CN215183848U - Fixing device - Google Patents

Abstract

The embodiment of the application discloses a fixing device, which is used for fixing a sample to be processed by focused ion beams and comprises a first part and a second part, wherein the first part is used for fixing the sample and is provided with a first guide piece; the second part is provided with a second guide piece, one of the second guide piece and the first guide piece comprises a guide groove, the other of the second guide piece and the first guide piece comprises a guide block, the guide block is positioned in the guide groove, and when the second part and the first part rotate relatively, the guide block can move in the guide groove; wherein, one of second guiding element and first guiding element still includes a plurality of first spacing grooves with the guide way intercommunication, and a plurality of first spacing grooves are along the extending direction interval distribution of guide way, and the guide block can be gone into first spacing inslot by the card. The embodiment of the application has the advantages that the structure is simple, the processing efficiency can be improved, and the operation risk brought by manual sample turning can be avoided.

Description

Fixing device

Technical Field

The application relates to the technical field of semiconductors, in particular to a fixing device.

Background

In the prior art, when a sample is processed by a focused ion beam, for example, a Transmission Electron Microscope (TEM) sample, whose appearance, size and characteristics need to be detected by TEM, is processed by the focused ion beam, the sample needs to be placed on a fixing device. In order to change the direction between the sample and the focused ion beam on the fixing device conveniently and realize the processing of a plurality of parts of the sample, the part for installing the sample is generally manually taken down and is installed on the fixing device after being overturned for a certain angle, so the operation is carried out, the processing efficiency of the sample is low, and the potential safety hazard exists.

SUMMERY OF THE UTILITY MODEL

The embodiment of the application provides a fixing device, only needs make fixing device's the relative second part of first part rotate can realize the position adjustment of the relative focused ion beam of sample, can promote machining efficiency, and can avoid the operation risk that brings when artifical manual upset sample. The technical scheme is as follows;

the embodiment of the present application provides a fixing device, fixing device is used for the fixed sample that needs to pass through focused ion beam processing, fixing device includes:

a first portion for holding the sample, the first portion having a first guide disposed thereon; and

a second part, wherein a second guide part is arranged on the second part, one of the second guide part and the first guide part comprises a guide groove, the other of the second guide part and the first guide part comprises a guide block, the guide block is positioned in the guide groove, and when the second part and the first part rotate relatively, the guide block can move in the guide groove;

one of the second guide piece and the first guide piece further comprises a plurality of first limiting grooves communicated with the guide grooves, the first limiting grooves are distributed at intervals along the extending direction of the guide grooves, and the guide block is used for being clamped into the first limiting grooves when the guide grooves move to the positions communicated with the first limiting grooves.

In some embodiments, the axial direction of the relative rotation between the second part and the first part is a first axial direction, and the guide groove is arranged around the first axial direction.

In some embodiments, the plurality of first limiting grooves include a first sub-limiting groove and a second sub-limiting groove, the guide groove includes a first groove section, a central angle of the first groove section is 90 °, and ends of two ends of the first groove section are respectively communicated with the first sub-limiting groove and the second sub-limiting groove.

In some embodiments, the plurality of first limiting grooves further include a third sub-limiting groove, the guide groove further includes a second groove section disposed adjacent to the first groove section, a central angle of the second groove section is 90 °, and an end of the second groove section away from the first groove section is communicated with the third sub-limiting groove.

In some of these embodiments, further comprising:

and the rotating platform is connected with the second part and can rotate along a second axial direction, and the second axial direction is perpendicular to the first axial direction.

In some embodiments, the plurality of first limiting grooves include a first sub-limiting groove and a second sub-limiting groove, the guide groove includes a first groove section and a second groove section which are adjacently arranged, the central angles of the first groove section and the second groove section are both first angle values, the first angle value is greater than 0 ° and less than or equal to 52 °, one end portion of the first groove section, which is far away from the second groove section, is communicated with the first sub-limiting groove, one end portion of the second groove section, which is far away from the first groove section, is communicated with the second sub-limiting groove, and a boundary line between the first groove section and the second groove section is parallel to the second axis direction.

In some of these embodiments, the first angle value is 25 °.

In some of these embodiments, the inner wall surface of the guide groove includes:

the bottom wall surface is provided with a plurality of first limiting grooves distributed at intervals; and

the side wall surface is positioned on one side of the bottom wall surface, the side wall surface is wound on the periphery of the bottom wall surface and is connected with the bottom wall surface, one end, far away from the bottom wall surface, of the side wall surface extends towards the direction close to the first axis to form a protrusion, the part, corresponding to the protrusion, of the guide block shrinks inwards to form a second limiting groove, and the protrusion is positioned in the second limiting groove; the length of the second limit groove is larger than that of the protrusion along the direction parallel to the first axis.

In some of these embodiments, the central angle of the guide slot is less than 360 °, the guide slot has two ends, and at least one of the two ends of the guide slot communicates with the outside.

In some embodiments, the first guide member includes the guide block, and the second guide member includes the guide groove and a plurality of the first stopper grooves communicating with the guide groove.

In some of these embodiments, the guide block comprises:

an elastic element, one end of which is connected with the first part; and

the slider is connected elastic element keeps away from the one end of first part, the slider is located the guide way, the second part with during the relative rotation of first part, the slider can the guide way internal motion, just the slider moves to when guide way and each first spacing groove intercommunication department, elastic element all can release elasticity in order to with the slider card is gone into correspondingly in the first spacing groove.

In some of these embodiments, the guide block further comprises:

the limiting cylinder is sleeved on the periphery of the elastic element and connected with the first part.

The utility model provides a fixing device, through setting up first portion and the second portion of rotating the connection, and the relative second portion of first portion rotates, the first portion, the guide block that sets up on one of the second portion can be in the guide way internal motion that sets up on another, and the guide block moves and can block into first spacing inslot when locating with the first spacing groove of guide way intercommunication, so set up, the guide block of being convenient for is in the locking of each first spacing groove department, thereby it processes the sample of installing on the first portion to do benefit to the focused ion beam. Through setting up a plurality of first spacing grooves of interval distribution for the guide block is when the different first spacing inslot of card income, and the sample corresponds the adjustment in the position of focusing ion beam relatively, does benefit to each position to the sample and processes. Simultaneously, the sample of this application embodiment only needs to make the relative second portion of first portion rotate and can realize the position adjustment of the relative focused ion beam of sample behind the fixing device, compares in with the sample take off from fixing device and change install again on fixing device after the position, can promote machining efficiency, and can avoid the operation risk that brings when artifical manual upset sample.

Drawings

In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present application, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.

Fig. 1 is a first perspective view of a fixing device provided in an embodiment of the present application;

FIG. 2 is a first perspective view of a second portion of the fixation device provided by an embodiment of the present application;

FIG. 3 is a second perspective view of a second portion of the fixation device provided by an embodiment of the present application;

FIG. 4 is a front view of FIG. 3;

FIG. 5 is a third perspective view of a second portion of the fixation device provided by an embodiment of the present application;

FIG. 6 is a front view of FIG. 5;

FIG. 7 is a second perspective view of a fastening device according to an embodiment of the present disclosure;

FIG. 8 is a schematic flow chart of a fastening device provided in an embodiment of the present application;

fig. 9 is a perspective exploded view of a first portion of a fastening device according to an embodiment of the present application.

Detailed Description

In order to make the objects, technical solutions and advantages of the present application more clear, embodiments of the present application will be described in further detail below with reference to the accompanying drawings.

When the following description refers to the accompanying drawings, like numbers in different drawings represent the same or similar elements unless otherwise indicated. The embodiments described in the following exemplary embodiments do not represent all embodiments consistent with the present application. Rather, they are merely examples of apparatus and methods consistent with certain aspects of the application, as detailed in the appended claims.

In the prior art, when a sample is processed by a focused ion beam, for example, a Transmission Electron Microscope (TEM) sample, whose appearance, size and characteristics need to be detected by TEM, is processed by the focused ion beam, the sample needs to be placed on a fixing device. In order to change the direction between the sample and the focused ion beam on the fixing device conveniently and realize the processing of a plurality of parts of the sample, the part for installing the sample is generally manually taken down and is installed on the fixing device after being overturned for a certain angle, so the operation is carried out, the processing efficiency of the sample is low, and the potential safety hazard exists. On this basis, the present application proposes a fixing device intended to solve the above drawbacks.

The present embodiment provides a fixture 100, the fixture 100 is used for fixing a sample to be processed by a focused ion beam, referring to fig. 1, the fixture 100 includes a first portion 110 and a second portion 120. The first portion 110 is used for fixing the sample, and a first guide 111 is arranged on the first portion 110; the second portion 120 is provided with a second guide member 121, one of the second guide member 121 and the first guide member 111 includes a guide groove b, and the other of the second guide member 121 and the first guide member 111 includes a guide block a, the guide block a is located in the guide groove b, and the guide block a can move in the guide groove b when the second portion 120 and the first portion 110 relatively rotate. Fig. 1 shows a case where the first guide 111 includes a guide block a and the second guide 121 includes a guide groove b.

Referring to fig. 1 to 6, one of the second guide member 121 and the first guide member 111 further includes a plurality of first limiting grooves c communicated with the guide groove b, the plurality of first limiting grooves c are distributed at intervals along the extending direction of the guide groove b, and the guide block a is configured to be capable of being snapped into the corresponding first limiting groove c when moving to a position communicated with each first limiting groove c along the guide groove b.

The fixing device 100 is provided with the first part 110 and the second part 120 which are rotatably connected, when the first part 110 rotates relative to the second part 120, the guide block a arranged on one of the first part 110 and the second part 120 can move in the guide groove b arranged on the other, and the guide block a can be clamped into the first limiting groove c when moving to the first limiting groove c communicated with the guide groove b, so that the guide block a can be conveniently locked at each first limiting groove c, and a sample arranged on the first part 110 can be processed by the focused ion beam. Through setting up a plurality of first spacing grooves c of interval distribution for guide block a is when the different first spacing grooves c of card income, and the sample corresponds the adjustment in the position of focusing the ion beam, does benefit to and processes each position of sample. Meanwhile, after the sample is installed on the fixing device 100, the orientation adjustment of the sample relative to the focused ion beam can be realized only by rotating the first part 110 relative to the second part 120, and compared with the case that the sample is installed on the fixing device 100 after being taken down from the fixing device 100 and replaced, the processing efficiency can be improved, and the operation risk brought when the sample is manually turned can be avoided. The rotation of the first portion 110 relative to the second portion 120 can be achieved by clamping with an auxiliary tool such as a clamp, so as to avoid manual contact with the fixing device 100, and further reduce the operation risk.

The structure of the guide groove b in the embodiment of the present application may be arbitrary, and it only needs to be satisfied that the guide block a can move in the guide groove b when the second portion 120 rotates relative to the first portion 110. For example, in some embodiments, referring to fig. 2, 3 and 5, if the axial direction of the relative rotation between the second part 120 and the first part 110 is defined as a first axial direction m, the guide groove b may be disposed around the first axial direction m. At this time, the guide groove b may be a circular groove, and the central angle of the guide groove b may satisfy more than 0 ° and 360 ° or less. In order to save materials and reduce the size of the fixing device 100, the central angle of the guide groove b is preferably less than 360 °. For example, the central angle of the guide groove b may be 180 °. When the central angle of the guide groove b is smaller than 360 degrees, the guide groove b is provided with two end parts, and the two end parts of the guide groove b can be communicated with the outside; of course, in order to prevent the guide block a from being removed from the guide groove b, the guide groove b may have only one end portion communicating with the outside and the other end portion closed. In some embodiments, e.g., see fig. 3 and 4, the closing of the ends of the guide slot b may be achieved by providing a stop d at the end thereof, or the like.

In the embodiment of the present application, the number of the first limiting grooves c may be two or more arbitrary values. For example, the number of the first retaining grooves c may be two, three, four, etc. When the number of the first limiting grooves c is plural, the distribution of the plural first limiting grooves c in the guide groove b can satisfy a certain condition, so that the processing efficiency of the sample fixed by the fixing device 100 is higher, the processing effect is better, and the specific distribution of the plural first limiting grooves c in the guide groove b will be described in detail below:

in order to describe the specific distribution of the plurality of first limiting grooves c on the guide groove b, in the embodiment of the present application, the guide groove b is divided into more than one groove section, and the specific distribution of each first limiting groove c is described by the groove section. In some embodiments, referring to fig. 2, the plurality of first stopper grooves c may include a first sub-stopper groove c1 and a second sub-stopper groove c2, the guide groove b may include a first groove segment b1 having a central angle of 90 °, and both end portions of the first groove segment b1 communicate with the first sub-stopper groove c1 and the second sub-stopper groove c2, respectively. Through the arrangement, when the guide block a is switched between the first sub-limiting groove c1 and the second sub-limiting groove c2, the sample can be turned over by 90 degrees, so that the processing of different parts is realized, and the basic processing requirement of the sample can be met.

Further, referring to fig. 3 and 4, the plurality of first stopper grooves c may further include a third sub-stopper groove c3 in addition to the first sub-stopper groove c1 and the second sub-stopper groove c2, and the guide groove b may further include a second groove section b2 disposed adjacent to the first groove section b1, in order to facilitate understanding, an auxiliary line is added in fig. 4 to divide the first groove section b1 and the second groove section b2, the central angle of the second groove section b2 is 90 °, and an end of the second groove section b2 away from the first groove section b1 is communicated with the third sub-stopper groove c 3. Through the arrangement, the fixing device 100 is additionally provided with a working position, so that more parts of the sample can be accurately processed, and the processing effect is better.

In still other embodiments, referring to fig. 5 and 6, the plurality of first restraint grooves c may include a first sub-restraint groove c4 and a second sub-restraint groove c5, the guide groove b may include a first groove segment b3 and a second groove segment b4, which are adjacently disposed, and for the sake of understanding, in fig. 6, an auxiliary line is added to divide the first and second groove segments b3 and b4, the central angles of the first and second groove segments b3 and b4 are equal and each has a first angle value theta, the first angle value theta is greater than 0 deg. and less than 52 deg., one end of the first groove segment b3 far from the second groove segment b4 may be in communication with the first sub-stopper groove c4, an end of the second slot segment b4 remote from the first slot segment b3 may be in communication with the second sub stopper slot c5, and the boundary line of the first groove segment b3 and the second groove segment b4 is parallel to the second axial direction n. Referring to fig. 7, the fixing device 100 may further include a rotating platform 130, where the rotating platform 130 is connected to the second portion 120, the second axial direction n is a rotating axial direction of the rotating platform 130, and the second axial direction n is perpendicular to the first axial direction m.

When a sample is processed, an ion beam machine with a FIB-SEM dual-beam system is generally used, wherein an included angle between an electron beam emitted by the ion beam machine for scanning the sample and an ion beam emitted for processing the sample is a fixed value of 52 °, the electron beam generally emits in a vertical direction, the ion beam machine emits in a direction having an included angle of 38 ° with a horizontal line, in this case, by limiting a central angle of a first groove segment b3 and a second groove segment b4, in which a first sub-limiting groove c4 and a second sub-limiting groove c5 are respectively disposed, to be greater than 0 ° and less than or equal to 52 °, and a boundary line of the first groove segment b3 and the second groove segment b4 is parallel to a rotation axis direction of the rotation platform 130, it can be satisfied that an included angle between the sample mounted on the fixing device 100 and a sufficient ion beam can be changed during the rotation of the rotation platform 130, thereby meeting the processing requirements. Preferably, referring to fig. 8, in a practical process, after the sample is mounted on the fixing device 100, the tilt angle α of the rotating platform 130 may be first adjusted to enable the ion beam to vertically irradiate the sample initially, and then during the rotation of the rotating platform 130, the ion beam forms a different angle with the sample as the orientation of the sample changes.

The first angle value θ in the embodiment of the present application may be any value between 0 ° and 52 °. For example, the first angle value θ may be 5 °, 15 °, 25 °, 35 °, 45 °, and the like. Preferably, the first angle value is 25 °. When the first angle value θ is 25 °, the rotating platform 130 may be optionally tilted by 27 ° so that the ion beam can vertically irradiate on the sample initially, and by setting the first angle value θ to 25 °, the guide block a can be made to have a greater variation value of an included angle between the sample mounted on the fixing device 100 and the ion beam, which is smaller than 90 ° and close to 90 °, during the rotation of the rotating platform 130 when being inserted into the first sub-limiting groove c4 or the second sub-limiting groove c5, so that the sample processing effect is better.

Further, referring to fig. 5 and 6, when the plurality of first stopper grooves c includes a first sub-stopper groove c4 and a second sub-stopper groove c5, a third sub-stopper groove and a fourth sub-stopper groove may be further included, the guide groove b may further include a third groove segment located on a side of the second groove segment b4 away from the first groove segment b3, a sum of a central angle of the third groove segment and a central angle of the second groove segment b4 may be 90 °, an end of the third groove segment away from the second groove segment b4 may communicate with the third sub-stopper groove, and a portion where the first groove segment b3 and the second groove segment b4 are connected may communicate with the fourth sub-stopper groove.

In some embodiments, the guide groove b may be provided with a limiting structure, so as to prevent the guide block a from moving out of the guide groove b. Specifically, referring to fig. 2, the inner wall surface of the guide groove b may include a bottom wall surface b5 and a side wall surface b6, and the bottom wall surface b5 is provided with a plurality of first stopper grooves c distributed at intervals; the side wall surface b6 is located on one side of the bottom wall surface b5, the side wall surface b6 is arranged around the periphery of the bottom wall surface b5 and connected with the bottom wall surface b5, one end of the side wall surface b6, which is far away from the bottom wall surface b5, extends towards the first axial direction m to form a protrusion b61, a part of the guide block a, which corresponds to the protrusion b61, is contracted inwards to form a second limiting groove a1 (see fig. 9), and the protrusion b61 is located in the second limiting groove a 1; the length of the second limit groove a1 is greater than that of the protrusion b61 along the direction parallel to the first axial direction m. Through the arrangement, the guide block a can be blocked by the protrusion b61 to be limited in the guide groove b, and the length of the second limiting groove a1 in the direction parallel to the first axis direction m is set to be larger than the length of the protrusion b61 in the direction parallel to the first axis direction m, so that the guide block a can be ensured to have a certain moving range in the direction parallel to the first axis direction m, and can move in the direction parallel to the first axis direction m to enter the guide groove b or be clamped in the first limiting groove c.

In some embodiments, in order to enable the guide block a to automatically snap into the first limiting groove c when moving along the guide groove b to a position communicating with each first limiting groove c, the guide block a may have elasticity, wherein the elastic property of the guide block a may enable the guide block a to be prepared by a material having elasticity. In other embodiments, the resilient properties of the guide block a may also be achieved by including some resilient elements in the guide block a. The following will describe in detail the structure of the guide block a including an elastic element by taking the first guide 111 including the guide block a, the second guide 121 including the guide groove b and the plurality of first limiting grooves c communicating with the guide groove b as an example:

referring to fig. 9, the guide block a may include an elastic element a2 and a slider a3, one end of the elastic element a2 being connected to the first portion 110; the slide block a3 is connected to one end of the elastic element a2, which is far away from the first portion 110, the slide block a3 is located in the guide groove b, when the second portion 120 rotates relative to the first portion 110, the slide block a3 can move in the guide groove b, and when the slide block a3 moves to a position where the guide groove b is communicated with each first limiting groove c, the elastic element a2 can release the elastic force to clamp the slide block a3 into the corresponding first limiting groove c. The guide block a is arranged to include the elastic element a2 between the first part 110 and the sliding block a3, so that the elastic element a2 can be in a compressed state when the guide block a is located in the guide groove b, and the elastic element a2 can release the elastic force and clamp the sliding block a3 into the first limiting groove c when the guide block a moves to the first limiting groove c, so that the guide block a is locked at the corresponding first limiting groove c, and the structure is simple and the operation is convenient. In some embodiments, the elastic element a2 may be a spring, a leaf spring, or the like.

Still further, referring to fig. 9, the guide block a may further include a limiting cylinder a4, the limiting cylinder a4 may be sleeved on the outer circumference of the elastic element a2, and the limiting cylinder a4 is connected to the first portion 110. By arranging the limiting cylinder a4 on the periphery of the elastic element a2, the travelling path of the elastic element a2 during stretching and compression can be limited, and the elastic element a2 can be prevented from twisting when the guide block a moves in the guide groove b, so that the smooth operation of the fixing device 100 is ensured, and the processing quality of a sample is ensured.

It is understood that, in other embodiments, in order to enable the guide block a to automatically snap into the first limiting groove c when moving along the guide groove b to a position communicating with each first limiting groove c, one of the second guide member 121 and the first guide member 111 may further include a driving structure connected with the guide block a, such that the driving structure contracts when the guide block a is located in the guide groove b, and extends and snaps the guide block a into the first limiting groove c when the guide block a moves to the first limiting groove c, thereby achieving locking of the guide block a at the corresponding first limiting groove c. Wherein, the driving structure can be a spring, a shrapnel, a cylinder and the like.

Due to the small sample size, in the embodiment of the present application, referring to fig. 9, the fixing device 100 may further include a fixing member 140 for mounting the sample to the first portion 110. The fixing member 140 may include a fixing plate, a pressing plate 141, and a locking member 142, the fixing plate may be positioned between the first part 110 and the pressing plate 141, the fixing plate is provided with the sample, and the pressing plate 141 and the first part 110 or the second part 120 may be connected by the locking member 142, thereby firmly fixing the fixing plate to the first part 110 or the second part 120. In the embodiment of the present application, the locking member 142 may be a screw, the fixing plate may be a copper mesh for TEM, and the sample may be fixed on the copper mesh by bonding or the like.

In the description of the present application, it is to be understood that the terms "first," "second," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance. The specific meaning of the above terms in the present application can be understood in a specific case by those of ordinary skill in the art. Further, in the description of the present application, "a plurality" means two or more unless otherwise specified. "and/or" describes the association relationship of the associated objects, meaning that there may be three relationships, e.g., a and/or B, which may mean: a exists alone, A and B exist simultaneously, and B exists alone. The character "/" generally indicates that the former and latter associated objects are in an "or" relationship.

The above disclosure is only for the purpose of illustrating the preferred embodiments of the present application and is not to be construed as limiting the scope of the present application, so that the present application is not limited thereto, and all equivalent variations and modifications can be made to the present application.

Claims (12)

1. A fixture for holding a sample to be processed by a focused ion beam, the fixture comprising:

a first portion for holding the sample, the first portion having a first guide disposed thereon; and

a second part, wherein a second guide part is arranged on the second part, one of the second guide part and the first guide part comprises a guide groove, the other of the second guide part and the first guide part comprises a guide block, the guide block is positioned in the guide groove, and when the second part and the first part rotate relatively, the guide block can move in the guide groove;

one of the second guide piece and the first guide piece further comprises a plurality of first limiting grooves communicated with the guide grooves, the first limiting grooves are distributed at intervals along the extending direction of the guide grooves, and the guide block is used for being clamped into the first limiting grooves when the guide grooves move to the positions communicated with the first limiting grooves.

2. The fastening device of claim 1, wherein the second portion rotates relative to the first portion in a first axial direction, and the guide slot is disposed around the first axial direction.

3. The fixing device according to claim 2, wherein the plurality of first position-limiting grooves include a first sub-position-limiting groove and a second sub-position-limiting groove, the guide groove includes a first groove section having a central angle of 90 °, and both end portions of the first groove section are respectively communicated with the first sub-position-limiting groove and the second sub-position-limiting groove.

4. The fixture according to claim 3, wherein the plurality of first retaining grooves further includes a third sub-retaining groove, the guide groove further includes a second groove segment disposed adjacent to the first groove segment, the second groove segment has a central angle of 90 °, and an end of the second groove segment remote from the first groove segment communicates with the third sub-retaining groove.

5. The fixture apparatus of claim 2, further comprising:

and the rotating platform is connected with the second part and can rotate along a second axial direction, and the second axial direction is perpendicular to the first axial direction.

6. The fixing device according to claim 5, wherein the plurality of first position-limiting grooves include a first sub-position-limiting groove and a second sub-position-limiting groove, the guide groove includes a first groove section and a second groove section which are adjacently arranged, the central angles of the first groove section and the second groove section are both first angle values, the first angle values are larger than 0 ° and smaller than or equal to 52 °, one end portion of the first groove section, which is far away from the second groove section, is communicated with the first sub-position-limiting groove, one end portion of the second groove section, which is far away from the first groove section, is communicated with the second sub-position-limiting groove, and a boundary line of the first groove section and the second groove section is parallel to the second axis direction.

7. The fixture of claim 6, wherein the first angle value is 25 °.

8. The fixing apparatus as claimed in claim 2, wherein the inner wall surface of the guide groove includes:

the bottom wall surface is provided with a plurality of first limiting grooves distributed at intervals; and

the side wall surface is positioned on one side of the bottom wall surface, the side wall surface is wound on the periphery of the bottom wall surface and is connected with the bottom wall surface, one end, far away from the bottom wall surface, of the side wall surface extends towards the direction close to the first axis to form a protrusion, the part, corresponding to the protrusion, of the guide block shrinks inwards to form a second limiting groove, and the protrusion is positioned in the second limiting groove; the length of the second limit groove is larger than that of the protrusion along the direction parallel to the first axis.

9. The fixing apparatus as claimed in claim 2, wherein the guide groove has a central angle of less than 360 °, and has two ends, at least one of which communicates with the outside.

10. The fixture of claim 1, wherein the first guide member includes the guide block, and the second guide member includes the guide groove and a plurality of the first restraint grooves communicating with the guide groove.

11. The fixture of claim 10, wherein the guide block comprises:

an elastic element, one end of which is connected with the first part; and

the slider is connected elastic element keeps away from the one end of first part, the slider is located the guide way, the second part with during the relative rotation of first part, the slider can the guide way internal motion, just the slider moves to when guide way and each first spacing groove intercommunication department, elastic element all can release elasticity in order to with the slider card is gone into correspondingly in the first spacing groove.

12. The fixture of claim 11, wherein the guide block further comprises:

the limiting cylinder is sleeved on the periphery of the elastic element and connected with the first part.

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