CN215430719U - Supporting device for masking plate frictioning - Google Patents
Supporting device for masking plate frictioning Download PDFInfo
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- CN215430719U CN215430719U CN202122349061.7U CN202122349061U CN215430719U CN 215430719 U CN215430719 U CN 215430719U CN 202122349061 U CN202122349061 U CN 202122349061U CN 215430719 U CN215430719 U CN 215430719U
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- mask
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Abstract
The utility model discloses a supporting device for masking plate frictioning, which comprises a base, and an installation plate, a positioning plate and a supporting piece which are arranged on the base and are sequentially arranged from bottom to top; the mask plate is characterized in that positioning marks are arranged on the positioning plate, the supporting piece is detachably arranged on the positioning plate, and the supporting piece is used for supporting and fixing four corners of the mask plate. The fixed position of the supporting piece can be accurately found through the positioning marks arranged on the positioning plate, so that the supporting piece can support and fix the mask plates with different sizes. The locating plate is a PP plate, and the mounting plate is an aluminum plate. Aluminum plate makes the locating plate fixed more firm, and PP board has corrosion resistance, avoids the sizing material to corrode the locating plate, prolongs the life of locating plate.
Description
Technical Field
The utility model relates to the technical field of mask processing, in particular to a supporting device for masking rubber.
Background
The coating of the photoresist is a very important process in the manufacturing process of the Mask, the photoresist is coated on the metal chromium layer, the photoresist remained after exposure and development in the yellow light process plays a role in protecting the bottom layer, and then the part where the photoresist is not remained is etched through main components of ammonium ceric nitrate, perchloric acid and deionized water, so that a pattern transfer process for transferring the Mask pattern to a sample is completed, and therefore, the coating requirement on the photoresist is higher.
At present, the photoresist gluing mode used in the MASK plate manufacturing yellow light process mainly comprises 2 main modes of Spin coating and Slit coating, and due to the characteristics of the equipment process of a Spin gluing machine, when a Spin bedplate rotates at a high speed, photoresist is uniformly dispersed on a whole base plate, meanwhile, the photoresist can be coated on the side surface and the edge mirror surface of a MASK base plate, so that the pollution of the environment and equipment can be caused in the following production process, the levelness of the base plate is poor during photoetching, the product precision deviation can be caused, and even the risk of product scrapping can be caused. Therefore, the side surface of the mask plate after being coated with the glue needs to be subjected to glue wiping treatment, and the mask plate needs to be supported and fixed through a special supporting device during the glue wiping treatment. However, when the mask is supported and fixed in the prior art, the mask is fixed and disassembled with great difficulty, the size of the supporting device is difficult to adjust, random switching according to the size of the mask cannot be achieved, and the use flexibility is poor.
SUMMERY OF THE UTILITY MODEL
The utility model aims to provide a supporting device for masking plate photoresist, which is used for solving the technical problems in the background technology.
The supporting device for the photoresist wiping of the mask plate comprises a base, and a mounting plate, a positioning plate and a supporting piece which are arranged on the base and sequentially arranged from bottom to top; the mask plate is characterized in that positioning marks are arranged on the positioning plate, the supporting piece is detachably arranged on the positioning plate, and the supporting piece is used for supporting and fixing four corners of the mask plate.
In a preferred embodiment, the positioning mark comprises a plurality of positioning holes penetrating through the positioning plate, and the plurality of positioning holes are symmetrically arranged in four groups.
In a preferred embodiment, the supporting member comprises four pad assemblies, each pad assembly comprises a lower pad and an upper pad detachably fixed to the lower pad and provided with an L-shaped side baffle, and each pad assembly is used for supporting one corner of the mask.
In a preferred embodiment, the lower cushion block and the upper cushion block are both provided with first fixing holes, and the lower cushion block and the upper cushion block are fixed through the first fixing holes.
In a preferred embodiment, a second fixing hole is formed in the lower cushion block, a positioning pin is fixed in the second fixing hole, the positioning pin extends out of the second fixing hole, and the positioning pin is inserted into the positioning hole when the cushion block assembly is fixed with the positioning plate.
In a preferred embodiment, the bottom of the base is provided with four supporting feet, and the supporting feet are provided with roller assemblies.
In a preferred embodiment, the positioning plate is a PP plate, and the mounting plate is an aluminum plate.
In a preferred embodiment, the lower cushion block is made of stainless steel, and the upper cushion block is made of teflon.
The technical scheme of the utility model has the beneficial effects that:
1. the fixed position of the supporting piece can be accurately found through the positioning marks arranged on the positioning plate, so that the supporting piece can support and fix the mask plates with different sizes. The locating plate is a PP plate, and the mounting plate is an aluminum plate. Aluminum plate makes the locating plate fixed more firm, and PP board has corrosion resistance, avoids the sizing material to corrode the locating plate, prolongs the life of locating plate.
2. Adopt the fixed mode of pegging graft between cushion subassembly and the locating plate, the fixed and dismantlement of cushion subassembly of being convenient for, three locating pin design is adopted to lower cushion bottom, guarantees the fastness that cushion subassembly is fixed.
3. The L-shaped side baffle on the upper cushion block is used for limiting the mask, and the four cushion block components are mutually matched to ensure that the mask can be stably fixed.
Drawings
Figure 1 is an exploded view of the structure of the present invention,
figure 2 is a top view of the alignment plate of the present invention,
figure 3 is an exploded view of the spacer assembly of the present invention,
FIG. 4 is a schematic view of a pad assembly according to the present invention.
Description of reference numerals: the device comprises a base 1, supporting feet 11, a roller assembly 12, a mounting plate 2, a positioning plate 3, a positioning hole 31, a cushion block assembly 4, a lower cushion block 41, an upper cushion block 42, a side baffle 43L, a first fixing hole 44, a second fixing hole 45 and a positioning pin 46.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and specific embodiments. The embodiments of the present invention have been presented for purposes of illustration and description, and are not intended to be exhaustive or limited to the utility model in the form disclosed. Many modifications and variations will be apparent to those of ordinary skill in the art. The embodiment was chosen and described in order to best explain the principles of the utility model and the practical application, and to enable others of ordinary skill in the art to understand the utility model for various embodiments with various modifications as are suited to the particular use contemplated.
Referring to fig. 1 to 4, the supporting device for masking plate photoresist according to the technical scheme of the present invention includes a base 1, an installation plate 2 disposed on the base 1 and sequentially disposed from bottom to top, a positioning plate 3 and a supporting member. Positioning marks are arranged on the positioning plate 3, the supporting piece is detachably arranged on the positioning plate 3, and the supporting piece is used for supporting and fixing four corners of the mask.
The mounting plate 2 is fixed on the base 1, the positioning plate 3 is fixed on the mounting plate 2, and the fixing position of the supporting piece can be accurately found through the positioning mark arranged on the positioning plate 3 so as to ensure that the supporting piece can support and fix mask plates with different sizes. The locating plate 3 is the PP board, and the mounting panel 2 is aluminum plate, and aluminum plate makes 3 fixed firmer of locating plate, and the PP board has corrosion resistance, avoids the sizing material to corrode locating plate 3, prolongs the life of locating plate 3.
The positioning mark includes a plurality of positioning holes 31 penetrating through the positioning plate 3, and the plurality of positioning holes 31 are symmetrically arranged in four groups. The supporting piece comprises four cushion block assemblies 4, each cushion block assembly 4 comprises a lower cushion block 41 and an upper cushion block 42 which is detachably fixed with the lower cushion block 41 and provided with an L-shaped side baffle 43, and each cushion block assembly 4 is used for supporting one corner of the mask.
Each group of positioning holes 31 is used for positioning and fixing one cushion block assembly 4, and the cushion block assemblies 4 are fixed with the positioning holes 31 in different positions through selection, so that the position change of the cushion block assemblies 4 is realized. The L-shaped side baffle 43 on the upper cushion block 42 is used for limiting the mask, and the four cushion block assemblies 4 are mutually matched to ensure that the mask can be stably fixed.
The lower cushion block 41 and the upper cushion block 42 are both provided with first fixing holes 44, and the lower cushion block 41 and the upper cushion block 42 are fixed through the first fixing holes 44. When the fixing is performed, the first fixing holes 44 on the upper cushion block 42 correspond to the first fixing holes 44 on the lower cushion block 41, and then the fixing of the upper cushion block 42 and the lower cushion block 41 is achieved through fixing members such as bolts. The lower cushion block 41 is made of stainless steel, and the upper cushion block 42 is made of Teflon. The lower cushion block 41 is connected with the positioning plate 3, the upper cushion block 42 is used for supporting the mask, the Teflon material has corrosion resistance, and the upper cushion block 42 is prevented from being corroded by rubber.
The lower cushion block 41 is provided with a second fixing hole 45, a positioning pin 46 is fixed in the second fixing hole 45, the positioning pin 46 extends out of the second fixing hole 45, and when the cushion block assembly 4 is fixed with the positioning plate 3, the positioning pin 46 is inserted into the positioning hole 31. Adopt grafting fixed mode between cushion subassembly 4 and the locating plate 3, the fixed and dismantlement of cushion subassembly 4 of being convenient for, the design of three locating pin 46 is adopted to lower cushion 41 bottom, guarantees the fastness that cushion subassembly 4 is fixed.
The bottom of the base 1 is provided with four supporting feet 11, and the supporting feet 11 are provided with roller assemblies 12. The movement of the whole device is facilitated by the arrangement of the roller assemblies 12.
It is to be understood that the described embodiments are merely a few embodiments of the utility model, and not all embodiments. All other embodiments, which can be derived by one of ordinary skill in the art and related arts based on the embodiments of the present invention without any creative effort, shall fall within the protection scope of the present invention. Structures, devices, and methods of operation not specifically described or illustrated herein are generally practiced in the art without specific recitation or limitation.
Claims (8)
1. The utility model provides a mask version strutting arrangement for frictioning which characterized in that: the positioning device comprises a base, and a mounting plate, a positioning plate and a supporting piece which are arranged on the base in sequence from bottom to top; the mask plate is characterized in that positioning marks are arranged on the positioning plate, the supporting piece is detachably arranged on the positioning plate, and the supporting piece is used for supporting and fixing four corners of the mask plate.
2. The supporting device for masking plate photoresist according to claim 1, characterized in that: the positioning mark comprises a plurality of positioning holes which are arranged on the positioning plate in a penetrating mode, and the plurality of positioning holes are symmetrically arranged into four groups.
3. The supporting device for masking plate photoresist according to claim 2, characterized in that: the supporting piece comprises four cushion block assemblies, each cushion block assembly comprises a lower cushion block and an upper cushion block which is detachably fixed with an L-shaped side baffle and is used for supporting one corner of the mask.
4. The supporting device for masking plate photoresist according to claim 3, characterized in that: the lower cushion block and the upper cushion block are both provided with first fixing holes, and the lower cushion block and the upper cushion block are fixed through the first fixing holes.
5. The supporting device for masking plate photoresist according to claim 3, characterized in that: the lower cushion block is provided with a second fixing hole, a positioning pin is fixed in the second fixing hole and extends out of the second fixing hole, and when the cushion block assembly is fixed with the positioning plate, the positioning pin is inserted into the positioning hole.
6. The supporting device for masking plate photoresist according to claim 1, characterized in that: the base bottom is provided with four supporting legss, be provided with wheel components on the supporting legss.
7. The supporting device for masking plate photoresist according to claim 1, characterized in that: the locating plate is a PP plate, and the mounting plate is an aluminum plate.
8. The supporting device for masking plate photoresist according to claim 3, characterized in that: the lower cushion block is made of stainless steel, and the upper cushion block is made of Teflon.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122349061.7U CN215430719U (en) | 2021-09-27 | 2021-09-27 | Supporting device for masking plate frictioning |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122349061.7U CN215430719U (en) | 2021-09-27 | 2021-09-27 | Supporting device for masking plate frictioning |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN215430719U true CN215430719U (en) | 2022-01-07 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202122349061.7U Active CN215430719U (en) | 2021-09-27 | 2021-09-27 | Supporting device for masking plate frictioning |
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| Country | Link |
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| CN (1) | CN215430719U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115194679A (en) * | 2022-08-26 | 2022-10-18 | 魅杰光电科技(上海)有限公司 | Take vacuum adsorption's mask version automatic positioning fixed establishment |
-
2021
- 2021-09-27 CN CN202122349061.7U patent/CN215430719U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115194679A (en) * | 2022-08-26 | 2022-10-18 | 魅杰光电科技(上海)有限公司 | Take vacuum adsorption's mask version automatic positioning fixed establishment |
| CN115194679B (en) * | 2022-08-26 | 2024-03-12 | 魅杰光电科技(上海)有限公司 | Mask automatic positioning and fixing mechanism with vacuum adsorption function |
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