bag is detachably connected to said filling pipe.
6. The coolant adding apparatus as claimed in claim 5, wherein said liquid feeding pipe includes a first pipe portion and a second pipe portion, one end of said first pipe portion is a first end of said liquid feeding pipe, one end of said second pipe portion is a second end of said liquid feeding pipe, and said air bag is fitted over the other end of said first pipe portion and the other end of said second pipe portion in an interference fit manner.
7. The coolant adding apparatus as claimed in claim 1, wherein said air bag has an outer diameter larger than an outer diameter of said filler pipe.
8. The coolant adding apparatus as set forth in claim 1, further comprising:
the first sealing plug is arranged on the liquid outlet, and the first end of the liquid feeding pipe penetrates through the first sealing plug and extends into the liquid storage barrel;
the second seals the stopper, set up in on the filling opening, the second end of filling tube runs through the second seals the stopper and stretches into in the filling opening.
9. The coolant adding apparatus as claimed in claim 8, wherein said first sealing plug and said second sealing plug are provided with a plurality of through holes, and said through holes communicate said liquid storage barrel with the atmosphere.
10. The coolant adding apparatus as set forth in claim 1, further comprising:
the clamp is arranged between the second end of the liquid feeding pipe and the air bag and used for clamping the liquid feeding pipe so as to seal the liquid feeding pipe.
11. An etching system, comprising a dry etching apparatus, a temperature control device and the cooling liquid adding apparatus as claimed in any one of claims 1 to 10, wherein the temperature control device is configured to provide the cooling liquid for the dry etching apparatus to adjust the temperature of the dry etching apparatus.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122086011.4U CN215675959U (en) | 2021-08-30 | 2021-08-30 | Cooling liquid adding equipment and etching system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122086011.4U CN215675959U (en) | 2021-08-30 | 2021-08-30 | Cooling liquid adding equipment and etching system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN215675959U true CN215675959U (en) | 2022-01-28 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202122086011.4U Active CN215675959U (en) | 2021-08-30 | 2021-08-30 | Cooling liquid adding equipment and etching system |
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| Country | Link |
|---|---|
| CN (1) | CN215675959U (en) |
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2021
- 2021-08-30 CN CN202122086011.4U patent/CN215675959U/en active Active
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