CN215213870U - Vibration plate of piezoelectric micropump and piezoelectric micropump - Google Patents

Abstract

The utility model relates to the technical field of piezoelectric micropumps, in particular to a vibrating plate of a piezoelectric micropump and a piezoelectric micropump thereof, wherein the vibrating plate comprises a vibrating part and a connecting part arranged at the periphery of the vibrating part, on one hand, the part of the connecting part of the vibrating plate of the piezoelectric micropump, except a window, can be fixedly connected with a support plate, thereby greatly improving the connecting area between the vibrating plate as a key part and the support plate, increasing the connecting strength, reducing the risk of connection failure in the working process, on the other hand, through arranging a cantilever structure consisting of an inner cantilever part, a middle cantilever part and an outer cantilever part, the length and the width of the cantilever structure are equivalently increased in a limited space, reducing the stress concentration at the connecting position between the cantilever structure and a beam part and between the cantilever structure and the connecting part in the deformation process of the cantilever structure, and reducing the working process, the risk of failure of the cantilever structure from root fracture improves life.

Description

Vibration plate of piezoelectric micropump and piezoelectric micropump

Technical Field

The utility model belongs to the technical field of piezoelectricity micropump technique and specifically relates to a vibration board of piezoelectricity micropump, in addition, the utility model discloses still relate to a piezoelectricity micropump including the vibration board of above-mentioned piezoelectricity micropump.

Background

The piezoelectric driving type fluid conveying and controlling device has the advantages of compact structure, easy microminiaturization, easy integration, high control precision, high response speed, low power consumption, long service life, high reliability and the like, and has wide application requirements in the fields of medical treatment, biology, chemical industry and the like.

In contrast, some piezoelectric micropumps have been proposed in the prior art, such as a vertically supported micro piezoelectric pump disclosed in patent document CN109869302A, in which a beam portion in a flexible plate (diaphragm) is provided in a circumferential direction, so that when the beam portion bends with an actuator (piezoelectric vibrator), the beam portion is easily subjected to torsional deformation, and further, the root of the beam portion is concentrated in stress, and thus the beam portion is easily broken;

patent document CN 111980887 a discloses a staggered-layer support structure of a piezoelectric micropump and a gas control device, in which cantilevers are provided in a resonator plate (diaphragm) in a radial direction, and torsional deformation can be greatly reduced when beam portions bend along with a piezoelectric vibrator, but the beam portions are all provided on the outer periphery of the resonator plate, and therefore, the effective connection area between the resonator plate and the support plate is inevitably reduced, and there is a risk of connection failure.

SUMMERY OF THE UTILITY MODEL

The to-be-solved technical problem of the utility model is: in order to solve the problem that the vibration plate in the piezoelectric micropump in the prior art can not have the stress concentration that reduces roof beam portion deformation in-process cantilever structure hookup location simultaneously concurrently and have great effective connection area, the present vibration plate that provides a piezoelectric micropump, in addition, the utility model provides a piezoelectric micropump including the vibration plate of above-mentioned piezoelectric micropump.

The utility model provides a technical scheme that its technical problem adopted is: a vibration plate of a piezoelectric micropump is provided with a piezoelectric vibrator, the vibration plate is used for being matched with the piezoelectric vibrator, the vibration plate comprises a vibration part and a connecting part arranged on the periphery of the vibration part, and a through-flow hole penetrates through the vibration part;

run through on the connecting portion and have at least one window, have in the window and be used for with piezoelectric vibrator fixed connection's connection cantilever, it includes roof beam portion and cantilever structure to connect the cantilever, cantilever structure includes interior cantilever portion, middle cantilever portion and outer cantilever portion, the quantity sum of interior cantilever portion and outer cantilever portion is greater than three, the one end of interior cantilever portion all is connected with the inner wall of window, and the other end all is connected with the inside wall of middle cantilever portion, and the lateral wall and the outer cantilever portion of middle cantilever portion are connected, and the one end and the roof beam portion that middle cantilever portion was kept away from to outer cantilever portion are connected, and the one end that outer cantilever portion was kept away from to the roof beam portion is unsettled.

In this embodiment, on the one hand, the part that the window was detached to connecting portion all can with backup pad fixed connection, greatly improved the area of connection between vibration board and the backup pad as key component, joint strength has been increased, the risk of connection failure in the course of the work has been reduced, on the other hand, through setting up the cantilever structure who comprises interior cantilever portion, middle cantilever portion and outer cantilever portion, the equivalent length and the width that has increased cantilever structure in limited space, can reduce the stress concentration of the hookup location department between cantilever structure and roof beam portion and cantilever structure and the connecting portion among the cantilever structure deformation process, in the reduction work process, cantilever structure follows the risk of root fracture failure, and service life is prolonged.

Further, the inner boom portion and the outer boom portion are offset from each other in the circumferential direction of the vibrating portion; that is to say, the connection points of the inner cantilever part, the outer cantilever part and the middle cantilever part are staggered with each other, so that the length and the width of the cantilever structure are equivalently increased, the stress of the middle cantilever part is relatively uniform, and the phenomenon of local stress concentration of the middle cantilever part is avoided.

Preferably, the inner boom portion and the outer boom portion each have two;

for the case that both the inner boom portion and the outer boom portion have two, the following two schemes can be adopted for the layout:

one of the two inner cantilever parts is respectively positioned at two ends of the inner side wall of the middle cantilever part, and the two outer cantilever parts are both positioned in the middle of the outer side wall of the middle cantilever part.

And the two inner cantilever parts are positioned in the middle of the inner side wall of the middle cantilever part, and the two outer cantilever parts are respectively positioned at two ends of the outer side wall of the middle cantilever part.

Further, the connecting part and the vibrating part are integrally formed, or the connecting part and the vibrating part are fixedly connected.

Further, the vibration plate is a conductor.

Further, the connecting portion is a conductor.

Further, the connecting cantilever and the connecting part are integrally formed; or the connecting cantilever is fixedly connected with the connecting part.

Further, a second external electrode is arranged on the outer edge of the connecting part.

The utility model also provides a piezoelectric micropump, including pump case, piezoelectric vibrator and bearing structure, found out between pump case and the bearing structure and hold the chamber, bearing structure includes the backup pad and establishes the vibration board in the backup pad, vibration board and piezoelectric vibrator all are located and hold the intracavity, the vibration board be foretell the vibration board that is used for piezoelectric micropump, the backup pad orientation holds the one side in chamber and the connecting portion fixed connection of vibration board, the backup pad is provided with the depressed groove towards one side of vibration board, the depressed groove is relative with vibration portion to form the drainage chamber with the vibration board cooperation, be provided with the inlet port with drainage chamber intercommunication in the backup pad, connect cantilever and piezoelectric vibrator fixed connection, one side of backup pad orientation vibration board is equipped with and is connected the groove of dodging that the cantilever position corresponds.

Further, an outer peripheral edge of the connecting portion of the vibration plate is sandwiched between the pump case and the support plate.

The utility model has the advantages that: the utility model discloses a part homoenergetic that window was detached to piezoelectric micropump's vibration board on the one hand connecting portion can with backup pad fixed connection, the area of being connected between vibration board as key component and the backup pad has greatly been improved, the joint strength has been increased, the risk of connection failure in the course of the work has been reduced, on the other hand, through setting up the cantilever structure by interior cantilever portion, middle cantilever portion and outer cantilever portion constitute, the equivalent has increased cantilever structure's length and width in limited space, can reduce the stress concentration of hookup location department between cantilever structure deformation in-process cantilever structure and roof beam portion and cantilever structure and the connecting portion, in the reduction work process, cantilever structure follows the risk of root fracture failure, and service life is prolonged.

Drawings

The present invention will be further explained with reference to the drawings and examples.

Fig. 1 is a schematic view of a vibrating plate of a piezoelectric micropump of the present invention;

fig. 2 is a schematic view of the vibrating plate of the piezoelectric micropump of the present invention disposed in the piezoelectric micropump;

fig. 3 is a schematic view of the air intake process of the piezoelectric micropump of the present invention;

FIG. 4 is a schematic view of the air outlet process of the piezoelectric micropump of the present invention;

in the figure: 1. a pump shell, 11, a cover plate, 111, an air outlet, 12, a first partition plate, 13, an electrode plate, 131, a first external electrode, 14 and a second partition plate;

2. a piezoelectric vibrator 21, a substrate 211, a connection boss 22, and a piezoelectric element;

3. a vibrating plate 31, a vibrating part 311, an overflow hole 32, a connecting part 321, a window 322, a connecting cantilever 3221, a beam part 3222, an inner cantilever part 3223, a middle cantilever part 3224, an outer cantilever part 323 and a second external electrode;

4. a support plate 41, a concave groove 42, an avoiding groove 43 and an air inlet hole;

5. an accommodating chamber;

6. a drainage cavity.

Detailed Description

The present invention will now be described in further detail with reference to the accompanying drawings. The drawings are simplified schematic drawings, which illustrate the basic structure of the invention only in a schematic way, and thus show only the components that are relevant to the invention, and the directions and references (e.g., upper, lower, left, right, etc.) may be used only to help describe the features in the drawings. The following detailed description is, therefore, not to be taken in a limiting sense, and the scope of the claimed subject matter is defined only by the appended claims and equivalents thereof.

Example 1

As shown in fig. 1 and 2, a vibration plate of a piezoelectric micropump, the piezoelectric micropump having a piezoelectric vibrator 2, the vibration plate 3 being adapted to fit the piezoelectric vibrator 2, the vibration plate 3 including a vibration portion 31 and a connection portion 32 disposed on an outer periphery of the vibration portion 31, the vibration portion 31 having a through-flow hole 311 therethrough;

at least one window 321 penetrates through the connection portion 32, a connection cantilever 322 for fixedly connecting with the piezoelectric vibrator 2 is arranged in the window 321, the connection cantilever 322 includes a beam portion 3221 and a cantilever structure, the cantilever structure includes an inner cantilever portion 3222, a middle cantilever portion 3223 and an outer cantilever portion 3224, the total number of the inner cantilever portion 3222 and the outer cantilever portion 3224 is greater than three, one end of the inner cantilever portion 3222 is fixedly connected with the inner wall of the window 321, the other end of the inner cantilever portion 3222 is fixedly connected with the inner wall of the middle cantilever portion 3223, the outer wall of the middle cantilever portion 3223 is fixedly connected with the outer cantilever portion 3224, one end of the outer cantilever portion 3224, which is far away from the middle cantilever portion 3223, is fixedly connected with the beam portion 3221, and one end of the beam portion 3221, which is far away from the outer cantilever portion 3224, is suspended.

It should be noted that in this embodiment, one end of the inner cantilever portion 3222 may be fixedly connected to any side wall inside the window 321, and preferably, one end of the inner cantilever portion 3222 is fixedly connected to a side inside the window 321 close to the center of the vibrating portion 31.

When the connecting portion 32 has a plurality of windows 321, the plurality of windows 321 are preferably uniformly distributed along the circumferential direction of the vibrating portion 31.

The inner suspension arm portion 3222 and the outer suspension arm portion 3224 are offset from each other in the circumferential direction of the vibrating portion 31; that is, the connection points of the inner cantilever portion 3222, the outer cantilever portion 3224 and the middle cantilever portion 3223 are staggered from each other, which is convenient for equivalently increasing the length and the width of the cantilever structure, so that the stress on the middle cantilever portion 3223 is relatively uniform, and the phenomenon of local stress concentration on the middle cantilever portion 3223 is avoided.

Preferably, there are two of the inner and outer cantilever portions 3222 and 3224; the two inner cantilever portions 3222 are respectively located at two ends of the inner side wall of the middle cantilever portion 3223, and the two outer cantilever portions 3224 are both located at the middle part of the outer side wall of the middle cantilever portion 3223; alternatively, the two inner cantilever portions 3222 are both located at the middle portion of the inner sidewall of the middle cantilever portion 3223, and the two outer cantilever portions 3224 are respectively located at two ends of the outer sidewall of the middle cantilever portion 3223.

The connecting portion 32 is integrally formed with the vibration portion 31, or the connecting portion 32 is fixedly connected with the vibration portion 31.

The whole vibrating plate 3 is a conductor, or only the connecting part 32 on the vibrating plate 3 is a conductor; thereby can be connected with piezoelectric vibrator 2 as one utmost point of piezoelectric vibrator 2 electricity, need not additionally set up an utmost point electrode plate 13 for piezoelectric vibrator 2, make overall structure more compact, simultaneously, vibration board 3 and piezoelectric vibrator 2 fixed connection, easily realize the electricity and connect, it is convenient to have brought for the drawing electricity of piezoelectricity micropump from this, compared with prior art, need not do the turn-ups to piezoelectric element 22 and handle, manufacturing cost is reduced, the regional area of electric connection on the piezoelectric element 22 reduces, the influence that produces bending deformation under the signal of telecommunication effect to piezoelectric element 22 has been reduced.

It should be noted that the connection cantilever 322 in this embodiment may be fixedly disposed on the connection portion 32, for example, the connection cantilever 322 may be fixed on the connection portion 32 by mechanical connection, adhesive bonding or welding, or may be integrally formed with the connection portion 32.

The outer edge of the connecting portion 32 is provided with a second external electrode 323, and preferably, the second external electrode 323 is integrally formed with the connecting portion 32.

In this embodiment, on one hand, the part of the connecting portion 32 excluding the window 321 can be fixedly connected with the supporting plate 4, so as to greatly increase the connection area between the vibrating plate 3 and the supporting plate 4, which are key components, increase the connection strength, and reduce the risk of connection failure in the working process, on the other hand, by providing the cantilever structure composed of the inner cantilever portion 3222, the middle cantilever portion 3223, and the outer cantilever portion 3224, the length and width of the cantilever structure are equivalently increased in a limited space, so as to reduce the stress concentration at the connection position between the cantilever structure and the beam portion 3221 and between the cantilever structure and the connecting portion 32 in the deformation process of the cantilever structure, reduce the risk of breakage failure of the cantilever structure from the root in the working process, and improve the service life.

Example 2

As shown in fig. 2, a piezoelectric micropump includes a pump case 1, a piezoelectric vibrator 2 and a supporting structure, wherein a containing cavity 5 is formed between the pump case 1 and the supporting structure, the supporting structure includes a supporting plate 4 and a vibrating plate 3 disposed on the supporting plate 4, the vibrating plate 3 and the piezoelectric vibrator 2 are both located in the containing cavity 5, the vibrating plate 3 is the vibrating plate for the piezoelectric micropump in embodiment 1, one side of the supporting plate 4 facing the containing cavity 5 is fixedly connected to a connecting portion 32 of the vibrating plate 3, one side of the supporting plate 4 facing the vibrating plate 3 is provided with a recessed groove 41, the recessed groove 41 is opposite to the vibrating portion 31 and forms a drainage cavity 6 in cooperation with the vibrating plate 3, the supporting plate 4 is provided with an air inlet 43 communicated with the drainage cavity 6, and the connecting cantilever 322 is fixedly connected to the piezoelectric vibrator 2.

The pump shell 1 comprises a cover plate 11, a first partition plate 12, an electrode plate 13 and a second partition plate 14 which are sequentially and hermetically connected from top to bottom, wherein an air outlet 111 communicated with the accommodating cavity 5 is formed in the cover plate 11, through holes communicated with the accommodating cavity 5 are formed in the first partition plate 12, the electrode plate 13 and the second partition plate 14, a first external electrode 131 extending out of the accommodating cavity 5 and an internal electrode arranged in the accommodating cavity 5 are formed in the electrode plate 13, the second partition plate 14 is an insulating plate, and the second partition plate 14 is hermetically connected with a supporting structure; the outer peripheral edge of the connecting portion 32 of the diaphragm 3 is sandwiched and fixed between the support plate 4 and the second diaphragm 14.

The piezoelectric vibrator 2 includes a substrate 21 and one or more piezoelectric elements 22 disposed on a side of the substrate 21 away from the support structure, and the shapes of the substrate 21 and the piezoelectric elements 22 may be circular, square, polygonal, or other shapes, which are not limited herein. In this embodiment, the substrate 21 and the piezoelectric element 22 are both circular and coaxially disposed, the substrate 21 constituting the piezoelectric vibrator 2 is a conductive body, the peripheral edge of the substrate 21 facing the vibrating plate 3 side has at least one connecting boss 211, the connecting cantilevers 322 are in one-to-one correspondence with the connecting bosses 211, the connecting cantilevers 322 are fixedly connected with the corresponding connecting bosses 211, specifically, the beam portion 3221 of the connecting cantilever 322 is fixedly connected with the connecting bosses 211, and the side of the support plate 4 facing the vibrating plate 3 is provided with an avoiding groove 42 corresponding to the position of the connecting cantilever 322.

The piezoelectric element 22 is electrically connected to the internal electrodes of the electrode plate 13, the vibrating plate 3 is electrically connected to the substrate 21, the substrate 21 is electrically connected to the piezoelectric element 22, the second external electrode 323 on the vibrating plate 3 is located outside the accommodating chamber 5, when an external power source applies an ac voltage to the piezoelectric vibrator 2 through the first external electrode 131 and the second external electrode 323, the piezoelectric vibrator 2 can generate a reciprocating bending deformation, and the two poles of the piezoelectric vibrator 2 can generate a reciprocating bending deformation after the ac voltage is applied.

When the piezoelectric vibrator 2 and the vibrating plate 3 reach a certain resonance state at a proper operating frequency, that is, when the piezoelectric vibrator 2 is convexly bent and deformed upward by applying a driving voltage to the piezoelectric vibrator 2, as shown in fig. 3, a gap between the piezoelectric vibrator 2 and the vibrating plate 3 becomes large near the center of the piezoelectric vibrator 2, a flow resistance is small at the position, a gap between the piezoelectric vibrator 2 and the vibrating plate 3 is small at the outer periphery of the piezoelectric vibrator 2, a flow resistance is large at the position, and thus, a fluid is mainly sucked from the overflowing hole 311. When the piezoelectric vibrator 2 is deformed by bending convexly downward, as shown in fig. 4, the gap between the piezoelectric vibrator 2 and the vibration plate 3 becomes smaller near the center of the piezoelectric vibrator 2, and the flow resistance is larger at the position, and the gap between the piezoelectric vibrator 2 and the vibration plate 3 is larger at the outer periphery of the piezoelectric vibrator 2, and the flow resistance is smaller at the position, so that the fluid mainly flows out from the outer periphery of the piezoelectric vibrator 2 to the air outlet 111. The above processes of suction and discharge are repeated by the control of the alternating current to achieve the purpose of continuous fluid delivery.

In light of the foregoing, it will be apparent to those skilled in the art from this disclosure that various changes and modifications can be made without departing from the spirit and scope of the invention. The technical scope of the present invention is not limited to the content of the specification, and must be determined according to the scope of the claims.

Claims (12)

1. A vibrating plate of a piezoelectric micropump, the piezoelectric micropump having a piezoelectric vibrator (2), the vibrating plate (3) being adapted to cooperate with the piezoelectric vibrator (2), characterized in that: the vibration plate (3) comprises a vibration part (31) and a connecting part (32) arranged on the periphery of the vibration part (31), wherein a through-flow hole (311) penetrates through the vibration part (31);

at least one window (321) penetrates through the connecting portion (32), a connecting cantilever (322) used for being fixedly connected with the piezoelectric vibrator (2) is arranged in the window (321), the connecting cantilever (322) comprises a beam portion (3221) and a cantilever structure, the cantilever structure comprises an inner cantilever portion (3222), a middle cantilever portion (3223) and an outer cantilever portion (3224), the total number of the inner cantilever portion (3222) and the outer cantilever portion (3224) is more than three, one end of the inner cantilever portion (3222) is connected with the inner wall of the window (321), the other end of the inner cantilever portion is connected with the inner wall of the middle cantilever portion (3223), the outer side wall of the middle cantilever portion (3223) is connected with the outer cantilever portion (3224), one end, far away from the middle cantilever portion (3223), of the outer cantilever portion (3224) is connected with the beam portion (3221), and one end, far away from the outer cantilever portion (3224), of the beam portion (3221) is suspended.

2. A vibration plate of a piezoelectric micro pump according to claim 1, characterized in that: the inner cantilever section (3222) and the outer cantilever section (3224) are offset from each other in the circumferential direction of the vibrating section (31).

3. The vibration plate of a piezoelectric micropump according to claim 1 or 2, wherein: the inner cantilever portion (3222) and the outer cantilever portion (3224) each have two.

4. A vibration plate of a piezoelectric micro pump according to claim 3, wherein: the two inner cantilever parts (3222) are respectively positioned at two ends of the inner side wall of the middle cantilever part (3223), and the two outer cantilever parts (3224) are both positioned at the middle part of the outer side wall of the middle cantilever part (3223).

5. A vibration plate of a piezoelectric micro pump according to claim 3, wherein: the two inner cantilever parts (3222) are both positioned in the middle of the inner side wall of the middle cantilever part (3223), and the two outer cantilever parts (3224) are respectively positioned at two ends of the outer side wall of the middle cantilever part (3223).

6. A vibration plate of a piezoelectric micro pump according to claim 1, characterized in that: the connecting part (32) and the vibrating part (31) are integrally formed, or the connecting part (32) and the vibrating part (31) are fixedly connected.

7. A vibration plate of a piezoelectric micro pump according to claim 1, characterized in that: the vibrating plate (3) is a conductor.

8. A vibration plate of a piezoelectric micro pump according to claim 1, characterized in that: the connecting part (32) is a conductor.

9. A vibration plate of a piezoelectric micro pump according to claim 1, characterized in that: the connecting cantilever (322) and the connecting part (32) are integrally formed; or the connecting cantilever (322) is fixedly connected with the connecting part (32).

10. A vibration plate of a piezoelectric micro pump according to claim 1, characterized in that: the outer edge of the connecting part (32) is provided with a second external electrode (323).

11. The utility model provides a piezoelectricity micropump, includes pump case (1), piezoelectricity oscillator (2) and bearing structure, establish between pump case (1) and the bearing structure and hold chamber (5), bearing structure includes backup pad (4) and establishes vibration board (3) on backup pad (4), vibration board (3) and piezoelectricity oscillator (2) all are located and hold chamber (5) its characterized in that: the vibration board (3) be the vibration board of the piezoelectricity micropump of any one of claims 1-10, backup pad (4) are towards the one side that holds chamber (5) and connecting portion (32) fixed connection of vibration board (3), backup pad (4) are provided with depressed groove (41) towards one side of vibration board (3), depressed groove (41) are relative with vibration portion (31) to form drainage chamber (6) with vibration board (3) cooperation, be provided with inlet port (43) with drainage chamber (6) intercommunication on backup pad (4), connect cantilever (322) and piezoelectricity oscillator (2) fixed connection, backup pad (4) are equipped with and are connected cantilever (322) one side of vibration board (3) and the groove (42) of dodging that the position corresponds.

12. The piezoelectric micropump of claim 11, wherein: the outer peripheral edge of the connecting portion (32) of the vibration plate (3) is sandwiched between the pump housing (1) and the support plate (4).

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