CN215288946U - Crystal vacuum coating device - Google Patents
Crystal vacuum coating device Download PDFInfo
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- CN215288946U CN215288946U CN202121783535.2U CN202121783535U CN215288946U CN 215288946 U CN215288946 U CN 215288946U CN 202121783535 U CN202121783535 U CN 202121783535U CN 215288946 U CN215288946 U CN 215288946U
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Abstract
The utility model discloses a crystal vacuum coating ware equipment, including coating film case, supporting mechanism, the back medial surface swing joint of coating film case has the bull stick, the side surface fixedly connected with coating film head of bull stick, the interior top fixedly connected with pneumatic cylinder of coating film case, the output fixedly connected with telescopic link of pneumatic cylinder, the one end fixedly connected with pinion rack of pneumatic cylinder is kept away from to the telescopic link, the side surface fixedly connected with ring gear of bull stick, the first motor of last fixed surface of coating film case, the first rotation axis of output fixedly connected with of first motor. The utility model discloses, through setting up coupling hose, pinion rack, ring gear, can carry out angular adjustment to the coating film head, can be faster when carrying out the coating film to the wafer, improve the speed of coating film, through setting up first rotation axis, change, second rotation axis, can make the more even of wafer coating film when the coating film, improve the coating film effect of wafer.
Description
Technical Field
The utility model relates to a vacuum coating device equipment field especially relates to a crystal vacuum coating device equipment.
Background
When the crystal is used, silver layer coating needs to be carried out on components such as electrodes of the crystal to prevent the crystal from being oxidized and further reduce the service life of the crystal, and vacuum coating equipment is needed during coating, mainly refers to a type of coating needing to be carried out under a higher vacuum degree, and specifically comprises various types including vacuum ion evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition and the like. The main idea is to divide into evaporation and sputtering.
At present, some vacuum coating device equipment can not uniformly coat the film on the crystal, so that the effect of coating the film on the surface of the crystal is poor, and the coating rate of some vacuum coating device equipment is low, so that the practicability of the equipment is reduced.
SUMMERY OF THE UTILITY MODEL
The utility model aims at solving the defects in the prior art and providing a crystal vacuum coater device.
In order to achieve the above purpose, the utility model adopts the following technical scheme: a vacuum crystal coater device comprises a coating box and a supporting mechanism, wherein a rotating rod is movably connected to the inner rear side surface of the coating box, a coating head is fixedly connected to the side surface of the rotating rod, a hydraulic cylinder is fixedly connected to the inner top of the coating box, an output end of the hydraulic cylinder is fixedly connected with a telescopic rod, a toothed plate is fixedly connected to one end, away from the hydraulic cylinder, of the telescopic rod, and a toothed ring is fixedly connected to the side surface of the rotating rod;
the upper surface of the film coating box is fixedly connected with a first motor, the output end of the first motor is fixedly connected with a first rotating shaft, the side surface of the first rotating shaft is fixedly connected with a connecting block, the interior of the connecting block is fixedly connected with a second motor, the output end of the second motor is fixedly connected with a second rotating shaft, and the side surface of the connecting block is movably connected with a rotating ring;
both ends all set up the connecting plate about the connecting block, the medial surface fixedly connected with spring of connecting plate, the bottom fixedly connected with clamp plate of spring, there is the right flank fixedly connected with connecting rod of connecting plate.
As a further description of the above technical solution:
the supporting mechanism comprises a supporting plate, a supporting column and a cross rod, the supporting plate is fixedly connected with the lower surface of the film coating box, the supporting column is fixedly connected with the bottom end of the supporting plate, and the cross rod is fixedly connected with the side surface of the supporting column.
As a further description of the above technical solution:
the upper surface of backup pad just is located the left side fixedly connected with box of coating case, the right flank fixedly connected with coupling hose of box.
As a further description of the above technical solution:
one end of the connecting hose, which is far away from the box body, extends to the inside of the box body and is connected with the input end of the film coating head.
As a further description of the above technical solution:
the upper surface of backup pad just is located the right side fixedly connected with vacuum pump of coating case, the input fixedly connected with connecting pipe of vacuum pump, the one end that the vacuum pump was kept away from to the connecting pipe extends to the inside of coating case.
As a further description of the above technical solution:
and one end of the second rotating shaft, which is far away from the second motor, is fixedly connected with the right side surface of the connecting plate.
As a further description of the above technical solution:
the toothed plate is meshed with the toothed ring, and one end, far away from the connecting plate, of the connecting rod is fixedly connected with the outer side face of the rotating ring.
As a further description of the above technical solution:
one end of the first rotating shaft, which is far away from the first motor, extends to the inside of the film coating box and is positioned on the right side of the film coating head.
The utility model discloses following beneficial effect has:
1. compared with the prior art, this crystal vacuum coating device equipment through setting up coupling hose, pinion rack, ring gear, can carry out angular adjustment to the coating film head, can be faster when carrying out the coating film to the wafer, improves the speed of coating film.
2. Compared with the prior art, the crystal vacuum coater equipment has the advantages that the first rotating shaft, the rotating ring and the second rotating shaft are arranged, so that the coating of the wafer is more uniform during coating, and the coating effect of the wafer is improved.
3. Compared with the prior art, this crystal vacuum coating device equipment through setting up spring and clamp plate, can fix the wafer, avoids the wafer to take place the phenomenon that drops, has improved the steadiness of wafer.
Drawings
FIG. 1 is a schematic view of the overall structure of a vacuum crystal coater apparatus according to the present invention;
FIG. 2 is a schematic view of the internal structure of a vacuum coater apparatus for crystals according to the present invention;
FIG. 3 is a front view of a crystal vacuum coater apparatus according to the present invention;
FIG. 4 is an enlarged view taken at A of FIG. 2;
fig. 5 is an enlarged view of the point B in fig. 2.
Illustration of the drawings:
1. coating a film box; 2. a support mechanism; 201. a support plate; 202. a support pillar; 203. a cross bar; 3. a box body; 4. a connecting hose; 5. a rotating rod; 6. coating a film head; 7. a hydraulic cylinder; 8. a toothed ring; 9. a first motor; 10. connecting blocks; 11. a second motor; 12. a second rotation shaft; 13. rotating the ring; 14. a connecting plate; 15. a spring; 16. pressing a plate; 17. a connecting plate; 18. a first rotating shaft; 19. a telescopic rod; 20. a toothed plate; 21. a vacuum pump; 22. and (4) connecting the pipes.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention; the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance, and furthermore, unless otherwise explicitly stated or limited, the terms "mounted," "connected," and "connected" are to be construed broadly and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.
Referring to fig. 1-5, the utility model provides a crystal vacuum coater apparatus: the wafer coating device comprises a coating box 1 and a supporting mechanism 2, wherein a box door is arranged on the front surface of the coating box 1 and is convenient for placing wafers, the supporting mechanism 2 is positioned on the lower surface of the coating box 1, the supporting mechanism 2 comprises a supporting plate 201, a supporting column 202 and a cross rod 203, the supporting plate 201 is fixedly connected with the lower surface of the coating box 1, the supporting column 202 is fixedly connected with the bottom end of the supporting plate 201, the cross rod 203 is fixedly connected with the side surface of the supporting column 202 to enhance the stability of the coating box 1, the upper surface of the supporting plate 201 is fixedly connected with a box body 3 positioned on the left side of the coating box 1, the right side surface of the box body 3 is fixedly connected with a connecting hose 4 which is convenient for a coating head 6 to rotate, one end, far away from the box body 3, of the connecting hose 4 extends into the box body 3 and is connected with the input end of the coating head 6, the upper surface of the supporting plate 201 is fixedly connected with a vacuum pump 21 positioned on the right side of the coating box 1, be convenient for take out futilely to the air in the coating film case 1, vacuum pump 21's input fixedly connected with connecting pipe 22, the one end that vacuum pump 21 was kept away from to connecting pipe 22 extends to the inside of coating film case 1.
Through setting up this structure, set up supporting mechanism 2 and be convenient for stabilize coating film case 1, set up vacuum pump 21 and be convenient for take out the air in coating film case 1 futilely, make coating film case 1 inside be in vacuum state.
The back medial surface swing joint of coating case 1 has bull stick 5, the coating head 6 of being convenient for rotates, the side surface fixedly connected with coating head 6 of bull stick 5, the interior top fixedly connected with pneumatic cylinder 7 of coating case 1, as coating head 6 pivoted power supply, the output fixedly connected with telescopic link 19 of pneumatic cylinder 7, pneumatic cylinder 7's one end fixedly connected with pinion rack 20 is kept away from to telescopic link 19, pinion rack 20 meshes with ring gear 8, the side surface fixedly connected with ring gear 8 of bull stick 5.
Through setting up this structure, set up coupling hose 4, pinion rack 20, ring gear 8, can carry out angular adjustment to coating film head 6, can be faster when carrying out the coating film to the wafer, improve the speed of coating film.
By adopting the structure, the first rotating shaft 18, the rotating ring 13 and the second rotating shaft 12 are arranged, so that the coating of the wafer is more uniform during coating, and the coating effect of the wafer is improved.
Both ends all set up connecting plate 14 about connecting block 10, and the medial surface fixedly connected with spring 15 of connecting plate 14, the bottom fixedly connected with clamp plate 16 of spring 15 are convenient for fix the wafer, and connecting plate 14 has right flank fixedly connected with connecting rod 17, is convenient for stabilize connecting plate 14.
Through setting up this structure, set up spring 15 and clamp plate 16, can fix the wafer, avoid the wafer to take place the phenomenon that drops, improved the steadiness of wafer.
The working principle is as follows: when using, fix the wafer that will need the coating film between two clamp plates 16, elasticity performance through spring 15 stabilizes the wafer, air through vacuum pump 21 in with coating film case 1 is taken out futilely, make coating film case 1 inside be in vacuum state, rethread first motor 9 rotates connecting block 10, rethread second motor 11, drive connecting plate 14 and rotate, rotation through the direction of difference, thereby improve the coating film to the wafer, make more even of wafer coating film, it rises to drive pinion rack 20 through pneumatic cylinder 7, the action that descends, rethread pinion rack 20 drives ring gear 8, it rotates to drive coating film head 6 of fixing on bull stick 5 with this, improve the speed of coating film with this.
Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications and variations can be made in the embodiments or in part of the technical features of the embodiments without departing from the spirit and the scope of the invention.
Claims (8)
1. The utility model provides a crystal vacuum coating ware equipment, includes coating film case (1), supporting mechanism (2), its characterized in that: the rear inner side surface of the film coating box (1) is movably connected with a rotating rod (5), the side surface of the rotating rod (5) is fixedly connected with a film coating head (6), the inner top of the film coating box (1) is fixedly connected with a hydraulic cylinder (7), the output end of the hydraulic cylinder (7) is fixedly connected with a telescopic rod (19), one end, far away from the hydraulic cylinder (7), of the telescopic rod (19) is fixedly connected with a toothed plate (20), and the side surface of the rotating rod (5) is fixedly connected with a toothed ring (8);
the upper surface of the film coating box (1) is fixedly connected with a first motor (9), the output end of the first motor (9) is fixedly connected with a first rotating shaft (18), the side surface of the first rotating shaft (18) is fixedly connected with a connecting block (10), the interior of the connecting block (10) is fixedly connected with a second motor (11), the output end of the second motor (11) is fixedly connected with a second rotating shaft (12), and the side surface of the connecting block (10) is movably connected with a rotating ring (13);
both ends all set up connecting plate (14) about connecting block (10), medial surface fixedly connected with spring (15) of connecting plate (14), bottom fixedly connected with clamp plate (16) of spring (15), there is right side fixedly connected with connecting rod (17) connecting plate (14).
2. The crystal vacuum coater apparatus according to claim 1, wherein: the supporting mechanism (2) comprises a supporting plate (201), a supporting column (202) and a cross rod (203), the supporting plate (201) is fixedly connected with the lower surface of the film coating box (1), the supporting column (202) is fixedly connected with the bottom end of the supporting plate (201), and the cross rod (203) is fixedly connected with the side surface of the supporting column (202).
3. The crystal vacuum coater apparatus according to claim 2, wherein: the upper surface of backup pad (201) just is located the left side fixedly connected with box (3) of coating case (1), the right flank fixedly connected with coupling hose (4) of box (3).
4. The crystal vacuum coater apparatus according to claim 3, wherein: one end of the connecting hose (4) far away from the box body (3) extends to the inside of the box body (3) and is connected with the input end of the film coating head (6).
5. The crystal vacuum coater apparatus according to claim 2, wherein: the upper surface of backup pad (201) just is located right side fixedly connected with vacuum pump (21) of coating case (1), the input fixedly connected with connecting pipe (22) of vacuum pump (21), the one end that vacuum pump (21) were kept away from in connecting pipe (22) extends to the inside of coating case (1).
6. The crystal vacuum coater apparatus according to claim 1, wherein: one end of the second rotating shaft (12) far away from the second motor (11) is fixedly connected with the right side face of the connecting plate (14).
7. The crystal vacuum coater apparatus according to claim 1, wherein: the toothed plate (20) is meshed with the toothed ring (8), and one end, far away from the connecting plate (14), of the connecting rod (17) is fixedly connected with the outer side face of the rotating ring (13).
8. The crystal vacuum coater apparatus according to claim 1, wherein: one end of the first rotating shaft (18), which is far away from the first motor (9), extends into the coating box (1) and is positioned on the right side of the coating head (6).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121783535.2U CN215288946U (en) | 2021-08-02 | 2021-08-02 | Crystal vacuum coating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121783535.2U CN215288946U (en) | 2021-08-02 | 2021-08-02 | Crystal vacuum coating device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN215288946U true CN215288946U (en) | 2021-12-24 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202121783535.2U Active CN215288946U (en) | 2021-08-02 | 2021-08-02 | Crystal vacuum coating device |
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| CN (1) | CN215288946U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114959593A (en) * | 2022-05-30 | 2022-08-30 | 咸阳旭光晶圆材料科技有限公司 | Laser crystal coating device and coating method thereof |
-
2021
- 2021-08-02 CN CN202121783535.2U patent/CN215288946U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114959593A (en) * | 2022-05-30 | 2022-08-30 | 咸阳旭光晶圆材料科技有限公司 | Laser crystal coating device and coating method thereof |
| CN114959593B (en) * | 2022-05-30 | 2023-09-19 | 咸阳旭光晶圆材料科技有限公司 | Laser crystal coating device and coating method thereof |
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