CN215452042U - Multi-beam, multi-wavelength output laser device - Google Patents
Multi-beam, multi-wavelength output laser device Download PDFInfo
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- CN215452042U CN215452042U CN202121405789.0U CN202121405789U CN215452042U CN 215452042 U CN215452042 U CN 215452042U CN 202121405789 U CN202121405789 U CN 202121405789U CN 215452042 U CN215452042 U CN 215452042U
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Abstract
The utility model relates to a multi-beam and multi-wavelength output laser device.A first half wave plate is connected with an infrared laser, a first half wave plate is connected with a first polarization spectroscope, the transmission direction of the first polarization spectroscope is connected with a first acousto-optic modulator, the reflection direction of the first polarization spectroscope is connected with a second half wave plate, the second half wave plate is connected with a second polarization spectroscope, and the reflection direction of the second polarization spectroscope is connected with a second acousto-optic modulator and a first frequency doubling module; the transmission direction of the second polarizing beam splitter is connected with the third half wave plate, the third half wave plate is connected with the third polarizing beam splitter, and the reflection direction of the third polarizing beam splitter is connected with the third acousto-optic modulator, the second frequency doubling module and the third frequency doubling module; the transmission direction of the polarizing beam splitter III is connected with the total reflection mirror, and the reflection light path of the total reflection mirror is connected with the acousto-optic modulator IV and the optical parametric oscillation module. A half wave plate and a polarization spectroscope are adopted to divide a laser beam into a plurality of laser beams, and the light splitting proportion of each laser beam can be precisely adjusted.
Description
Technical Field
The utility model relates to a multi-beam and multi-wavelength output laser device.
Background
At present, with the continuous improvement of the requirement of the industrial laser processing field on the processing efficiency, the higher requirement is provided for the output power and the output frequency of the laser, the higher output power and the higher frequency are needed to be adopted to improve the processing efficiency, but when the laser power is improved to a certain degree, the processing quality is influenced by the heat effect, and the improvement of the repetition frequency of the laser is limited by the scanning speed of a galvanometer or the limitation of the moving speed of a platform and cannot be used. Therefore, the method of multi-path parallel processing is adopted, and the laser processing efficiency can be obviously improved, for example, 2-path, 4-path or more paths of light splitting are adopted. The current mainstream method adopted by light splitting is to split laser by using a single part of output lens, and output lenses with different transmittances are selected according to the required light splitting proportion, but the light splitting mode has the phenomenon of inconsistent laser power of each path after light splitting due to the fact that the transmittance of the lens cannot be accurately controlled, and the consistency of the processing effect is influenced. In addition, after light splitting, the optical power of each path cannot be independently controlled, and the laser power of each path completely depends on the laser.
In the field of laser processing, when laser is used to process different objects or to achieve different processing effects, lasers of two or more wavelengths are required. For example, in the field of laser annealing, the wavelength combination of infrared and green light can be used for realizing special annealing processing of materials; in the field of glass processing, one wavelength is adopted during cutting, and the other wavelength is adopted during splitting. In the field of material processing, higher processing efficiency can be realized by infrared, and better processing quality can be realized by ultraviolet. Generally, a common means for obtaining multi-wavelength laser is to select two or more lasers with different wavelengths, so the use cost is very high and the system is relatively complex.
SUMMERY OF THE UTILITY MODEL
The utility model aims to overcome the defects in the prior art and provide a multi-beam and multi-wavelength output laser device.
The purpose of the utility model is realized by the following technical scheme:
the multi-beam, multi-wavelength output laser device is characterized in that: the infrared laser is connected with the first half-wave plate, the first half-wave plate is connected with the first polarization beam splitter, the first time light splitting is realized after the infrared laser passes through the first polarization beam splitter, the transmission direction of the first polarization beam splitter is connected with the first acousto-optic modulator to realize infrared output, the reflection direction of the first polarization beam splitter is connected with the second half-wave plate, the second half-wave plate is connected with the second polarization beam splitter, the second time light splitting is realized after the infrared laser reflected by the first polarization beam splitter passes through the second polarization beam splitter, the reflection direction of the second polarization beam splitter is connected with the second acousto-optic modulator, the second acousto-optic modulator is connected with the first frequency doubling module, and the green light output is realized after the infrared laser passes through the first frequency doubling module; the transmission direction of the second polarizing beam splitter is connected with the third half wave plate, the third half wave plate is connected with the third polarizing beam splitter, the infrared laser transmitted by the second polarizing beam splitter passes through the third polarizing beam splitter to realize third light splitting, the reflection direction of the third polarizing beam splitter is connected with the third acousto-optic modulator, the third acousto-optic modulator is connected with the second frequency doubling module, the second frequency doubling module is connected with the third frequency doubling module, and the infrared laser passes through the second frequency doubling module and the third frequency doubling module to realize ultraviolet output; the transmission direction of the polarizing beam splitter III is connected with the total reflection mirror, a reflection light path of the total reflection mirror is connected with the acousto-optic modulator IV, the acousto-optic modulator IV is connected with the optical parametric oscillation module, and the infrared laser passes through the optical parametric oscillation module to realize tunable wavelength output.
Further, in the multi-beam and multi-wavelength output laser device, the infrared laser is an infrared laser with output wavelengths of 1030nm, 1064nm and 1342nm, output power of 1-500W and pulse width of 100 fs-100 ns.
Further, in the multi-beam, multi-wavelength output laser device, the first half-wave plate, the second half-wave plate and the third half-wave plate are half-wave plates with working wavelengths of 1030nm, 1064nm and 1342 nm.
Further, in the multi-beam and multi-wavelength output laser device, the first polarization beam splitter, the second polarization beam splitter and the third polarization beam splitter are polarization beam splitters with working wavelengths of 1030nm, 1064nm and 1342nm and polarization extinction ratios of more than 500: 1.
Further, in the multi-beam and multi-wavelength output laser device, the acousto-optic modulator i, the acousto-optic modulator ii, the acousto-optic modulator iii and the acousto-optic modulator iv are acousto-optic modulators with working wavelengths of 1030nm, 1064nm and 1342nm, radio frequency power of 1-50W and radio frequency of 50-300 MHz.
Further, in the multi-beam, multi-wavelength output laser device, the first frequency doubling module and the second frequency doubling module employ LBO, BBO or KTP frequency doubling crystals.
Further, in the multi-beam, multi-wavelength output laser device, the frequency tripling module employs an LBO, BBO or CLBO frequency doubling crystal.
Further, in the multi-beam, multi-wavelength output laser device, the optical parametric oscillation module employs an LBO, BBO, or KTP nonlinear crystal.
Compared with the prior art, the utility model has obvious advantages and beneficial effects, and is embodied in the following aspects:
firstly, the utility model has novel design, adopts a mode of a half wave plate and a polarization spectroscope to realize that a laser beam is divided into a plurality of laser beams, and the light splitting proportion of each path of laser can realize precise adjustment, thereby solving the problem that the power of each path of laser is inconsistent after light splitting caused by adopting a part of output mirrors at present;
secondly, after light splitting, an acousto-optic modulator is adopted, the diffraction efficiency of the acousto-optic modulator is controlled through an electric signal, and real-time adjustment and on-off light control of each path of laser power are realized, which is very important for the laser processing process, especially when different processing objects are faced;
and thirdly, in the light path after light splitting, a frequency doubling module, a sum frequency module and an optical parametric oscillation module are arranged as required, laser output with different wavelengths is realized, a plurality of lasers are avoided, the complexity and the use cost of the system are reduced, and the application range of the laser system is greatly expanded.
Additional features and advantages of the utility model will be set forth in the description which follows, and in part will be obvious from the description, or may be learned by the practice of the utility model. The objectives and other advantages of the utility model will be realized and attained by the structure particularly pointed out in the written description and drawings.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.
FIG. 1: the utility model is a schematic diagram of an optical path structure.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. The components of embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations. Thus, the following detailed description of the embodiments of the present invention, presented in the figures, is not intended to limit the scope of the utility model, as claimed, but is merely representative of selected embodiments of the utility model. All other embodiments, which can be derived by a person skilled in the art from the embodiments of the present invention without making any creative effort, shall fall within the protection scope of the present invention.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures. Meanwhile, in the description of the present invention, the directional terms and the sequence terms, etc. are used only for distinguishing the description, and are not to be construed as indicating or implying relative importance.
As shown in fig. 1, in the multi-beam, multi-wavelength output laser device, an infrared laser 1 is connected with a first half-wave plate 2, the first half-wave plate 2 is connected with a first polarization beam splitter 3, the infrared laser realizes first light splitting after passing through the first polarization beam splitter 3, the transmission direction of the first polarization beam splitter 3 is connected with a first acousto-optic modulator 4 to realize infrared output, the reflection direction of the first polarization beam splitter 3 is connected with a second half-wave plate 5, the second half-wave plate 5 is connected with a second polarization beam splitter 6, the infrared laser reflected by the first polarization beam splitter 3 realizes second light splitting after passing through the second polarization beam splitter 6, the reflection direction of the second polarization beam splitter 6 is connected with a second acousto-optic modulator 10, the second acousto-optic modulator 10 is connected with a first frequency doubling module 11, and the infrared laser realizes green light output after passing through the first frequency doubling module 11; the transmission direction of the second polarizing beam splitter 6 is connected with the third half-wave plate 7, the third half-wave plate 7 is connected with the third polarizing beam splitter 8, the infrared laser transmitted by the second polarizing beam splitter 6 passes through the third polarizing beam splitter 8 to realize third light splitting, the reflection direction of the third polarizing beam splitter 8 is connected with the third acousto-optic modulator 12, the third acousto-optic modulator 12 is connected with the second frequency doubling module 13, the second frequency doubling module 13 is connected with the third frequency doubling module 14, and the infrared laser passes through the second frequency doubling module 13 and the third frequency doubling module 14 to realize ultraviolet output; the transmission direction of the polarizing beam splitter III 8 is connected with the total reflection mirror 9, the reflection light path of the total reflection mirror 9 is connected with the acousto-optic modulator IV 15, the acousto-optic modulator IV 15 is connected with the optical parametric oscillation module 16, and the infrared laser passes through the optical parametric oscillation module 16 to realize tunable wavelength output.
Wherein, the infrared laser is an infrared laser with output wavelengths of 1030nm, 1064nm and 1342nm wave bands, output power of 1-500W and pulse width of 100 fs-100 ns.
The half wave plate I2, the half wave plate II 5 and the half wave plate III 7 are half wave plates with working wavelengths of 1030nm, 1064nm and 1342 nm.
The first polarizing beam splitter 3, the second polarizing beam splitter 6 and the third polarizing beam splitter 8 are polarizing beam splitters with working wavelengths of 1030nm, 1064nm and 1342nm and polarization extinction ratios of more than 500: 1.
The acousto-optic modulator I4, the acousto-optic modulator II 10, the acousto-optic modulator III 12 and the acousto-optic modulator IV (15) are acousto-optic modulators with working wavelengths of 1030nm, 1064nm and 1342nm, radio frequency power of 1-50W and radio frequency of 50-300 MHz.
The first frequency doubling module 11 and the second frequency doubling module 13 adopt LBO, BBO or KTP frequency doubling crystals.
The frequency tripling module 14 adopts LBO, BBO or CLBO frequency doubling crystal.
The optical parametric oscillation module 16 employs an LBO, BBO, or KTP nonlinear crystal.
When the infrared laser is applied specifically, the infrared laser outputs infrared laser, the infrared laser is divided into four paths of laser (the number of the polarization beam splitters can be increased as required and the number of the beam splitters can be increased) through the three polarization beam splitters, the acousto-optic modulator is arranged on each beam splitting light path, the diffraction efficiency of the acousto-optic modulator is adjusted through an electric signal, the flexible adjustment and the on-off control of power can be realized, the condition that the output power and the light emitting state of each path of laser are completely limited by the output of the total infrared laser is avoided, and a nonlinear frequency conversion module (a frequency doubling module, a frequency tripling module and an optical parameter oscillation module) is arranged behind the acousto-optic modulator as required to realize multi-wavelength output; therefore, the utility model can realize the function of a plurality of lasers by matching a single laser with the light splitting path, greatly simplifies the system complexity and obviously saves the cost.
And splitting a beam of infrared laser to realize multi-beam output. The light splitting mode is realized by combining a half wave plate and a Polarization Beam Splitter (PBS). The incident infrared polarized light realizes polarization rotation by rotating the angle of the wave plate, and light beam separation in the horizontal direction and the vertical direction is realized after passing through PBS. The proportion of the light split in two directions can be accurately controlled by adjusting the rotation angle of the wave plate, so that the problem of inconsistent light split proportion caused by light split of a single partial output mirror can be solved. By continuously increasing the number of the wave plates and the PBS on the light path after light splitting, a plurality of laser beams can be output, and the output proportion of each path can be accurately controlled.
The utility model arranges an acousto-optic modulator (AOM) on any light splitting path, can realize the on-off control of single-path laser and the real-time adjustment of power by controlling the diffraction efficiency of the AOM of each path of light, which is very important in multi-beam laser processing, especially when each path of light faces different processing objects.
In order to meet the requirement of multi-wavelength output, the frequency doubling module, the sum frequency module and the optical parametric oscillation module are arranged behind the AOM, so that green light, ultraviolet and more wavelength outputs can be realized, thus realizing multi-path multi-wavelength output, avoiding the use of a plurality of lasers with different wavelengths, and increasing the complexity and the use cost of equipment.
In summary, the present invention has a novel design, and adopts a way of a half-wave plate and a polarization beam splitter to divide a laser beam into a plurality of laser beams, and the splitting ratio of each laser beam can be precisely adjusted, thereby solving the problem of inconsistent laser power of each laser beam after splitting caused by adopting a part of output mirrors at present.
After light splitting, an acousto-optic modulator is adopted, the diffraction efficiency of the acousto-optic modulator is controlled through an electric signal, and real-time adjustment and on-off light control of each path of laser power are achieved, which is very important for a laser processing process, especially when different processing objects are faced.
In the light path after light splitting, a frequency doubling module, a sum frequency module and an optical parametric oscillation module are arranged according to needs, laser output with different wavelengths is realized simultaneously, multiple lasers are avoided, the complexity and the use cost of the system are reduced, and the application range of the laser system is greatly expanded.
The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention. It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.
The above description is only for the specific embodiments of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art can easily conceive of the changes or substitutions within the technical scope of the present invention, and shall be covered by the scope of the present invention.
It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.
Claims (8)
1. A multi-beam, multi-wavelength output laser device, characterized by: the infrared laser (1) is connected with a first half-wave plate (2), the first half-wave plate (2) is connected with a first polarization spectroscope (3), infrared laser realizes first light splitting after passing through the first polarization spectroscope (3), the transmission direction of the first polarization spectroscope (3) is connected with a first acousto-optic modulator (4) to realize infrared output, the reflection direction of the first polarization spectroscope (3) is connected with a second half-wave plate (5), the second half-wave plate (5) is connected with a second polarization spectroscope (6), infrared laser reflected by the first polarization spectroscope (3) realizes second light splitting after passing through the second polarization spectroscope (6), the reflection direction of the second polarization spectroscope (6) is connected with a second acousto-optic modulator (10), the second acousto-optic modulator (10) is connected with a first frequency doubling module (11), and green light output is realized after the infrared laser passes through the first frequency doubling module (11); the transmission direction of the second polarizing beam splitter (6) is connected with a third half wave plate (7), the third half wave plate (7) is connected with a third polarizing beam splitter (8), infrared laser transmitted by the second polarizing beam splitter (6) passes through the third polarizing beam splitter (8) to realize third light splitting, the reflection direction of the third polarizing beam splitter (8) is connected with a third acousto-optic modulator (12), the third acousto-optic modulator (12) is connected with a second frequency doubling module (13), the second frequency doubling module (13) is connected with a third frequency doubling module (14), and the infrared laser passes through the second frequency doubling module (13) and the third frequency doubling module (14) to realize ultraviolet output; the transmission direction of the polarizing beam splitter III (8) is connected with the total reflection mirror (9), the reflection light path of the total reflection mirror (9) is connected with the acousto-optic modulator IV (15), the acousto-optic modulator IV (15) is connected with the optical parametric oscillation module (16), and the infrared laser passes through the optical parametric oscillation module (16) to realize tunable wavelength output.
2. The multi-beam, multi-wavelength output laser device according to claim 1, characterized in that: the infrared laser is an infrared laser with output wavelengths of 1030nm, 1064nm and 1342nm, output power of 1-500W and pulse width of 100 fs-100 ns.
3. The multi-beam, multi-wavelength output laser device according to claim 1, characterized in that: the half wave plate I (2), the half wave plate II (5) and the half wave plate III (7) are half wave plates with working wavelengths of 1030nm, 1064nm and 1342 nm.
4. The multi-beam, multi-wavelength output laser device according to claim 1, characterized in that: the first polarizing beam splitter (3), the second polarizing beam splitter (6) and the third polarizing beam splitter (8) are polarizing beam splitters with working wavelengths of 1030nm, 1064nm and 1342nm and polarization extinction ratios of more than 500: 1.
5. The multi-beam, multi-wavelength output laser device according to claim 1, characterized in that: the acousto-optic modulator I (4), the acousto-optic modulator II (10), the acousto-optic modulator III (12) and the acousto-optic modulator IV (15) are acousto-optic modulators with working wavelengths of 1030nm, 1064nm and 1342nm, radio-frequency power of 1-50W and radio-frequency of 50-300 MHz.
6. The multi-beam, multi-wavelength output laser device according to claim 1, characterized in that: and the first frequency doubling module (11) and the second frequency doubling module (13) adopt LBO, BBO or KTP frequency doubling crystals.
7. The multi-beam, multi-wavelength output laser device according to claim 1, characterized in that: the frequency tripling module (14) adopts LBO, BBO or CLBO frequency doubling crystals.
8. The multi-beam, multi-wavelength output laser device according to claim 1, characterized in that: the optical parametric oscillation module (16) adopts LBO, BBO or KTP nonlinear crystal.
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| CN202121405789.0U CN215452042U (en) | 2021-06-23 | 2021-06-23 | Multi-beam, multi-wavelength output laser device |
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| CN202121405789.0U CN215452042U (en) | 2021-06-23 | 2021-06-23 | Multi-beam, multi-wavelength output laser device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN113540955A (en) * | 2021-06-23 | 2021-10-22 | 苏州贝林激光有限公司 | Multi-beam, multi-wavelength output laser device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN113540955A (en) * | 2021-06-23 | 2021-10-22 | 苏州贝林激光有限公司 | Multi-beam, multi-wavelength output laser device |
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