CN215613630U - Graphite boat cleaning system - Google Patents
Graphite boat cleaning system Download PDFInfo
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- CN215613630U CN215613630U CN202121487426.6U CN202121487426U CN215613630U CN 215613630 U CN215613630 U CN 215613630U CN 202121487426 U CN202121487426 U CN 202121487426U CN 215613630 U CN215613630 U CN 215613630U
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- tank
- graphite boat
- pickling
- plate
- cleaning system
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 71
- 229910002804 graphite Inorganic materials 0.000 title claims abstract description 71
- 239000010439 graphite Substances 0.000 title claims abstract description 71
- 238000004140 cleaning Methods 0.000 title claims abstract description 42
- 238000005554 pickling Methods 0.000 claims abstract description 71
- 238000005406 washing Methods 0.000 claims abstract description 43
- 238000005507 spraying Methods 0.000 claims abstract description 20
- 239000007921 spray Substances 0.000 claims abstract description 15
- 238000007599 discharging Methods 0.000 claims abstract description 7
- 229910021645 metal ion Inorganic materials 0.000 claims abstract description 4
- 239000013049 sediment Substances 0.000 claims abstract description 3
- 239000007788 liquid Substances 0.000 claims description 40
- 230000005587 bubbling Effects 0.000 claims description 32
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 19
- 239000003814 drug Substances 0.000 claims description 9
- 238000011010 flushing procedure Methods 0.000 claims description 8
- 238000004891 communication Methods 0.000 claims description 6
- 230000008859 change Effects 0.000 claims description 5
- 239000012535 impurity Substances 0.000 abstract description 7
- 238000009825 accumulation Methods 0.000 abstract description 3
- 230000008021 deposition Effects 0.000 abstract description 2
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 239000002253 acid Substances 0.000 description 12
- 230000000694 effects Effects 0.000 description 12
- 239000000126 substance Substances 0.000 description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- 241000197194 Bulla Species 0.000 description 5
- 229910052581 Si3N4 Inorganic materials 0.000 description 5
- 208000002352 blister Diseases 0.000 description 5
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 5
- 239000007787 solid Substances 0.000 description 4
- 239000000243 solution Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000007774 longterm Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 210000005056 cell body Anatomy 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 239000007888 film coating Substances 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 238000011031 large-scale manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 239000012487 rinsing solution Substances 0.000 description 1
- 238000004062 sedimentation Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
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- Cleaning By Liquid Or Steam (AREA)
Abstract
The utility model provides a graphite boat cleaning system, which belongs to the technical field of battery manufacture and comprises: the pickling tank group comprises a plurality of pickling tanks; the spraying groove is used for spraying and washing the graphite boat and the mechanical arm for clamping the graphite boat; the washing tank group comprises a plurality of washing tanks; the slow lifting groove is used for removing metal ions on the surface of the graphite boat; the pickling tank group, the spray tank, the rinsing tank group and the slow lifting tank are arranged in sequence, bottom plates are arranged at the bottoms of the pickling tank, the spray tank, the rinsing tank and the slow lifting tank, and the bottom plates are funnel-shaped and used for discharging sediments. The utility model provides a graphite boat cleaning system which comprises a pickling tank, a spraying tank, a rinsing tank and a slow lifting tank, wherein impurities generated by cleaning can be timely discharged through a funnel-shaped bottom plate at the bottom of a tank body, so that deposition and accumulation are avoided, and the device can be normally used for a long time.
Description
Technical Field
The utility model relates to the technical field of battery manufacturing, in particular to a graphite boat cleaning system.
Background
Under the development of a novel PECVD technology, the structure of a film layer is more and more complex, so that the cleaning difficulty of the graphite boat is greatly improved. The reason is that the graphite boat is used as a carrier in the film coating deposition process, the battery pieces are fixedly placed in a high-temperature furnace tube by the graphite boat under the action of microwaves or radio frequency, the graphite boat has a strong conductive effect under high temperature and high voltage, an electric field is formed between the fixedly adjacent battery pieces, introduced special gas is ionized into plasma, and the plasma reacts and deposits on the surface of the battery pieces to form silicon nitride and silicon oxynitride films. In the process, the surface of the graphite boat is also plated with silicon nitride and silicon oxynitride films, so the graphite boat can be reused after being cleaned.
Among the prior art, an application number is "201920289015.2" a graphite boat cleaning equipment, including wasing the cell body, locate a plurality of graphite boats that are used for placing of washing tank internal are right the station that the graphite boat goes on handling is used for carrying the manipulator of graphite boat, control the manipulator will the control system of graphite boat transport between each station, this graphite boat cleaning equipment is inside to adopt the manipulator to carry, has reduced manual operation, has reduced operating personnel's intensity of labour, has improved work efficiency, and in addition, the unloading dolly is gone up to the outside adoption, has made things convenient for user's use.
However, the method still has the obvious defects in the using process: above-mentioned device is in wasing the use, and the solid impurity such as silicon oxynitride that produces deposits easily in graphite boat cleaning machine's tank bottom department, and long-term accumulation can lead to the bottom to deposit more, and when discharging the liquid medicine, unusual circumstances such as the flowing back valve jam appear easily, seriously influence graphite boat cleaning device's normal use, need frequently carry out artifical clearance, and is comparatively loaded down with trivial details.
SUMMERY OF THE UTILITY MODEL
The utility model aims to provide a graphite boat cleaning system to solve the problems in the background technology.
In order to achieve the purpose, the utility model provides the following technical scheme:
a graphite boat cleaning system, comprising:
the pickling tank group comprises a plurality of pickling tanks;
the spraying groove is used for spraying and washing the graphite boat and the mechanical arm for clamping the graphite boat;
the washing tank group comprises a plurality of washing tanks;
the slow lifting groove is used for removing metal ions on the surface of the graphite boat; and
the pickling tank group, the spray tank, the rinsing tank group and the slow lifting tank are arranged in sequence, bottom plates are arranged at the bottoms of the pickling tank, the spray tank, the rinsing tank and the slow lifting tank, and the bottom plates are funnel-shaped and used for discharging sediments.
Preferably, the bottom of the bottom plate is provided with a liquid medicine discharge pipe, and the liquid medicine discharge pipe is provided with a liquid medicine discharge valve.
Preferably, conductivity monitors are arranged in the pickling tank, the spraying tank, the rinsing tank and the slow lifting tank.
Preferably, the pickling tanks are communicated through a first communication pipe, and at least three pickling tank liquid inlet pipes and one pickling tank overflow pipe are arranged on the pickling tanks of the same pickling tank group.
Preferably, at least one the activity is provided with the hard board of L type in descaling bath and the wash bowl, first wind-guiding passageway and second wind-guiding passageway have been seted up on the hard board of L type, first wind-guiding passageway communicates in the tympanic bulla abrupt exit tube of L type stereoplasm board surface setting, second wind-guiding passageway communicates in the tympanic bulla board, tympanic bulla board and L type stereoplasm board are fixed mutually, a plurality of gas pockets have been seted up on the tympanic bulla board, the fixed collecting pipe that is provided with in one side that the tympanic bulla board was kept away from to the hard board of L type, the fixed first cylinder that is provided with in the collecting pipe, the fixed baffle that is provided with of output of first cylinder, one side intercommunication that the hard board of L type was kept away from to the collecting pipe is provided with the air-supply line, be provided with the fan on the air-supply line.
Preferably, the L-shaped hard plate can be driven by the height adjusting structure to change the height position of the L-shaped hard plate.
Preferably, the height adjusting structure includes the loading board, the loading board is fixed to be set up on the descaling bath or the wash bowl outer wall that correspond the position, embedded bearing frame that is provided with in the loading board, the articulated lead screw that is provided with in the bearing frame, fixed cover is equipped with the runner on the lead screw, the activity is provided with the nut on the lead screw, the fixed push rod that is provided with on the nut, the one end that the nut was kept away from to the push rod is fixed in on the L type hard board, the fixed stopper that is provided with of one end that the bearing frame was kept away from to the lead screw.
Preferably, at least one group of liquid level meters is arranged in the pickling tanks of the same pickling tank group, and at least two groups of liquid level meters are arranged in the rinsing tanks of the same rinsing tank group.
Preferably, a hollow air deflector is fixedly arranged on the inner wall of the spraying groove, a plurality of joint pipes are communicated with the hollow air deflector, flushing nozzles are communicated with the joint pipes, and a plurality of spraying openings are formed in the flushing nozzles.
Preferably, the rinsing tanks are communicated with each other through a second communicating pipe, and at least one rinsing tank liquid inlet pipe and one rinsing tank overflow pipe are arranged on the rinsing tanks in the same rinsing tank group.
Compared with the prior art, the utility model has the beneficial effects that: the graphite boat cleaning system comprises a pickling tank, a spraying tank, a rinsing tank and a slow lifting tank, wherein the bottoms of the tank bodies are all arranged into funnel shapes, so that impurities such as silicon nitride, silicon oxynitride and the like after cleaning can be completely discharged out of the tank bodies under the action of gravity during liquid drainage, and the influence on normal liquid drainage and the graphite boat cleaning effect after long-term sedimentation at the bottom of the tank bodies is avoided.
The utility model provides a graphite boat cleaning system which comprises a pickling tank, a spraying tank, a rinsing tank and a slow lifting tank, wherein impurities generated by cleaning can be timely discharged through a funnel-shaped bottom plate at the bottom of a tank body, so that deposition and accumulation are avoided, and the device can be normally used for a long time.
Drawings
FIG. 1 is a schematic diagram of the structure of the present invention;
FIG. 2 is a schematic view of the internal structure of the pickling bath set according to the present invention;
FIG. 3 is an enlarged view taken at A of FIG. 2 in accordance with the present invention;
FIG. 4 is an enlarged view of the utility model at B in FIG. 2;
fig. 5 is a schematic top view of the bubble plate according to the present invention;
FIG. 6 is a schematic front sectional view of a spray channel of the present invention;
FIG. 7 is a schematic top view of the spray channel of the present invention;
FIG. 8 is a schematic view showing the internal structure of the water washing tub set according to the present invention;
FIG. 9 is a schematic sectional front view of a slow lifting tank of the present invention.
In the figure: 1 pickling tank group, 101 pickling tank, 2 spray tank, 3 rinsing tank group, 301 rinsing tank, 4 slow lifting tank, 5 bottom plate, 6 liquid medicine discharge pipe, 7 liquid medicine discharge valve, 8 conductivity monitor, 9 first communicating pipe, 10 pickling tank liquid inlet pipe, 11 pickling tank overflow pipe, 12L type hard plate, 13 first air guide channel, 14 second air guide channel, 15 bubbling protruded pipe, 16 bubbling plate, 17 air hole, 18 confluence pipe, 19 first air cylinder, 20 baffle, 21 air inlet pipe, 22 fan, 23 bearing plate, 24 bearing seat, 25 lead screw, 26 runner, 27 nut, 28 push rod, 29 limiting block, 30 level gauge, 31 hollow air guide plate, 32 joint pipe, 33 flushing nozzle, 331 spray nozzle, 34 second communicating pipe, 35 rinsing tank liquid inlet pipe and 36 overflow pipe.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1 to 9, the present invention provides a technical solution:
a graphite boat cleaning system, comprising:
the pickling tank group 1 comprises a plurality of pickling tanks 101 in the pickling tank group 1;
the spraying tank 2 is used for spraying and washing the graphite boat and the mechanical arm for clamping the graphite boat so as to remove acid residues on the mechanical arm, so that the mechanical arm is prevented from polluting the rinsing tanks 301 when passing through the rinsing tank group 3, and all the rinsing tanks 301 are possibly polluted due to the acid residues on the mechanical arm because the rinsing tanks 301 are connected in series, so that serious influence is caused;
the water washing tank group 3 comprises a plurality of water washing tanks 301;
the slow lifting groove 4 is used for removing metal ions on the surface of the graphite boat, and the slow lifting groove 4 can adopt an industrial online water heater; and
the pickling tank group 1, the spraying tank 2, the washing tank group 3 and the slow lifting tank 4 are sequentially arranged and used for cleaning the graphite boat in a seriation mode, the bottoms of the pickling tank 101, the spraying tank 2, the washing tank 301 and the slow lifting tank 4 are respectively provided with a bottom plate 5, the bottom plates 5 are funnel-shaped and used for discharging precipitates, silicon nitride, silicon oxynitride and the like generated after pickling are completely discharged from tank bodies, and the problem that solid impurities are precipitated at the bottom of the tank bodies for a long time to affect normal liquid drainage, block a valve and reduce the cleaning effect of the graphite boat is solved.
Preferably, the bottom of the bottom plate 5 is provided with a chemical liquid discharge pipe 6 for discharging chemical liquid after use, and the chemical liquid discharge pipe 6 is provided with a chemical liquid discharge valve 7, so that the communication amount of the chemical liquid discharge pipe 6 can be controlled by opening and closing the chemical liquid discharge valve 7.
Preferably, the pickling tank 101, the spraying tank 2, the rinsing tank 301 and the slow lifting tank 4 are all provided with conductivity monitors 8, which can continuously monitor the conductivity of the liquid medicine in the tank bodies in real time on line, so that a user can conveniently and quickly know relevant information.
Preferably, the pickling tanks 101 are communicated with each other through a first communication pipe 9, so that the pickling tanks 101 in the same pickling tank group 1 are connected in series, and at least three pickling tank liquid inlet pipes 10 and one pickling tank overflow pipe 11 are arranged on the pickling tanks 101 in the same pickling tank group 1, wherein the chemical liquids introduced into the three pickling tank liquid inlet pipes 10 can be HF, HCL and H respectively2O may be flexibly adjusted according to actual needs, and the acid washing tank overflow pipe 11 is provided in one line, which is only an example and not a limitation, but since the acid washing tanks 101 are connected in series, the excess acid washing solution overflows and is discharged from the acid washing tank overflow pipe 11.
Preferably, at least one of the pickling bath 101 and the rinsing bath 301 is movably provided with an L-shaped hard plate 12, that is, at least one of the pickling bath 101 in the same pickling bath group 1 and one of the rinsing bath 301 in the same rinsing bath group 3 is movably provided with an L-shaped hard plate 12, at most all of the pickling baths 101 in the same pickling bath group 1 and all of the rinsing baths 301 in the same rinsing bath group 3 are movably provided with an L-shaped hard plate 12, it can be seen that the L-shaped hard plates 12 are used as a structure having a bubbling function, the number of which can be flexibly set according to different working conditions, the L-shaped hard plates 12 are provided with a first air guide channel 13 and a second air guide channel 14, the first air guide channel 13 is communicated with a bubbling protruded pipe 15 arranged on the surface of the L-shaped hard plate 12, the bubbling air guide plate 15 blows air flow, and generates a bubbling air flow in the vertical direction, the second air guide channel 14 is communicated with a bubbling pipe 16, the bubbling plate 16 and the L-shaped hard plate 12 are fixed together, the bubbling plate 16 is provided with a plurality of air holes 17, air flow can be blown out from the air holes 17, and then bubbling air flow is generated in the horizontal direction, one side of the L-shaped hard plate 12, which is far away from the bubbling plate 16, is fixedly provided with a collecting pipe 18, a first air cylinder 19 is fixedly arranged in the collecting pipe 18, an output end of the first air cylinder 19 is fixedly provided with a baffle plate 20, the thickness of the baffle plate 20 is greater than the heights of the first air guide channel 13 and the second air guide channel 14, therefore, after the position of the baffle plate 20 is adjusted, the first air guide channel 13 or the second air guide channel 14 can be independently and completely blocked, and the baffle plate can be adjusted to the position between the first air guide channel 13 and the second air guide channel 14, so that the first air guide channel 13 or the second air guide channel 14 is in a communicated state, therefore, three different bubbling effects can be generated, more diversified, and different cleaning effects can be achieved, an air inlet pipe 21 is communicated with one side of the collecting pipe 18 away from the L-shaped hard plate 12, a fan 22 is arranged on the air inlet pipe 21, and the fan 22 can guide air flow to the air inlet pipe 21, so that ventilation can be performed in the first air guiding channel 13 and the second air guiding channel 14.
Preferably, the L-shaped hard plate 12 can be driven by the height adjusting structure to change the height position thereof, so as to change the position of the bubbling plate 16 for generating bubbles, thereby being suitable for graphite boats with different specifications.
Preferably, the height adjusting structure comprises a bearing plate 23, the bearing plate 23 is fixedly arranged on the outer wall of the pickling tank 101 or the rinsing tank 301 at the corresponding position, a bearing seat 24 is embedded in the bearing plate 23, a screw rod 25 is hinged in the bearing seat 24, the screw rod 25 can rotate in situ in the bearing seat 24, a rotating wheel 26 is fixedly sleeved on the screw rod 25, the rotating wheel 26 can be manually rotated during use, or the rotating wheel 26 can be rotated by the aid of other tools such as a wrench, a nut 27 is movably arranged on the screw rod 25, when the screw rod 25 rotates, the nut 27 can move along the screw rod 25, a push rod 28 is fixedly arranged on the nut 27, one end of the push rod 28 far away from the nut 27 is fixed on the L-shaped hard plate 12, therefore, the push rod 28 can push the L-shaped hard plate 12 to move, a limit block 29 is fixedly arranged at one end of the screw rod 25 far away from the bearing seat 24, and the limit block 29 can prevent the nut 27 from being separated from the screw rod 25 when moving.
Preferably, at least one group of liquid level meters 30 are arranged in the pickling tanks 101 of the same pickling tank group 1, the liquid level meters 30 can monitor the amount of the pickling solution in real time, at least two groups of liquid level meters 30 are arranged in the rinsing tanks 301 of the same pickling tank group 3, the liquid level meters 30 can monitor the amount of the rinsing solution in real time, and when the monitored value is lower than the preset value, a user can be reminded of replenishing the liquid medicine in time.
Preferably, a hollow air deflector 31 is fixedly arranged on the inner wall of the spraying tank 2, a plurality of joint pipes 32 are communicated with the hollow air deflector 31, flushing nozzles 33 are communicated with the joint pipes 32, a plurality of spraying ports 331 are formed in the flushing nozzles 33, cleaning liquid can be sprayed out of the spraying ports 331, and then the graphite boat and a mechanical arm for clamping the graphite boat can be sprayed and washed, so that acid residues on the mechanical arm can be removed, and pollution to the cleaning liquid in the water washing tank 301 can be reduced.
Preferably, the rinsing baths 301 are communicated with each other through the second communication pipe 34, so that the rinsing baths 301 are connected in series, at least one rinsing bath liquid inlet pipe 35 and one rinsing bath overflow pipe 36 are arranged on the rinsing baths 301 in the same rinsing bath group 3, the rinsing bath liquid inlet pipe 35 is used for introducing pure water, and of course, the adjustment can be flexibly performed according to actual needs, and the rinsing bath overflow pipe 36 is used for overflowing and discharging excess rinsing bath.
The first embodiment is as follows:
when cleaning a graphite boat, the graphite boat needs to sequentially pass through an acid washing tank group 1, a spraying tank 2, a water washing tank group 3 and a slow lifting tank 4, specifically, in the embodiment, the acid washing tank group 1 comprises four acid washing tanks 101, the water washing tank group 3 comprises four water washing tanks 301, and the graphite boat is firstly grabbed by using a manipulator; placing the graphite boat into one pickling tank 101 in the pickling tank group 1 for pickling for 420 minutes, grabbing the graphite boat to a spray tank for washing for 20 minutes after pickling is finished, washing the mechanical arm for 5 minutes to prevent acid residues on the mechanical arm from polluting a subsequent rinsing tank 301, then sending the graphite boat to the rinsing tank 301 for washing for 400 minutes, and opening an overflow pipe 36 of the rinsing tank for 20 degrees for overflowing; after the water washing is finished, the graphite boat is conveyed to the slow lifting tank 4 through a mechanical arm, the treatment temperature is 65 ℃ and the treatment time is 22 minutes under the condition of overflowing a valve with the temperature of 20 ℃; finally, after the slow lifting is finished, the graphite boats are conveyed to the platform through the manipulator, and according to the cleaning device, if four graphite boats are placed in each groove, namely, two graphite boats are transversely arranged and two graphite boats are longitudinally arranged, 40 graphite boats can be cleaned every 12 hours, the efficiency is higher, the requirement for large-scale production can be better met, the acid liquor utilization rate is high, and the cost can be saved.
After a period of cleaning, no matter in which tank body, solid impurities can be cleaned from the graphite boat and can be deposited on the bottom plate 5, but the bottom plate 5 is in a funnel shape, so that silicon nitride, silicon oxynitride and the like generated after pickling can be completely discharged out of the tank body, the solid impurities are prevented from being deposited at the bottom of the tank body for a long time, normal liquid discharge is prevented, a valve is blocked, and the cleaning effect of the graphite boat is reduced.
Example two:
in order to improve the cleaning effect, the device is also provided with a structure with a bubbling function, namely, at least one pickling tank 101 and a rinsing tank 301 are movably provided with an L-shaped hard plate 12, 5 minutes of bubbling is carried out in the pickling tank 101 every 10 minutes, and the bubbling device can be always opened in the rinsing tank 301.
When the air-blast furnace is used, if only the trough body is required to generate bubbling air flow in the vertical direction, the position of the baffle 20 can be adjusted through the first air cylinder 19, so that the second air guide channel 14 is completely blocked by the baffle 20, and therefore, the air flow generated by the fan 22 enters the first air guide channel 13 through the air inlet pipe 21 and is finally blown out from the bubbling protruded pipe 15, bubbling is generated in the vertical direction, and the cleaning effect on the graphite boat is improved.
Example three:
the present embodiment is similar to the present embodiment, and the only difference is that in the present embodiment, the trough body is only required to generate a bubbling airflow in the horizontal direction, specifically, the position of the baffle 20 is adjusted by the first cylinder 19, so that the baffle 20 completely blocks the first air guiding channel 13, and thus, the airflow generated by the fan 22 enters the second air guiding channel 14 and the bubbling plate 16 through the air inlet pipe 21, and finally is blown out from the air hole 17, and bubbles are generated in the horizontal direction, thereby improving the cleaning effect on the graphite boat.
Example four:
the embodiment is similar to the embodiment, and the only difference is that in the embodiment, the groove body is required to generate bubbling air flows in both the vertical direction and the horizontal direction, specifically, the position of the baffle 20 is adjusted by the first cylinder 19, so that the baffle 20 is located between the first air guide channel 13 and the second air guide channel 14, the first air guide channel 13 and the second air guide channel 14 are both in a communicated state at the time, bubbles are generated in the bubbling protruding tube 15 in the vertical direction, and bubbles are generated in the air hole 17 in the horizontal direction, so that the graphite boat can be cleaned more comprehensively.
Example five:
in this embodiment, the L-shaped hard plate 12 can be driven by the height adjustment structure to change its height position, specifically, the runner 26 can be rotated manually or by the assistance of other tools such as a wrench, the runner 26 drives the lead screw 25 to rotate, so that the nut 27 moves along the lead screw 25, the nut 27 drives the push rod 28, the push rod 28 then drives the L-shaped hard plate 12 to go up and down in the height position, and then the bubbling height of the bubbling protruding tube 15 and the bubbling height of the air hole 17 are changed, for example, when the thickness of the graphite boat is smaller, the L-shaped hard plate 12 can be adjusted upwards, so that the bubbling can be more closely acted on the surface of the graphite boat, and the cleaning effect is better.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.
Claims (10)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121487426.6U CN215613630U (en) | 2021-07-01 | 2021-07-01 | Graphite boat cleaning system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121487426.6U CN215613630U (en) | 2021-07-01 | 2021-07-01 | Graphite boat cleaning system |
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| Publication Number | Publication Date |
|---|---|
| CN215613630U true CN215613630U (en) | 2022-01-25 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202121487426.6U Active CN215613630U (en) | 2021-07-01 | 2021-07-01 | Graphite boat cleaning system |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115213157A (en) * | 2022-07-19 | 2022-10-21 | 江苏格林保尔光伏有限公司 | Quartz boat sweeps equipment with weather mechanism |
| CN115971145A (en) * | 2022-12-28 | 2023-04-18 | 无锡亚电智能装备有限公司 | Graphite boat cleaning equipment and cleaning method |
| CN116197184A (en) * | 2023-03-29 | 2023-06-02 | 通威太阳能(眉山)有限公司 | Cleaning method of Poly boat |
-
2021
- 2021-07-01 CN CN202121487426.6U patent/CN215613630U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115213157A (en) * | 2022-07-19 | 2022-10-21 | 江苏格林保尔光伏有限公司 | Quartz boat sweeps equipment with weather mechanism |
| CN115971145A (en) * | 2022-12-28 | 2023-04-18 | 无锡亚电智能装备有限公司 | Graphite boat cleaning equipment and cleaning method |
| CN115971145B (en) * | 2022-12-28 | 2023-10-03 | 无锡亚电智能装备有限公司 | Graphite boat cleaning equipment and cleaning method |
| CN116197184A (en) * | 2023-03-29 | 2023-06-02 | 通威太阳能(眉山)有限公司 | Cleaning method of Poly boat |
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Effective date of registration: 20241115 Address after: 610299 Chengdu High tech Comprehensive Bonded Zone Shuangliu Industrial Park Comprehensive Bonded Zone, Sichuan Province, China Patentee after: TONGWEI SOLAR (CHENGDU) Co.,Ltd. Country or region after: China Address before: 230088 southwest corner of the intersection of Changning Avenue and Xiyou Road, high tech Zone, Hefei City, Anhui Province Patentee before: TONGWEI SOLAR ENERGY (ANHUI) Co.,Ltd. Country or region before: China |