CN215214608U

CN215214608U - Vacuum linear leading-in device

Info

Publication number: CN215214608U
Application number: CN202121109686.XU
Authority: CN
Inventors: 马丽敏; 王超; 耿继宝; 杜文武; 李朝阳
Original assignee: Anhui Specreation Instrument Science & Technology Co ltd
Current assignee: Anhui Specreation Instrument Science & Technology Co ltd
Priority date: 2021-05-21
Filing date: 2021-05-21
Publication date: 2021-12-17
Anticipated expiration: 2031-05-21

Abstract

The utility model provides a vacuum straight line gatherer, the ejector pin of differential head is located the outer pillar that outer pillar and differential head link to each other the end inside, the rod end and the ejector pin rod end of ejector pin constitute for sphere and plane and support the cooperation of pressure formula and positive pressure between the two and ejector pin rod core with the core and arrange, the one end of flange cover links to each other with the tip of keeping away from the outer pillar of differential head place end, the other end of ejector pin extends to the outside of flange cover, arrange the inside bellows one end sealing connection of outer pillar on the inside flange cover of outer pillar in, the other end is connected with the rod end sealing who is close to ejector pin one end on the ejector pin, constitute the straight line displacement cooperation between ejector pin and the flange cover. What constitute between the rod end face of ejector pin and the ejector pin is that the sphere supports to lean on the point contact formula cooperation of complex with the plane, has just so guaranteed the ejector pin and has avoided receiving the effect of eccentric force and moment of torsion, and the ejector pin receives external force promptly and is with the same core rather than the pole core, and the ejector pin does not have the deformation production in the linear displacement process.

Description

Vacuum linear leading-in device

Technical Field

The utility model relates to a little stroke high accuracy straight line gatherer for vacuum environment belongs to vacuum apparatus technical field.

Background

With the development of modern science and technology, the application of vacuum technology is more and more extensive. In vacuum instrumentation, it is often necessary to control the linear displacement and movement of the workpiece therein, and the linear introducer is the most common device for performing this function.

The slit is one of the main components of the optical system, and the slit width is often required to be adjustable online, and the linear introducer is a basic tool for realizing the online adjustment of the slit width. The linear introducer for adjusting the width of the slit has the following characteristics: the vacuum sealing device is used in a vacuum link, so that the rear section of a working push rod or an ejector rod of the importer needs to be reliably sealed; the precise optical device requires that the repeated positioning precision and the resolution of the slit width reach the mu level, so the precision requirement of the linear displacement of the introducer is extremely high; in addition, the width of the slit to be adjusted is generally smaller, and is usually between 0 mm and 1mm, so that the stroke of the linear introducer for realizing the driving function is smaller.

In the sealing mode of the introducer, the traditional method is to adopt a rubber sealing mode or a design mode of stretching and contracting by the deformation of a metal corrugated pipe. The method has the characteristics of reliable vacuum, high vacuum degree, convenient installation and low cost, is named as 'ultrahigh vacuum linear introducer' (patent number ZL200920011032.6), 'ultrahigh vacuum linear pushing introducer' (patent number ZL200920011033.0) and 'precise heavy-load vacuum linear introducing device' (patent number ZL 200920014985.8), adopts a mode of arranging a corrugated pipe to maintain vacuum, namely, an introducing rod 11 or 1 or a hollow shaft 4 is arranged in the corrugated pipe and is connected with vacuum equipment by using flanges 1, 10 and 2, so that the introducing rod 11 or 1 or the hollow shaft 4 can be in a vacuum environment to implement linear displacement.

The above prior art concentrates on the following drawbacks and disadvantages:

1. the external part provides power in a torque mode, and the power is transmitted and converted into linear motion through a transmission mechanism such as a coupler, a screw rod nut and a sliding seat, and the mechanical transmission structure is complex and the production cost is high;

2. the torque provided by external rotation is converted into linear motion, and the coaxiality requirement is difficult to realize in part processing and assembling, so that the difficulty is increased for debugging;

3. the screw rod, the nut structure, the bearing of the rotating part and the coupling of the connecting part have gaps in the process of pushing or returning movement, and the precision is difficult to guarantee.

SUMMERY OF THE UTILITY MODEL

The utility model aims at providing a vacuum straight line gatherer, simple structure, the debugging of being convenient for and the precision is high. In order to achieve the above object, the utility model discloses a technical scheme, a vacuum straight line gatherer, its characterized in that: the ejector rod of the differential head is positioned inside the outer protecting pipe at the end where the outer protecting pipe is connected with the differential head, the rod end of the ejector rod and the rod end of the ejector rod form a pressing fit through a spherical surface and a plane, positive pressure between the spherical surface and the plane is arranged with the ejector rod core in a concentric manner, one end of the flange sleeve is connected with the end part of the outer protecting pipe far away from the end where the differential head is positioned, the other end of the ejector rod extends to the outside of the flange sleeve, one end of a corrugated pipe arranged inside the outer protecting pipe is connected to the flange sleeve inside the outer protecting pipe in a sealing manner, the other end of the corrugated pipe is connected with the rod end, close to one end of the ejector rod, of the ejector rod in a sealing manner, and linear displacement fit is formed between the ejector rod and the flange sleeve.

Among the above-mentioned scheme, what constitute between the rod end face of ejector pin and the ejector pin is that the sphere supports with the plane and leans on the complex point contact formula cooperation to contact cooperation position and ejector pin coincidence, just so guaranteed the ejector pin and avoided receiving the effect of eccentric force and moment of torsion, the ejector pin receives external force and its pole core with the core promptly, the ejector pin does not have the deformation production at the linear displacement process, so its displacement volume can be directly read by the differential head, provides the prerequisite guarantee for high accuracy displacement adjustment slit, and the utility model discloses still have the simple advantage of showing of debugging.

Drawings

FIG. 1 is a schematic perspective view of the present invention;

FIG. 2 is a schematic sectional view of the present invention;

FIG. 3 is a schematic perspective view of the cross-sectional structure of the present invention;

FIG. 4 is a perspective view of the present invention with the outer sheath removed;

FIG. 5 is a perspective view of the present invention in a partially assembled state;

fig. 6 is a sectional perspective view of the present invention in a partially assembled state.

Detailed Description

As shown in fig. 1 and 2, in the vacuum linear introducer, the ejector rod 11 of the differential head 10 is located inside the outer protection tube 20 at the end where the outer protection tube 20 is connected with the differential head 10, the rod end of the ejector rod 11 and the rod end of the ejector rod 30 are in a pressing fit with each other by a spherical surface and a plane, and the positive pressure between the two is arranged with the rod core of the ejector rod 30 in the same core, one end of the flange sleeve 50 is connected with the end of the outer protection tube 20 far away from the end where the differential head 10 is located, the other end of the ejector rod 30 extends to the outside of the flange sleeve 50, one end of the corrugated tube 60 arranged inside the outer protection tube 20 is hermetically connected to the flange sleeve 50 inside the outer protection tube 20, the other end of the corrugated tube is hermetically connected with the rod end of the ejector rod 30 close to one end of the ejector rod 11, and the ejector rod 30 and the flange sleeve 50 form a linear displacement fit.

In the above solution, the outer protecting tube 20 is used to connect the differential head 10 and the flange sleeve 50, when in use, the flange sleeve 50 is hermetically connected with the related equipment, and the bellows 60 is disposed between the flange sleeve 50 and the ejector pin 30, so that the ejector pin 30 is located in an environmental state where the bellows 60, the flange sleeve 50 and the related equipment are maintained, that is, in a vacuum environment where the optical instrument is usually located. In view of the tube length deformation properties of bellows 60, it provides a guarantee for the ejector pin 30 to be displaced in the relevant vacuum environment, i.e. the rod end of ejector pin 30 extends into the environment of the optics and performs the task of driving the relevant device in motion. Because the rod ends of the ejector rod 11 and the ejector rod 30 are in abutting fit with each other by the spherical surface and the plane, and the positive pressure between the two is arranged in the same core with the rod core of the ejector rod 30, the direction of the external force of the displacement applied to the ejector rod 30 is in the same core with the rod core, so that the ejector rod 30 is free from the action of torque and eccentric bending moment, that is, the linear displacement posture of the ejector rod 30 is ensured without the occurrence of rotary motion and bending deformation. On the basis, the linear displacement driven and read by the differential head 10 is consistent with the real displacement of the ejector rod 30, so that the precision of displacement adjustment is ensured, the displacement of the executed piece can be accurately controlled, and the accurate adjustment of a slit is realized. Because the utility model provides a rod end and ejector pin 30 rod end of ejector pin 11 constitute for sphere and plane and support the formula cooperation of pressing, both are the parts that are totally independent each other promptly and between the two only constitute lean on the formula cooperation, so, ejector pin 11 can not rigidity pulling bellows 60 during the return stroke to avoided the bellows to be drawn the condition emergence of damaging, just also ensured bellows 60's airtight integrality certainly.

Preferably, the rod end surface of the ejector rod 11 is in abutting fit with the vertex of the spherical surface 41 at the end of the ejector rod 30, and the vertex of the spherical surface 41 is concentric with the ejector rod 30. The spherical surface 41 serving as a stress piece is arranged at the end part of the ejector rod 30, so that the processing precision is ensured, and the processing difficulty is reduced. It should be noted here that the spherical surface 41 is not required to be a shape of a strictly mathematically circular spherical surface, but may be a spherical surface shape having an ellipse, a parabola, or the like as a revolution surface, and the top portion of the curved surface is required to be in contact with the rod end plane of the push rod 11, so that it is easier to realize concentric arrangement of the vertex of the spherical surface 41 and the push rod 30, in other words, the processing accuracy of concentric arrangement of the vertex of the spherical surface 41 and the push rod 30 is easier to realize.

The specific configuration of the spherical surface 41 may be that the spherical surface 41 is directly machined at the end of the ejector pin 30, or may be implemented according to the preferred embodiments described below.

The round steel ball 40 is positioned at the conical blind hole 31 of the rod end of the ejector rod 30, the rod core of the ejector rod 30 and the hole core of the conical blind hole 31 are arranged in the same core, and the top point of the spherical surface 41 of the round steel ball 40 exposed outside the conical blind hole 31 is abutted against the rod end plane of the ejector rod 11.

The conical blind hole 31 is processed on the rod end of the ejector rod 30 easily, the position and shape accuracy can be ensured, and meanwhile, the round steel ball 40 can also ensure the self accuracy and the matching accuracy with the conical blind hole 31.

Preferably, the ejector rod 30 is provided with a retainer 33 at the rod end, and the partial spherical surface 41 of the round steel ball 40 protrudes outside the retainer 33. The provision of the retainer 33 makes the assembly process extremely simple and ensures a substantially stable position of the round steel beads 40.

In view of the main function of bellows 60 is to realize sealed environment, if rely on the reliable and stable conflict of the pole terminal surface of its deformation providing elasticity that resumes of its simple dependence to order about round steel ball 40 and ejector pin 11, this can have hidden danger, for eliminating this hidden danger, the utility model discloses a following preferred scheme, be provided with spring 70 between the ejector pin 30 in the outer pillar 20 and the flange cover 50, spring 70 provides elasticity and orders about ejector pin 30 to the displacement of little head 10 place end. Therefore, under the action of the spring 70, the round steel ball 40 and the rod end surface of the ejector rod 11 always keep a reliable interference state, and the phenomenon that the round steel ball 40 and the rod end surface are separated and then contacted to cause collision is avoided.

The end of the ejector rod 30 located in the outer protecting tube 20 is a T-shaped head 32, the outer wall of the T-shaped head 32 is connected with one end of a limiting adjusting sleeve 80 through a thread, and the other end of the limiting adjusting sleeve 80 extends to the side where the flange sleeve 50 is located. In order to realize the spacing regulatory function, the utility model discloses in add the displacement stroke of establishing spacing adjusting sleeve 80 and injecing the ejector pin 30 with this, for the convenience of connecting, design the one end of ejector pin 30 for T shape head 32, can set up connecting thread like this and be used for connecting spacing adjusting sleeve 80.

More preferably, the spring 70 is enclosed outside the tube of the limit adjusting sleeve 80, and one end of the spring abuts against the step surface 81 of the outer wall of the limit adjusting sleeve 80, and the other end abuts against the inner side of the flange sleeve 50. The stepped surface 81 formed at the threaded end of the limit adjusting sleeve 80 is used for the end surface matched with the spring 70, and the tube body of the limit adjusting sleeve 80 plays a role in maintaining the position and the posture of the spring 70.

Meanwhile, when the limit adjusting sleeve 80 moves towards the flange sleeve 50, the spring 70 is compressed, and the front end of the limit adjusting sleeve 80 touches the inner end surface of the flange sleeve 50, so that the maximum stroke is reached. Therefore, mechanisms such as hinges in the cavity of the vacuum equipment can be protected from being damaged due to overlarge stroke of the push-rod 30. When the differential head 10 is rotated reversely, the spring 70 pushes the ejector rod 30, the round steel beads 40 and the rod end surface of the ejector rod 11 of the differential head 10 to be closely attached through the limiting adjusting sleeve 80, so as to realize reverse linear motion. The distance between the limiting adjusting sleeve 80 and the inner end face of the flange sleeve 50 can be adjusted by rotating the limiting adjusting sleeve 80 and the thread matching section on the outer wall of the T-shaped head 32, so that the purpose of adjusting the stroke of the ejector rod 30 is achieved.

The utility model also provides a preferred scheme of holder 33, promptly the holder 33 include the nut section and be located the bottom 331 of nut section one end, bottom 331 middle part aperture is less than the hole of steel ball 40 diameter, the part sphere of steel ball 40 is outside from this hole department protrusion to bottom 331. The scheme not only facilitates the processing of the retainer 33, but also facilitates the assembly operation.

For convenient assembly, the small-diameter pillar stand sections at one side of the fixed sleeve 12 and the flange sleeve 50 on the differential head 10 are respectively inserted into the pipe holes at two ends of the outer protective pipe 20, and the insertion matching sections are provided with radial locking screws 90.

In addition, the ejector pin 30 is linearly movably engaged with the flange sleeve 50 by a linear bearing 100 to form a limit guide. This can ensure the positional accuracy during the linear displacement of the ejector pin 30.

Claims

1. A vacuum linear introducer, characterized by: the ejector rod (11) of the differential head (10) is located inside an outer protective pipe (20) at the end where the outer protective pipe (20) is connected with the differential head (10), the rod end of the ejector rod (11) and the rod end of the ejector rod (30) are in pressing fit through a spherical surface and a plane, positive pressure between the spherical surface and the plane is arranged with the rod core of the ejector rod (30) in a concentric mode, one end of a flange sleeve (50) is connected with the end portion of the outer protective pipe (20) far away from the end where the differential head (10) is located, the other end of the ejector rod (30) extends to the outside of the flange sleeve (50), one end of a corrugated pipe (60) arranged inside the outer protective pipe (20) is connected to a flange sleeve (50) inside the outer protective pipe (20) in a sealing mode, the other end of the corrugated pipe is connected with the rod end, close to one end of the ejector rod (11), on the ejector rod (30), and the flange sleeve (50) form linear displacement fit.

2. The vacuum line introducer of claim 1, wherein: the end surface of the ejector rod (11) is abutted and matched with the top point of the spherical surface (41) at the end part of the ejector rod (30), and the top point of the spherical surface (41) and the ejector rod (30) are arranged in the same core.

3. The vacuum line introducer of claim 2, wherein: the round steel ball (40) is located at the conical blind hole (31) of the rod end of the ejector rod (30), the rod core of the ejector rod (30) and the hole core of the conical blind hole (31) are arranged in the same core, and the top point of the spherical surface (41) of the round steel ball (40) exposed outside the conical blind hole (31) is abutted to the plane of the rod end of the ejector rod (11).

4. The vacuum line introducer of claim 2, wherein: the rod end of the ejector rod (30) is provided with a retainer (33), and part of the spherical surface (41) of the round steel bead (40) protrudes outwards to the outside of the retainer (33).

5. The vacuum line introducer of claim 2 or 3, wherein: a spring (70) is arranged between the ejector rod (30) in the outer protecting pipe (20) and the flange sleeve (50), and the spring (70) provides elastic force to drive the ejector rod (30) to move towards the end where the differential head (10) is located.

6. The vacuum line introducer of claim 2 or 3, wherein: the rod end of the ejector rod (30) located in the outer protecting pipe (20) is a T-shaped head (32), the outer wall of the T-shaped head (32) is in threaded connection with one end of a limiting adjusting sleeve (80), and the other end of the limiting adjusting sleeve (80) extends towards the side where the flange sleeve (50) is located.

7. The vacuum line introducer of claim 5, wherein: the push rod (30) be located the rod end of outer pillar (20) for T shape head (32), T shape head (32) outer wall and the one end threaded connection of spacing adjusting sleeve pipe (80), the other end of spacing adjusting sleeve pipe (80) extends to flange cover (50) place side, spring (70) enclose establish in spacing adjusting sleeve pipe (80) body outside and its one end support by on step face (81) of the outer wall of spacing adjusting sleeve pipe (80), the other end supports by the inboard of flange cover (50).

8. The vacuum line introducer of claim 4, wherein: the retainer (33) comprises a nut section and a bottom cover (331) positioned at one end of the nut section, a hole with the aperture smaller than the diameter of the steel ball (40) is formed in the middle of the bottom cover (331), and part of the spherical surface of the steel ball (40) protrudes out of the bottom cover (331) from the hole.

9. The vacuum line introducer of claim 1, wherein: the fixed sleeve (12) on the differential head (10) and the small-diameter column base on one side of the flange sleeve (50) are respectively inserted into pipe holes at two ends of the outer protective pipe (20), and the insertion matching section is provided with a radial locking screw (90).

10. The vacuum line introducer of claim 1, wherein: the ejector rod (30) and the flange sleeve (50) form a limit guide linear displacement fit by a linear bearing (100).