CN215543295U - Chip test probe belt cleaning device - Google Patents

Chip test probe belt cleaning device Download PDF

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Publication number
CN215543295U
CN215543295U CN202121565865.4U CN202121565865U CN215543295U CN 215543295 U CN215543295 U CN 215543295U CN 202121565865 U CN202121565865 U CN 202121565865U CN 215543295 U CN215543295 U CN 215543295U
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CN
China
Prior art keywords
water
cleaning
tank
water storage
storage tank
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CN202121565865.4U
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Chinese (zh)
Inventor
洪斌
李伟
王坤
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Fujian Huixin Laser Technology Co ltd
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Fujian Huixin Laser Technology Co ltd
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Abstract

The utility model discloses a chip test probe cleaning device which comprises a cleaning tank, a water storage tank, a filter screen, an ultrasonic transducer, a first water pump and a second water pump, wherein the first water pump is used for conveying water in the water storage tank into the cleaning tank; the ultrasonic probe cleaning device comprises a cleaning tank, an ultrasonic transducer, a water storage tank, a water inlet end, a water outlet end, a filter screen and a water outlet end, wherein the cleaning tank is provided with an opening for the hook part of the probe to stretch into, the ultrasonic transducer is connected with the cleaning tank, the cleaning water inlet end of the cleaning tank is communicated with the water storage water outlet end of the water storage tank, the cleaning water outlet end of the cleaning tank is communicated with the water storage water inlet end of the water storage tank, the filter screen is installed in the water storage tank, and the filter screen is located on a water flow path of the water storage water inlet end. Compared with the prior art, need not artifical use cleaning paper to clean the surface of probe, reduced the wearing and tearing of cleaning in-process probe, improve the life of probe, reduced the test cost to, the water resource can cyclic utilization, accomplishes the using water wisely.

Description

Chip test probe belt cleaning device
Technical Field
The utility model relates to the technical field of semiconductor manufacturing, in particular to a chip test probe cleaning device.
Background
The probe is an important testing device in the semiconductor manufacturing process, and is mainly used for carrying out online circuit testing, functional testing and the like on chips on a silicon wafer. However, in the chip testing process, residual charges are formed on the surface of the probe due to repeated needle pricking friction and signal transmission, so that the surface of the probe adsorbs tiny particles, the electrical contact between the probe and a chip to be tested is influenced, and the reliability of the probe testing result is reduced.
Accordingly, the present inventors have conducted extensive studies and have made the present invention.
SUMMERY OF THE UTILITY MODEL
The utility model aims to provide a chip test probe cleaning device, which reduces the abrasion of the surface of a probe in the cleaning process, prolongs the service life of the probe and reduces the test cost.
In order to achieve the above purpose, the solution of the utility model is as follows:
a chip test probe cleaning device comprises a cleaning tank, a water storage tank, a filter screen, an ultrasonic transducer, a first water pump and a second water pump, wherein the first water pump is used for conveying water in the water storage tank into the cleaning tank, and the second water pump is used for conveying water in the cleaning tank into the water storage tank; the ultrasonic probe cleaning device comprises a cleaning tank, an ultrasonic transducer, a water storage tank, a water inlet end, a water outlet end, a filter screen and a water outlet end, wherein the cleaning tank is provided with an opening for the hook part of the probe to stretch into, the ultrasonic transducer is connected with the cleaning tank, the cleaning water inlet end of the cleaning tank is communicated with the water storage water outlet end of the water storage tank, the cleaning water outlet end of the cleaning tank is communicated with the water storage water inlet end of the water storage tank, the filter screen is installed in the water storage tank, and the filter screen is located on a water flow path of the water storage water inlet end.
The first water pump is arranged between the water storage water outlet end and the cleaning water inlet end, and the second water pump is arranged between the cleaning water outlet end and the water storage water inlet end; or the two water pumps are built-in water pumps, the first water pump is installed in the cleaning tank, a water inlet of the first water pump is connected with the cleaning water inlet end, the second water pump is installed in the water storage tank 2, and a water inlet of the second water pump is connected with the water storage water inlet end.
The water storage tank comprises a tank cover and a tank body which are mutually covered, the filter screen is arranged at the opening position of the tank body in a detachable mode, and the water storage inlet end is positioned on the tank cover.
The ultrasonic transducer is connected with the ultrasonic generator, a slotted hole is formed in the bottom of the cleaning tank, and the ultrasonic transducer is installed in the slotted hole.
The cleaning tank and the water storage tank are respectively arranged on the base platform in a way of being capable of ascending and descending, and the cleaning tank and the water storage tank are arranged in a synchronous moving mode.
The cleaning tank and the water storage tank are both arranged on a mounting plate, and the mounting plate is arranged on the base platform in a way of being capable of ascending and descending.
The mounting plate is characterized in that an air cylinder device is installed on the base platform and comprises air cylinders which are vertically arranged, and piston rods of the air cylinders are in transmission connection with the mounting plate.
Install first lead screw device on the mounting panel, first lead screw device includes first lead screw, first motor and first sliding sleeve, first lead screw arranges along the front and back, just first lead screw in order can the pivoted mode install in on the mounting panel, first motor install in on the mounting panel, just the output shaft transmission of first motor is connected first lead screw, first sliding sleeve with can the back-and-forth movement the mode install in on the mounting panel, just first sliding sleeve cover is located outside the first lead screw, sliding plate around first sliding sleeve is connected with.
The front and rear sliding plates are provided with a second lead screw device, the second lead screw device comprises a second lead screw, a second motor and a second sliding sleeve, the second lead screw is arranged along the left and right direction, the second lead screw is rotatably arranged on the front and rear sliding plates, the second motor is arranged on the front and rear sliding plates, an output shaft of the second motor is connected with the second lead screw, the second sliding sleeve is arranged on the front and rear sliding plates in a manner of moving back and forth, the second sliding sleeve is sleeved outside the second lead screw, the second sliding sleeve is connected with a left sliding plate and a right sliding plate, and the cleaning tank and the water storage tank are both arranged on the left and right sliding plates.
The blow-drying device is erected on the base platform and comprises a fan, and the probe is located in an air outlet range of an air outlet of the fan.
After adopting the structure, the utility model has the following beneficial effects:
1. when the probe washs, during the probe stretched into the opening of washing tank this moment, carry the washing tank through the clear water of water pump in with the water storage tank to make the portion of colluding of probe dip in the aquatic in the clear water groove, then the water in the washing tank vibrates under ultrasonic transducer's ultrasonic frequency, wash the probe, wash in another water pump carries the water storage tank with the sewage in the washing tank after accomplishing, just can enter into the water storage tank after this in-process sewage filters through the filter screen, in order to carry out recycling after filtering sewage. Compared with the prior art, need not artifical use cleaning paper to clean the surface of probe, reduced the wearing and tearing of cleaning in-process probe, improve the life of probe, reduced the test cost to, the water resource can cyclic utilization, accomplishes the using water wisely.
2. The split arrangement of the box body and the box cover in the water storage tank facilitates cleaning or replacement of the filter screen by workers.
3. The water storage tank and the cleaning tank move synchronously so as to conveniently adjust the position of the water storage tank relative to the probe, and the hook part of the probe just extends into the cleaning tank from the opening of the water storage tank.
Drawings
FIG. 1 is a schematic view of the piping connection of the present invention.
In the figure:
1-a cleaning tank; 11-cleaning the water outlet end;
12-cleaning the water inlet end; 2-a water storage tank;
21-water storage and water outlet end; 22-water storage and inlet end;
23-a box body; 24-a box cover;
3, filtering the filter screen; 4-a first water pump;
5-a second water pump; 6-opening;
71-an ultrasonic generator; 72-ultrasonic transducer.
Detailed Description
In order to further explain the technical solution of the present invention, the present invention is explained in detail by the following specific examples.
A chip test probe cleaning device is shown in figure 1 and comprises a cleaning tank 1, a water storage tank 2, a filter screen 3, an ultrasonic transducer, a first water pump 4 and a second water pump 5, wherein an opening 6 for a probe hook to extend into is arranged on the cleaning tank 1, the ultrasonic transducer is connected with the cleaning tank 1, the cleaning tank 1 is provided with a cleaning water outlet end 11 and a cleaning water inlet end 12, a tank body 23 is provided with a water storage water inlet end 22 and a water storage water outlet end 21, the cleaning water outlet end 11 of the cleaning tank 1 is connected with the water storage water inlet end 22 of the water storage tank 2, the water storage water outlet end 21 of the water storage tank 2 is connected with the cleaning water inlet end 12 of the cleaning tank 1, the filter screen 3 is arranged in the water storage tank 2 and is opposite to the water storage water inlet end 22 of the water storage tank 2, so that the filter screen 3 is positioned on a water flow path of the water storage water inlet end 22 of the water storage tank 2, namely water in the water storage tank 2 enters through the water storage water inlet end 22, the filter screen 2 is positioned at a water flow position of water entering from the water inlet end 22, after passing through the filter screen 2, the water is stored in the water storage tank 2.
For convenience of description, the orientation of the utility model in normal use is taken as a reference direction.
Specifically, the opening 6 of the cleaning tank 1 is located at the center of the upper side of the cleaning tank 1, the opening 6 can be used for the hook portions of the two probes to go in and out, the cleaning water inlet end 12 and the cleaning water outlet end 11 of the cleaning tank 1 are respectively arranged at the left side, the right side, the front side or the right side of the cleaning tank 1, and in this embodiment, the cleaning water inlet end 12 is located at the lower part of the right side of the cleaning tank 1, and the cleaning water outlet end 11 is located at the lower part of the left side. Wherein, the center position of the tank bottom of the cleaning tank 1 is provided with a slotted hole, and the slotted hole is used for installing the ultrasonic transducer.
The ultrasonic transducer 72 is electrically connected to the ultrasonic generator 71 in a conventional manner, and the ultrasonic transducer 72 is fixedly installed in the slot hole so that the ultrasonic transducer 72 is installed at the bottom of the cleaning tank 1, and the installation structure of the ultrasonic transducer 72 is well known in the art and will not be described further. When there is clear water or cleaning liquid in the cleaning tank 1, the ultrasonic generator 71 operates to cause the ultrasonic transducer 72 to emit mechanical oscillation to vibrate the clear water or cleaning liquid in the cleaning tank 1 and the cleaning tank 1.
Preferably, the bottom of the cleaning tank 1 is an inclined surface inclined upward in a direction away from the slot of the cleaning tank 1, so as to quickly store water in the cleaning tank 1, and facilitate the hook of the probe to be immersed in the clean water or cleaning solution of the cleaning tank 1 after extending into the opening 6.
Further, the water storage tank 2 comprises a tank body 23 and a tank cover 24, the upper side surface of the tank body is open, the tank body 23 and the tank cover 24 are mutually sealed and covered, and the covering or the opening between the tank body 23 and the tank cover 24 can be realized by adopting the conventional technology, for example, the inner side wall of the upper part of the tank body 23 is provided with an internal thread, the outer side wall of the tank cover 24 is provided with an external thread, and the internal thread is matched with the external thread; for another example, a limiting concave portion is provided at an upper portion of the inside of the case 23, and the cover edge of the case cover 24 is snap-fitted to the limiting concave portion. The water inlet end 22 is located on the box cover 24, in this embodiment, taking the water inlet end 22 located on the left side of the box cover 24 as an example, the water outlet end 21 is located on the lower portion of the left side or the right side of the box body 23, in this embodiment, the water outlet end 21 is located on the right side of the box body 23; filter screen 3 is installed in the upper portion of box 23 with the mode that can dismantle, and filter screen 3 is arranged in carrying out filtration treatment to the sewage that gets into in storage water tank 2 to but store cyclic utilization's water in making storage water tank 2, and, the setting dismantled of filter screen 3, the convenience is changed filter screen 3. The filter screen 3 is installed by adopting the conventional technology, for example, the upper part of the inner side wall of the box body 23 is provided with a plurality of clamping holes, each clamping hole is arranged along the circumferential direction of the box body, the outer circumferential surface of the filter screen 3 is provided with a plurality of clamping blocks, and each clamping block and each clamping hole are respectively clamped and matched one by one so that the filter screen 3 is clamped and connected in the box body; for another example, the filter net 3 has the same mounting structure as that of the filter net of the air conditioner.
In the present invention, the filter screen 3 is 2300 mesh or more, and in the present embodiment, the filter screen 3 is 2800 mesh. Wherein, filter screen 3 includes the screen circle and connects the screen cloth in the screen circle, and the screen circle joint is in the inside of box 23, and foretell fixture block sets up in the outer lane of screen circle promptly, and the screen circle that the frame was made for adopting conventional 304 stainless steel bilayer to dash, and the screen cloth that the screen cloth was made for adopting 304 stainless steel to make filter screen hardness high, long service life and reuse.
Further, the first water pump 4 is used for conveying the water in the water storage tank 2 to the cleaning tank 1, and the second water pump 5 is used for conveying the water in the cleaning tank 1 to the water storage tank 2. In this embodiment, the first water pump 4 and the second water pump 5 may be external water pumps or internal water pumps, and the two structures are described below.
The first water pump 4 and the second water pump 5 are external water pumps: the cleaning water inlet end 12 of the cleaning tank 1 is communicated with the water storage water outlet end 21 of the water storage tank 2 through a first pipeline, the cleaning water outlet end 11 of the cleaning tank 1 is communicated with the water storage water inlet end 22 of the water storage tank 2 through a second pipeline, the first water pump 4 is installed in the first pipeline, and the second water pump 5 is installed in the second pipeline. The first water pump 4 and the second water pump 5 are conventional external water pumps.
The first water pump 4 and the second water pump 5 are both built-in water pumps: the first water pump 4 is arranged in the cleaning tank 1, the second water pump 5 is arranged in the water storage tank 2, a water inlet of the first water pump 4 is connected with a water storage and inlet end of the water storage tank 2, and a water inlet of the first water pump 4 is positioned in the cleaning tank 1; the water inlet of the second water pump 5 is connected with the cleaning water inlet end of the cleaning tank 1. Wherein, first water pump 4 and second water pump 5 are the built-in water pump of current conventionality, and first water pump 4 and second water pump 5 all adopt current conventionality technique to install.
In addition, the first water pump 4 can also be a built-in water pump, and the second water pump 5 can be an external water pump; or the first water pump 4 is an external water pump, and the second water pump 5 is a built-in water pump.
In this embodiment, the first water pump 4 and the second water pump 5 are both external water pumps.
The utility model is installed in the conventional chip tester, for example, the VCSEL wafer point tester with model number VPT8090 produced by Hutt science and technology shares company; in addition, the test device can also be other chip test machines which are already used in the market. It should be noted that, in the chip testing machine, the two probes can move back and forth, left and right, and up and down, and the two probes move together to move to the corresponding contact points of the chip to be tested, respectively, where the hook portions of the two probes contact the chip to be tested.
Further, the cleaning tank 1 and the water storage tank 2 are respectively mounted on a base platform in a manner of being capable of ascending and descending, and the base platform can be a base platform of a chip testing machine, or the base platform is a base platform spliced with a table board of the chip testing machine. Specifically, but install the mounting panel of oscilaltion on the base station, washing tank 1 and the equal fixed mounting of storage water tank 2 are in the side of going up of mounting panel, and the mounting panel passes through cylinder device and realizes the oscilaltion in this embodiment, and cylinder device installs on the base station, and cylinder device includes vertical arrangement's cylinder, and the cylinder body fixed mounting of cylinder is on the base station, and the piston rod of cylinder is located the upside of the cylinder body of cylinder, and the mounting panel is connected in the piston rod transmission of cylinder, and for confirming the stability of mounting panel, cylinder device has two sets at least in this embodiment. Like this, through the flexible of the piston rod of cylinder to make the mounting panel upwards or move down, thereby drive washing tank 1 and storage water tank 2 and remove, when two probes are all just to washing tank 1's opening 6, through the extension of cylinder, in order to drive washing tank 1 and upwards move, thereby make the portion of colluding of two probes stretch into in washing tank 1, and dip in the aquatic of washing tank 1. In addition, other conventional structures can be adopted in the embodiment to realize the up-and-down lifting of the mounting plate, such as a screw rod device and the like.
It should be noted that the ultrasonic generator 71 is mounted on the base, and the connection wire between the ultrasonic generator 71 and the ultrasonic transducer 72 is long enough so that the wire is not pulled when the cleaning tank 1 moves upward.
As a preferable mode, the cleaning tank 1 and the water storage tank 2 can also realize left-right and front-back movement, in an unfolded state, the upper side surface of the mounting plate 1 is provided with a first screw rod device, the first screw rod device comprises a first screw rod, a first motor and a first sliding sleeve, the first screw rod is arranged along the left-right direction, the first screw rod is rotatably mounted on the upper side surface of the mounting plate, and the mounting structure of the first screw rod can be realized by adopting the conventional technology, so that the unfolding description is omitted; the first motor is fixedly arranged on the mounting plate, and an output shaft of the first motor is in transmission connection with one end of the first screw rod; the first sliding sleeve is arranged on the mounting plate in a manner of moving left and right, the first sliding sleeve is sleeved outside the first screw rod, and the first sliding sleeve is in spiral fit with the first screw rod, wherein the left and right moving structure of the first sliding sleeve is the prior known technology, for example, a sliding block is arranged on the first sliding sleeve, a sliding groove is arranged on the mounting plate corresponding to the sliding block, and the sliding block is in sliding fit with the sliding groove; the first sliding sleeve is fixedly provided with a left sliding plate and a right sliding plate. Therefore, the first motor works, the output shaft rotates to drive the first screw rod to rotate, so that the first sliding sleeve moves left and right, the left and right sliding plates are driven to move left and right, and the cleaning tank 1 and the water storage tank 2 move left and right.
In the present embodiment, the front-back direction is a direction approaching or separating from the chip tester, and the left-right direction is a direction perpendicular to the front-back direction in the horizontal plane.
Furthermore, the left and right sliding plates are provided with a second screw rod device, the first screw rod device and the second screw rod device have the same structure and are only arranged at different positions, a second screw rod in the second screw rod device is arranged along the front and back direction, the second sliding sleeve is fixedly connected with the front and back sliding plates, and the cleaning tank 1 and the water storage tank 2 are both arranged on the front and back sliding plates. Therefore, when the second motor works, the output shaft of the second motor rotates to drive the second screw rod to rotate, so that the second sliding sleeve moves back and forth, the front and rear sliding plates are driven to move left and right, and the cleaning tank 1 and the water storage tank 2 move forwards or backwards.
After the probes move right above the cleaning tank 1, the cleaning tank 1 moves forwards, backwards, leftwards and rightwards, so that the opening 6 of the cleaning tank 1 is just opposite to the two probes, then the cleaning tank 1 moves upwards, hook parts of the two probes all extend into the cleaning tank 1 through the opening 6, and the hook parts of the two probes are all immersed in water.
Preferably, the utility model further comprises a drying device, wherein the drying device comprises a fan, the fan is erected on the base platform through a bracket, and an air outlet of the fan can be over against the opening 6 of the cleaning tank 1. Like this, after two probe washs the completion, washing tank 1 moves down to make two probes all unsettled, then the fan is bloied to the portion of colluding of two probes, with quick drying probe, indirect improvement efficiency of software testing.
The working process of the chip test probe cleaning device provided by the utility model is as follows: when the probes need to be cleaned, the chip testing machine controls the two probes to move back and forth, left and right and up and down so that the hook parts of the two probes are located right above the cleaning tank 1, meanwhile, water in the water storage tank 2 is conveyed into the cleaning tank 1, then the cleaning tank 1 moves back and forth and left and right so that the hook parts of the two probes are right opposite to an opening 6 of the cleaning tank 1, then the cleaning tank 1 moves upwards so that the hook parts of the two probes extend into the cleaning tank 1, the hook parts of the two probes are immersed into the water in the cleaning tank 1, then the ultrasonic transducer works to clean the hook parts of the two probes, after cleaning is completed, the cleaning tank 1 moves downwards so that the hook parts of the two probes leave the cleaning tank 1, then the fan blows the two probes to rapidly dry the two probes, and after drying is completed, the two probes move to the position to be tested again; after the probe leaves the cleaning tank 1, the sewage in the cleaning tank 1 enters the water storage tank 2, and the sewage is filtered by the filter screen 3 to obtain water which can be recycled and is continuously stored in the water storage tank 2.
The above description is only a preferred embodiment of the present invention, and all equivalent changes and modifications made within the scope of the claims of the present invention should fall within the scope of the claims of the present invention.

Claims (10)

1. The utility model provides a chip test probe belt cleaning device which characterized in that: the ultrasonic cleaning device comprises a cleaning tank, a water storage tank, a filter screen, an ultrasonic transducer, a first water pump and a second water pump, wherein the first water pump is used for conveying water in the water storage tank into the cleaning tank; the ultrasonic probe cleaning device comprises a cleaning tank, an ultrasonic transducer, a water storage tank, a water inlet end, a water outlet end, a filter screen and a water outlet end, wherein the cleaning tank is provided with an opening for the hook part of the probe to stretch into, the ultrasonic transducer is connected with the cleaning tank, the cleaning water inlet end of the cleaning tank is communicated with the water storage water outlet end of the water storage tank, the cleaning water outlet end of the cleaning tank is communicated with the water storage water inlet end of the water storage tank, the filter screen is installed in the water storage tank, and the filter screen is located on a water flow path of the water storage water inlet end.
2. The apparatus for cleaning chip test probes according to claim 1, wherein: the first water pump is arranged between the water storage water outlet end and the cleaning water inlet end, and the second water pump is arranged between the cleaning water outlet end and the water storage water inlet end; or the two water pumps are built-in water pumps, the first water pump is arranged in the cleaning tank, a water inlet of the first water pump is connected with the cleaning water inlet end, the second water pump is arranged in the water storage tank (2), and a water inlet of the second water pump is connected with the water storage water inlet end.
3. The apparatus for cleaning chip test probes according to claim 1, wherein: the water storage tank comprises a tank cover and a tank body which are mutually covered, the filter screen is arranged at the opening position of the tank body in a detachable mode, and the water storage inlet end is positioned on the tank cover.
4. The chip test probe cleaning apparatus according to claim 1, 2 or 3, wherein: the ultrasonic transducer is connected with the ultrasonic generator, a slotted hole is formed in the bottom of the cleaning tank, and the ultrasonic transducer is installed in the slotted hole.
5. The chip test probe cleaning apparatus according to claim 1, 2 or 3, wherein: the cleaning tank and the water storage tank are respectively arranged on the base platform in a way of being capable of ascending and descending, and the cleaning tank and the water storage tank are arranged in a synchronous moving mode.
6. The apparatus for cleaning chip test probes according to claim 5, wherein: the cleaning tank and the water storage tank are both arranged on a mounting plate, and the mounting plate is arranged on the base platform in a way of being capable of ascending and descending.
7. The apparatus for cleaning chip test probes according to claim 6, wherein: the mounting plate is characterized in that an air cylinder device is installed on the base platform and comprises air cylinders which are vertically arranged, and piston rods of the air cylinders are in transmission connection with the mounting plate.
8. The apparatus for cleaning chip test probes according to claim 7, wherein: install first lead screw device on the mounting panel, first lead screw device includes first lead screw, first motor and first sliding sleeve, first lead screw arranges along the front and back, just first lead screw in order can the pivoted mode install in on the mounting panel, first motor install in on the mounting panel, just the output shaft transmission of first motor is connected first lead screw, first sliding sleeve with can the back-and-forth movement the mode install in on the mounting panel, just first sliding sleeve cover is located outside the first lead screw, sliding plate around first sliding sleeve is connected with.
9. The apparatus for cleaning chip test probes according to claim 8, wherein: the front and rear sliding plates are provided with a second lead screw device, the second lead screw device comprises a second lead screw, a second motor and a second sliding sleeve, the second lead screw is arranged along the left and right direction, the second lead screw is rotatably arranged on the front and rear sliding plates, the second motor is arranged on the front and rear sliding plates, an output shaft of the second motor is connected with the second lead screw, the second sliding sleeve is arranged on the front and rear sliding plates in a manner of moving back and forth, the second sliding sleeve is sleeved outside the second lead screw, the second sliding sleeve is connected with a left sliding plate and a right sliding plate, and the cleaning tank and the water storage tank are both arranged on the left and right sliding plates.
10. The apparatus for cleaning chip test probes according to claim 5, wherein: the blow-drying device is erected on the base platform and comprises a fan, and the probe is located in an air outlet range of an air outlet of the fan.
CN202121565865.4U 2021-07-09 2021-07-09 Chip test probe belt cleaning device Active CN215543295U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202121565865.4U CN215543295U (en) 2021-07-09 2021-07-09 Chip test probe belt cleaning device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202121565865.4U CN215543295U (en) 2021-07-09 2021-07-09 Chip test probe belt cleaning device

Publications (1)

Publication Number Publication Date
CN215543295U true CN215543295U (en) 2022-01-18

Family

ID=79824820

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202121565865.4U Active CN215543295U (en) 2021-07-09 2021-07-09 Chip test probe belt cleaning device

Country Status (1)

Country Link
CN (1) CN215543295U (en)

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