CN215466323U

CN215466323U - Support plate cleaning device

Info

Publication number: CN215466323U
Application number: CN202121200422.5U
Authority: CN
Inventors: 杨与胜; 倪鹏玉; 张建德; 徐尔强
Original assignee: Goldstone Fujian Energy Co Ltd
Current assignee: Goldstone Fujian Energy Co Ltd
Priority date: 2021-05-31
Filing date: 2021-05-31
Publication date: 2022-01-11
Anticipated expiration: 2031-05-31

Abstract

The utility model relates to a carrier plate cleaning device which comprises a machine shell, a rolling brush assembly and a dust collection assembly, wherein the machine shell is used for accommodating a cleaning part, and the left side wall and the right side wall of the machine shell are provided with a carrier plate inlet and a carrier plate outlet, the rolling brush assembly is arranged in the middle of an inner cavity of the machine shell, and the dust collection assembly is arranged at the lower part of the inner cavity of the machine shell and matched with the rolling brush assembly. The utility model aims to provide a carrier plate cleaning device which is simple in structure of the whole machine, can effectively clean a carrier plate and prevent dust particles from flying to pollute the environment.

Description

Support plate cleaning device

Technical Field

The utility model relates to a carrier plate cleaning device.

Background

The PVD (Physical Vapor Deposition) process is one of the very critical steps in the fabrication of high efficiency heterojunction solar cells. And the silicon wafer subjected to chemical vapor deposition is placed on a support plate, the support plate is used as a silicon wafer bearing and conveying tray, and the silicon wafer is conveyed into a vacuum chamber for physical vapor deposition. In the process, the carrier plate can also form a coating film on the surface like a silicon wafer, and the coating film becomes thicker and thicker along with the increase of the use times. During the process of conveying the carrier plate on the transmission roller, powder falling can occur due to conveying vibration or friction between the carrier plate and the transmission roller, and the film coating quality of the silicon wafer is affected.

Disclosure of Invention

The utility model aims to provide a carrier plate cleaning device which is simple in structure of the whole machine, can effectively clean a carrier plate and prevent dust particles from flying to pollute the environment.

The purpose of the utility model is realized by the following technical scheme:

a carrier plate cleaning device comprises a machine shell, a rolling brush assembly and a dust collection assembly, wherein the machine shell is used for accommodating a cleaning part, the left side wall and the right side wall of the machine shell are provided with a carrier plate inlet and a carrier plate outlet, the rolling brush assembly is arranged in the middle of an inner cavity of the machine shell, and the dust collection assembly is arranged at the lower part of the inner cavity of the machine shell and matched with the rolling brush assembly.

Compared with the prior art, the utility model has the advantages that:

(1) the whole machine has simple structure, effectively cleans the carrier plate and prevents dust particles from flying to pollute the environment.

(2) The air outlet of the air knife component is adjustable, so that the angle of the air outlet aligned with the carrier plate can be adjusted as required, and the film particles stripped from the carrier plate by the rolling brush can be blown off in time.

(3) And a closed shell structure is adopted, so that the dust particles are prevented from diffusing to pollute the environment.

(4) The rolling brushes are arranged on the upper surface and the lower surface of the support plate up and down, and the moving direction of the rolling brushes is opposite to that of the support plate, so that film particles adhered to the upper surface and the lower surface of the support plate can be better removed.

(5) The dust hood aims at the brushing part of the rolling brush assembly, dust particles are collected in time, and particularly the dust hood is arranged below the rolling brush assembly, so that large particles can be effectively collected, and the dust removal effect is improved.

Drawings

Fig. 1 is a schematic structural diagram of an embodiment of a carrier plate cleaning device of the present invention.

Fig. 2 is a sectional structural screenshot of fig. 1.

Fig. 3 is a cross-sectional structural screenshot of another view of fig. 1.

Fig. 4 is a schematic diagram of an application state of the structure shown in fig. 1.

Description of reference numerals: the device comprises a carrier plate cleaning device 1, a frame 11, a support frame 111, a first bearing seat 112, a second bearing seat 113, a bearing 114, a sealing cover 12, a rolling brush motor 13, a coupler 14, an upper rolling brush 15, a lower rolling brush 16, a gear 17, a dust hood 18, a dust collection interface 181, a horn-shaped groove 182, a slotted hole 183, a dust collection groove 184, a dust collection pipe 185, a wind knife assembly 19, a conveying frame 2, a chamber frame 3 and a carrier plate backflow conveying device 4.

Detailed Description

The utility model is described in detail below with reference to the drawings and examples of the specification:

fig. 1 to 4 are schematic diagrams illustrating an embodiment of a carrier cleaning apparatus according to the present invention.

The rolling brush device also comprises an air knife assembly 19 arranged at the middle upper part of the left side of the rolling brush assembly, and the direction of an air outlet of the air knife assembly is adjustable.

The machine shell comprises a sealing cover 12 and a machine frame 11, wherein the left side wall and the right side wall of the sealing cover are provided with a support plate inlet and outlet, and the machine frame is covered by the sealing cover 12.

The rolling brush assembly comprises more than two rolling brushes which are arranged at intervals up and down and are in contact with the support plate and a rolling brush driving unit for driving the rolling brushes to rotate; the rotating direction of the rolling brush is opposite to the conveying direction of the support plate.

The rolling brush driving unit comprises a rolling brush motor 13 arranged outside the machine shell and a rolling brush transmission structure arranged in the machine shell and connected between the rolling brush and the rolling brush motor 13 in a transmission mode.

In one embodiment, the rolling brush assembly comprises an upper rolling brush 15 and a lower rolling brush 16 which are arranged up and down correspondingly; the rack 11 comprises two support frames 111 arranged in front and at back, a first bearing seat 112 and a second bearing seat 113 are fixedly arranged at the upper part and the lower part of the support frame 111 respectively, and bearings 114 are arranged on the first bearing seat 112 and the second bearing seat 113; one end of the lower rolling brush 16 is provided with a coupler 14 fixedly connected with the rolling brush motor 13, the other end of the lower rolling brush is provided with a gear 17, and the lower rolling brush 16 penetrates through a bearing 114 and is in rolling connection with a bearing seat I112; one end of the upper rolling brush 15 is provided with a gear 17, and the upper rolling brush 15 passes through a bearing 114 and is in rolling connection with a second bearing seat 113; the upper and

lower roll brushes

15 and 16 are engaged by a gear 17.

The dust collection assembly comprises a dust collection cover 18 and a dust collection power assembly, wherein the dust collection cover 18 is arranged in the cavity of the machine shell, an opening of the dust collection cover is aligned with the brushing part of the rolling brush assembly, and the dust collection power assembly is connected with the dust collection cover 18.

The dust hood comprises a horn-shaped groove 182 with an upward opening and used for accommodating part of the rolling brush assembly, a dust suction groove 184 connected with the lower end of the horn-shaped groove, and a dust suction pipe 185 connected with the lower end of the dust suction groove 184; the dust suction pipe 185 is provided with a dust suction port 181 connected to the dust suction power assembly. In one embodiment, the dust hood 18 has fixing lugs at the front and back sides for engaging with the frame 11, and the fixing lugs have fixing slots 183 for adjusting the height of the dust hood 18.

The dust absorption power component is dust suction and purification equipment.

In one embodiment, the carrier cleaning apparatus 1 of the present invention is connected to the conveyor frame 2 and the chamber frame 3, and is in forward abutment with the carrier reflow conveyor 4.

Claims

1. A support plate cleaning device is characterized in that: the cleaning device comprises a machine shell, a rolling brush assembly and a dust collection assembly, wherein the machine shell is used for accommodating a cleaning part, and the left side wall and the right side wall of the machine shell are provided with a support plate inlet and outlet, the rolling brush assembly is arranged in the middle of an inner cavity of the machine shell, and the dust collection assembly is arranged at the lower part of the inner cavity of the machine shell and matched with the rolling brush assembly.

2. The carrier plate cleaning device of claim 1, wherein: the rolling brush device further comprises an air knife assembly arranged on the middle upper portion of the left side of the rolling brush assembly, and the direction of an air outlet of the air knife assembly is adjustable.

3. The carrier plate cleaning device of claim 1, wherein: the casing includes that the left and right sides lateral wall is equipped with the sealed cowling of support plate exit and carries out the frame of shade by the sealed cowling.

4. The carrier plate cleaning device of claim 1, wherein: the dust collection assembly comprises a dust collection cover and a dust collection power assembly, wherein the dust collection cover is arranged in the cavity of the machine shell, an opening of the dust collection cover is aligned with the brushing part of the rolling brush assembly, and the dust collection power assembly is connected with the dust collection cover.

5. The carrier plate cleaning device of claim 4, wherein: the dust hood comprises a horn-shaped groove with an upward opening and used for accommodating part of the rolling brush assembly, a dust collection groove connected with the lower end of the horn-shaped groove, and a dust collection pipe connected with the lower end of the dust collection groove; the dust suction pipe is provided with a dust suction interface connected with the dust suction power assembly.

6. The carrier plate cleaning device of claim 4, wherein: the dust absorption power component is dust suction and purification equipment.

7. A carrier plate cleaning device according to any one of claims 1-6, characterized in that: the rolling brush assembly comprises more than two rolling brushes which are arranged at intervals up and down and are in contact with the support plate and a rolling brush driving unit for driving the rolling brushes to rotate; the rotating direction of the rolling brush is opposite to the conveying direction of the support plate.

8. The carrier plate cleaning device of claim 7, wherein: the rolling brush driving unit comprises a rolling brush motor arranged outside the shell and a rolling brush transmission structure arranged in the shell and in transmission connection between the rolling brush and the rolling brush motor.