CN215261716U

CN215261716U - Quartz boat class product roughness measurement adjusting device

Info

Publication number: CN215261716U
Application number: CN202120698429.8U
Authority: CN
Inventors: 付兴隆; 陈洋洋; 杨军
Original assignee: Zhejiang Fuleide Quartz Technology Co ltd
Current assignee: Zhejiang Fuleide Quartz Technology Co ltd
Priority date: 2021-04-06
Filing date: 2021-04-06
Publication date: 2021-12-21
Anticipated expiration: 2031-04-06

Abstract

The utility model discloses a quartz boat class product roughness measurement adjusting device, including work platform, still include elevating gear, roughness appearance place the platform and roughness measurement appearance, elevating gear sets up between work platform and roughness appearance place the platform, roughness measurement appearance is fixed on roughness appearance place the platform. The utility model provides a quartz boat class product roughness measurement adjusting device satisfies under the roughness of precision measurement ditch tooth prerequisite, reduces the time of artificial adjustment roughness appearance height, improves detection efficiency.

Description

Quartz boat class product roughness measurement adjusting device

Technical Field

The utility model belongs to the technical field of quartz product detects and specifically relates to a quartz boat class product roughness measurement adjusting device is related to.

Background

Since the requirements for the appearance and the size of a quartz product in the semiconductor industry are very high, the requirement for precise detection of the quartz product is required, particularly for the groove tooth part of a quartz boat, because the requirement for the roughness of the groove tooth by a customer is very high due to direct contact with a silicon wafer, and the roughness of each groove tooth needs to be measured. However, the number of the grooves of each boat is large, and the grooves are not on the same plane, and the height of the roughness meter needs to be adjusted continuously to measure each groove. The workman now adopts the cushion to remove to adjust the roughness meter, and every ditch tooth of surveying just need add the cushion and remove to adjust the roughness meter and remove to measure next ditch tooth, and efficiency is very low down, needs a lot of tool cushions moreover. For example, the cylinder liner bore straightness detection device disclosed in the chinese patent literature has a publication number CN211783395U, which includes a roughness measuring instrument, a V-shaped block and a detection platform, wherein the roughness measuring instrument is connected to a lifting seat via a connecting plate in a lifting manner, the bottom of the lifting seat is fixed to the detection platform, the detection platform is provided with a horizontal guide rail, the bottom of the V-shaped block is provided with a chute matched with the horizontal guide rail, one end of the horizontal guide rail close to the roughness measuring instrument is provided with a stopper, the stopper is connected to the horizontal guide rail via a bolt, one side of the stopper close to the V-shaped block is provided with a flexible buffer pad, the upper end of the V-shaped block is provided with a V-shaped opening matched with the outer circular surface of the cylinder liner, the cylinder liner is horizontally placed on the V-shaped opening of the V-shaped block, the roughness measuring instrument is provided with a telescopic measuring pin corresponding to the inner bore of the cylinder liner, and the device positively measures the roughness via the telescopic side, but the device is suitable for the cylinder sleeve and is not suitable for quartz boat products.

Disclosure of Invention

The utility model relates to an overcome among the above-mentioned prior art to the ditch tooth roughness measurement of quartz boat inconvenient, the inefficiency scheduling problem, provide a quartz boat class product roughness measurement adjusting device, satisfying under the accurate measurement ditch tooth roughness prerequisite, reduce the time of artificial adjustment roughness appearance height, improve detection efficiency.

In order to achieve the above purpose, the utility model adopts the following technical scheme:

the utility model provides a quartz boat class product roughness measurement adjusting device, includes work platform, still includes elevating gear, roughness appearance place the platform and roughness measurement appearance, elevating gear sets up between work platform and roughness appearance place the platform, roughness measurement appearance is fixed on roughness appearance place the platform. In this technical scheme, control roughness measurement appearance's height through elevating gear, when using, make roughness measurement appearance's front end probe contact the first ditch tooth of quartz boat product and carry out the roughness measurement, after having measured first ditch tooth, adjustment elevating gear, make roughness measurement appearance drop to second ditch tooth position and carry out second ditch tooth and measure, repeat above-mentioned step and can carry out the roughness measurement to every ditch tooth of quartz boat, the simple operation, compare in traditional measurement mode, the use of tool piece has been reduced, and under the prerequisite of satisfying the accurate measurement ditch tooth roughness, reduce the time of artificial adjustment roughness appearance height, and the detection efficiency is improved.

Preferably, the lifting device comprises telescopic frames arranged in pairs, supporting plates used for fixing the telescopic frames, intermediate rods arranged in pairs and in parallel and adjusting rods used for controlling the telescopic frames to stretch, the supporting plates are fixed on the coarseness tester placing platform and the working platform, the telescopic frames are link mechanisms, and two ends of each intermediate rod are respectively connected to the paired telescopic frames in a rotating mode.

In the use, rotate through the control regulation pole and control the distance between two intermediate arms, two poles inwards/outwards remove in the middle of the pulling promptly, and then control the expansion bracket and stretch out and draw back to realize elevating gear's oscilaltion, the simple operation is laborsaving and efficient.

Preferably, the end of the telescopic frame is fixed on the support plate, the telescopic frame comprises a sliding support unit and a fixed support unit which are connected in a rotating mode, the sliding support unit and the fixed support unit are formed by connecting two support rods which form a V-shaped structure in a rotating mode through the end, a sliding hole is formed in the support plate, two ends of the sliding support unit are arranged on the sliding hole in a sliding mode, and two ends of the fixed support unit are fixed on the support plate.

The backup pad is spacing to the expansion bracket, make the expansion bracket can only carry out elevating movement, when using, the continuous grow of fixed support unit and the V type contained angle of the support unit that slides, and fixed support unit both ends are fixed, consequently the expansion bracket can only carry out up-and-down concertina movement, and the support unit that slides and sets up on the hole that slides, the concertina movement of avoiding the expansion bracket receives the hindrance, it is more steady to make elevating gear go up and down, in addition, the expansion bracket forms the upper and lower bottom of triangle-shaped structure with the backup pad, make the structure firm.

Preferably, the V-shaped openings of the sliding support unit and the fixed support unit are oppositely arranged to form a deformation frame. The deformation frame is of a quadrilateral structure, the quadrilateral structure is easy to deform, but the deformation of the deformation frame is limited by the support plate, so that the telescopic frame can move up and down.

Preferably, the ends of the two sliding support units/fixed support units in the pair are connected through a connecting rod. Such an arrangement facilitates the deformation of the paired sliding support unit/fixed support unit to be identical, and ensures the lifting stability.

Preferably, the two paired intermediate rods are respectively and rotatably connected between the two sliding support units and between the two fixed support units, and the intermediate rods are rotatably connected at the bending positions of the sliding support units/the fixed support units. Because the supporting rod and the intermediate rod of the sliding supporting unit/the fixed supporting unit can rotate relatively in the lifting process, the intermediate rod is arranged at the bending part of the sliding supporting unit/the fixed supporting unit to avoid punching on the supporting rod again, so that the structure is simpler.

Preferably, the middle rod is provided with an adjusting threaded hole, and the adjusting rod penetrates through the adjusting threaded hole and is in threaded connection with the adjusting threaded hole. Threaded connection's setting makes regulation pole and intermediate lever fixed, and it only needs the rotation regulation pole, and two poles outwards move inwards in the middle of the pulling, and then control the expansion bracket and drive the roughness measuring apparatu and go up and down, and convenient operation is swift.

Preferably, a shockproof foot pad is arranged at the bottom of the working platform. The shockproof foot pad is favorable for reducing errors caused by vibration to roughness measurement.

Therefore, the utility model discloses following beneficial effect has: on the premise of meeting the requirement of accurately measuring the roughness of the groove teeth, the time for artificially adjusting the height of the roughness meter is reduced, and the detection efficiency is improved; the structure is stable; and the error of the vibration on the roughness measurement is reduced.

Drawings

FIG. 1 is a schematic structural view of a device for measuring and adjusting roughness of quartz boat products according to the present invention;

FIG. 2 is a schematic structural view of the lifting device;

FIG. 3 is a schematic diagram of an application structure of a roughness measurement adjusting device for quartz boat products;

in the figure: 1. the device comprises a working platform 2, a roughness meter placing platform 3, a roughness meter 301, a front-end probe 4, a lifting device 5, quartz boat products 501, ditch teeth 6, a telescopic frame 601, a sliding support unit 602, a fixed support unit 7, a support plate 701, a sliding hole 8, an intermediate rod 9, a connecting rod 10, an adjusting rod 11, a shockproof foot pad 12 and a bottom plate.

Detailed Description

The present invention will be further described with reference to the accompanying drawings and the detailed description.

Example 1:

in embodiment 1 shown in fig. 1 and 2, a quartz boat product roughness measurement adjusting device includes a working platform 1, a roughness meter placing platform 2, and a roughness measuring instrument 3, wherein a lifting device 4 is arranged between the roughness meter placing platform 2 and the working platform 1, the roughness measuring instrument 3 is arranged on the roughness meter placing platform 2, and the lifting device 4 is used for installing and controlling the height of the roughness meter placing platform, and further controlling the height of the roughness measuring instrument 3. The lifting device 4 comprises a pair of telescopic frames 6, a supporting plate 7 for fixing the telescopic frames 6, a pair of middle rods 8 arranged in parallel and an adjusting rod 10 for controlling the telescopic frames 6 to stretch, the telescopic frames 6 are arranged to be link mechanisms, and two ends of each middle rod 8 are respectively connected to the paired telescopic frames 6 in a rotating mode. The telescopic frame 6 comprises a sliding supporting unit 601 and a fixed supporting unit 602, the sliding telescopic unit and the fixed telescopic unit are both arranged in a V-shaped structure with variable angles, namely the sliding supporting unit 601 and the fixed supporting unit 602 are formed by connecting two supporting rods with ends in a rotating manner to form the V-shaped structure, a sliding hole 701 is formed in the supporting plate 7, two ends of the sliding supporting unit 601 are arranged in the sliding hole 701 in a sliding manner, two ends of the fixed supporting unit 602 are fixed on the supporting plate 7, V-shaped openings of the sliding supporting unit 601 and the fixed supporting unit 602 are oppositely arranged to form a deformation frame, and the intersection of the supporting rods of the sliding supporting unit 601 and the fixed supporting unit 602 is connected in a rotating manner.

In addition, because the expansion bracket 6 is arranged in pairs, the sliding support units 601 and the fixed support units 602 are also arranged in pairs, the sliding support units 601/the fixed support units 602 in pairs are connected through the connecting rod 9, two ends of the connecting rod 9 are rotatably connected to the end parts of the two sliding support units 601/the fixed support units 602, the two middle rods 8 in pairs are respectively rotatably connected between the two sliding support units 601 and between the two fixed support units 602, two ends of the middle rod 8 are rotatably connected to the bending parts of the two sliding support units 601/the fixed support units 602, and the middle rods 8 and the connecting rod 9 are arranged in parallel. The intermediate rod 8 is used for controlling the telescopic frame 6 to extend and retract, and the connecting rod 9 is used for ensuring that the deformation of the two sliding supporting units 601/fixed supporting units 602 in a pair is synchronous and consistent. When using, the V type contained angle of fixed support unit 602 and the support unit 601 that slides constantly grow (fixed support unit 602 and the V type department of bending of the support unit 601 that slides constantly are close to each other or keep away from promptly), and fixed support unit 602 both ends are fixed, consequently telescopic bracket 6 can only carry out up-and-down concertina movement, and the support unit 601 that slides sets up on sliding hole 701, the concertina movement of avoiding telescopic bracket 6 receives the hindrance, it is more steady to make elevating gear 4 go up and down, in addition, telescopic bracket 6 and backup pad 7 form the upper and lower bottom of triangle-shaped structure, make the structure firm.

Furthermore, an adjusting threaded hole is formed in the middle rod 8, and the adjusting rod 10 penetrates through the adjusting threaded hole and is in threaded connection with the adjusting threaded hole. Threaded connection's setting makes regulation pole 10 and intermediate lever 8 fixed, and it only needs two poles in the middle of the pulling inwards outwards to remove, and then control expansion bracket 6 drives roughness measurement appearance 3 and goes up and down, and convenient operation is swift.

Further, a shockproof foot pad 11 is arranged at the bottom of the working platform 1. The anti-vibration foot pad 11 is arranged to reduce the error of the vibration to the roughness measurement.

In addition, here work platform 1 sets up to the marble platform, and the marble platform passes through the measurement calibration, guarantees whole plane degree. Backup pad 7 sets up to the L template, sets up bottom plate 12 on work platform 1, and bottom plate 12 is used for erection bracing board 7, and roughness appearance place platform 2 place the plane stainless steel polishing, and the surface is smooth and level, and this just makes roughness measurement appearance place the back level and level, and it is convenient to remove.

Example 2:

the embodiment 2 is basically the same as the embodiment 1, except that: to ensure that the two intermediate rods 8 move toward or away from each other during rotation of the adjustment lever 10, the threaded holes of the two intermediate rods 8 are oppositely threaded.

Example 3:

as shown in fig. 3, the technical solution of the embodiment 2 and the embodiment 1 apply the embodiments: when the roughness of the groove teeth 501 of the quartz boat products 5 is detected by using the roughness measurement and adjustment device for the quartz boat products, the method comprises the following steps:

the method comprises the following steps: placing a roughness detector on a roughness meter placing platform 2, fixing the roughness meter placing platform 2 with a lifting device 4, and then placing the whole device on a working platform 1;

step two: carefully placing quartz boat products 5 on the working platform 1;

step three: manually rotating the adjusting rod 10, pulling the two middle rods to move inwards and outwards, so as to drive the lifting platform to ascend and descend, and then enabling the front-end probe 301 of the roughness detector to contact with the first groove tooth 501 of the quartz boat type product 5 to measure the roughness;

step four: after the first groove tooth 501 is measured, the adjusting rod 10 is continuously rotated, so that the roughness detector is lowered to the position of the second groove tooth 501, and the roughness measurement of the second groove tooth 501 is carried out;

step five: repeating the steps, and measuring the roughness of each groove tooth 501 of the quartz boat by rotating the adjusting rod 10, thereby completing the measurement of the roughness of the groove teeth 501 of the quartz boat

It should be noted that as used in the foregoing description, the terms "front," "back," "left," "right," "upper" and "lower" refer to directions in the drawings, and the terms "inner" and "outer" refer to directions toward and away from, respectively, the geometric center of a particular component.

The above examples are only for illustrating the present invention and are not intended to limit the scope of the present invention. Various other modifications and changes may be made by those skilled in the art based on the above-described technical solutions and concepts, and all such modifications and changes are intended to fall within the scope of the claims.

Claims

1. The utility model provides a quartz boat class product roughness measurement adjusting device, includes work platform (1), characterized by still includes elevating gear (4), roughness appearance place the platform (2) and roughness measurement appearance (3), elevating gear (4) set up between work platform (1) and roughness appearance place the platform (2), roughness measurement appearance (3) are fixed on roughness appearance place the platform (2).

2. The quartz boat product roughness measurement and adjustment device as claimed in claim 1, wherein the lifting device (4) comprises a pair of expansion brackets (6), a support plate (7) for fixing the expansion brackets (6), a pair of middle rods (8) arranged in parallel, and an adjusting rod (10) for controlling the expansion brackets (6) to expand and contract, the support plates (7) are fixed on the roughness meter placing platform (2) and the working platform (1), the expansion brackets (6) are arranged as a link mechanism, and two ends of the middle rod (8) are respectively connected to the pair of expansion brackets (6) in a rotating manner.

3. The device for measuring and adjusting the roughness of quartz boat products as claimed in claim 2, wherein the end of the telescopic frame (6) is fixed on the supporting plate (7), the telescopic frame (6) comprises a sliding supporting unit (601) and a fixed supporting unit (602) which are rotatably connected with each other, the sliding supporting unit (601) and the fixed supporting unit (602) are both formed by two supporting rods which are rotatably connected with each other at the ends to form a V-shaped structure, a sliding hole (701) is formed in the supporting plate (7), two ends of the sliding supporting unit (601) are slidably arranged on the sliding hole (701), and two ends of the fixed supporting unit (602) are fixed on the supporting plate (7).

4. The device for measuring and adjusting the roughness of quartz boat products as claimed in claim 3, wherein the V-shaped openings of the sliding support unit (601) and the fixed support unit (602) are oppositely arranged to form a deformation frame.

5. The device for measuring and adjusting the roughness of quartz boat products as claimed in claim 3, wherein the ends of the two sliding support units (601)/fixed support units (602) in pair are connected through a connecting rod (9).

6. The device for measuring and adjusting the roughness of quartz boat products as claimed in claim 3, wherein the two middle rods (8) in pair are respectively connected between the two sliding support units (601) and the two fixed support units (602) in a rotating manner, and the middle rods (8) are connected at the bending points of the sliding support units (601)/the fixed support units (602) in a rotating manner.

7. The device for measuring and adjusting the roughness of quartz boat products as claimed in any one of claims 2-6, wherein the middle rod (8) is provided with an adjusting threaded hole, and the adjusting rod (10) penetrates through and is in threaded connection with the adjusting threaded hole.

8. The device for measuring and adjusting the roughness of quartz boat products as claimed in any one of claims 1-6, characterized in that a shock-proof foot pad (11) is arranged at the bottom of the working platform (1).