CN215617177U - Combined grinding wheel and grinding equipment for processing semiconductor epitaxial quartz component - Google Patents

Abstract

The application relates to a combined grinding wheel and grinding equipment for processing a semiconductor epitaxial quartz component, which relates to the technical field of production of the semiconductor epitaxial quartz component, and comprises a connecting sleeve and a plurality of grinding wheel bodies arranged on the connecting sleeve, wherein the mesh numbers of the grinding wheel bodies are different from each other and are at least provided with two. According to the grinding wheel, the semiconductor quartz products are processed through the grinding wheel bodies with the same number, so that the processing can be completed according to different processing requirements, the probability of replacing the grinding wheel for many times is reduced, the time is saved, and the processing efficiency of the grinding wheel on the products is improved.

Description

Combined grinding wheel and grinding equipment for processing semiconductor epitaxial quartz component

Technical Field

The application relates to the technical field of production of semiconductor epitaxial quartz components, in particular to a combined grinding wheel and grinding equipment for processing a semiconductor epitaxial quartz component.

Background

The semiconductor refers to a material with the conductivity between a conductor and an insulator at normal temperature, semiconductor epitaxy is an electronic process aiming at the semiconductor, and a quartz component is a product after the semiconductor epitaxy processing.

The grinding wheel is a tool which is used more when a semiconductor quartz component product is processed, is also called a consolidation grinding tool, and is a consolidation grinding tool which is formed by consolidating common grinding materials into a certain shape (mostly circular, and a through hole is arranged in the center) by a binding agent and has certain strength; when the grinding wheel is used, the grinding wheel rotates at a high speed, various molded surfaces of a semiconductor quartz product are subjected to coarse grinding, semi-fine grinding and fine grinding, grooving, cutting and the like, and the characteristics of the grinding wheel are mainly determined by factors such as grinding materials, granularity, bonding agents, hardness, tissues, shapes, sizes and the like.

The machining degree of machined parts can be different, and different grinding wheels are needed to meet machining requirements during machining in different degrees, so that different grinding wheels need to be replaced for multiple times in the machining process, the machining time of products is prolonged, and the machining efficiency of the grinding wheels to the products is reduced.

SUMMERY OF THE UTILITY MODEL

In order to improve the machining efficiency of the grinding wheel on products, the application provides a combined grinding wheel and grinding equipment for machining a semiconductor epitaxial quartz component.

In a first aspect, the application provides a combined grinding wheel for processing a semiconductor epitaxial quartz component, which adopts the following technical scheme:

a combined grinding wheel for processing a semiconductor epitaxial quartz component comprises a connecting sleeve and a plurality of grinding wheel bodies arranged on the connecting sleeve, wherein the mesh number of the plurality of grinding wheel bodies is different and at least two grinding wheel bodies are arranged;

the grinding wheel body is detachably arranged on the connecting sleeve through a connecting device, and the connecting device comprises a connecting sleeve body and a connecting sleeve body;

the grinding wheel body is provided with an installation part which is sleeved on the connecting sleeve and is abutted against the connecting disc;

and the fixing component is arranged on the connecting sleeve and is used for positioning the mounting part.

By adopting the technical scheme, the semiconductor quartz products are respectively processed by the plurality of grinding wheel bodies with the same mesh number, so that the processing can be finished according to different processing requirements, the probability of replacing the grinding wheel bodies for multiple times is reduced, the time is saved, and the processing efficiency of the grinding wheel on the products is improved;

the fixed subassembly of unblock is changed new emery wheel body, establishes the installation department cover of new emery wheel body on the connection pad is sheathe in and is contradicted to the connection pad, and the fixed subassembly of locking is fixed a position the installation department to this is convenient for change the emery wheel body.

Optionally, the fixing assembly includes:

the connecting columns are arranged on the mounting part and are arranged in a plurality of circumferential arrays around the axis of the connecting sleeve, at least two connecting columns are arranged, the connecting disc is provided with an inserting groove which is in inserting fit with the connecting columns, and the side wall of the mounting part, which is far away from one side of the connecting columns, is provided with a mounting groove which is in inserting fit with the connecting columns;

and the connecting ring is in threaded connection with the connecting sleeve and is abutted against the mounting part.

By adopting the technical scheme, the connecting ring is screwed to be separated from the connecting sleeve, the grinding wheel body on the connecting sleeve is taken down, a new grinding wheel body is sleeved on the connecting sleeve, so that the connecting column is in inserting fit with the inserting groove on the connecting disc, the next grinding wheel body is sleeved on the connecting sleeve, the connecting column on the next grinding wheel body is pushed to be in inserting fit with the installing groove on the previous grinding wheel body, and finally the connecting ring is in threaded connection with the connecting sleeve, so that the connecting ring is tightly supported on the installing part at one side farthest from the connecting disc, and a plurality of grinding wheel bodies are fixedly connected according to different processing requirements;

therefore, the number and the mesh number of the grinding wheel bodies can be combined and fixedly connected together according to the processing requirements, so that the application range of the grinding wheel to the product during processing is enlarged, the time is further saved, and the processing efficiency of the grinding wheel to the product is improved; a plurality of spliced poles and connection pad are pegged graft and are cooperated to this concentricity with the adapter sleeve after having improved emery wheel body installation has reduced the probability of shake when emery wheel body moves, has improved the processingquality of emery wheel to the product.

Optionally, the mounting portion protrudes out of the grinding wheel body, so that an avoiding space is formed between two adjacent grinding wheel bodies, the diameters of the grinding wheel bodies are different in size, and the diameters and the mesh numbers of the grinding wheel bodies are the same in change range along the arrangement direction of the grinding wheel bodies.

By adopting the technical scheme, the space avoiding enables the adjacent two grinding wheel bodies to have interval time when being replaced, so that the processing quality of the grinding wheel on products is improved; the diameters and the mesh numbers of the grinding wheel bodies are different, and the change ranges of the diameters and the mesh numbers are the same along the arrangement direction, so that the probability of replacing errors of the grinding wheel bodies is reduced, and the convenience in replacing the grinding wheel bodies is improved.

In a second aspect, the present application provides a grinding apparatus, which adopts the following technical solution:

a grinding device comprises a machine base and a movable base arranged on the machine base in a sliding mode, wherein a driving assembly for driving the movable base to move is arranged on the machine base; the grinding wheel is characterized in that a driving shaft is rotatably arranged on the moving seat, a driving motor connected with the driving shaft is arranged on the moving seat, and the semiconductor epitaxial quartz component machining combined grinding wheel in the first aspect can be detachably arranged on the driving shaft through a connecting mechanism.

By adopting the technical scheme, the driving assembly is started to drive the movable seat and the driving shaft to move, meanwhile, the driving motor is started to drive the driving shaft to rotate, the driving shaft rotates to drive the combined grinding wheel to rotate, and the movable seat drives the combined grinding wheel body to move, so that the product is machined; after the grinding machine is machined, the required combined grinding wheel is replaced through the connecting mechanism, so that the application range of the grinding equipment to products is improved, and meanwhile, the grinding wheel body can be replaced according to machining requirements when the grinding equipment is used for machining the products, so that the time spent on replacing the combined grinding wheel is saved, and the machining efficiency of the grinding equipment is improved.

Optionally, the connecting mechanism comprises;

the connecting shaft is arranged on the driving shaft, and the connecting sleeve is sleeved on the connecting shaft and abutted against the driving shaft;

the clamping block is arranged on the connecting shaft and is in clamping fit with the connecting sleeve;

and the positioning ring is in threaded connection with the connecting shaft and is tightly abutted against the connecting sleeve.

Through adopting above-mentioned technical scheme, twist the holding ring and break away from with the connecting axle, then can take off the combination formula emery wheel, establish the connecting axle with the adapter sleeve cover of new combination formula emery wheel on, and joint piece and the cooperation of adapter sleeve joint, twist holding ring threaded connection to the connecting axle on, make the holding ring support tightly on the connecting axle, change the combination formula emery wheel with this, joint piece and adapter sleeve joint cooperation simultaneously, consequently, the probability that connecting axle and adapter sleeve take place relative rotation and produce wearing and tearing has been reduced, the concentricity after connecting axle and the adapter sleeve installation has been improved, the precision in the emery wheel processing has been improved, the quality of product when grinding device adds man-hour has been improved.

Optionally, a positioning groove is formed in one end, away from the driving motor, of the connecting shaft, and a supporting device for supporting the connecting shaft is arranged on the base and comprises;

the rotating shaft is rotatably arranged on the moving seat;

the ejector rod is arranged on the rotating shaft in a sliding mode and is provided with a conical guide surface which is attached to the positioning groove;

and the moving mechanism is arranged on the rotating shaft, is connected with the ejector rod and is used for driving the ejector rod to move.

One end of the driving shaft is connected with the driving motor, and the other end of the driving shaft is suspended, so that the driving shaft is easy to shake when driving the combined grinding wheel to rotate, and the quality of products is reduced when the grinding equipment processes products;

through adopting above-mentioned technical scheme, moving mechanism starts to drive the ejector pin and is close to the drive shaft for the spigot surface on the ejector pin supports tightly with the constant head tank, consequently drives ejector pin and axis of rotation when the drive shaft rotates, thereby has reduced the probability that takes place the shake when the drive shaft rotates, has improved the quality of grinding equipment product when processing the product.

Optionally, the moving mechanism comprises;

the movable screw is in threaded connection with the rotating shaft and is connected with the ejector rod;

and the locking nut is in threaded connection with the movable screw rod and is tightly abutted against the rotating shaft.

Through adopting above-mentioned technical scheme, twist and move the locking nut and keep away from the axis of rotation, then twist and move the screw rod and rotate and drive the ejector pin and rotate and remove, remove after accomplishing, twist and move the locking nut and support tightly on the axis of rotation to this realizes twisting and moves the screw rod and drive the ejector pin and remove.

Optionally, a cooling device for cooling the grinding wheel body is arranged on the movable seat, and the cooling device comprises;

the fixed pipe is arranged on the movable seat, is communicated with an air source and is provided with a switch;

and the air outlet pipe is arranged on the fixed pipe, and the pipe orifice of the air outlet pipe is aligned with the grinding wheel body.

Through adopting above-mentioned technical scheme, grinding equipment starts the back, opens the switch, and on gas loop through fixed pipe and outlet duct blown the emery wheel body in the air supply to this comes to carry out cooling to the emery wheel body, has reduced the probability that the emery wheel body damaged because overheated, and the piece on the emery wheel body is blown off to gas simultaneously, thereby has improved the quality of product when grinding equipment processing product.

Optionally, the drive assembly comprises;

the sliding seat is arranged on the base in a sliding mode, and the moving seat is arranged on the sliding seat in a sliding mode;

the first screw rod is rotatably arranged on the base and is in threaded connection with the sliding seat;

the second screw rod is rotatably arranged on the sliding seat and is in threaded connection with the moving seat;

the first motor is arranged on the base and is connected with the first screw rod;

a second motor arranged on the sliding seat and connected with the second screw rod

Through adopting above-mentioned technical scheme, first motor starts to drive first screw rod and rotates, and first screw rod rotates and drives the seat that slides and remove, and the second motor starts to drive the second screw rod simultaneously and rotates, and the second screw rod rotates and drives and remove the seat and remove to this drives and removes seat and emery wheel body and remove along two directions.

In summary, the present application includes at least one of the following beneficial technical effects:

1. the semiconductor quartz product is processed through the grinding wheel bodies with the same mesh number, so that the processing can be finished according to different processing requirements, the probability of replacing the grinding wheel bodies for multiple times is reduced, the time is saved, and the processing efficiency of the grinding wheel on the product is improved;

2. the combined grinding wheel is driven to move by starting the driving component, and the combined grinding wheel is driven to rotate by starting the driving motor, so that the product is processed; after the grinding machine is machined, the required combined grinding wheel is replaced through the connecting mechanism, so that the application range of the grinding equipment to products is improved, and meanwhile, the grinding wheel body can be replaced when the grinding equipment is used for machining the products, so that the time spent on replacing the combined grinding wheel is saved, and the machining efficiency of the grinding equipment is improved.

Drawings

FIG. 1 is a schematic perspective view of the present application;

FIG. 2 is a schematic diagram of the construction of a composite grinding wheel of the present application;

FIG. 3 is a schematic cross-sectional view A-A of FIG. 2;

FIG. 4 is a schematic view of the structure of the grinding apparatus of the present application;

FIG. 5 is a schematic view of the connection mechanism, support device and cooling device of the present application;

fig. 6 is a partial exploded view of the present application with the rotating shaft side wall sectioned.

Reference numerals: 1. connecting sleeves; 11. a clamping groove; 12. a grinding wheel body; 13. an installation part; 14. a first thread segment; 15. avoiding space; 2. a connecting device; 21. a connecting disc; 22. connecting columns; 23. a connecting ring; 24. inserting grooves; 25. mounting grooves; 31. a machine base; 32. a movable seat; 321. a first support plate; 322. a second support plate; 33. a drive shaft; 34. a drive motor; 4. a drive assembly; 41. a sliding seat; 42. a first screw; 43. a second screw; 44. a first motor; 45. a second motor; 5. a connecting mechanism; 51. a connecting shaft; 52. a clamping block; 53. a positioning ring; 54. a second thread segment; 55. positioning a groove; 6. a support device; 61. a rotating shaft; 611. a sliding groove; 62. a top rod; 621. a guide surface; 63. a moving mechanism; 64. moving the screw; 65. a locking nut; 7. a cooling device; 71. a fixed tube; 72. an air outlet pipe; 73. and (4) switching.

Detailed Description

The present application is described in further detail below with reference to figures 1-6.

The embodiment of the application discloses a combined grinding wheel for processing a semiconductor epitaxial quartz component.

Referring to fig. 1 and 2, the combined grinding wheel for processing the semiconductor epitaxial quartz component comprises a connecting sleeve 1 which is tubular and has openings at two ends, clamping grooves 11 which penetrate through two ends of the connecting sleeve 1 are formed in two opposite inner side walls of the connecting sleeve 1, and a plurality of grinding wheel bodies 12 are detachably arranged on the connecting sleeve 1 through a connecting device 2.

Referring to fig. 2 and 3, the number of the grinding wheel bodies 12 is at least two, and the number of the grinding wheel bodies 12 may be three or more, the diameters and the mesh numbers of the respective grinding wheel bodies 12 are different from each other, and the diameters and the mesh numbers of the grinding wheel bodies 12 have the same change range along the arrangement direction of the grinding wheel bodies 12; taking two grinding wheel bodies 12 as an example for explanation, the grinding wheel body 12 is fixedly provided with an installation part 13, the installation part 13 is tubular and has two open ends, the grinding wheel body 12 is located on the outer circular surface of the installation part 13, and one end of the installation part 13 is flush with the grinding wheel body 12 while the other end protrudes out of the grinding wheel body 12.

Referring to fig. 2 and 3, the connecting device 2 comprises a connecting disc 21 and a fixing component, wherein the connecting disc 21 is coaxially and integrally arranged at one end of the connecting sleeve 1, the connecting disc 21 is positioned on the outer circular surface of the connecting sleeve 1, and the connecting disc 21 is flush with the end surface of the same side of the connecting sleeve 1; installation department 13 cover is established on adapter sleeve 1, and installation department 13 external diameter is greater than connection pad 21 external diameter, and the one end that installation department 13 and emery wheel body 12 flush simultaneously contradicts with connection pad 21, has seted up inserting groove 24 on the lateral wall that connection pad 21 contradicts with installation department 13.

Referring to fig. 2 and 3, fixed subassembly sets up on adapter sleeve 1 and is used for fixing a position installation department 13, and fixed subassembly includes spliced pole 22 and go-between 23, and spliced pole 22 is integrative to be set up in installation department 13 and one of connection pad 21 conflict and with inserting groove 24 cooperation of pegging graft, and inserting groove 24 and spliced pole 22 all are provided with a plurality ofly around adapter sleeve 1 axis circumference array simultaneously, and inserting groove 24 and spliced pole 22 figure are two at least and can be three or more. Mounting groove 25 has been seted up on the lateral wall of installation department 13 on the one side that deviates from spliced pole 22, and mounting groove 25 and spliced pole 22 one-to-one have seted up a plurality ofly.

Referring to fig. 2 and 3, when the mounting part 13 on the next grinding wheel body 12 is sleeved on the connecting sleeve 1, the connecting column 22 on the next grinding wheel body 12 is in inserted fit with the mounting groove 25 on the previous grinding wheel body 12, the mounting parts 13 of the two grinding wheel bodies 12 are abutted together, and a space 15 is formed between the two grinding wheel bodies 12 in a fit manner; one end of the connecting sleeve 1, which is far away from the connecting disc 21, is provided with a first threaded section 14, the connecting ring 23 is in threaded connection with the first threaded section 14, and the connecting ring 23 and the connecting disc 21 are respectively abutted against two ends of the mounting part 13.

The working principle of the embodiment of the application is as follows:

twist and move go-between 23 and adapter sleeve 1 and break away from, then take off emery wheel body 12 and change, establish the installation department 13 cover of new emery wheel body 12 on adapter sleeve 1, make spliced pole 22 and inserting groove 24 grafting cooperation, continue to overlap the installation department 13 of the next emery wheel body 12 and establish on adapter sleeve 1, make spliced pole 22 on the next emery wheel body 12 and the cooperation of pegging graft of the mounting groove 25 of the preceding emery wheel body 12, twist go-between 23 threaded connection to first screw thread section 14, make go-between 23 support tightly to installation department 13, realize changing emery wheel body 12 with this, a plurality of emery wheel body 12 combination installation that need with product processing together, consequently, the probability of changing emery wheel body 12 many times has been reduced, time is saved, the machining efficiency of emery wheel body 12 to the product has been improved.

The embodiment of the application discloses grinding equipment.

Referring to fig. 1 and 4, the grinding apparatus includes a base 31, a movable seat 32 slidably disposed on an upper surface of the base 31, a driving assembly 4 disposed on the base 31 for driving the movable seat 32 to move, a horizontal driving shaft 33 rotatably mounted on a side wall of the movable seat 32, a combined grinding wheel detachably disposed on the driving shaft 33 through a connecting mechanism 5, and a driving motor 34 connected to the driving shaft 33 disposed on a side wall of the movable seat 32 away from the driving shaft 33.

Referring to fig. 4, the driving assembly 4 includes a sliding seat 41, a first screw 42, a second screw 43, a first motor 44 and a second motor 45, the sliding seat 41 is horizontally slidably mounted on the upper surface of the base 31, and the sliding direction of the sliding seat 41 is parallel to the axis of the driving shaft 33, while the moving seat 32 is horizontally slidably mounted on the upper surface of the sliding seat 41, and the sliding directions of the sliding seat 41 and the moving seat 32 are perpendicular; the first screw 42 is horizontally and rotatably installed on the upper surface of the base 31, and the first screw 42 is in threaded connection with the sliding seat 41, while the second screw 43 is horizontally and rotatably installed on the upper surface of the sliding seat 41, and the second screw 43 is in threaded connection with the movable seat 32.

Referring to fig. 4, a first motor 44 is fixedly installed on the sidewall of the base 31 and the output shaft is connected to the first screw 42, and a second motor 45 is fixedly installed on the sidewall of the sliding seat 41 and the output shaft is connected to the second screw 43. The first motor 44 is started to drive the first screw rod 42 to rotate, the first screw rod 42 is rotated to drive the sliding seat 41 to move, the second motor 45 is started to drive the second screw rod 43 to rotate, the second screw rod 43 is rotated to drive the moving seat 32 to move, and therefore the moving seat 32 and the driving shaft 33 are driven to move along two mutually perpendicular directions.

Referring to fig. 4 and 5, the connecting mechanism 5 includes a connecting shaft 51, a clamping block 52 and a positioning ring 53, the connecting shaft 51 is coaxially and fixedly mounted on one end of the driving shaft 33 far away from the driving motor 34, and the diameter of the connecting shaft 51 is smaller than that of the driving shaft 33.

Referring to fig. 3 and 5, the connecting sleeve 1 is sleeved on the connecting shaft 51, and both one end of the connecting sleeve 1 close to the connecting disc 21 and the connecting disc 21 are abutted against the driving shaft 33; the clamping blocks 52 are fixedly mounted on the side wall of the connecting shaft 51, and the clamping blocks 52 are provided with two clamping grooves 11 and are respectively matched with the two clamping grooves in a clamping manner.

Referring to fig. 4 and 5, a second threaded section 54 is formed at one end of the connecting shaft 51 away from the driving shaft 33, a positioning ring 53 is threaded onto the second threaded section 54, the positioning ring 53 abuts against the connecting sleeve 1, and a positioning groove 55 is formed at one end of the connecting shaft 51 away from the driving shaft 33.

Referring to fig. 5, the moving base 32 is provided with a supporting device 6 for supporting the connecting shaft 51, and the supporting device 6 includes a rotating shaft 61, a push rod 62 and a moving mechanism 63; remove seat 32 and be close to first backup pad 321 of horizontally fixed mounting on the lateral wall of drive shaft 33 one side, and first backup pad 321 is located emery wheel body 12 below, and first backup pad 321 is kept away from and is removed seat 32 one end and extend to connecting axle 51 and keep away from drive shaft 33 one side simultaneously, and first backup pad 321 keeps away from the one end fixed mounting who removes the seat and has second backup pad 322, and second backup pad 322 is vertical upwards to extend to connecting axle 51 top.

Referring to fig. 5 and 6, the rotating shaft 61 is rotatably mounted on the second support plate 322, an axis of the rotating shaft 61 coincides with an axis of the connecting shaft 51, and two ends of the rotating shaft 61 horizontally penetrate through two opposite side walls of the second support plate 322. One end of the rotating shaft 61 close to the connecting shaft 51 is coaxially provided with a sliding groove 611, the push rod 62 is slidably mounted on the sliding groove 611 and is in a cylindrical state, and meanwhile, the push rod 62 and the rotating shaft 61 are overlapped with the axis.

Referring to fig. 5 and 6, one end of the push rod 62 near the connecting shaft 51 is provided with a guide surface 621 which is conical and is attached to the positioning groove 55, and the guide surface 621 facilitates the attachment of the push rod 62 to the positioning groove 55; the moving mechanism 63 is disposed on the rotating shaft 61 and is used for driving the push rod 62 to move, and the moving mechanism 63 comprises a moving screw 64 and a locking nut 65.

Referring to fig. 5 and 6, the movable screw 64 passes through one end of the rotating shaft 61 far away from the sliding groove 611 and extends into the sliding groove 611, meanwhile, the movable screw 64 is in threaded connection with the rotating shaft 61, and the movable screw 64 is fixedly connected with one end of the push rod 62 located in the sliding groove 611; the lock nut 65 is screwed to the moving screw 64 and abuts against the rotating shaft 61.

Referring to fig. 5 and 6, the locking nut 65 is screwed to be away from the rotating shaft 61, the movable screw 64 is screwed to rotate to drive the ejector rod 62 to be away from the connecting shaft 51, then the combined grinding wheel can be replaced, after the replacement is completed, the movable screw 64 is screwed to rotate to drive the ejector rod 62 to be close to the connecting shaft 51, so that the guide surface 621 abuts against the positioning groove 55, and finally the locking nut 65 is screwed against the rotating shaft 61, so that the ejector rod 62 is used for supporting the connecting shaft 51 and the driving shaft 33.

Referring to fig. 4 and 5, a cooling device 7 for cooling the grinding wheel body 12 is arranged on the movable seat 32, the cooling device 7 includes a fixed pipe 71 and an air outlet pipe 72, a mounting block 74 is fixedly mounted on the side wall of the movable seat 32, the fixed pipe 71 passes through the side wall of the mounting block 74 on the side away from the driving shaft 33 and is fixedly connected with the mounting block 74, a switch 73 is fixedly mounted on the fixed pipe 71, and one end of the fixed pipe 71 away from the mounting block 74 is communicated with an air source; one end of the air outlet pipe 72 is fixedly installed on one end of the fixing pipe 71 close to the driving shaft 33, and one end of the air outlet pipe 72 far away from the fixing pipe 71 extends to one side of the grinding wheel body 12 and is aligned with the outer circumferential surface of the grinding wheel body 12.

The working principle of the embodiment of the application is as follows:

twist lock nut 65 and keep away from axis of rotation 61, then twist removal screw 64 and drive ejector pin 62 and keep away from connecting axle 51, take off combined type emery wheel and change, establish connecting axle 51 with the pot head that connecting sleeve 1 is close to connection pad 21 on, make connection pad 21 contradict with drive shaft 33, and joint piece 52 and the cooperation of joint groove 11 joint, twist on holding ring 53 threaded connection second screw thread section 54, make holding ring 53 support tightly and fix a position on connecting sleeve 1, realize changing combined type emery wheel with this, thereby the accommodation of grinding device to the product has been improved, grinding device adds man-hour to the product simultaneously and can more change emery wheel body 12 on the connecting sleeve 1 as required, with this time of changing combined type emery wheel cost has been saved, grinding device's machining efficiency has been improved.

After the replacement is completed, the movable screw 64 is screwed to drive the guide surface 621 on the ejector rod 62 to abut against the positioning groove 55, the locking nut 65 is screwed to abut against the rotating shaft 61 to position the ejector rod 62, the driving motor 34 is started to drive the driving shaft 33 and the grinding wheel body 12 to rotate, the driving shaft 33 is rotated to drive the ejector rod 62 and the rotating shaft 61 to rotate, the first motor 44 and the second motor 45 are started to drive the grinding wheel body 12 to move, so that the product is processed, the probability of shaking during the processing of the grinding wheel body 12 is reduced, and the quality of the product during the processing of the grinding equipment is improved.

Open switch 73, gaseous blow through outlet duct 72 on the emery wheel body 12 to this cools down emery wheel body 12, has reduced the probability that emery wheel body 12 damaged because of overheated, and the piece on the emery wheel body 12 is blown off to gaseous simultaneously, thereby the quality of product when having improved the grinding device processing product.

The above embodiments are preferred embodiments of the present application, and the protection scope of the present application is not limited by the above embodiments, so: all equivalent changes made according to the structure, shape and principle of the present application shall be covered by the protection scope of the present application.

Claims (9)

1. A combined grinding wheel for processing a semiconductor epitaxial quartz component is characterized in that: the grinding wheel grinding device comprises a connecting sleeve (1) and a plurality of grinding wheel bodies (12) arranged on the connecting sleeve (1), wherein the mesh number of the grinding wheel bodies (12) is different and at least two grinding wheel bodies are arranged;

the grinding wheel body (12) is detachably arranged on the connecting sleeve (1) through a connecting device (2), and the connecting device (2) comprises;

the grinding wheel comprises a connecting disc (21), wherein the connecting disc (21) is arranged on a connecting sleeve (1), and an installation part (13) which is sleeved on the connecting sleeve (1) and is abutted against the connecting disc (21) is arranged on the grinding wheel body (12);

the fixing component is arranged on the connecting sleeve (1) and used for positioning the mounting part (13).

2. The combined grinding wheel for processing the semiconductor epitaxial quartz component, according to claim 1, is characterized in that: the fixing assembly includes:

the connecting columns (22) are arranged on the mounting part (13) and are arranged in a plurality of circumferential arrays around the axis of the connecting sleeve (1), at least two connecting columns (22) are arranged, the connecting disc (21) is provided with inserting grooves (24) which are in inserting fit with the connecting columns (22), and the side wall of the mounting part (13) on the side away from the connecting columns (22) is provided with mounting grooves (25) which are in inserting fit with the connecting columns (22);

the connecting ring (23) is in threaded connection with the connecting sleeve (1) and abuts against the mounting portion (13).

3. The combined grinding wheel for processing the semiconductor epitaxial quartz component of claim 2, wherein: the mounting part (13) protrudes out of the grinding wheel body (12) to enable an avoiding space (15) to be formed between two adjacent grinding wheel bodies (12), the diameters of the grinding wheel bodies (12) are different in size, and the diameters and the mesh numbers of the grinding wheel bodies (12) are the same in change range along the arrangement direction of the grinding wheel bodies (12).

4. A grinding apparatus characterized by: the device comprises a base (31) and a movable base (32) arranged on the base (31) in a sliding manner, wherein a driving assembly (4) for driving the movable base (32) to move is arranged on the base (31); the movable seat (32) is rotatably provided with a driving shaft (33), the movable seat (32) is provided with a driving motor (34) connected with the driving shaft (33), and the driving shaft (33) is detachably provided with the semiconductor epitaxial quartz component processing combined grinding wheel as claimed in any one of claims 1 to 3 through the connecting mechanism (5).

5. A grinding apparatus according to claim 4, characterized in that: the connecting mechanism (5) comprises;

the connecting shaft (51), the connecting shaft (51) is arranged on the driving shaft (33), and the connecting sleeve (1) is sleeved on the connecting shaft (51) and abutted against the driving shaft (33);

the clamping block (52) is arranged on the connecting shaft (51) and is in clamping fit with the connecting sleeve (1);

the positioning ring (53) is in threaded connection with the connecting shaft (51) and abuts against the connecting sleeve (1).

6. A grinding apparatus according to claim 5, characterized in that: a positioning groove (55) is formed in one end, far away from the driving motor (34), of the connecting shaft (51), a supporting device (6) for supporting the connecting shaft (51) is arranged on the base (31), and the supporting device (6) comprises;

the rotating shaft (61), the said rotating shaft (61) is set up on moving the seat (32) rotatably;

the ejector rod (62), the said ejector rod (62) slips and sets up on the axis of rotation (61) and has conical and guide surface (621) that is laminated with locating slot (55);

and the moving mechanism (63) is arranged on the rotating shaft (61), is connected with the push rod (62) and is used for driving the push rod (62) to move.

7. A grinding apparatus according to claim 6, characterized in that: the moving mechanism (63) comprises;

the movable screw rod (64) is in threaded connection with the rotating shaft (61) and is connected with the ejector rod (62);

and the locking nut (65) is in threaded connection with the movable screw rod (64) and is tightly abutted against the rotating shaft (61).

8. A grinding apparatus according to claim 4, characterized in that: the movable seat (32) is provided with a cooling device (7) for cooling the grinding wheel body (12), and the cooling device (7) comprises;

the fixed pipe (71), the fixed pipe (71) is arranged on the movable base (32), is communicated with an air source and is provided with a switch (73);

and the air outlet pipe (72) is arranged on the fixed pipe (71), and the pipe orifice of the air outlet pipe (72) is aligned with the grinding wheel body (12).

9. A grinding apparatus according to claim 4, characterized in that: the drive assembly (4) comprises;

the sliding seat (41), the sliding seat (41) is arranged on the base (31) in a sliding manner, and the moving seat (32) is arranged on the sliding seat (41) in a sliding manner;

the first screw rod (42) is rotationally arranged on the base (31) and is in threaded connection with the sliding seat (41);

the second screw rod (43) is rotatably arranged on the sliding seat (41) and is in threaded connection with the moving seat (32);

the first motor (44), the said first motor (44) is set up on the base (31) and connected with first threaded spindle (42);

and the second motor (45) is arranged on the sliding seat (41) and is connected with the second screw rod (43).

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