CN215404474U - Sheet bearing ring structure for evaporating planetary disk - Google Patents
Sheet bearing ring structure for evaporating planetary disk Download PDFInfo
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- CN215404474U CN215404474U CN202121046604.1U CN202121046604U CN215404474U CN 215404474 U CN215404474 U CN 215404474U CN 202121046604 U CN202121046604 U CN 202121046604U CN 215404474 U CN215404474 U CN 215404474U
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Abstract
The invention relates to a sheet bearing ring structure for an evaporation planetary plate, which comprises a circular sheet plate, wherein the middle part of the circular sheet plate is provided with a bearing hole for bearing a product sheet, the lower end of the inner wall of the bearing hole is provided with a sheet bearing fulcrum for supporting the product sheet and at least two positioning flat edge supporting parts, the sheet bearing fulcrums are arranged beside the positioning flat edge supporting parts, and the periphery of the circular sheet plate is uniformly provided with a plurality of mounting holes.
Description
Technical Field
The invention relates to a carrying sheet ring structure for an evaporation planetary disk.
Background
The evaporation planetary disc is a tool which is necessary for an evaporation table to carry a product sheet in evaporation operation; the sheet-bearing ring of the traditional evaporation planetary disk is a groove-type integral ring-shaped body. In the evaporation process, the product sheet needs to be completely placed at the back of the sheet bearing ring sheet bearing groove, the 5mm area at the edge of the product sheet is completely contacted with the sheet bearing ring, and the contact area is shielded during evaporation, so that the tube core in the area is a failure tube core. Meanwhile, as the planet disk bearing ring is in a circular ring shape and the product sheet is determined to be a flat edge, when the product sheet is placed in the gasket ring, the product sheet positioning flat edge area does not contact the gasket ring, the area is suspended, when evaporation is carried out, metal can float to the front of the product positioning flat edge area along the suspended position, so that the color difference exists in the product sheet front flat edge area, the product front surface appearance quality is influenced, and the area can be discarded during testing.
The traditional machining mode of the bearing ring is that a mechanical milling groove is directly fixed on the planetary plate and is integrated with the planetary plate. Along with production and use, the planetary plate needs to be maintained according to a certain period, and the planetary plate deforms after accumulating day and month, so that the levelness of the bearing ring is changed; the product sheet can not be completely attached when the product sheet contacts the bearing ring because of the change of the levelness of the bearing ring; in the whole evaporation process, due to different fitting degrees, the heat dissipation of the edges of the product pieces is different, so that the edge color difference of the product pieces is caused after evaporation; the regional color difference affects the apparent quality of the product and seriously needs key point waste treatment.
Disclosure of Invention
The invention aims to overcome the defects and provides a supporting sheet ring structure for an evaporation planetary disk.
The invention adopts the scheme that the sheet bearing ring structure for the evaporation planetary disk comprises a disk plate, wherein a bearing hole for bearing a product sheet is formed in the middle of the disk plate, the lower end of the inner wall of the bearing hole is provided with a sheet bearing fulcrum and a positioning flat edge supporting part for supporting the product sheet, the sheet bearing fulcrums are arranged beside the positioning flat edge supporting part and are at least two, and a plurality of mounting holes are uniformly distributed on the periphery of the disk plate.
Furthermore, the lower end of the inner wall of the bearing hole is provided with an alignment bearing sheet fulcrum at the opposite side of the positioning flat edge supporting part, and a plurality of side bearing sheet fulcrums are arranged on the two sides of the positioning flat edge supporting part.
Furthermore, the inner wall of the bearing hole comprises an arc surface and a vertical surface, and two ends of the arc surface are connected with two ends of the vertical surface.
Furthermore, a joint of the arc surface and the vertical surface is provided with an anti-clamping piece position-giving opening.
Furthermore, the positioning flat edge supporting part is arranged at the lower end of the vertical surface, and the supporting piece fulcrum is arranged at the lower end of the arc surface.
Furthermore, an included angle between two connecting lines of two ends of the arc surface and the circle center of the wafer plate is an acute angle.
Compared with the prior art, the invention has the following beneficial effects: simple structure, reasonable in design carries out the point contact through holding the piece fulcrum to the product piece and supports, has reduced the area of contact at product piece edge and holding the piece ring, increases the coating by vaporization area, and the effective tube core in product edge increases, supports the location flush side of product piece through location flush side supporting part, avoids product piece edge to lead to the colour difference and the unsettled plain side colour difference that leads to of location flush side because of the heat dissipation problem, promotes the product yield.
Drawings
The invention is further described with reference to the following figures.
FIG. 1 is a schematic view of the present wafer ring.
In the figure: 1-a wafer plate; 2-carrying hole disc; 3-supporting the supporting point of the supporting sheet; 4-positioning the flat edge supporting part; 5-mounting holes; 6-arc surface; 7-vertical plane; 8-anti-jamming sheet clearance port.
Detailed Description
The invention is further described with reference to the following figures and detailed description.
As shown in figure 1, a hold piece ring structure for evaporating planetary plate, including wafer board 1, the bearing hole 2 that is used for bearing the product piece is offered at wafer board middle part, bearing hole inner wall lower extreme is provided with and is used for supporting the product piece hold piece fulcrum 3, location plain noodles supporting part 4, holds the piece fulcrum and establishes and just sets up two at least at location plain noodles supporting part side, and the periphery equipartition of wafer board sets up a plurality of mounting holes 5, carries out the point contact support to the product piece through holding the piece fulcrum, has reduced the area of contact of product piece edge with holding the piece ring, and the effective tube core in product edge increases, through the location plain noodles that location plain noodles supporting part supported the product piece, eliminates product piece dangling dead zone, effectively blocks the drift dead zone of metal during the coating by vaporization.
In this embodiment, the lower end of the inner wall of the bearing hole is provided with an alignment bearing sheet fulcrum at the opposite side of the positioning flat edge supporting part, and a plurality of side bearing sheet fulcrums are arranged at the two sides of the positioning flat edge supporting part.
In this embodiment, the inner wall of the bearing hole includes an arc surface 6 and a vertical surface 7, and two ends of the arc surface are connected with two ends of the vertical surface.
In this embodiment, in order to prevent the flat edge corner of the product piece from contacting with the flat edge corner of the sheet bearing ring, the problem of "blocking" occurs, and the joint of the arc surface and the vertical surface is provided with an arc-shaped anti-blocking piece clearance opening 8.
In this embodiment, the positioning flat edge supporting part is arranged at the lower end of the vertical surface, and the supporting piece fulcrum is arranged at the lower end of the arc surface.
In this embodiment, an included angle between two connecting lines of the two ends of the arc surface and the center of the circle of the wafer plate is an acute angle.
If this patent discloses or refers to parts or structures that are fixedly connected to each other, the fixedly connected may be understood as: a detachable fixed connection (for example using bolts or screws) is also understood as: non-detachable fixed connections (e.g. riveting, welding), but of course, fixed connections to each other may also be replaced by one-piece structures (e.g. manufactured integrally using a casting process) (unless it is obviously impossible to use an integral forming process).
In the description of this patent, it is to be understood that the terms "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like are used in the orientations and positional relationships indicated in the drawings for convenience in describing the patent, and are not intended to indicate or imply that the referenced devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and are not to be considered limiting of the patent.
The above-mentioned preferred embodiments, further illustrating the objects, technical solutions and advantages of the present invention, should be understood that the above-mentioned are only preferred embodiments of the present invention and should not be construed as limiting the present invention, and any modifications, equivalents, improvements and the like made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (6)
1. A hold piece ring structure for evaporating planetary dish which characterized in that: including the disc board, the bearing hole that is used for bearing the weight of the product piece is offered at disc board middle part, bearing hole inner wall lower extreme is provided with the piece fulcrum, the flat limit supporting part of location that are used for supporting the product piece, and the piece fulcrum is established and is just set up two at least at location flat limit supporting part side, and the disc board periphery equipartition sets up a plurality of mounting holes.
2. The carrier ring structure for evaporating a planetary disk as in claim 1, wherein: the lower end of the inner wall of the bearing hole is provided with an alignment bearing sheet fulcrum at the opposite side of the positioning flat edge supporting part, and a plurality of side bearing sheet fulcrums are arranged on the two sides of the positioning flat edge supporting part.
3. The carrier ring structure for evaporating a planetary disk as in claim 2, wherein: the inner wall of the bearing hole comprises an arc surface and a vertical surface, and two ends of the arc surface are connected with two ends of the vertical surface.
4. A socket ring structure for an evaporative planet disk as claimed in claim 3, wherein: and a joint of the arc surface and the vertical surface is provided with an anti-clamping piece position-giving opening.
5. The carrier ring structure for evaporating a planetary disk as in claim 2, wherein: the positioning flat edge supporting part is arranged at the lower end of the vertical surface, and the supporting sheet fulcrum is arranged at the lower end of the arc part surface.
6. The carrier ring structure for evaporating a planetary disk as in claim 2, wherein: and an included angle between two connecting lines of the two ends of the arc surface and the circle center of the wafer plate is an acute angle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121046604.1U CN215404474U (en) | 2021-05-17 | 2021-05-17 | Sheet bearing ring structure for evaporating planetary disk |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121046604.1U CN215404474U (en) | 2021-05-17 | 2021-05-17 | Sheet bearing ring structure for evaporating planetary disk |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN215404474U true CN215404474U (en) | 2022-01-04 |
Family
ID=79675687
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202121046604.1U Active CN215404474U (en) | 2021-05-17 | 2021-05-17 | Sheet bearing ring structure for evaporating planetary disk |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN215404474U (en) |
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2021
- 2021-05-17 CN CN202121046604.1U patent/CN215404474U/en active Active
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