CN215251143U - Novel special slide glass boat of horizontal low pressure deposition furnace - Google Patents

Abstract

The utility model relates to a novel special slide glass boat of horizontal low pressure sedimentation stove, include the slide glass box body that forms by drain pan and upper cover amalgamation, it has the inlet port to cover evenly distributed on drain pan and the upper cover, be provided with the stop gear who is used for evenly arranging the product piece on the drain pan. The utility model discloses slide glass boat adopts box-like structure, wraps up the product in the box body completely, and the product piece is evenly arranged in the box body, can realize that deposit gas evenly enters into the box body in, improves the homogeneity that the film thickness of deposit and resistivity on the product piece, reduces and takes the membrane granule, improves the product quality.

Description

Novel special slide glass boat of horizontal low pressure deposition furnace

Technical Field

The utility model relates to a low pressure deposition equipment field, especially a novel special slide glass boat of horizontal low pressure deposition stove.

Background

The low-pressure deposition quartz boat is a tool clamp which is necessary for bearing product wafers and used in the working steps of low-pressure deposition horizontal furnace operation TEOS, POLY, SIN deposition and the like; the quartz boat is used in the tradition, can appear in the piece, the problem of the thick and resistivity homogeneity deviation of inter-chip membrane to and the problem that 0.3um area membrane granule exceeds standard in the stove (area membrane granule is unstable always, area membrane granule number can reach thousands of), bring very big influence to the horizontal deposition furnace operation of low pressure, the bad sculpture uniformity problem that can influence thickness sculpture or corruption workshop section of thick membrane homogeneity, each parameter uniformity problem of product can be influenced to the resistivity inconsistency, the granule can seriously influence the yield problem of operation product beyond standard.

SUMMERY OF THE UTILITY MODEL

In view of this, the utility model aims at providing a novel special slide glass boat of horizontal low pressure deposition furnace novel structure, practicality are strong, effectively improve the homogeneity that the deposited film thickness and resistivity on the product piece, reduce and take the membrane granule.

The utility model discloses a following scheme realizes: a novel special slide glass boat for a horizontal low-pressure deposition furnace comprises a slide glass box body formed by splicing a bottom shell and an upper cover, wherein air inlet holes are uniformly distributed in the bottom shell and the upper cover, and a limiting mechanism for uniformly distributing product pieces is arranged on the bottom shell.

Furthermore, the longitudinal sections of the bottom shell and the upper cover are semicircular.

Furthermore, the limiting mechanism comprises limiting strips which are positioned at the bottom and the side surface in the bottom shell and are parallel, and tooth grooves are distributed on the limiting strips along the length direction of the limiting strips.

Furthermore, the air inlet holes are long seam holes, the length direction of the air inlet holes is parallel to the axial lead of the bottom shell and the upper cover, and support legs are arranged on the lower side of the bottom shell.

Furthermore, the drain pan both ends are provided with the intubate, the upper cover both ends are provided with the inserted bar with the intubate grafting complex, the inserted bar tip is the toper.

Compared with the prior art, the utility model discloses following beneficial effect has: this novel special slide glass boat of horizontal low pressure deposition furnace novel structure, reasonable in design, the practicality is strong, adopts box-like structure, wraps up the product in the box body completely, and the product piece evenly arranges in the box body, can realize that deposition gas evenly enters into the box body in, improves the homogeneity that the film thickness of deposit and resistivity on the product piece, reduces and takes the membrane granule, improves the product quality.

In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be described in further detail below with reference to specific embodiments and related drawings.

Drawings

Fig. 1 is a front view of the embodiment of the present invention in a state where the bottom case and the upper cover are separated;

FIG. 2 is a longitudinal cross-sectional view of FIG. 1;

fig. 3 is a top view of the bottom case in the embodiment of the present invention;

fig. 4 is a bottom view of the upper cover in the embodiment of the present invention;

FIG. 5 is a schematic view of the structure of the spacing strip in the embodiment of the present invention;

the reference numbers in the figures illustrate: 100-slide box body, 110-bottom shell, 120-upper cover, 130-air inlet hole, 140-limit strip, 141-tooth groove, 150-support leg, 160-cannula, 170-inserted bar and 180-handle.

Detailed Description

It should be noted that the following detailed description is exemplary and is intended to provide further explanation of the disclosure. Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs.

It is noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of example embodiments according to the present application. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, and it should be understood that when the terms "comprises" and/or "comprising" are used in this specification, they specify the presence of stated features, steps, operations, devices, components, and/or combinations thereof, unless the context clearly indicates otherwise.

As shown in fig. 1 to 5, a novel slide boat dedicated for a horizontal low-pressure deposition furnace comprises a slide box body 100 formed by splicing a bottom shell 110 and an upper cover 120, wherein air inlets 130 are uniformly distributed on the bottom shell 110 and the upper cover 120, and a limiting mechanism for uniformly distributing product pieces is arranged on the bottom shell 100; the utility model discloses slide glass boat adopts box-like structure, wraps up the product in the box body completely, because stop gear's setting makes the product piece evenly arrange in the box body, and the inlet port through evenly distributed around is convenient for the deposit gas evenly enters into the box body in, forms the deposit rete with the contact of product piece for the homogeneity of the thick and resistivity of deposit film obtains good promotion on the product piece, and 0.3um area membrane granule obtains effectively reducing, can reduce to being less than 100 with lining (0.3 um), satisfies the product operation requirement.

In the present embodiment, both the bottom case 110 and the upper cover 120 have a semicircular longitudinal section.

In this embodiment, the limiting mechanism includes a limiting strip 140 located at the bottom and the side of the bottom case and parallel to each other, and a plurality of tooth grooves 141 are distributed on the limiting strip 140 along the length direction thereof; tooth's socket position one-to-one on all spacing, product piece edge is put into the tooth's socket that corresponds on the spacing, guarantees that the product piece can evenly arrange.

In this embodiment, the limiting strip is fixed on the bottom case through the arc-shaped connecting strips on the two sides by hot-melt welding.

In this embodiment, the air intake holes 130 are long slit holes which are uniformly distributed along the circumferential direction on the semicircular surfaces of the bottom case and the upper cover, and both ends of the long slit holes extend to both ends of the bottom case and the upper cover, and the length direction of the long slit holes is parallel to the axial line of the bottom case and the upper cover, and the bottom case is provided with support legs 150 at the lower side thereof.

In this embodiment, the insertion tube 160 is disposed at two ends of the bottom shell 110, the insertion rod 170 is disposed at two ends of the upper cover, the insertion rod is engaged with the insertion tube, the end of the insertion rod is tapered, and the insertion rod of the upper cover is inserted into the insertion tube of the bottom shell when the bottom shell and the upper cover are assembled together, so that the bottom shell and the upper cover are connected together.

In this embodiment, handles are disposed at two ends of the upper cover.

Any technical solution disclosed in the present invention is, unless otherwise stated, disclosed a numerical range if it is disclosed, and the disclosed numerical range is a preferred numerical range, and any person skilled in the art should understand that: the preferred ranges are merely those values which are obvious or representative of the technical effect which can be achieved. Because numerical value is more, can't be exhaustive, so the utility model discloses just disclose some numerical values with the illustration the technical scheme of the utility model to, the numerical value that the aforesaid was enumerated should not constitute right the utility model discloses create the restriction of protection scope.

The utility model discloses if disclose or related to mutual fixed connection's spare part or structure, then, except that other the note, fixed connection can understand: a detachable fixed connection (for example using bolts or screws) is also understood as: non-detachable fixed connections (e.g. riveting, welding), but of course, fixed connections to each other may also be replaced by one-piece structures (e.g. manufactured integrally using a casting process) (unless it is obviously impossible to use an integral forming process).

In addition, the terms used in any aspect of the present disclosure as described above to indicate positional relationships or shapes include similar, analogous, or approximate states or shapes unless otherwise stated.

The utility model provides an arbitrary part both can be assembled by a plurality of solitary component parts and form, also can be the solitary part that the integrated into one piece technology was made.

The foregoing is directed to preferred embodiments of the present invention, other and further embodiments of the invention may be devised without departing from the basic scope thereof, and the scope thereof is determined by the claims that follow. However, any simple modification, equivalent change and modification of the above embodiments according to the technical essence of the present invention are within the protection scope of the technical solution of the present invention.

Claims (5)

1. The utility model provides a special slide glass boat of novel horizontal low pressure deposition stove which characterized in that: the slide glass box comprises a slide glass box body formed by splicing a bottom shell and an upper cover, wherein air inlet holes are uniformly distributed in the bottom shell and the upper cover, and a limiting mechanism for uniformly distributing product pieces is arranged on the bottom shell.

2. The novel slide boat special for the horizontal low-pressure deposition furnace as claimed in claim 1, wherein: the longitudinal sections of the bottom shell and the upper cover are semicircular.

3. The novel special slide boat for the horizontal low-pressure deposition furnace according to claim 1 or 2, wherein: the limiting mechanism comprises limiting strips which are positioned at the bottom and the side surface in the bottom shell and are parallel, and tooth sockets are distributed on the limiting strips along the length direction of the limiting strips.

4. The novel slide boat special for the horizontal low-pressure deposition furnace as claimed in claim 2, wherein: the air inlet is a long slit hole, the length direction of the air inlet is parallel to the axial lead of the bottom shell and the upper cover, and support legs are arranged on the lower side of the bottom shell.

5. The novel slide boat special for the horizontal low-pressure deposition furnace as claimed in claim 1, wherein: the improved structure is characterized in that insertion pipes are arranged at two ends of the bottom shell, insertion rods matched with the insertion pipes in an inserted mode are arranged at two ends of the upper cover, and the end portions of the insertion rods are conical.

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