CN215517751U

CN215517751U - High-safety diffusion furnace with good yield

Info

Publication number: CN215517751U
Application number: CN202121572444.4U
Authority: CN
Inventors: 薛会福
Original assignee: Xuzhou Yunzhitu Electronic Technology Co ltd
Current assignee: Shenzhen Haofengquan Electronics Co.,Ltd.
Priority date: 2021-07-12
Filing date: 2021-07-12
Publication date: 2022-01-14
Anticipated expiration: 2031-07-12

Abstract

The utility model discloses a high-safety diffusion furnace with good yield, which comprises a diffusion furnace body, supporting legs, rollers, limiting grooves and a limiting mechanism, wherein the supporting legs are fixedly connected to the left side and the right side of the bottom of the diffusion furnace body, the rollers are fixedly connected to the bottoms of the supporting legs, and a plurality of limiting grooves are formed in the surfaces of the rollers in a surrounding mode. According to the utility model, through the mutual matching of the diffusion furnace body, the supporting legs, the rollers, the limiting grooves, the movable grooves, the telescopic rods, the supporting plates, the movable grooves, the first bearings, the first threaded rods, the first handles, the threaded plates, the limiting rods, the second bearings, the second threaded rods, the second handles and the threaded blocks, the problem that the common diffusion furnace is not stable enough is solved, the rollers at the bottom of the diffusion furnace are not easy to slide during working, so that accidents are effectively avoided, the safety is greatly improved, the working stability of the diffusion furnace is greatly improved, and the yield is effectively improved.

Description

High-safety diffusion furnace with good yield

Technical Field

The utility model relates to the technical field of diffusion furnaces, in particular to a high-safety diffusion furnace with good yield.

Background

The diffusion furnace is one of important process equipment of a front process of a semiconductor production line, and is used for diffusion, oxidation, annealing, alloying, sintering and other processes in industries such as large-scale integrated circuits, discrete devices, power electronics, photoelectric devices, optical fibers and the like. When the diffusion furnace is used, the silicon wafer needs to be conveyed into the diffusion furnace body, and the silicon wafer reacts with reaction gas in the diffusion furnace, so that a silicon dioxide film is continuously generated on the surface of the silicon wafer.

However, the existing high-safety diffusion furnace with good yield is not stable enough, and the rollers at the bottom of the diffusion furnace slide easily during working, so that accidents are easily caused, the safety is greatly reduced, the working stability of the diffusion furnace is also greatly influenced, and the yield is greatly influenced.

SUMMERY OF THE UTILITY MODEL

The utility model aims to provide a high-safety diffusion furnace with good yield so as to solve the problems in the background technology.

In order to achieve the purpose, the utility model provides the following technical scheme: a high-safety diffusion furnace with good yield comprises a diffusion furnace body, supporting legs, rollers, limiting grooves and limiting mechanisms, wherein the supporting legs are fixedly connected to the left side and the right side of the bottom of the diffusion furnace body;

the limiting mechanism comprises a movable groove, a telescopic rod, a supporting plate, a movable groove, a first bearing, a first threaded rod, a first handle, a threaded plate, a limiting rod, a second bearing, a second threaded rod, a second handle and a threaded block, the movable groove is formed in the bottom of each of the left side and the right side of the diffusion furnace body, the telescopic rod is fixedly connected to the bottom of the inner wall of each movable groove, the supporting plate is fixedly connected to the top of the telescopic rod, one side, away from the movable groove, of the supporting plate penetrates through the movable groove and extends to the outside of the movable groove, the movable groove is formed in one side, away from the movable groove, of the bottom of the supporting plate, the first bearing is fixedly connected to one side, close to the diffusion furnace body, of the inner wall of each movable groove, the first threaded rod is movably connected to the inside of the first bearing, one end, away from the first bearing, of the first threaded rod penetrates through the first bearing, the movable groove and the supporting plate in sequence and extends to the outside of the supporting plate, the utility model discloses a diffusion furnace body, including first threaded rod, the inside threaded connection that just is located the shifting chute on first threaded rod surface has the threading board, the outside that the shifting chute just extended to the shifting chute is run through to the bottom of threading board, the threading board is close to the bottom fixedly connected with gag lever post of diffusion furnace body one side, the top fixedly connected with second bearing of backup pad, the top swing joint of second bearing has the second threaded rod, the top fixedly connected with second handle of second threaded rod, the surperficial threaded connection of second threaded rod has the thread piece.

Preferably, the surface of the supporting plate is movably connected with the inner wall of the movable groove.

Preferably, the first threaded rod is movably connected with the support plate.

Preferably, the surface of the thread plate is movably connected and tightly attached with the inner wall of the moving groove.

Preferably, the limiting rod is matched with the limiting groove for use.

Preferably, the first handle and the second handle are both provided with anti-skid grains.

Preferably, the screw block is fixedly connected with the diffusion furnace body.

Compared with the prior art, the utility model has the following beneficial effects:

according to the utility model, through the mutual matching of the diffusion furnace body, the supporting legs, the rollers, the limiting groove, the limiting mechanism, the movable groove, the telescopic rod, the supporting plate, the movable groove, the first bearing, the first threaded rod, the first handle, the threaded plate, the limiting rod, the second bearing, the second threaded rod, the second handle and the threaded block, the problem that the common diffusion furnace is not stable enough in placement is solved, the rollers at the bottom of the diffusion furnace are not easy to slide during operation, so that accidents are effectively avoided, the safety is greatly improved, the stability of the diffusion furnace during operation is greatly improved, and the yield is effectively improved.

Drawings

FIG. 1 is a structural cross-sectional view in elevation of the present invention;

FIG. 2 is an enlarged view of A of FIG. 1 according to the present invention;

FIG. 3 is an enlarged view of B in FIG. 1 according to the present invention.

In the figure: 1 diffusion furnace body, 2 supporting legs, 3 rollers, 4 limiting grooves, 5 limiting mechanisms, 501 movable grooves, 502 telescopic rods, 503 supporting plates, 504 moving grooves, 505 first bearings, 506 first threaded rods, 507 first handles, 508 threaded plates, 509 limiting rods, 510 second bearings, 511 second threaded rods, 512 second handles and 513 threaded blocks.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

Referring to fig. 1-3, a high-safety diffusion furnace with good yield comprises a diffusion furnace body 1, supporting legs 2, rollers 3, limiting grooves 4 and limiting mechanisms 5, wherein the supporting legs 2 are fixedly connected to the left side and the right side of the bottom of the diffusion furnace body 1, the rollers 3 are fixedly connected to the bottoms of the supporting legs 2, the surfaces of the rollers 3 are provided with a plurality of limiting grooves 4 in a surrounding manner, and the limiting mechanisms 5 are arranged on the diffusion furnace body 1.

The limiting mechanism 5 comprises a movable groove 501, an expansion link 502, a supporting plate 503, a movable groove 504, a first bearing 505, a first threaded rod 506, a first handle 507, a threaded plate 508, a limiting rod 509, a second bearing 510, a second threaded rod 511, a second handle 512 and a threaded block 513, the movable groove 501 is arranged at the bottom of the left side and the right side of the diffusion furnace body 1, the expansion link 502 is fixedly connected with the bottom of the inner wall of the movable groove 501, the supporting plate 503 is fixedly connected with the top of the expansion link 502, the surface of the supporting plate 503 is movably connected with the inner wall of the movable groove 501, one side of the supporting plate 503, which is far away from the movable groove 501, penetrates through the movable groove 501 and extends to the outside of the movable groove 501, the movable groove 504 is arranged at one side of the bottom of the supporting plate 503, which is far away from the movable groove 501, the first bearing 505 is fixedly connected with one side of the inner wall of the movable groove 504, the first threaded rod 506 is movably connected with the inside of the first bearing 505, one end of the first threaded rod 506, which is far away from the first bearing 505, sequentially penetrates through the first bearing 505, the moving groove 504 and the supporting plate 503 and extends to the outside of the supporting plate 503 to be fixedly connected with a first handle 507, the first threaded rod 506 is movably connected with the supporting plate 503, the surface of the first threaded rod 506 is in threaded connection with a threaded plate 508 in the moving groove 504, the surface of the threaded plate 508 is movably connected with the inner wall of the moving groove 504 and is tightly attached to the inner wall of the moving groove, the bottom of the threaded plate 508 penetrates through the moving groove 504 and extends to the outside of the moving groove 504, the bottom of the threaded plate 508, which is close to one side of the diffusion furnace body 1, is fixedly connected with a limiting rod 509, the limiting rod is matched with the limiting groove 4 for use, the top of the supporting plate 503 is fixedly connected with a second bearing 510, the top of the second bearing 510 is movably connected with a second threaded rod 511, the top of the second threaded rod 511 is fixedly connected with a second handle 512, and the first handle 507 and the second handle 512 are both provided with anti-slip threads, the surface of the second threaded rod 511 is in threaded connection with a threaded block 513, and the threaded block 513 is fixedly connected with the diffusion furnace body 1.

The working principle is as follows: when the device is needed to be used for operation, the device is moved to a designated position through the roller 3, then, the second handle 512 is rotated only in the forward direction, so that the second threaded rod 511 is rotated, so that the second threaded rod 511 moves downward in the threaded block 513, thereby sequentially pushing the second bearing 510, the support plate 503, the threaded plate 508 and the stopper rod 509 to move downward, so that the stopper rod 509 descends to a proper position, then, the first handle 507 is rotated in the forward direction to rotate the first threaded rod 506, so that the threaded plate 508 moves on the first threaded rod 506 to the side close to the diffusion furnace body 1, thereby driving the limit rod 509 to move towards one side close to the roller 3, so that the limit rod 509 is inserted into the corresponding limit groove 4, through the above steps, can effectively prevent the roller 3 from sliding at will, thereby greatly improving the placing stability of the device.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.

Claims

1. The utility model provides a high security diffusion furnace that yield is good, includes diffusion furnace body (1), landing leg (2), gyro wheel (3), spacing groove (4) and stop gear (5), its characterized in that: the left side and the right side of the bottom of the diffusion furnace body (1) are fixedly connected with supporting legs (2), the bottom of each supporting leg (2) is fixedly connected with a roller (3), the surface of each roller (3) is provided with a plurality of limiting grooves (4) in a surrounding manner, and the diffusion furnace body (1) is provided with a limiting mechanism (5);

the limiting mechanism (5) comprises a movable groove (501), an expansion link (502), a supporting plate (503), a movable groove (504), a first bearing (505), a first threaded rod (506), a first handle (507), a threaded plate (508), a limiting rod (509), a second bearing (510), a second threaded rod (511), a second handle (512) and a threaded block (513), the movable groove (501) is formed in the bottom of the left side and the right side of the diffusion furnace body (1), the expansion link (502) is fixedly connected to the bottom of the inner wall of the movable groove (501), the supporting plate (503) is fixedly connected to the top of the expansion link (502), one side, far away from the movable groove (501), of the supporting plate (503) penetrates through the movable groove (501) and extends to the outside of the movable groove (501), the movable groove (504) is formed in one side, far away from the movable groove (501), of the bottom of the supporting plate (503), one side of the inner wall of the movable groove (504) close to the diffusion furnace body (1) is fixedly connected with a first bearing (505), the inside of the first bearing (505) is movably connected with a first threaded rod (506), one end, far away from the first bearing (505), of the first threaded rod (506) sequentially penetrates through the first bearing (505), the movable groove (504) and the supporting plate (503) and extends to the outside of the supporting plate (503) to be fixedly connected with a first handle (507), the inner thread, located on the movable groove (504), of the surface of the first threaded rod (506) is connected with a threaded plate (508), the bottom of the threaded plate (508) penetrates through the movable groove (504) and extends to the outside of the movable groove (504), the bottom, close to one side of the diffusion furnace body (1), of the threaded plate (508) is fixedly connected with a limiting rod (509), the top of the supporting plate (503) is fixedly connected with a second bearing (510), the top swing joint of second bearing (510) has second threaded rod (511), the top fixedly connected with second handle (512) of second threaded rod (511), the surperficial threaded connection of second threaded rod (511) has screw block (513).

2. The high-safety diffusion furnace with good yield according to claim 1, wherein: the surface of the supporting plate (503) is movably connected with the inner wall of the movable groove (501).

3. The high-safety diffusion furnace with good yield according to claim 2, wherein: the first threaded rod (506) is movably connected with the supporting plate (503).

4. A high-safety diffusion furnace with good yield according to claim 3, wherein: the surface of the thread plate (508) is movably connected and tightly attached with the inner wall of the moving groove (504).

5. The high-safety diffusion furnace with good yield according to claim 4, wherein: the limiting rod (509) is matched with the limiting groove (4) for use.

6. The high-safety diffusion furnace with good yield according to claim 5, wherein: the first handle (507) and the second handle (512) are both provided with anti-skid grains.

7. The high-safety diffusion furnace with good yield according to claim 6, wherein: the thread block (513) is fixedly connected with the diffusion furnace body (1).