CN215613649U - Graphite boat belt cleaning device - Google Patents
Graphite boat belt cleaning device Download PDFInfo
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- CN215613649U CN215613649U CN202121290929.4U CN202121290929U CN215613649U CN 215613649 U CN215613649 U CN 215613649U CN 202121290929 U CN202121290929 U CN 202121290929U CN 215613649 U CN215613649 U CN 215613649U
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- graphite boat
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Abstract
A graphite boat cleaning device belongs to the technical field of cleaning equipment. The device comprises a box body, a cleaning cavity is formed in the box body, an opening suitable for a graphite boat to pass through is formed in one end of the box body, and a cover body capable of being opened and closed is arranged at the opening; the conveying belt is arranged in the cleaning cavity and used for supporting the graphite boat and driving the graphite boat to move in the direction far away from or towards the opening; the driving part is positioned outside the cleaning cavity and used for driving the conveying belt to move. According to the utility model, the conveying belt is arranged to drive the graphite boat to move in the direction far away from or towards the opening so as to drive the graphite boat conveyed into the cleaning cavity from the opening to move in the direction far away from the opening, and the graphite boat is driven to move in the direction towards the opening after cleaning, so that the mode of manually moving the graphite boat is replaced, the moving efficiency of the graphite boat is improved, and the cleaning efficiency is further improved.
Description
Technical Field
The utility model relates to the technical field of cleaning equipment, in particular to a graphite boat cleaning device.
Background
In the production process of the solar cell, the tubular PECVD is utilized to plate the antireflection film on the silicon wafer, and the graphite boat is used as a carrier for plating the antireflection film and is used for bearing and fixing the silicon wafer. In the production process, silicon nitride can be deposited on the surface of the graphite boat, and is accumulated along with the increase of the use times, so that the coating uniformity of the silicon wafer is influenced, and therefore, the graphite boat needs to be cleaned regularly to reduce the production of defective silicon wafers.
In the prior art, a cleaning chamber containing cleaning liquid is adopted to clean a graphite boat, but in the cleaning process, the cleaning liquid volatilizes to generate acid gas, so that the cleaning chamber needs to adopt a closed chamber, an opening for taking and placing the graphite boat is arranged on the end face of the top of the cleaning chamber, an openable cover body is arranged at the opening, when in cleaning, the cover body is closed to prevent the acid gas generated by volatilization of the cleaning liquid from being discharged from the opening, and further the influence on the physical health and the environment of workers is caused, but the size of the opening of the existing cleaning chamber is only capable of taking and placing one graphite boat due to the limitation of the structure of the existing cleaning chamber, and a plurality of graphite boats can be simultaneously accommodated inside the cleaning chamber to be cleaned, so that one graphite boat needs to be put into the cleaning chamber from the opening, and then the graphite boat is manually pushed to move towards the interior of the cleaning chamber far away from the opening through a tool, so that put into next graphite boat, on the same reason, when taking out the graphite boat, also have the manual work and drag the operation process that washs the inside graphite boat in chamber and remove to the opening part through the instrument, this kind of mode efficiency through manual work removal graphite boat is lower, and then has reduced the cleaning efficiency to the graphite boat.
SUMMERY OF THE UTILITY MODEL
Therefore, the technical problem to be solved by the utility model is to overcome the defect that when the graphite boat is cleaned by the cleaning cavity in the prior art, the graphite boat needs to be manually moved to move towards the direction far away from or towards the opening, so that the moving efficiency is low, and further the cleaning efficiency of the graphite boat is reduced, thereby providing the graphite boat cleaning device.
The utility model provides the following technical scheme:
a graphite boat cleaning device, comprising:
the cleaning device comprises a box body, a cleaning cavity, a graphite boat and a cover body, wherein one end of the box body is provided with an opening suitable for the graphite boat to pass through, and the opening is provided with the openable cover body;
the conveying belt is arranged in the cleaning cavity and used for supporting the graphite boat and driving the graphite boat to move in a direction far away from or towards the opening;
the driving part is positioned outside the cleaning cavity and used for driving the conveying belt to move.
Optionally, the conveyor belt is a polypropylene material.
Optionally, the conveyor belt is a chain conveyor belt.
Optionally, the driving portion is disposed at an end of the box body different from the opening.
Optionally, the method further comprises:
and the transmission mechanism is in transmission connection with the driving part and the conveying belt.
Optionally, the transmission mechanism is a polypropylene material.
Optionally, the transmission mechanism comprises:
the driving wheel is connected with the driving part and is driven by the driving part to rotate;
the driven wheel is connected with a driving shaft of the conveying belt and used for driving the driving shaft to rotate, and the driving shaft drives the conveying belt to move;
and the transmission chain is in transmission connection with the driving wheel and the driven wheel.
Optionally, the method further comprises:
the inlet part is communicated with the cleaning cavity and is used for introducing cleaning liquid into the cleaning cavity;
and the overflow guiding part is communicated with the cleaning cavity, and the communication position is positioned above the graphite boat accommodated in the cleaning cavity.
Optionally, the method further comprises:
and an outlet of the bubbling pipe is communicated with the cleaning cavity, and the outlet is positioned below the graphite boat accommodated in the cleaning cavity.
Optionally, be equipped with level sensor in the washing intracavity, level sensor with enter the portion communication and link to each other, be used for wash intracavity wash the liquid level and be higher than during the overflow derivation portion, control enter the portion and close.
The technical scheme of the utility model has the following advantages:
1. the utility model provides a graphite boat cleaning device, which comprises a box body, wherein a cleaning cavity is formed in the box body, one end of the box body is provided with an opening suitable for a graphite boat to pass through, and the opening is provided with a cover body capable of being opened and closed; the conveying belt is arranged in the cleaning cavity and used for supporting the graphite boat and driving the graphite boat to move in a direction far away from or towards the opening; the driving part is positioned outside the cleaning cavity and used for driving the conveying belt to move.
Compared with the mode that the graphite boat is moved manually in the prior art, the graphite boat cleaning device drives the graphite boat to move through the conveying belt, so that the moving efficiency of the graphite boat is improved, and the cleaning efficiency is further improved.
2. According to the graphite boat cleaning device provided by the utility model, the conveying belt is made of a polypropylene material.
The conveying belt is made of polypropylene materials, so that the corrosion effect of the cleaning liquid on the conveying belt is reduced, the service life of the conveying belt is prolonged, and the service life of the graphite boat cleaning device is further prolonged.
3. According to the graphite boat cleaning device provided by the utility model, the conveying belt is a chain type conveying belt.
The conveying belt is a chain type conveying belt, the bearing capacity of the chain type conveying belt is high, the chain type conveying belt can bear a plurality of graphite boats, the conveying belt is prevented from being damaged when the number of the graphite boats is large, and the chain type conveying belt can be made of polypropylene materials, so that the service life of the conveying belt is prolonged.
4. According to the graphite boat cleaning device provided by the utility model, the driving part is arranged at one end of the box body, which is different from the opening.
The driving part is arranged at one end of the box body, which is different from the opening, so that the driving part is prevented from being corroded by cleaning liquid splashed out of the opening when the graphite boat is taken and placed, and meanwhile, the driving part is prevented from being corroded by the cleaning liquid carried by the taken graphite boat, and further the driving part is prevented from being damaged.
5. The graphite boat cleaning device further comprises a transmission mechanism which is in transmission connection with the driving part and the conveying belt.
The transmission mechanism is arranged to connect the driving part and the conveying belt, so that the driving part at the top of the box body can drive the conveying belt in the cleaning cavity to move.
6. According to the graphite boat cleaning device provided by the utility model, the transmission mechanism is made of a polypropylene material.
The transmission mechanism is made of polypropylene materials, so that the corrosion effect of the cleaning liquid on the transmission mechanism is reduced, the service life of the transmission mechanism is prolonged, and the service life of the graphite boat cleaning device is further prolonged.
7. The graphite boat cleaning device provided by the utility model is characterized in that the transmission mechanism comprises a driving wheel, a driving part and a driving part, wherein the driving wheel is connected with the driving part and driven by the driving part to rotate; the driven wheel is connected with a driving shaft of the conveying belt and used for driving the driving shaft to rotate, and the driving shaft drives the conveying belt to move; and the transmission chain is in transmission connection with the driving wheel and the driven wheel.
The transmission mechanism comprises the driving wheel, the driven wheel and the transmission chain, has strong bearing capacity, can drive the conveying belt bearing a plurality of graphite boats to move, avoids the damage of the transmission mechanism caused by a large number of graphite boats, and can be made of polypropylene materials, so that the service life of the conveying belt is prolonged.
8. The graphite boat cleaning device further comprises an inlet part, wherein the inlet part is communicated with the cleaning cavity and is used for introducing cleaning fluid into the cleaning cavity; and the overflow guiding part is communicated with the cleaning cavity, and the communication position is positioned above the graphite boat accommodated in the cleaning cavity.
The overflow discharge part is used for discharging the cleaned pollutants along with the overflowing cleaning liquid, so that the pollutants are prevented from being accumulated in the cleaning cavity, the cleaning effect is reduced, and the space of the cleaning cavity is occupied.
9. The graphite boat cleaning device provided by the utility model further comprises a bubbling pipe, wherein an outlet is communicated with the cleaning cavity and is positioned below the graphite boat accommodated in the cleaning cavity.
The utility model is provided with bubbles introduced into the cleaning cavity by the bubbling pipe, the cleaning liquid in the cleaning cavity is stirred by the bubbles to realize cleaning, and pollutants are carried to the upper layer of the cleaning liquid by the air lifting action, so that the pollutants are discharged from the overflow discharge part.
10. According to the graphite boat cleaning device provided by the utility model, the cleaning cavity is internally provided with the liquid level sensor, and the liquid level sensor is in communication connection with the inlet part and is used for controlling the inlet part to be closed when the liquid level of the cleaning liquid in the cleaning cavity is higher than that of the overflow leading-out part.
According to the utility model, the liquid level sensor is arranged to sense the liquid level of the cleaning liquid in the cleaning cavity, and when the liquid level of the cleaning liquid in the cleaning cavity is higher than the overflow leading-out part due to the fact that the flow of the inlet part is larger than the flow of the overflow leading-out part or the overflow leading-out part is blocked, the liquid level sensor controls the inlet part to be closed, so that the problems that the cleaning liquid overflows from other positions except the overflow leading-out part, and the cleaning liquid is wasted or the environment is polluted are avoided.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to the drawings without creative efforts.
Fig. 1 is a schematic structural diagram of embodiment 1 of the present invention.
Description of reference numerals:
1. a cleaning chamber; 2. a graphite boat; 3. a conveyor belt; 4. a drive section; 5. a drive shaft; 6. and (4) a box body.
Detailed Description
The technical solutions of the present invention will be described clearly and completely with reference to the accompanying drawings, and it should be understood that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
In addition, the technical features involved in the different embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.
Example 1
This embodiment provides a graphite boat cleaning device, as shown in FIG. 1, comprising
The cleaning device comprises a box body 6, a cleaning cavity 1 is formed inside the box body 6, an opening suitable for the graphite boat 2 to pass through is formed in one end of the top of the box body 6, a cover body capable of being opened and closed is arranged at the opening, and the cover body can be hinged with the box body 6, can also be connected with the box body in a sliding mode through a sliding groove and can also be detachably connected with the box body; the structure of the case 6 is not particularly limited in the present embodiment, and a rectangular case is preferable, but it is needless to say that the case may be cylindrical in other embodiments.
The conveying belt 3 comprises a driving shaft 5, a driven shaft and a bearing belt driven by the driving shaft 5 to move, and the conveying belt 3 is arranged in the cleaning cavity 1, preferably arranged at the bottom of the cleaning cavity 1, is used for bearing the graphite boat 2 and drives the graphite boat 2 to move in a direction away from or towards the opening; in this embodiment, the material and structure of the conveyor belt 3 are not limited, and preferably, the conveyor belt 3 of this embodiment is made of polypropylene material, and is a chain conveyor belt, which may be a chain plate type, a chain mesh type, a slat type, or the like; of course, in other embodiments, the conveyor belt 3 may be made of metal and a steel belt conveyor belt may be used.
The driving portion 4 is located outside the cleaning cavity 1, the driving portion 4 is used for driving the conveying belt 3 to move, the setting position of the driving portion 4 is not specifically limited in this embodiment, preferably, the driving portion 4 is disposed at the top of the box body 6, which is different from the open end, of course, in other embodiments, the driving portion 4 may also be disposed at the side of the box body 6, and the rotating shaft of the driving portion 4 is directly connected with the driving shaft 5 of the conveying belt 3, that is, the driving portion 4 is located in the axial direction of the driving shaft 5.
The transmission mechanism is in transmission connection with the driving part 4 and the conveying belt 3; the material and structure of the transmission mechanism are not specifically limited in this embodiment, and preferably, the transmission mechanism of this embodiment is made of polypropylene material, and includes a driving wheel, which is connected to the driving portion 4 and is driven by the driving portion 4 to rotate; the driven wheel is connected with the driving shaft 5 of the conveying belt 3 and is used for driving the driving shaft 5 to rotate, and the driving shaft 5 drives the conveying belt 3 to move; the transmission chain is in transmission connection with the driving wheel and the driven wheel; of course, in other embodiments, the transmission mechanism may also be made of metal, and an interlayer space into which the cleaning solution cannot enter is provided at the side of the tank 6, and the transmission mechanism is a plurality of groups of transmission gears arranged in the interlayer space; of course, in other embodiments, when the driving part 4 is located in the axial direction of the driving shaft 5 and is directly connected to the driving shaft 5, the transmission mechanism may not be provided.
The inlet part is preferably a pipe body provided with a valve, is communicated with the cleaning cavity 1 and is used for introducing cleaning fluid into the cleaning cavity 1; of course, in other embodiments, the inlet portion may not be provided, and the cleaning liquid may enter the cleaning chamber 1 through the opening.
The overflow leading-out part is communicated with the cleaning cavity 1, and the communication position is positioned above the graphite boat 2 accommodated in the cleaning cavity 1; in this embodiment, the overflow leading-out part is preferably a pipe body communicated with the cleaning cavity 1, and the communication position is located below the opening, so that when the liquid level of the cleaning solution in the cleaning cavity 1 is higher than the communication position, the cleaning solution does not directly overflow from the opening, and meanwhile, the pipe body is connected with the overflow storage chamber, and the cleaning solution flowing out of the overflow leading-out part and pollutants in the cleaning solution are stored in the overflow storage chamber, so as to facilitate subsequent treatment; of course, in other embodiments, the overflow guiding portion may also be an opening formed at a side portion of the box body 6, and the overflow storage chamber is a groove body with an opening facing the bottom of the box body 6 and is disposed at the bottom of the box body 6; of course, in other embodiments, the overflow lead-out portion may not be provided, and the cleaning liquid and the contaminants in the cleaning liquid may be directly discharged through the drain pipe provided at the bottom of the tank 6.
The outlet of the bubbling pipe is communicated with the cleaning cavity 1 and is positioned below the graphite boat 2 accommodated in the cleaning cavity 1, preferably, the outlet is positioned at the bottom of the box body 6 and is communicated with bubbles in the cleaning cavity 1 to stir the cleaning liquid, so that the graphite boat 2 is cleaned; of course, in other embodiments, the conveying belt 3 may be driven to move back and forth during the cleaning process without providing a bubbling pipe, and the conveying belt 3 drives the graphite boat 2 to move so as to stir the cleaning solution, thereby cleaning the graphite boat 2.
A liquid level sensor is arranged in the cleaning cavity 1, and is in communication connection with the inlet part and used for controlling the inlet part to be closed when the liquid level of the cleaning liquid in the cleaning cavity 1 is higher than the overflow leading-out part, so that the problem that the liquid level of the cleaning liquid in the cleaning cavity 1 is higher than the overflow leading-out part and then overflows from other positions except the overflow leading-out part due to the fact that the flow of the inlet part is larger than the flow of the overflow leading-out part or the overflow leading-out part is blocked and the like is avoided, for example, an opening is formed, so that the cleaning liquid is wasted or the environment is polluted, and certainly, when the inlet part is closed, the liquid level of the cleaning liquid can exceed the overflow leading-out part by a certain distance which can be adjusted according to the specific height structure and the use requirements of the cleaning cavity 1; of course, in other embodiments, the liquid level sensor may not be provided, and the manner of manual visual judgment and operation may also be adopted.
It should be understood that the above examples are only for clarity of illustration and are not intended to limit the embodiments. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. And obvious variations or modifications therefrom are within the scope of the utility model.
Claims (10)
1. A graphite boat belt cleaning device which characterized in that includes:
the cleaning device comprises a box body (6), a cleaning cavity (1) is formed inside the box body (6), an opening suitable for the graphite boat (2) to pass through is formed in one end of the box body (6), and a cover body capable of being opened and closed is arranged at the opening;
the conveying belt (3) is arranged in the cleaning cavity (1) and is used for supporting the graphite boat (2) and driving the graphite boat (2) to move in a direction far away from or towards the opening;
the driving part (4) is located outside the cleaning cavity (1), and the driving part (4) is used for driving the conveying belt (3) to move.
2. The graphite boat cleaning device according to claim 1, wherein the conveyor belt (3) is made of polypropylene.
3. The graphite boat cleaning device according to claim 2, characterized in that the conveyor belt (3) is a chain conveyor belt.
4. The graphite boat cleaning device according to any one of claims 1 to 3, wherein the driving portion (4) is provided at an end of the case (6) other than the opening.
5. The graphite boat cleaning device according to claim 4, further comprising:
and the transmission mechanism is in transmission connection with the driving part (4) and the conveying belt (3).
6. The graphite boat cleaning device according to claim 5, wherein the transmission mechanism is a polypropylene material.
7. The graphite boat cleaning device according to claim 6, wherein the transmission mechanism comprises:
the driving wheel is connected with the driving part (4) and is driven by the driving part (4) to rotate;
the driven wheel is connected with a driving shaft (5) of the conveying belt (3), the driven wheel is used for driving the driving shaft (5) to rotate, and the driving shaft (5) drives the conveying belt (3) to move;
and the transmission chain is in transmission connection with the driving wheel and the driven wheel.
8. The graphite boat cleaning apparatus according to any one of claims 1 to 3, further comprising:
the inlet part is communicated with the cleaning cavity (1) and is used for introducing cleaning liquid into the cleaning cavity (1);
and the overflow guiding part is communicated with the cleaning cavity (1), and the communication position is positioned above the graphite boat (2) accommodated in the cleaning cavity (1).
9. The graphite boat cleaning device according to claim 8, further comprising:
and an outlet of the bubbling pipe is communicated with the cleaning cavity (1), and the outlet is positioned below the graphite boat (2) accommodated in the cleaning cavity (1).
10. The graphite boat cleaning device according to claim 8, characterized in that a liquid level sensor is arranged in the cleaning chamber (1), and the liquid level sensor is in communication with the inlet part and used for controlling the inlet part to be closed when the liquid level of the cleaning liquid in the cleaning chamber (1) is higher than the overflow lead-out part.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121290929.4U CN215613649U (en) | 2021-06-09 | 2021-06-09 | Graphite boat belt cleaning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121290929.4U CN215613649U (en) | 2021-06-09 | 2021-06-09 | Graphite boat belt cleaning device |
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| Publication Number | Publication Date |
|---|---|
| CN215613649U true CN215613649U (en) | 2022-01-25 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202121290929.4U Active CN215613649U (en) | 2021-06-09 | 2021-06-09 | Graphite boat belt cleaning device |
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| CN (1) | CN215613649U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116259564A (en) * | 2023-05-15 | 2023-06-13 | 苏州昊建自动化系统有限公司 | Cleaning system of photovoltaic silicon wafer |
-
2021
- 2021-06-09 CN CN202121290929.4U patent/CN215613649U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116259564A (en) * | 2023-05-15 | 2023-06-13 | 苏州昊建自动化系统有限公司 | Cleaning system of photovoltaic silicon wafer |
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