CN215328346U

CN215328346U - Turnover baffle device used on vacuum coating equipment

Info

Publication number: CN215328346U
Application number: CN202121759653.XU
Authority: CN
Inventors: 郭喜明; 王帅; 王开亮; 张�浩
Original assignee: Shenyang Lebei Vacuum Technology Co ltd
Current assignee: Shenyang Lebei Vacuum Technology Co ltd
Priority date: 2021-07-30
Filing date: 2021-07-30
Publication date: 2021-12-28
Anticipated expiration: 2031-07-30

Abstract

The utility model provides a be used in upset baffle device on vacuum coating equipment, solves that current deposit source shelters from the shift mechanism structure that the device exists complicated, and occupation space is big, and the motion flexibility is poor, and the fault rate is high, maintains the difficulty, is unfavorable for the problem of high-efficient production. Including setting up the upset baffle in the deposition source front side, its characterized in that: the upper end of the turnover baffle is rotatably connected with a fixed box body at the top of the inner side wall of the coating vacuum chamber through an upper rotating shaft of the baffle, and the lower end of the turnover baffle is hinged with a lower rotating shaft base at the bottom of the coating vacuum chamber through a lower rotating shaft of the baffle; the upper baffle rotating shaft at the upper end of the turnover baffle is connected with a cylinder telescopic rod of a driving cylinder through a baffle driving mechanism arranged inside the fixed box body, and the driving cylinder is fixed on the outer side wall of the coating vacuum chamber through a cylinder connecting seat. The mechanism has the advantages of reasonable design, compact structure, small mechanism occupation space, flexible arrangement mode, high use reliability and wide application range, and can be suitable for occasions with limited space.

Description

Turnover baffle device used on vacuum coating equipment

Technical Field

The utility model belongs to the technical field of vacuum coating, and particularly relates to a turnover baffle plate device which is compact in structure, small in mechanism occupied space, flexible in arrangement mode, high in use reliability and wide in application range, can be suitable for occasions with limited space and is used for vacuum coating equipment.

Background

In PVD (physical vapor deposition) vacuum coating equipment, due to the requirements of the processing process, the vacuum coating equipment sometimes needs to be equipped with several different types of deposition sources, such as: an arc evaporation source, a magnetic control target or an ion source, or magnetic control targets of different targets are arranged on one device. In such a production case, it is impossible to operate simultaneously due to magnetron targets of different targets or between the arc evaporation source, the magnetron target and the ion source, and in order to prevent the respective targets from being contaminated, it is necessary to provide a displaceable shielding device in front of the different deposition sources. The displacement form of the existing deposition source shielding device mainly comprises curvilinear displacement, linear displacement and rotary displacement, however, the traditional displacement mechanisms are complex in structure, large in occupied space, poor in movement flexibility, high in failure rate and difficult to maintain, and are not beneficial to efficient production of vacuum coating. Therefore, there is a need for an improved deposition source shielding device for vacuum coating equipment.

SUMMERY OF THE UTILITY MODEL

The utility model aims at the problems and provides the turnover baffle plate device which has the advantages of compact structure, small mechanism occupation space, flexible arrangement mode, high use reliability and wide application range, can be suitable for occasions with limited space and is used on vacuum coating equipment.

The technical scheme adopted by the utility model is as follows: the turnover baffle plate device used on the vacuum coating equipment comprises a turnover baffle plate arranged on the front side of a deposition source in a coating vacuum chamber, and is characterized in that: the upper end of the turnover baffle is rotatably connected with a fixed box body arranged at the top of the inner side wall of the coating vacuum chamber through an upper baffle rotating shaft, and the lower end of the turnover baffle is hinged with a lower rotating shaft base arranged at the bottom of the coating vacuum chamber through a lower baffle rotating shaft; meanwhile, the upper baffle rotating shaft at the upper end of the turnover baffle is connected with a cylinder telescopic rod of the driving cylinder through a baffle driving mechanism arranged in the fixed box body, and the driving cylinder is fixed on the outer side wall of the coating vacuum chamber through a cylinder connecting seat.

The turnover baffle comprises a left baffle and a right baffle, and the left baffle and the right baffle are symmetrically arranged on the left side and the right side in front of the corresponding deposition source respectively. The structure form through two lamella formulas on the left and right sides are arranged, effectively reduce the required space when upset baffle rotates the aversion, are convenient for the nimble of device and arrange.

The left baffle and the right baffle have the same structure and are both composed of vertical baffle plates, the upper ends of the vertical baffle plates are provided with horizontally arranged turnover upper connecting plates, and the lower ends of the vertical baffle plates are provided with horizontally arranged turnover lower connecting plates; and the turnover upper connecting plate is hinged with a baffle upper rotating shaft arranged on an upper rotating shaft base at the end part of the fixed box body through a baffle shaft hinge hole, and the turnover lower connecting plate is hinged with a baffle lower rotating shaft arranged on a lower rotating shaft base through a baffle shaft hinge hole. So that the vertical baffle plates of the left baffle plate and the right baffle plate are respectively arranged at the front sides of the corresponding deposition sources in a rotating way by utilizing the upper overturning connecting plate and the lower overturning connecting plate.

The cross section of the vertical left baffle plate of the left baffle plate is straight, and the end part of the cross section of the vertical right baffle plate of the right baffle plate is provided with lap joints. The left baffle plate and the right baffle plate are connected with the left baffle plate through the vertical right baffle plate and the vertical left baffle plate, and the left baffle plate and the right baffle plate are connected with the left baffle plate and the right baffle plate through the vertical right baffle plate.

The baffle driving mechanism in the fixed box body comprises a transverse connecting plate, the middle part of the transverse connecting plate is connected with the end part of a cylinder telescopic rod of a driving cylinder, and two ends of the transverse connecting plate are respectively hinged with upper rotating shaft bases at two ends of the fixed box body through swinging connecting rods; one end of the swing connecting rod is connected with the upper rotating shaft base through an upper rotating shaft of the baffle, and the other end of the swing connecting rod is hinged with the end part of the transverse connecting plate through a guide pin shaft; and the upper part of the guide pin shaft penetrates through an arc-shaped guide groove arranged on an upper cover plate of the fixed box body, and the guide pin shaft penetrates through the upper end of the upper cover plate and is hinged with guide shaft hinge holes arranged on the turnover upper connecting plates of the left baffle and the right baffle respectively. The driving cylinder is used for driving the transverse connecting plate to stretch back and forth in the fixed box body, and then the left baffle and the right baffle are driven to turn over to be opened or closed through linkage of the swing connecting rods at two ends of the transverse connecting plate and guiding of the guide pin shaft in the arc-shaped guide groove, so that exposure and shielding of a deposition source are realized.

And the parts of the two end parts of the transverse connecting plate, which are hinged with the guide pin shaft, are respectively provided with a hinged oblong hole. The flexibility of connection between the transverse connecting plate and the swing connecting rod is improved through the hinged long round hole, and therefore the blocking phenomenon in the action process is effectively avoided.

The utility model has the beneficial effects that: the utility model adopts the turnover baffle arranged at the front side of the deposition source in the coating vacuum chamber, the upper end of the turnover baffle is rotatably connected with the fixed box body at the top of the inner side wall of the coating vacuum chamber through the upper rotating shaft of the baffle, and the lower end of the turnover baffle is hinged with the lower rotating shaft base at the bottom of the coating vacuum chamber through the lower rotating shaft of the baffle; the pivot on the baffle of upset baffle upper end links to each other through setting up at the inside baffle actuating mechanism of fixed box, with the cylinder telescopic link that drives actuating cylinder, drives actuating cylinder and passes through the structural style that the cylinder connecting seat was fixed on the real empty room lateral wall of coating film, so its reasonable in design, compact structure, the occupation space of mechanism is little, can be applicable to the limited occasion in space, and the device can be put according to specific use needs, and the arrangement is nimble, uses the reliability height, and the range of application is wide.

Drawings

FIG. 1 is a schematic diagram of an embodiment of the present invention.

Fig. 2 is a cross-sectional view taken along line a-a of fig. 1.

Fig. 3 is an enlarged view of a portion of the structure at B in fig. 1 (shielding the deposition source).

Fig. 4 is a view in the direction C of fig. 3.

Fig. 5 is a schematic view of a structure of the left baffle plate in fig. 3.

Fig. 6 is a schematic view of a structure of the right baffle plate in fig. 3.

Fig. 7 is a bottom view of fig. 5.

FIG. 8 is a schematic view of the cylinder of FIG. 3 with the telescopic rod extending and the swing link driving the left and right shutters to open (exposing the deposition source).

The sequence numbers in the figures illustrate: 1 coating vacuum chamber, 2 vacuum chamber doors, 3 workpiece bearing turntables, 4 coating workpieces, 5 deposition sources, 6 overturning baffles, 7 driving cylinders, 8 baffle driving mechanisms, 9 baffle lower rotating shafts, 10 lower rotating shaft bases, 11 cylinder telescopic rods, 12 cylinder connecting bases, 13 fixed boxes, 14 transverse connecting plates, 15 guide pin shafts, 16 upper rotating shaft bases, 17 baffle upper rotating shafts, 18 swinging connecting rods, 19 upper cover plates, 20 arc-shaped guide grooves, 21 left baffles, 22 right baffles, 23 hinged slotted holes, 24 overturning upper connecting plates, 25 baffle shaft hinge holes, 26 guide shaft hinge holes, 27 vertical left baffles, 28 vertical right baffles, 29 lap joint bending and 30 overturning lower connecting plates.

Detailed Description

The specific structure of the present invention will be described in detail with reference to FIGS. 1 to 8. The turnover baffle plate device used on the vacuum coating equipment comprises a turnover baffle plate 6 arranged inside a coating vacuum chamber 1 and in front of each deposition source 5, wherein a workpiece bearing rotary table 3 is arranged in the middle of the coating vacuum chamber 1, a plurality of coating workpieces 4 uniformly distributed along the circumference are arranged on the workpiece bearing rotary table 3, and a vacuum chamber door 2 is further arranged on the side part of the coating vacuum chamber 1. The overturning baffle 6 comprises a left baffle 21 and a right baffle 22, and the left baffle 21 and the right baffle 22 are respectively and symmetrically arranged at the left side and the right side in front of the corresponding deposition source 5; and then through the structural style that left and right two lamella formulas were arranged, required space when effectively reducing upset baffle 6 and rotating the aversion, the flexibility of the device of being convenient for is arranged.

The left baffle 21 and the right baffle 22 have the same structure and are respectively composed of a vertical left baffle 27 and a vertical right baffle 28, the upper ends of the vertical left baffle 27 and the vertical right baffle 28 are respectively provided with a horizontally arranged turnover upper connecting plate 24, and the lower ends of the vertical left baffle 27 and the vertical right baffle 28 are respectively provided with a horizontally arranged turnover lower connecting plate 30. Moreover, the turnover upper connecting plate 24 is hinged with a baffle upper rotating shaft 17 on an upper rotating shaft base 16 at the end part of a fixed box body 13 arranged at the top of the inner side wall of the coating vacuum chamber 1 through a baffle shaft hinge hole 25; the turning lower connecting plate 30 is hinged with the baffle lower rotating shaft 9 on the lower rotating shaft base 10 at the bottom of the coating vacuum chamber 1 through the baffle shaft hinge hole 25. Thus, the vertical left and

right shielding plates

27 and 28 of the left and

right baffles

21 and 22, respectively, are rotatably disposed at the front sides of the respective deposition sources 5 by the inverted upper and lower connecting

plates

24 and 30.

Meanwhile, in order to ensure the closed shielding effect of the left baffle plate 21 and the right baffle plate 22 on the deposition source 5, the cross section of the vertical left baffle plate 27 of the left baffle plate 21 is a straight shape, and the end part of the cross section of the vertical right baffle plate 28 of the right baffle plate 22 is provided with a lap bend 29; the close lap joint between the right vertical baffle plate 28 of the right baffle plate 22 and the left vertical baffle plate 27 of the left baffle plate 21 is facilitated through the matching connection of the lap bend 29 at the end side of the right vertical baffle plate 28 and the straight edge at the end side of the left vertical baffle plate 27.

In addition, the baffle upper rotating shaft 17 at the upper ends of the left baffle 21 and the right baffle 22 is connected with the cylinder telescopic rod 11 of the driving cylinder 7 through the baffle driving mechanism 8 arranged in the fixed box body 13; the cylinder body of the driving cylinder 7 is fixedly arranged on the outer side wall of the coating vacuum chamber 1 through a cylinder connecting seat 12. The baffle driving mechanism 8 arranged inside the fixed box body 13 at the top of the inner side wall of the coating vacuum chamber 1 comprises a transverse connecting plate 14, the middle part of the transverse connecting plate 14 is connected with the end part of the cylinder telescopic rod 11 of the driving cylinder 7, and the two ends of the transverse connecting plate 14 are respectively hinged with the upper rotating shaft base 16 at the left end and the right end of the fixed box body 13 through swing connecting rods 18. One end of each swing link 18 is connected with the upper rotating shaft base 16 on the corresponding side through the baffle upper rotating shaft 17, and the other end of each swing link 18 is hinged with the end part of the transverse connecting plate 14 through the guide pin shaft 15.

Moreover, the upper part of the guide pin shaft 15 passes through an arc-shaped guide groove 20 arranged on an upper cover plate 19 of the fixed box body 13, and the guide pin shaft 15 is matched and connected with the arc-shaped guide groove 20. Meanwhile, the guide pin shaft 15 penetrates through the upper end of the upper cover plate 19 and is respectively hinged with guide shaft hinge holes 26 arranged on the turnover upper connecting plate 24 of the left baffle plate 21 and the right baffle plate 22; and then the driving cylinder 7 is used for driving the transverse connecting plate 14 to stretch back and forth in the fixed box body 13, so that the left baffle 21 and the right baffle 22 are driven to turn over by 90 degrees, open or close respectively through the linkage of the swinging connecting rods 18 at the two ends of the transverse connecting plate 14 and the guide of the guide pin shaft 15 in the arc-shaped guide groove 20, and the exposure and the shielding of the deposition source 5 are realized. For the purpose of effectively avoiding the blocking phenomenon in the action process, the two end parts of the transverse connecting plate 14 and the parts hinged with the guide pin shafts 15 are respectively provided with hinged oblong holes 23, so that the flexibility of connection between the transverse connecting plate 14 and the swing connecting rod 18 is improved through the hinged oblong holes 23.

When the turnover baffle plate device used on the vacuum coating equipment is used, firstly, when the vacuum coating equipment provided with a plurality of different types of deposition sources 5 works, the turnover baffle plate 6 at the front side of the deposition source 5 which is not needed to be used is in a closed and shielding state temporarily. When a certain (or a plurality of) deposition sources 5 are required to be used according to a coating process, the driving cylinder 7 is utilized to drive the transverse connecting plate 14 of the baffle driving mechanism 8 to extend forwards in the fixed box body 13, and then the left baffle 21 and the right baffle 22 are driven to turn over and open by the linkage of the swinging connecting rods 18 at the two ends of the transverse connecting plate 14 and the guidance of the guide pin shaft 15 in the arc-shaped guide groove 20 so as to expose the corresponding deposition sources 5, thereby facilitating the coating processing of the coated workpiece 4 on the workpiece bearing turntable 3. When a certain deposition source 5 needs to be shielded, the driving cylinder 7 drives the transverse connecting plates 14 to retract backwards, so that the left baffle 21 and the right baffle 22 are closed inwards by the swinging connecting rods 18 at the two ends of the transverse connecting plates 14.

Claims

1. The utility model provides a turnover baffle device for on vacuum coating equipment, is including setting up turnover baffle (6) in inside deposition source (5) front side of coating vacuum chamber (1), its characterized in that: the upper end of the turnover baffle (6) is rotatably connected with a fixed box body (13) arranged at the top of the inner side wall of the coating vacuum chamber (1) through a baffle upper rotating shaft (17), and the lower end of the turnover baffle (6) is hinged with a lower rotating shaft base (10) arranged at the bottom of the coating vacuum chamber (1) through a baffle lower rotating shaft (9); meanwhile, a baffle upper rotating shaft (17) at the upper end of the turnover baffle (6) is connected with a cylinder telescopic rod (11) of the driving cylinder (7) through a baffle driving mechanism (8) arranged inside the fixed box body (13), and the driving cylinder (7) is fixed on the outer side wall of the coating vacuum chamber (1) through a cylinder connecting seat (12).

2. The inverted baffle device for use in a vacuum coating apparatus as claimed in claim 1, wherein: the overturning baffle plate (6) comprises a left baffle plate (21) and a right baffle plate (22), and the left baffle plate (21) and the right baffle plate (22) are symmetrically arranged on the left side and the right side in front of the corresponding deposition source (5) respectively.

3. The inverted baffle device for use in a vacuum coating apparatus as claimed in claim 2, wherein: the left baffle (21) and the right baffle (22) are identical in structure and both consist of vertical baffles, the upper ends of the vertical baffles are provided with horizontally arranged turnover upper connecting plates (24), and the lower ends of the vertical baffles are provided with horizontally arranged turnover lower connecting plates (30); and the overturning upper connecting plate (24) is hinged with a baffle upper rotating shaft (17) arranged on an upper rotating shaft base (16) at the end part of the fixed box body (13) through a baffle shaft hinge hole (25), and the overturning lower connecting plate (30) is hinged with a baffle lower rotating shaft (9) on a lower rotating shaft base (10) through a baffle shaft hinge hole (25).

4. The inverted baffle device for use in a vacuum coating apparatus as claimed in claim 3, wherein: the cross section of the vertical left baffle plate (27) of the left baffle plate (21) is in a straight shape, and the end part of the cross section of the vertical right baffle plate (28) of the right baffle plate (22) is provided with a lap joint bend (29).

5. The inverted baffle device for use in a vacuum coating apparatus as claimed in claim 3, wherein: the baffle driving mechanism (8) in the fixed box body (13) comprises a transverse connecting plate (14), the middle part of the transverse connecting plate (14) is connected with the end part of a cylinder telescopic rod (11) of the driving cylinder (7), and the two ends of the transverse connecting plate (14) are respectively hinged with upper rotating shaft bases (16) at the two ends of the fixed box body (13) through swing connecting rods (18); one end of the swing connecting rod (18) is connected with the upper rotating shaft base (16) through the baffle upper rotating shaft (17), and the other end of the swing connecting rod (18) is hinged with the end part of the transverse connecting plate (14) through the guide pin shaft (15); and the upper part of the guide pin shaft (15) penetrates through an arc-shaped guide groove (20) formed in an upper cover plate (19) of the fixed box body (13), and the guide pin shaft (15) penetrates through the upper end of the upper cover plate (19) and is hinged with a guide shaft hinge hole (26) formed in an overturning upper connecting plate (24) of the left baffle plate (21) and the right baffle plate (22) respectively.

6. The inverted baffle device for use in a vacuum coating apparatus as claimed in claim 5, wherein: the two end parts of the transverse connecting plate (14) and the parts hinged with the guide pin shafts (15) are respectively provided with hinged oblong holes (23).