CN215451362U - Wafer pastes dress feeder equipment - Google Patents

Abstract

The application provides a wafer mounting and feeding device, which comprises a base, a feeding device and a feeding device, wherein the base is provided with a head end and a tail end; the film expanding device is connected to the tail end of the base in a liftable manner; the upper pressure plate assembly is arranged on the base; the film carrier is connected to the upper pressure plate assembly in a sliding mode; the clamping device is connected to the base in a sliding mode and slides back and forth from the head end to the tail end; in this application, through inciting somebody to action grabbing device with expand the membrane device with the top board assembly sets up integrative structure, makes grabbing device can top board assembly with expand to move between the membrane device and shuttle, and avoid the problem that the top board assembly needs the opening blowing has guaranteed the tensile equilibrium of expanding the membrane, has solved simultaneously in the traditional design will press from both sides the problem of getting the external design of device, has reduced grabbing device occupation space has improved the work efficiency of wafer subsides dress feeding equipment.

Description

Wafer pastes dress feeder equipment

Technical Field

The utility model relates to a feeding device, in particular to a wafer mounting feeding device.

Background

Wafer pastes dress automatic feed among the prior art and operates by the mode that the blowing was got to outside clamp, can open a breach on the wafer clamp plate and supply to press from both sides the material device business turn over, when the wafer when expanding the membrane the clamp plate pushes down with expand membrane ring interact and expand the membrane, the blue membrane of brilliant ring that the breach department received expands membrane tension unbalance, has influenced and has expanded brilliant yield, and presss from both sides and get the blowing device and all need externally, has increased equipment occupation space.

SUMMERY OF THE UTILITY MODEL

In order to overcome the defects and shortcomings in the prior art, the central wafer mounting and feeding equipment aims to solve the problem that the structure of the central wafer mounting and feeding equipment in the prior art is complex.

The application provides a wafer mounting and feeding device, which comprises a base, a feeding device and a feeding device, wherein the base is provided with a head end and a tail end; the membrane expanding device is connected to the tail end in a liftable manner; the upper pressure plate assembly is arranged on the base; the film carrier is connected to the upper pressure plate assembly in a sliding mode; the clamping device is connected to the base in a sliding mode and slides back and forth from the head end to the tail end; when the clamping device slides to the head end, the film carrier slides to a position right opposite to the film expanding device, the clamping device is separated from the film carrier, the upper pressure plate assembly descends, and the film expanding device ascends to a position close to the film carrier to perform film expanding work; when the film expanding device descends and is far away from the film carrier, the upper pressure plate assembly ascends, the clamping device clamps the film carrier and slides from the head end to the tail end so as to convey the film carrier away from the upper pressure plate assembly.

The clamping device comprises a clamping cantilever, a cantilever fixing piece and a clamping mechanism, the cantilever fixing piece is connected with the base in a sliding mode along the direction from the head end to the tail end, the clamping cantilever is installed on the cantilever fixing piece, the clamping mechanism is installed on the clamping cantilever, and the clamping mechanism is used for clamping the film carrier.

The film carrier clamping device comprises a base, a clamping device body and a clamping device, wherein the clamping device body is provided with a head end and a tail end, the clamping device body is provided with a clamping device, the clamping device body is provided with a clamping mechanism, the clamping mechanism is provided with a first driving mechanism, the first driving mechanism is arranged on the base, the first driving mechanism controls the clamping device to clamp the film carrier, and the first driving mechanism drives the clamping device to move along the direction from the head end to the tail end.

The upper pressure plate assembly comprises a top plate, a cover plate, a plurality of first pulleys and a pair of bearing pieces, the top plate is arranged on the base, the first pulleys are fixed on one side, facing the base, of the top plate, the cover plate is installed on the top plate, the first pulleys are rotatably connected with the cover plate, the bearing pieces are installed on one side, facing the base, of the cover plate, the bearing pieces are provided with abutting faces, the film carriers abut against the abutting faces, the abutting faces are parallel to the movement direction of the clamping device, and the bearing pieces are used for bearing the film carriers.

The upper pressure plate assembly further comprises a guide piece, the guide piece is fixed to one surface, facing the base, of the top plate, the guide piece is arranged on one side, close to the tail end, of the top plate, and the guide piece and the bearing piece are arranged on the same horizontal line.

The wafer mounting and feeding equipment further comprises a lifting device and a second driving mechanism, wherein the lifting device is installed on the base, the second driving mechanism is installed on the base, and the second driving mechanism controls the lifting device to drive the upper pressure plate assembly to ascend or descend.

Wherein, expand the membrane device and include that it goes up and down to expand membrane ware, inner ring seat, outer ring seat, a plurality of second pulley and drive the transmission assembly of inner ring seat, it is a plurality of the second pulley is fixed in the base dorsad the one side of top board assembly, inner ring seat is installed on the base, it is a plurality of the second pulley ring is located outer ring seat week side, and a plurality of the second pulley with outer ring seat rotates to be connected, outer ring seat snare is located the inner ring seat, it is fixed in to expand the membrane ware the inner ring seat orientation the one end of top board assembly, transmission assembly is including fixing gyro wheel on the outer ring seat and set up in the rotatory groove of inner ring seat tilt up, outer ring seat rotates and drives the gyro wheel along the rotatory groove motion is in order to realize the inner ring seat goes up and down.

The membrane expanding device further comprises a third driving mechanism, the third driving mechanism is installed on the base, and the third driving mechanism controls the outer ring base to rotate.

The wafer mounting and feeding equipment further comprises a connecting device, one end of the connecting device is fixed on the cover plate, and the other end of the connecting device is fixed on the film expanding device, so that when the film expanding device rotates, the film expanding device drives the cover plate to rotate synchronously.

The wafer mounting and feeding equipment further comprises a clamping assembly, the clamping assembly is arranged on the base, and the clamping assembly is used for limiting the rotation of the inner ring base.

In this application, through inciting somebody to action grabbing device with expand the membrane device with the top board assembly sets up integrative structure, makes grabbing device can top board assembly with expand to move between the membrane device and shuttle, and avoid the problem that the top board assembly needs the opening blowing has guaranteed the tensile equilibrium of expanding the membrane, has solved simultaneously in the traditional design will press from both sides the problem of getting the external design of device, has reduced grabbing device occupation space has improved the work efficiency of wafer subsides dress feeding equipment.

Drawings

Fig. 1 is a schematic structural diagram of a wafer mounting and feeding apparatus provided in the present application.

Fig. 2 is an exploded view of a wafer mounting and feeding apparatus according to the present application.

Fig. 3 is another schematic diagram of a wafer mounting and feeding apparatus according to the present application.

Fig. 4 is an exploded view of the upper platen assembly provided herein.

Fig. 5 is a partially enlarged schematic view of fig. 4.

Fig. 6 is another schematic diagram of a wafer mounting supply according to the present application.

Fig. 7 is a schematic structural diagram of a film spreading device provided by the present application.

Fig. 8 is another schematic illustration of a wafer mounting feed according to the present application.

Fig. 9 is another schematic illustration of a wafer mount feed according to the present application.

Detailed Description

The technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. It is to be understood that the embodiments described are only a few embodiments of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments of the present invention without any inventive step, shall fall within the scope of protection of the present invention.

Referring to fig. 1 to 2, the present application provides a wafer mounting and feeding apparatus 1, which includes a base 10, wherein the base 10 has a head end 11 and a tail end 12; the membrane expanding device 20 is connected to the tail end 12 in a liftable mode; the upper pressure plate assembly 30 is arranged on the base 10, and the upper pressure plate assembly 30 is arranged on the base 10; a film carrier 50, said film carrier 50 being slidably connected to said upper platen assembly 30; the clamping device 40 is connected to the base 10 in a sliding mode, and slides back and forth from the head end 11 to the tail end 12; when the clamping device 40 slides to the head end 11, the film carrier 50 slides to a position opposite to the film expanding device 20, the clamping device 40 is separated from the film carrier 50, the upper platen assembly 30 descends, and the film expanding device 20 ascends to a position close to the film carrier 50 for film expanding work; when the film expanding device 20 descends away from the film carrier 50, the upper platen assembly 30 ascends, and the gripping device 40 grips the film carrier 50 and slides from the head end 11 to the tail end 12 to send the film carrier 50 away from the upper platen assembly 30.

Specifically, base 10 is rectangular block, first accepting groove 10a has been seted up to tail end 12 of base 10, first accepting groove 10a is circular, expand membrane device 20 install in first accepting groove 10a, expand membrane device 20 along the axial direction of accepting groove carries out the membrane work that expands of elevating movement, top board assembly 30 also along the axial direction of first accepting groove 10a carries out elevating movement, film carrier 50 establishes top board assembly 30 with between the base 10, film carrier 50 is the blue membrane steel ring, press from both sides and get device 40 and can snatch film carrier 50 in the head end 11 of base 10 slides to tail end 12 of base 10.

When the clamping device 40 clamps one film carrier 50 from a material bin (not shown) and moves along the direction from the tail end 12 to the head end 11, the film carrier 50 is driven by the clamping device 40 to move on the upper platen assembly 30 along the same moving direction as the clamping device 40, at this time, the upper platen assembly is located at the highest point where it can be lifted, the film expanding device 20 is located at the lowest point where it can be lifted, when the clamping device 40 clamps the film carrier 50 to be coaxial with the film expanding device 20, the clamping device 40 releases the film carrier 50 and continues to move to the head end 11, the clamping device 40 stands by at the head end 11, the upper platen assembly 30 fixes the film carrier 50, and the upper platen assembly 30 begins to descend to the lowest point where it can be lifted, the film expanding device 20 starts to ascend to the highest point capable of ascending and descending, and the film expanding device 20 performs film expanding operation on the film carrier 50; after the film expanding device 20 completes the film expanding operation, the film carrier 50 needs to be replaced, the film expanding device 20 descends from the highest point to the lowest point, the upper platen assembly 30 ascends to the highest point to avoid blocking the movement of the clamping device 40, the clamping device 40 moves to the film carrier 50 and grabs the film carrier 50, and the film expanded film carrier 50 is transported to a material bin (not shown) along the direction from the head end 11 to the tail end 12.

In this application, through inciting somebody to action press from both sides get device 40 with expand membrane device 20 with top board assembly 30 sets up an organic whole structure, makes press from both sides get device 40 can top board assembly 30 with expand moving between the membrane device 20 and shuttle, and avoid the problem that top board assembly 30 needs the opening blowing has guaranteed the tensile equilibrium of expanding the membrane, has solved simultaneously in traditional design press from both sides the problem of getting the external design of device 40, has reduced press from both sides and get device 40 occupation space, has improved the work efficiency of wafer subsides dress feeding equipment 1.

Further, referring to fig. 3, the clamping device 40 includes a clamping cantilever 41, a cantilever fixing member 42, and a clamping mechanism 43, the cantilever fixing member 42 is slidably connected to the base 10 along the direction from the head end 11 to the tail end 12, the clamping cantilever 41 is mounted on the cantilever fixing member 42, the clamping mechanism 43 is mounted on the clamping cantilever 41, and the clamping mechanism 43 is configured to clamp the film carrier 50.

Specifically, the base 10 has a side wall 13, the side wall 13 extends along a direction from the head end 11 to the tail end 12, a first slide rail 131 is disposed on a surface of the side wall 13 facing the film spreading device 20, the first slide rail 131 extends along the direction from the head end 11 to the tail end 12, the first slide rail 131 is fixed to the side wall 13 by a screw (not shown), and a first slide groove adapted to the first slide rail 131 is disposed on a surface of the cantilever fixing member 42 facing the first slide rail 131, so that the cantilever fixing member 42 can move back and forth on the first slide rail 131; the clamping cantilever 41 is rectangular, the clamping cantilever 41 extends along a direction perpendicular to the side wall 13, one end of the clamping cantilever 41 close to the side wall 13 is fixedly connected with the cantilever fixing member 42 through a screw, one end of the clamping cantilever 41 far away from the side wall 13 is provided with a clamping mechanism 43, the clamping mechanism 43 is fixedly connected with the cantilever fixing member 42 through a screw, a clamping cylinder 44 is arranged on the clamping cantilever 41, and the clamping cylinder 44 controls the clamping mechanism 43 to compress and release, so that the clamping mechanism 43 can clamp the film carrier 50 or place the film carrier 50.

In this embodiment, the clamping device 40 is installed on the base 10, and the clamping device 40 can move back and forth along the first slide rail 131, so that the clamping device 40 can move from the head end 11 to the tail end 12, so that the clamping device 40 can transfer the film carrier 50, the wafer mounting and feeding apparatus 1 is more integrated, and the work efficiency is improved.

Further, with reference to fig. 3, the feeding apparatus 1 further includes a first driving mechanism 100, the first driving mechanism 100 is installed on the base 10, the first driving mechanism 100 controls the clamping device 40 to clamp the film carrier 50, and the first driving mechanism 100 drives the clamping device 40 to move along the direction from the head end 11 to the tail end 12.

Specifically, the first driving mechanism 100 is disposed at one side of the head end 11, the first driving mechanism 100 includes a first driving motor 110, a first driving synchronous belt 120, a first driving synchronous wheel 130 and a first driving fixing seat 140, one end of the first driving fixing seat 140 is fixedly connected to the base 10, the other end of the first driving fixing seat 140 extends out of the head end 11 and is used for fixedly mounting the first driving motor 110, the first driving motor 110 is fixed on the first driving fixing seat 140 by a screw, the first driving fixing seat 140 semi-surrounds the first driving motor 110, the first driving motor 110 extends out of the head end 11 to reduce a contact area between the first driving motor 110 and the base 10 to increase a heat dissipation efficiency of the first driving motor 110, the first driving motor 110 is provided with the first driving synchronous wheel 130 facing one side of the side wall 13, first driving motor 110 can drive first drive synchronizing wheel 130 rotates, the week side winding of first drive synchronizing wheel 130 has first drive hold-in range 120, first drive hold-in range 120 along head end 11 extremely the direction of tail end 12 rotates, first drive hold-in range 120 with cantilever mounting 42 butt each other, can drive when first drive hold-in range 120 rotates cantilever mounting 42 removes.

In this embodiment, the first driving motor 110 drives the first driving synchronous wheel 130 to rotate, the first driving synchronous wheel 130 drives the first driving synchronous belt 120 to rotate, and the first synchronous belt drives the cantilever fixing member 42 to move, so that the first driving mechanism 100 drives the clamping device 40 to move; after the wafer mounting and feeding device 1 finishes the film expanding operation, the first driving mechanism 100 drives the clamping device 40 to move to be close to the film carrier 50, the first driving mechanism 100 sends an electric signal to control the clamping mechanism 43 to clamp the film carrier 50, and the first driving mechanism 100 continues to drive the clamping device 40 to convey the film carrier 50 to the material bin.

Further, referring to fig. 4 to 5, the upper platen assembly 30 includes a top plate 31, a cover plate 32, a plurality of first pulleys 33, and a pair of supporting members 34, the top plate 31 is disposed on the base 10, the plurality of first pulleys 33 are fixed on one side of the top plate 31 facing the base 10, the cover plate 32 is mounted on the top plate 31, the plurality of first pulleys 33 are rotatably connected with the cover plate 32, the supporting members 34 are mounted on one side of the cover plate 32 facing the base 10, the supporting members 34 have abutting surfaces 34c, the film carriers 50 abut against the abutting surfaces 34c, the abutting surfaces 34c are parallel to the moving direction of the clamping device 40, and the supporting members 34 are used for supporting the film carriers 50.

Specifically, the upper platen assembly 30 is perpendicular to the lifting direction of the film expanding device 20, the top plate 31 is rectangular, the top plate 31 is disposed in the direction of the orthographic projection of the tail end 12, the top plate 31 is provided with a second accommodating groove 30a, the second accommodating groove 30a is circular, the second accommodating groove 30a and the first accommodating groove 10a are coaxially disposed, the cover plate 32 is in an annular boss structure, one end of the cover plate 32 departing from the base 10 is accommodated in the second accommodating groove 30a, the other end of the cover plate 32 is provided with a first annular rail 32a, the axial cross section of the first annular rail 32a is in a V-shaped structure, the plurality of first pulleys 33 are mounted on one side of the top plate 31 facing the base 10, the plurality of first pulleys 33 are arranged along the circumference of the cover plate 32, and the plurality of first pulleys 33 are slidably connected with the first annular rail 32a, so that the cover plate 32 can be rotated while the plurality of first pulleys 33 fix the cover plate 32.

As can be understood, referring to fig. 5, a pair of the supporting members 34 are oppositely disposed on two sides of the cover plate 32, the supporting members 34 are fixedly connected to the first ring rail 32a, the supporting members 34 extend along the moving direction of the clamping device 40, the supporting members 34 are in an L-shaped structure, the supporting members 34 further have a supporting main body portion 34a and a supporting extension portion 34b, the abutting surface 34c is located on a surface of the supporting main body portion 34a facing the axial center of the film carrier 50, the supporting extension portion 34b is perpendicular to the supporting main body portion 34a, the supporting extension portion 34b extends toward the axial center of the film carrier 50, and the supporting extension portion 34b is used for placing the film carrier 50, so that the supporting members 34 can support the film carrier 50; the film carrier is characterized in that a first limiting member 36 and a second limiting member 37 are arranged on the bearing main body portion 34a, the first limiting member 36 is a stop block, the first limiting member 36 is fixed on one side of the bearing member 34 close to the head end 11, the second limiting member 37 is an elastic sheet roller 251, the film carrier 50 can slide into the bearing member 34 from one side of the tail end 12, the second limiting member 37 is fixed on one side of the bearing member 34 close to the tail end 12, and the first limiting member 36 and the second limiting member 37 are used for stopping the film carrier 50 from separating from the bearing member 34.

In this embodiment, when the clamping device 40 grabs the film carrier 50 and moves from the tail end 12 to the second limiting member 37, the clamping device 40 drives the film carrier 50 to slide into the second limiting member 37, and when the clamping device 40 drives the film carrier 50 to the first limiting member 36, the first limiting member 36 limits the film carrier 50 to continue moving, and the clamping device 40 releases the template carrier and moves to the head end 11 to wait. The film carrier 50 is supported by mounting a pair of the carriers 34 on a side of the cover plate 32 facing the base 10, and the film carrier 50 is prevented from being detached from the carriers 34 by respectively disposing the first and second stoppers 36 and 37 in the carriers 34.

In one embodiment, referring to fig. 3, the upper platen assembly 30 further includes a second cover plate 38 and an adapter plate 39, the second cover plate 38 is annular, the second cover plate 38 is fixedly connected with the cover plate 32, one side of the cover plate 32, which faces away from the base 10, is provided with a cover plate 32 positioning groove, one side of the second cover plate 38, which faces away from the base 10, is provided with a cover plate 32 mounting groove, one end of the adapter plate 39 is clamped in the positioning groove of the cover plate 32, the other end of the adapter plate 39 is fixed in the mounting groove of the cover plate 32 through a screw, so that the second cover plate 38 can be stably fixed in the cover plate 32, the cover plate 32 is a 12-inch steel ring plate, the second cover plate 38 is an 8-inch steel ring plate, when the cover plate needs to be replaced, the second cover plate 38 is placed on the inner side of the cover plate 32, and then the cover plate 32 is fixedly connected with the second cover plate 38 through the adapter plate 39. Of course, the bearing members 34 with corresponding sizes are installed on the sides of the second cover plate 38 facing the base 10, and are not described in detail herein.

In this embodiment, the second cover plate 38 capable of being replaced is additionally arranged on the inner side of the cover plate 32, so that 8/12-inch wafers can be compatible to be produced, production personnel can flexibly change according to actual requirements, and the working efficiency is improved.

Further, referring to fig. 6, the upper platen assembly 30 further includes a pair of guiding members 35, the pair of guiding members 35 are fixed on a surface of the top plate 31 facing the base 10, the guiding members 35 are disposed on a side of the top plate 31 close to the tail end 12, and the guiding members 35 and the bearing members 34 are disposed on a same horizontal line.

Specifically, the guide member 35 is an L-shaped structure, the guide member 35 is similar to the bearing member 34 in structure, the guide member 35 has a guide main body portion 35a and a guide extension portion 35b, the guide main body portion 35a and the guide extension portion 35b are perpendicular to each other, the guide extension portion 35b is consistent with the extending direction of the bearing extension portion 34b, the guide main body portion 35a is fixed on a surface of the top plate 31 facing the base 10, and the guide member 35 extends from a side of the top plate 31 near the tail end 12 to the bearing member 34 in the direction of the head end 11.

In this embodiment, the guide 35 is installed on the top plate 31 near the tail end 12, so that when the gripping device 40 takes out the film carrier 50 from the material bin, the film carrier 50 can be moved in a directional manner and can be prevented from being displaced when moving.

Further, referring to fig. 3, the wafer mounting and feeding apparatus 1 further includes a lifting device 60 and a second driving mechanism 200, wherein the lifting device 60 is installed on the base 10, the second driving mechanism 200 is installed on the base 10, and the second driving mechanism controls the lifting device 60 to drive the upper platen assembly 30 to ascend or descend.

Specifically, the lifting devices 60 are disposed at corners of the top plate 31, there are four lifting devices 60, the lifting devices 60 fixedly connect the base 10 and the upper platen assembly 30, each lifting device 60 includes a lifting rod 61 and a rotating ring 62, one end of the lifting rod 61 is fixedly connected with the top plate 31, the other end of the lifting rod 61 is fixedly connected with the base 10 and extends to a side of the base 10 opposite to the upper platen assembly 30, the rotating ring 62 is sleeved on the periphery of the lifting rod 61, and the rotating ring 62 rotates to drive the lifting rod 61 to ascend or descend; the second driving mechanism 200 is disposed on a side of the head end 11 away from the side wall 13, the second driving mechanism 200 is rotatably connected to the lifting device 60, the second driving mechanism 200 includes a second driving motor 210 and a second driving fixing seat 220, the second driving fixing seat 220 is mounted on a side of the head end 11 away from the side wall 13, the second driving motor 210 is fixed in the second driving fixing seat 220, and the second driving motor 210 is rotatably connected to the rotating ring 62; the end of the lifting rod 61 away from the upper platen assembly 30 is further provided with a second driving synchronous wheel 230 and a second driving synchronous belt 240, the second driving timing wheel 230 and the second driving timing belt 240 are disposed at a side of the base 10 facing away from the upper platen assembly 30, the second driving synchronous wheel 230 is sleeved on the periphery of the lifting rod 61, the second driving synchronous belt 240 is wound on the second driving synchronous wheel 230, the second driving motor 210 drives the rotating ring to rotate, the rotating ring drives the lifting rod 61 to rotate, the lifting rod 61 rotates to drive the second driving synchronous wheel 230 to rotate, the second driving synchronous wheel 230 drives the second driving synchronous belt 240 to slide, the remaining three lifting devices 60 are driven to rotate, and the lifting rods 61 lift the upper platen assembly 30 away from the base 10.

When the wafer mounting and feeding apparatus 1 needs to replace the film carrier 50, the second driving mechanism 200 controls the lifting device 60 to drive the upper platen assembly 30 to lift, and the clamping device 40 clamps the film carrier 50 and transmits the film carrier to the tail end 12; after the film carrier 50 is gripped by the gripping device 40 and the carrier 34 is placed on the film carrier, the second driving mechanism 200 controls the lifting device 60 to drive the upper platen assembly 30 to descend for film expanding operation.

In this embodiment, the lifting device 60 is installed in the corner area of the top plate 31, so that the upper platen assembly 30 can be stably installed on the base 10, and the second driving mechanism 200 controls the lifting device 60 to move to drive the upper platen assembly 30 to move, so that the wafer mounting and feeding apparatus 1 has a compact structure and a high integration degree, and the production efficiency is improved.

Further, referring to fig. 6 and 7, the film spreading device 20 includes a film spreading device 21, an inner ring seat 22, an outer ring seat 23, a plurality of second pulleys 24 and a transmission assembly 25 for driving the inner ring seat 22 to ascend and descend, the plurality of second pulleys 24 are fixed on a surface of the base 10 facing away from the upper platen assembly 30, the inner ring seat 22 is installed on the base 10, the plurality of second pulleys 24 are annularly arranged on the periphery of the outer ring seat 23, the plurality of second pulleys 24 are rotatably connected with the outer ring seat 23, the outer ring seat 23 is annularly sleeved on the inner ring seat 22, the film spreading device 21 is fixed on one end of the inner ring seat 22 facing the upper platen assembly 30, the transmission assembly 25 includes a roller 251 fixed on the outer ring seat 23 and a rotation groove 252 opened on the inner ring seat 22 and inclined upward, the outer ring seat 23 rotates to drive the roller 251 to move along the rotation groove 252, to achieve the lifting movement of the inner ring seat 22.

Specifically, the outer ring seat 23 is of an annular boss structure, one end of the outer ring seat 23 facing the upper platen assembly 30 is accommodated in the first accommodating groove 10a, one end of the outer ring seat 23 facing away from the upper platen assembly 30 is provided with a second ring rail 23a, an axial cross section of the second ring rail 23a is of a V-shaped structure, the plurality of second pulleys 24 are installed on one side of the base 10 facing away from the upper platen assembly 30, the plurality of second pulleys 24 are arranged along the circumference of the outer ring seat 23, and the plurality of second pulleys 24 are slidably connected with the second ring rail 23a, so that the plurality of second pulleys 24 can support the outer ring seat 23 and can also perform rotary motion with the outer ring seat 23; the outer ring seat 23 is provided with an inner wall 23c, the inner wall 23c is provided with roller positioning holes 23b matched with the rollers 251, the rollers 251 are fixed in the roller positioning holes 23b, the three rollers 251 are uniformly arranged on the inner wall 23c, one side of the rotating groove 252 close to the film expander 21 is also provided with roller clamping grooves 252, the roller clamping grooves 252 are horizontal tracks, and the roller clamping grooves 252 are used for accommodating the rollers 251; the film expanding device 20 further comprises a roller retainer 221, a retainer fixing groove (not shown) is formed on a surface of the inner ring seat 22 facing away from the upper platen assembly 30, the roller retainer 221 is installed in the retainer fixing groove, the roller retainer 221 is elastically connected to the inner ring seat 22, the roller retainer 221 and the inner ring seat 22 form a roller receiving groove 221a, the roller receiving groove 221a is semi-arc shaped, the size of the roller 251 receiving groove 221a is matched with the size of the roller 251, the roller receiving groove 221a and the rotation groove 252 form a joint portion 221b, the joint portion 221b is rectangular groove shaped, the joint portion 221b and the inner ring seat 22 have a smaller distance than the diameter of the roller 251, when the roller 251 slides to the joint portion 221b, since the roller retainer 221 is elastically connected to the inner ring seat 22, the roller 251 supports the roller baffle 221, that is, the roller baffle 221 is extended toward the side away from the inner ring seat 22, then the roller 251 continues to slide into the roller receiving groove 221a, the roller baffle 221 is contracted toward one surface of the inner ring seat 22, so that the roller 251 is fixed in the roller receiving groove 221a, that is, the inner ring seat 22 and the outer ring seat 23 are integrally synchronized, the roller 251 slidably connects the outer ring seat 23 and the inner ring seat 22, the film expander 21 is in an annular boss structure, the film expander 21 is magnetically connected with one end of the inner ring seat 22 facing the upper platen assembly 30, and one end of the film expander 21 close to the inner ring seat 22 is fixed on the inner ring seat 22 through a pin, so that the film expander 21 rotates along with the rotation of the inner ring seat 22, and at the same time, the film expander 21 is conveniently detached from the inner ring seat 22, the structure is simple and stable, and in other embodiments, the membrane expander 21 may also be fixed on the inner ring seat 22 by means of adhesion, screwing, or the like.

In this embodiment, the roller 251 is installed on the outer ring seat 23, and the rotating groove 252 is formed on the inner ring seat 22, so that the inner ring seat 22 is slidably connected to the outer ring seat 23, and the roller 251 can slide on the rotating groove 252, so as to drive the inner ring seat 22 to perform a lifting motion relative to the outer ring seat 23, so as to satisfy that the clamping device 40 still maintains a sufficient film expanding lifting height on the premise of passing between the upper platen assembly 30 and the base 10, so as to satisfy the film expanding performance of the wafer.

Further, referring to fig. 8 to 9, the wafer mounting and feeding apparatus 1 further includes a clamping assembly 90, the clamping assembly 90 is disposed on the base 10, and the clamping assembly 90 is used for limiting the rotation of the inner ring seat 22.

The holding assembly 90 includes a holding cylinder 91 and a pressing rod 92, the holding cylinder 91 is fixed on one side of the head end 11 near the film expanding device 20, the clamping cylinder 91 is in a rectangular block shape, the pressure rod 92 is fixed at one end of the clamping cylinder 91 facing the film expanding device 20, the pressing rod 92 is in a convex structure, a second positioning groove 22b is formed on one side of the inner ring seat 22 facing the head end 11, a pair of inserts 93 are mounted on the second positioning slot 22b, the inserts 93 are rectangular blocks, the inserts 93 are mounted in the second positioning slot 22b at intervals, the press rod 92 is inserted into the gap between the inserts 93, when the third driving mechanism 300 drives the outer ring seat 23 to rotate to a predetermined angle, the retaining cylinder 91 pushes the pressing rod 92 to be inserted into the insert block 93, so as to prevent the inner ring seat 22 from rotating further.

Further, the wafer mounting and feeding apparatus 1 further includes a third driving mechanism 300, the third driving mechanism 300 is installed on the base 10, and the third driving mechanism 300 controls the outer ring seat 23 to rotate.

Specifically, referring to fig. 2 and fig. 6, the third driving mechanism 300 is disposed on a side of the tail end 12 away from the side wall 13, the third driving mechanism 300 includes a third driving motor 310, a third driving timing belt 320, a third driving timing wheel 330, a third driving rotation shaft 340, an outer ring seat timing wheel 350 and an outer ring seat timing belt 360, one end of the third driving rotating shaft 340 facing the upper platen assembly 30 is wound and connected with the third driving motor 310 by the third driving timing belt 320, one end of the third driving rotating shaft 340, which faces away from the upper pressure plate, is connected with the outer ring seat synchronous pulley 350 by winding through the outer ring seat synchronous belt 360, the third driving motor 310 controls the third driving synchronous wheel 330 to rotate, the third driving synchronous wheel 330 drives the third driving rotary shaft 340 to rotate, the third driving rotation shaft 340 rotates to drive the outer ring seat synchronizing wheel 350 to rotate; the outer ring seat synchronizing wheel 350 is fixed on one side of the outer ring seat 23, which faces away from the upper pressure plate assembly 30, and is mounted on one side of the second ring rail 23a, which faces away from the inner ring seat 22, through screws, so that the outer ring seat synchronizing wheel 350 rotates to drive the outer ring seat 23 to rotate.

When the wafer mounting and feeding equipment 1 needs to replace the film carrier 50, the clamping cylinder 91 pushes the pressing rod 92 to be inserted into the insert block 93, to prevent the inner ring holder 22 from further rotating, the roller 251 is located in the roller receiving groove 221a, the third driving motor 310 controls the outer ring seat synchronizing wheel 350 to rotate, the outer ring seat synchronizing wheel 350 drives the outer ring seat 23 to rotate, the outer ring holder 23 rotates to make the roller 251 move from the roller receiving groove 221a to the roller receiving groove 252a, the outer ring holder 23 is fixed with respect to the base 10, that is, the inner race 22 descends along the rotation groove 252, and at the same time, the pressing rod 92 descends along the gap of the insert 93, and further, the film expander 21 is driven to descend, so that the film carrier 50 is clamped by the clamping device 40 and moves from the head end 11 to the tail end 12.

In this embodiment, the third driving mechanism 300 controls the outer ring seat 23 to rotate, and drives the inner ring seat 22 to lift along the rotating groove 252 through the cooperation between the roller 251 and the inner ring seat 22, so as to realize efficient and convenient lifting movement of the film expanding device 20 on the base 10, so that under the condition that the clamping device 40 can shuttle in the gap between the upper platen assembly 30 and the film expanding device 20, a sufficient film expanding lifting height is still maintained, so as to ensure the film expanding performance of the wafer, and improve the stability of wafer processing.

Further, referring to fig. 2, the wafer mounting and feeding apparatus 1 further includes an encoder 70, the encoder 70 is installed at one end of the tail end 12 close to the side wall 13, an encoder synchronizing wheel (not shown) is installed at one end of the encoder 70 opposite to the upper platen assembly 30, the encoder synchronizing wheel is slidably connected to the outer annular seat synchronous belt 360, the encoder 70 can read a rotation angle of the third driving synchronizing wheel 330, that is, the encoder 70 can feed back an angle of each rotation of the third driving synchronizing wheel 330, and a worker can adjust or change an angle of the film carrier 50 by combining feedback of the encoder 70 with actual requirements.

Further, referring to fig. 8, the wafer mounting and feeding apparatus 1 further includes a connecting device 80, one end of the connecting device 80 is fixed to the cover plate 32, and the other end of the connecting device 80 is fixed to the film spreading device 20, so that when the film spreading device 20 rotates, the film spreading device 20 drives the cover plate 32 to rotate synchronously.

Specifically, the connecting device 80 includes a connecting rod 81, a connecting bearing 82, and a positioning seat 83, one end of the connecting rod 81 is fixed on the top plate 31, one end of the inner ring seat 22 facing the membrane expander 21 is provided with a first positioning groove 22a, the positioning seat 83 is fixed in the first positioning groove 22a by a screw, the connecting bearing 82 is installed in the positioning seat 83, the connecting bearing 82 is sleeved on the other end of the connecting rod 81, and the connecting rod 81 and the connecting bearing 82 are in clearance fit, so that the connecting rod 81 can be lifted in the connecting bearing 82; when the third driving mechanism 300 drives the film spreading device 20 to rotate, the film spreading device 20 can drive the cover plate 32 to rotate in the second receiving slot 30a, so as to realize the synchronous rotation of the film spreading device 20 and the cover plate 32.

Further, referring to fig. 1, the wafer mounting and feeding apparatus 1 further includes a moving device 400, the moving device 400 includes a first mover 410 and a second mover 420, the first mover 410 moves toward a first direction X, the second mover 420 moves toward a second direction Y, the first direction X and the second direction Y are perpendicular to each other, the second direction Y is a direction from the head end to the tail end, the first mover 410 is disposed on a surface of the head end facing away from the upper platen assembly, a first slider (not shown) is disposed on an end of the base facing toward the first mover 410, a first slide rail (not shown) is disposed on an end of the first mover 410 facing toward the base, the first slider is slidably connected to the first slide rail to enable the base to move in the direction, the second mover 420 is disposed on a side of the first mover 410 facing away from the base, the first mover 410 is provided with a second sliding block at one end facing the second mover 420, the second mover 420 is provided with a second sliding rail at one end facing the first mover 410, and the second sliding block is slidably connected to the second sliding rail, so that the first mover 410 can move on the second mover 420, and the base is driven to move in the second direction Y.

In the present application, please refer to fig. 6 and fig. 9 together, when the feeding apparatus for wafer mounting 1 starts to work, the clamping device 40 clamps the film carrier 50 from a material bin, the material bin is located at a side close to the tail end 12, the first driving mechanism 100 controls the clamping device 40 to clamp the film carrier 50 to move from the tail end 12 toward the head end 11, the film carrier 50 moves into the carrying member 34 along with the extending direction of the guiding member 35, the first limiting member 36 and the second limiting member 37 fix the film carrier 50 in the carrying member 34, and the clamping device 40 releases the film carrier 50 and continues to move to the head end 11 to wait in a standby mode; at this time, the upper platen assembly 30 is located at the highest point where it can rise, the film expanding device 20 is located at the lowest point where it can fall, the press rod 92 is always clamped in the gap of the insert block 93, and the distance between the upper platen assembly 30 and the film expanding device 20 can satisfy the movement of the clamping device 40; after the film carrier 50 is fixed on the upper platen assembly 30, the third driving mechanism 300 controls the outer ring base 23 to rotate, the outer ring base 23 rotates to drive the inner ring base 22 to ascend, at this time, the roller 251 is located in the roller slot 252a, along with the rotation of the outer ring base 23, the roller 251 slides and descends along the rotation slot 252 from the roller slot 252a, the roller 251 slides and descends into the roller receiving slot 221a in the roller baffle 221, that is, the inner ring base 22 ascends in the direction of the upper platen assembly 30, the film expander 21 synchronously ascends along with the inner ring base 22, then the second driving mechanism 200 controls the lifting device 60 to descend in the direction of the base 10 to the lowest point where the lifting device can descend, that is, the film expander 21 lifts the middle area of the film carrier 50 in the direction of the upper platen assembly 30, after the film expander 21 completes the film expanding operation, the pressure rod 92 is retracted into the clamping cylinder 91, that is, the clamping assembly 90 stops abutting against the inner ring seat 22, because the connecting rod 81 is connected with the connecting bearing 82, the inner ring seat 22 rotates to drive the cover plate 32 to rotate, and the worker can adjust the rotation angle of the wafer through the feedback of the encoder 70, and finally perform the next step.

In this application, through inciting somebody to action press from both sides get device 40 with expand membrane device 20 with top board assembly 30 sets up an organic whole structure, top board assembly 30 can rise just expand membrane device 20 and descend, make press from both sides get device 40 have can top board assembly 30 with it shuttles back and forth to move between the membrane device 20, and has avoided top board assembly 30 needs the problem of opening blowing, has guaranteed to expand the tensile equilibrium of membrane, has solved simultaneously traditional design will press from both sides the problem of getting the external design of device 40, has reduced press from both sides and get device 40 occupation space, has improved the work efficiency of wafer subsides dress feeding equipment 1.

While the utility model has been described with reference to specific embodiments, the utility model is not limited thereto, and various equivalent modifications or substitutions can be easily made by those skilled in the art within the technical scope of the utility model. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.

Claims (10)

1. A wafer mounting and feeding apparatus, comprising:

a base having a head end and a tail end;

the membrane expanding device is connected to the tail end in a liftable manner;

the upper pressure plate assembly is arranged on the base;

the film carrier is connected to the upper pressure plate assembly in a sliding mode;

the clamping device is connected to the base in a sliding mode and slides back and forth from the head end to the tail end;

when the clamping device slides to the head end, the film carrier slides to a position right opposite to the film expanding device, the clamping device is separated from the film carrier, the upper pressure plate assembly descends, and the film expanding device ascends to a position close to the film carrier to perform film expanding work;

when the film expanding device descends and is far away from the film carrier, the upper pressure plate assembly ascends, the clamping device clamps the film carrier and slides from the head end to the tail end so as to convey the film carrier away from the upper pressure plate assembly.

2. The apparatus as claimed in claim 1, wherein the clamping device comprises a clamping cantilever, a cantilever fixing member, and a clamping mechanism, the cantilever fixing member is slidably connected to the base along a direction from the head end to the tail end, the clamping cantilever is mounted on the cantilever fixing member, the clamping mechanism is mounted on the clamping cantilever, and the clamping mechanism is configured to clamp the film carrier.

3. The apparatus of claim 2, further comprising a first driving mechanism, the first driving mechanism being mounted on the base, the first driving mechanism controlling the clamping device to clamp the film carrier and the first driving mechanism driving the clamping device to move along the direction from the head end to the tail end.

4. The wafer mounting feeding apparatus according to claim 1, wherein the upper platen assembly includes a top plate, a cover plate, a plurality of first pulleys and a pair of supporting members, the top plate is disposed on the base, the plurality of first pulleys are fixed on one side of the top plate facing the base, the cover plate is mounted on the top plate, the plurality of first pulleys are rotatably connected to the cover plate, the supporting members are mounted on one side of the cover plate facing the base, the supporting members have abutting surfaces, the film carrier abuts against the abutting surfaces, the abutting surfaces are parallel to a moving direction of the clamping device, and the supporting members are used for receiving the film carrier.

5. The wafer-mounting feeding apparatus according to claim 4, wherein the upper platen assembly further comprises a guide member, the guide member is fixed to a surface of the top plate facing the pedestal, the guide member is disposed on a side of the top plate close to the tail end, and the guide member and the carrying member are disposed on a same horizontal line.

6. The apparatus of claim 1, further comprising a lifting device mounted on the base, and a second driving mechanism mounted on the base, wherein the second driving mechanism controls the lifting device to drive the upper platen assembly to ascend or descend.

7. The wafer mounting feeding equipment according to claim 1, wherein the film spreading device comprises a film spreader, an inner ring seat, an outer ring seat, a plurality of second pulleys and a transmission component for driving the inner ring seat to ascend and descend, the plurality of second pulleys are fixed on one surface of the base opposite to the upper platen component, the inner ring seat is arranged on the base, the second pulley rings are arranged on the periphery of the outer ring seat, the second pulleys are rotatably connected with the outer ring seat, the outer ring seat is annularly sleeved on the inner ring seat, the film expander is fixed at one end of the inner ring seat facing the upper pressure plate assembly, the transmission assembly comprises a roller fixed on the outer ring seat and a rotary groove arranged on the inner ring seat and inclined upwards, the outer ring seat rotates to drive the roller to move along the rotating groove, so that the inner ring seat is lifted.

8. The apparatus of claim 7, further comprising a third drive mechanism mounted on the base, the third drive mechanism controlling the outer race to rotate.

9. The wafer mounting feeding apparatus according to any one of claims 4-5, further comprising a connecting device, wherein one end of the connecting device is fixed to the cover plate, and the other end of the connecting device is fixed to the film expanding device, so that when the film expanding device rotates, the film expanding device drives the cover plate to rotate synchronously.

10. The apparatus of any one of claims 1-8, further comprising a retaining assembly disposed on the base, the retaining assembly configured to limit rotation of the inner race.

Images