CN215470353U - 一种边缘抛光设备优化结构 - Google Patents
一种边缘抛光设备优化结构 Download PDFInfo
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- CN215470353U CN215470353U CN202120548691.4U CN202120548691U CN215470353U CN 215470353 U CN215470353 U CN 215470353U CN 202120548691 U CN202120548691 U CN 202120548691U CN 215470353 U CN215470353 U CN 215470353U
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- 238000005498 polishing Methods 0.000 title claims abstract description 195
- 238000005457 optimization Methods 0.000 title description 3
- 239000000463 material Substances 0.000 claims abstract description 39
- 238000004519 manufacturing process Methods 0.000 abstract description 8
- 230000002035 prolonged effect Effects 0.000 abstract description 2
- 238000006748 scratching Methods 0.000 abstract description 2
- 230000002393 scratching effect Effects 0.000 abstract description 2
- 239000002699 waste material Substances 0.000 abstract description 2
- 230000009286 beneficial effect Effects 0.000 abstract 1
- 229920001971 elastomer Polymers 0.000 description 7
- 229910000831 Steel Inorganic materials 0.000 description 5
- 238000012545 processing Methods 0.000 description 5
- 239000010959 steel Substances 0.000 description 5
- 238000013461 design Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229920002635 polyurethane Polymers 0.000 description 1
- 239000004814 polyurethane Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000007306 turnover Effects 0.000 description 1
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- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
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CN202120548691.4U CN215470353U (zh) | 2021-03-17 | 2021-03-17 | 一种边缘抛光设备优化结构 |
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CN202120548691.4U CN215470353U (zh) | 2021-03-17 | 2021-03-17 | 一种边缘抛光设备优化结构 |
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CN215470353U true CN215470353U (zh) | 2022-01-11 |
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CN202120548691.4U Active CN215470353U (zh) | 2021-03-17 | 2021-03-17 | 一种边缘抛光设备优化结构 |
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2021
- 2021-03-17 CN CN202120548691.4U patent/CN215470353U/zh active Active
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Address after: 300384 Tianjin Binhai New Area high tech Zone Huayuan Industrial Area (outside the ring) Hai Tai Road 12 inside. Patentee after: TIANJIN ZHONGHUAN ADVANCED MATERIAL TECHNOLOGY Co.,Ltd. Country or region after: China Patentee after: Zhonghuan Leading Semiconductor Technology Co.,Ltd. Address before: No.12 Haitai East Road, Huayuan Industrial Zone, Binhai New Area, Tianjin Patentee before: TIANJIN ZHONGHUAN ADVANCED MATERIAL TECHNOLOGY Co.,Ltd. Country or region before: China Patentee before: Zhonghuan leading semiconductor materials Co.,Ltd. |