CN215218154U - Isolated air sampling device of high-purity liquid product - Google Patents
Isolated air sampling device of high-purity liquid product Download PDFInfo
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- CN215218154U CN215218154U CN202120996711.4U CN202120996711U CN215218154U CN 215218154 U CN215218154 U CN 215218154U CN 202120996711 U CN202120996711 U CN 202120996711U CN 215218154 U CN215218154 U CN 215218154U
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Abstract
The utility model relates to a sampling device field, concretely relates to isolated air sampling device of high-purity liquid product. Including the bin, fixed sealing connection can be dismantled to the bin upper end has the apron, the apron upper end is fixed with the intake pipe, install the check valve in the intake pipe, be fixed with the fixed pipe rather than the intercommunication on the bin bottom plate, install the relief valve on the fixed pipe of bin below, be fixed with the fender ring on the fixed pipe of relief valve below, still include the sampling bottle, the sampling bottle upper end internal fixation has the inner ring, the inner ring upper end is fixed with the elastic sealing ring, inner ring lower extreme circumference equipartition is fixed with a plurality of dead levers, the dead lever lower part is 90 bending type kinks to inner ring axle center direction, it is provided with the shrouding to slide between a plurality of dead levers, shrouding upper end and inner ring lower extreme sealing connection. The utility model discloses, simple structure, the sample is convenient, can prevent during the sample that the air from entering into the storage box, can effectually prevent that in the storage box that the electron chemicals are contaminated.
Description
Technical Field
The utility model relates to a sampling device field, concretely relates to isolated air sampling device of high-purity liquid product.
Background
With the rapid development of liquid crystal display and semiconductor industries, the demand and demand for wet electronic chemicals are increasing. In a wet process in a semiconductor manufacturing process, a wet electronic chemical material is required to meet the requirements of high purity, high selective corrosion, high selective cleaning, stripping and the like; if the wet chemical contains solid particles such as metal particles and dust particles, the function of the circuit in the wafer is easily damaged, and short circuit or open circuit is formed, so that the purity, storage and the like of the used wet electronic chemical are very strict. For example: NMP is one of wet electronic chemicals, the purity requirement of the NMP is more than or equal to 99.95 percent, the metal ion requirement is less than or equal to 1ppb, the particle number of more than or equal to 0.5 mu m is less than or equal to 100/mL, so that nitrogen sealing is needed for product storage, but when a cap is opened during ordinary bottle or barrel sampling, the whole bottle or barrel of samples can be polluted, and therefore, a sampling device capable of isolating air is needed.
SUMMERY OF THE UTILITY MODEL
The utility model aims to solve the technical problem that a simple structure, convenient to use can prevent during the sample that the air from entering into the storage box, can effectually prevent that what the storage box is electronic chemistry article contaminated isolated air sampling device of high-purity liquid product.
In order to realize the purpose, the utility model provides a technical scheme is:
the utility model provides an isolated air sampling device of high-purity liquid product, including the bin, fixed sealing connection has the apron can be dismantled to the bin upper end, the apron upper end is fixed with the intake pipe, install the check valve in the intake pipe, intake pipe and bin intercommunication, be fixed with the fixed pipe rather than the intercommunication on the bin bottom plate, install the relief valve on the fixed pipe of bin below, be fixed with the fender ring on the fixed pipe of relief valve below, a plurality of recesses have been seted up on the fixed intraduct of managing down the terminal surface, recess and fixed intraduct intercommunication, be fixed with the branch of L shape on the left bin bottom plate of fixed pipe, the straight portion of branch is located fixed pipe below, threaded connection has adjusting bolt on the straight portion of branch, the adjusting bolt upper end rotates and is provided with the tray, the tray is concentric with fixed pipe.
Still include the sampling bottle, sampling bottle upper end internal fixation has the inner ring, and the inner ring upper end is fixed with elastic sealing ring, and inner ring lower extreme circumference equipartition is fixed with a plurality of dead levers, and the dead lever lower part is 90 bending type kink to the inner ring axle center direction, slides between a plurality of dead levers and is provided with the shrouding, shrouding upper end and inner ring lower extreme sealing connection, through spring coupling between the kink of shrouding and dead lever, and it has nitrogen gas to fill in the sampling bottle.
Specifically, the upper end of the inner ring is flush with the upper end of the sampling bottle.
Specifically, the outer edge of the sealing plate is in sliding contact with the vertical part of the fixing rod.
Specifically, a sealing gasket is fixed at the upper end of the sealing plate, and the upper end of the sealing plate is connected with the lower end of the inner ring in a sealing mode through the sealing gasket.
Specifically, the grooves are uniformly distributed according to the circumference of the axis of the fixed pipe.
Compared with the prior art, the beneficial effects of the utility model are that:
the utility model discloses, simple structure, the sample is convenient, can prevent during the sample that the air from entering into the storage box, can effectually prevent that in the storage box that the electron chemicals are contaminated.
Drawings
Fig. 1 is a schematic structural diagram of the present invention.
Fig. 2 is an enlarged view of the area a in fig. 1.
Detailed Description
As shown in figure 1-2, the isolated air sampling device for the high-purity liquid product comprises a storage box 1, the upper end of the storage box 1 is detachably, fixedly and hermetically connected with a cover plate 2, the upper end of the cover plate 2 is fixedly provided with an air inlet pipe 3, the air inlet pipe 3 is provided with a one-way valve 4, the air inlet pipe 3 is communicated with the storage box 1, a bottom plate of the storage box 1 is fixedly provided with a fixed pipe 5 communicated with the storage box 1, a fixed pipe 5 below the storage box 1 is provided with a pressure relief valve 6, a fixed pipe 5 below the pressure relief valve 6 is fixedly provided with a baffle ring 11, the lower end surface of the fixed pipe 5 is provided with a plurality of grooves 12, the grooves 12 are uniformly distributed according to the circumference of the axis of the fixed pipe 5, the grooves 12 are communicated with the inside of the fixed pipe 5, a L-shaped support rod 7 is fixed on the bottom plate of the storage box 1 at the left side of the fixed pipe 5, the flat part of the support rod 7 is positioned below the fixed pipe 5, and is in threaded connection with an adjusting bolt 8, the upper end of the adjusting bolt 8 is rotatably provided with a tray 9, and the tray 9 is concentric with the fixed pipe 5.
Still include sampling bottle 10, the sampling bottle 10 upper end internal fixation has inner ring 18, the parallel and level of inner ring 18 upper end and sampling bottle 10 upper end, the inner ring 18 upper end is fixed with elastic sealing ring 16, and the inner ring 18 lower extreme circumference equipartition is fixed with a plurality of dead levers 13, and dead lever 13 lower part is 90 bending type bending parts to inner ring 18 axle center orientation, slides between a plurality of dead levers 13 and is provided with shrouding 15, the vertical sliding contact of 15 outer fringe of shrouding and dead lever 13, 15 upper ends of shrouding are fixed with sealed pad 17, and 15 upper ends of shrouding pass through sealed pad 17 sealing connection with the 18 lower extreme of inner ring, pass through spring 14 between the kink of shrouding 15 and dead lever 13 and be connected, and the interior packing of sampling bottle 10 has nitrogen gas.
When depositing wet electron chemistry article in bin 1, let in nitrogen gas in to bin 1 through intake pipe 3 to carry out the nitrogen seal to the wet electron chemistry article in the bin 1 and preserve.
When sampling is carried out, a sampling bottle 10 is placed on a tray 9, then an adjusting bolt 8 is rotated to enable the tray 9 and the sampling bottle 10 to move upwards, along with continuous ascending of the sampling bottle 10, the lower end of a fixed tube 5 is inserted in an inner ring 18, when an elastic sealing ring 16 is in sealing contact with a baffle ring 11, the lower end of the fixed tube 5 is in contact with a sealing gasket 17 at the upper end of a sealing plate 15 to continue to enable the sampling bottle 10 to move upwards, the elastic sealing ring 16 generates elastic deformation, the lower end of the fixed tube 5 enables the sealing plate 15 to move downwards, the sealing gasket 17 is separated from the inner ring 18, at the moment, the sampling bottle 10 is communicated with the fixed tube 5, high-purity nitrogen is introduced into a storage box 1 through an air inlet pipe 3 to enable the pressure in the storage box 1 to be increased, after a pressure relief valve 6 is opened, wet electronic chemicals in the storage box 1 can flow into the sampling bottle 10 through the fixed tube 5, a groove 12 and a gap between the sealing gasket 17 and the inner ring 18, in-process that wet electron chemicals entered into sampling bottle 10, nitrogen gas in the sampling bottle 10 can enter into bin 1, consequently, can prevent during the sample that the air from entering into bin 1, along with the discharge of wet electron chemicals, pressure reduction in the bin 1, after relief valve 6 closes, rotation adjusting bolt 8, make sampling bottle 10 down, when the separation of fixed tube 5 lower extreme and sealed pad 17, under spring 14's spring action, shrouding 15 passes through sealed pad 17 sealing connection with inner ring 18, thereby seal the preservation to the wet electron chemicals in the sampling bottle 10, inner ring 18 still passes through elastic sealing ring 16 and keeps off ring 11 sealing connection this moment, continue to rotate adjusting bolt 8, until sampling bottle 10 separates with fixed tube 5 completely. The elastic sealing ring and the sealing gasket are generally made of polytetrafluoroethylene materials.
The above description is only exemplary of the present invention and should not be taken as limiting the scope of the present invention, as any modifications, equivalents, improvements and the like made within the spirit and principles of the present invention are intended to be included within the scope of the present invention.
Claims (5)
1. An isolated air sampling device for high-purity liquid products comprises a storage box, wherein the upper end of the storage box is detachably, fixedly and hermetically connected with a cover plate, the isolated air sampling device is characterized in that an air inlet pipe is fixed at the upper end of the cover plate, a one-way valve is installed on the air inlet pipe, the air inlet pipe is communicated with the storage box, a fixed pipe communicated with the storage box is fixed on the bottom plate of the storage box, a pressure release valve is installed on the fixed pipe below the storage box, a baffle ring is fixed on the fixed pipe below the pressure release valve, a plurality of grooves are formed in the lower end surface of the fixed pipe, the grooves are communicated with the inside of the fixed pipe, an L-shaped support rod is fixed on the bottom plate of the storage box on the left side of the fixed pipe, the straight part of the support rod is positioned below the fixed pipe, an adjusting bolt is in threaded connection with the straight part of the support rod, a tray is rotatably arranged at the upper end of the adjusting bolt, the tray is concentric with the fixed pipe,
still include the sampling bottle, sampling bottle upper end internal fixation has the inner ring, and the inner ring upper end is fixed with elastic sealing ring, and inner ring lower extreme circumference equipartition is fixed with a plurality of dead levers, and the dead lever lower part is 90 bending type kink to the inner ring axle center direction, slides between a plurality of dead levers and is provided with the shrouding, shrouding upper end and inner ring lower extreme sealing connection, through spring coupling between the kink of shrouding and dead lever, and it has nitrogen gas to fill in the sampling bottle.
2. The apparatus of claim 1, wherein the upper end of the inner ring is flush with the upper end of the sampling bottle.
3. The apparatus of claim 1, wherein the plate is slidably engaged with the vertical portion of the retaining rod.
4. The apparatus for sampling air from a high purity liquid product according to claim 1, wherein a sealing gasket is fixed to the upper end of the sealing plate, and the upper end of the sealing plate is connected with the lower end of the inner ring in a sealing manner through the sealing gasket.
5. The isolated air sampling device of claim 1, wherein the plurality of grooves are evenly spaced around the circumference of the axis of the stationary tube.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120996711.4U CN215218154U (en) | 2021-05-11 | 2021-05-11 | Isolated air sampling device of high-purity liquid product |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120996711.4U CN215218154U (en) | 2021-05-11 | 2021-05-11 | Isolated air sampling device of high-purity liquid product |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN215218154U true CN215218154U (en) | 2021-12-17 |
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ID=79418571
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202120996711.4U Active CN215218154U (en) | 2021-05-11 | 2021-05-11 | Isolated air sampling device of high-purity liquid product |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN215218154U (en) |
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2021
- 2021-05-11 CN CN202120996711.4U patent/CN215218154U/en active Active
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